Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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09/07/1999 | US5950087 Method to make self-aligned source etching available in split-gate flash |
09/07/1999 | US5950086 A semiconductor device |
09/07/1999 | US5950085 Method of manufacturing electrically erasable semiconductor non-volatile memory device |
09/07/1999 | US5950084 Method of manufacturing dual-packed capacitor for DRAM cells |
09/07/1999 | US5950083 Method for fabricating CMOS transistor with self-aligned silicide (salicide) structure |
09/07/1999 | US5950082 For forming an integrated circuit |
09/07/1999 | US5950081 Method of fabricating semiconductor |
09/07/1999 | US5950080 Semiconductor device and method of manufacturing the same |
09/07/1999 | US5950079 Semiconductor processing methods of forming complementary metal oxide semiconductor memory and other circuitry |
09/07/1999 | US5950078 Rapid thermal annealing with absorptive layers for thin film transistors on transparent substrates |
09/07/1999 | US5950077 Semiconductor device and manufacturing method thereof |
09/07/1999 | US5950076 Methods of forming silicon carbide semiconductor devices having buried silicon carbide conduction barrier layers therein |
09/07/1999 | US5950071 Detachment and removal of microscopic surface contaminants using a pulsed detach light |
09/07/1999 | US5950070 Method of forming a chip scale package, and a tool used in forming the chip scale package |
09/07/1999 | US5950069 Quencher clamping operation using an electromagnet |
09/07/1999 | US5950068 Method of fabricating semiconductor devices having a mesa structure for improved surface voltage breakdown characteristics |
09/07/1999 | US5949900 Fine pattern inspection device capable of carrying out inspection without pattern recognition |
09/07/1999 | US5949847 For use in testing a product |
09/07/1999 | US5949844 Exposure apparatus |
09/07/1999 | US5949714 Nonvolatile semiconductor memory device |
09/07/1999 | US5949706 Static random access memory cell having a thin film transistor (TFT) pass gate connection to a bit line |
09/07/1999 | US5949705 DRAM cell, DRAM and method for fabricating the same |
09/07/1999 | US5949704 Stacked read-only memory |
09/07/1999 | US5949701 Memory circuit with a connection layout and a method for testing and a wiring design apparatus |
09/07/1999 | US5949700 Five square vertical dynamic random access memory cell |
09/07/1999 | US5949697 Semiconductor memory device having hierarchical input/output line structure and method for arranging the same |
09/07/1999 | US5949663 Inverter apparatus capable of readily modification of the specification and performance thereof |
09/07/1999 | US5949654 Multi-chip module, an electronic device, and production method thereof |
09/07/1999 | US5949568 Array of thin film actuated mirrors having a levelling member |
09/07/1999 | US5949468 Light quantity measuring system and exposure apparatus using the same |
09/07/1999 | US5949323 Non-uniform width configurable fuse structure |
09/07/1999 | US5949242 Method and apparatus for testing unpackaged semiconductor dice |
09/07/1999 | US5949156 Precision capacitor ladder using differential equal-perimeter pairs |
09/07/1999 | US5949145 Semiconductor device including alignment marks |
09/07/1999 | US5949144 In a bonded wafer |
09/07/1999 | US5949143 Semiconductor interconnect structure with air gap for reducing intralayer capacitance in metal layers in damascene metalization process |
09/07/1999 | US5949142 Chip size package and method of manufacturing the same |
09/07/1999 | US5949141 Laminated film/metal structures |
09/07/1999 | US5949134 For mounting a semiconductor chip |
09/07/1999 | US5949133 Semiconductor interconnect structure for high temperature applications |
09/07/1999 | US5949132 Dambarless leadframe for molded component encapsulation |
09/07/1999 | US5949130 Semiconductor integrated circuit device employing interlayer insulating film with low dielectric constant |
09/07/1999 | US5949129 Wafer comprising optoelectronic circuits and method of verifying this wafer |
09/07/1999 | US5949126 Trench isolation structure employing protective sidewall spacers upon exposed surfaces of the isolation trench |
09/07/1999 | US5949125 Semiconductor device having field isolation with a mesa or mesas |
09/07/1999 | US5949122 Integrated circuit with a device having a predetermined reverse conduction threshold and a thermal compensation device with Vbe multipliers |
09/07/1999 | US5949119 Device equipped with floating rigid microstructure elements |
09/07/1999 | US5949116 MOS device having a source/drain region conforming to a conductive material filled French structure in a substrate |
09/07/1999 | US5949115 Semiconductor device including nickel formed on a crystalline silicon substrate |
09/07/1999 | US5949114 Semiconductor device having increased breakdown voltage and method of fabricating same |
09/07/1999 | US5949113 Static RAM having a stable high-resistance load |
09/07/1999 | US5949112 Integrated circuits with tub-ties |
09/07/1999 | US5949111 Semiconductor device and fabrication process therefor |
09/07/1999 | US5949110 DRAM having peripheral circuitry in which source-drain interconnection contact of a MOS transistor is made small by utilizing a pad layer and manufacturing method thereof |
09/07/1999 | US5949108 Semiconductor device with reduced capacitance |
09/07/1999 | US5949107 Semiconductor device and method of fabricating same |
09/07/1999 | US5949106 FET input/output pad layout |
09/07/1999 | US5949105 Insulated-gate field-effect transistor structure and method |
09/07/1999 | US5949104 Source connection structure for lateral RF MOS devices |
09/07/1999 | US5949103 MOSFET with tunneling insulation and fabrication method thereof |
09/07/1999 | US5949102 Semiconductor device having a gate electrode with only two crystal grains |
09/07/1999 | US5949101 Semiconductor memory device comprising multi-level logic value of the threshold voltage |
09/07/1999 | US5949100 Integrate circuit device including expanded contact holes and related structures |
09/07/1999 | US5949098 Semiconductor integrated circuit having an improved arrangement of power supply lines to reduce noise occurring therein |
09/07/1999 | US5949097 Semiconductor device, method for manufacturing same, communication system and electric circuit system |
09/07/1999 | US5949096 Field effect transistor with stabilized threshold voltage |
09/07/1999 | US5949095 Enhancement type MESFET |
09/07/1999 | US5949092 Ultra-high-density pass gate using dual stacked transistors having a gate structure with planarized upper surface in relation to interlayer insulator |
09/07/1999 | US5949091 Semiconductor device having polysilicon thin-film |
09/07/1999 | US5949090 MOS TEG structure |
09/07/1999 | US5949088 Intermediate SRAM array product and method of conditioning memory elements thereof |
09/07/1999 | US5949079 Method of and an apparatus for electron beam exposure |
09/07/1999 | US5949030 Vias and method for making the same in organic board and chip carriers |
09/07/1999 | US5948986 Monitoring of wafer presence and position in semiconductor processing operations |
09/07/1999 | US5948958 Method and apparatus for verifying the calibration of semiconductor processing equipment |
09/07/1999 | US5948705 Method of forming interconnection line |
09/07/1999 | US5948704 High flow vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support |
09/07/1999 | US5948703 Method of soft-landing gate etching to prevent gate oxide damage |
09/07/1999 | US5948702 Titanium nitride |
09/07/1999 | US5948701 Self-aligned contact (SAC) etching using polymer-building chemistry |
09/07/1999 | US5948700 Method of planarization of an intermetal dielectric layer using chemical mechanical polishing |
09/07/1999 | US5948699 Wafer backing insert for free mount semiconductor polishing apparatus and process |
09/07/1999 | US5948698 Manufacturing method of semiconductor device using chemical mechanical polishing |
09/07/1999 | US5948697 Catalytic acceleration and electrical bias control of CMP processing |
09/07/1999 | US5948690 Pretreatment system for analyzing impurities contained in flat sample |
09/07/1999 | US5948598 Anti-reflective silicon nitride film using in-situ deposition |
09/07/1999 | US5948590 Negative type image recording material |
09/07/1999 | US5948589 Positive-working photoresist composition |
09/07/1999 | US5948587 Positive working photoresist composition |
09/07/1999 | US5948578 The present invention relates to a photoresist for forming a fine pattern used in manufacturing a large scale integrated circuit (lsi) and so on. |
09/07/1999 | US5948574 Mask for manufacturing semiconductor device and method of manufacture thereof |
09/07/1999 | US5948573 Method of designing mask pattern to be formed in mask and method of manufacturing integrated circuit |
09/07/1999 | US5948571 An exposure mask for use in a photoresist imaging system. |
09/07/1999 | US5948570 Process for dry lithographic etching |
09/07/1999 | US5948485 Plasma deposition method and an apparatus therefor |
09/07/1999 | US5948470 A selected block copolymer is coated onto the selected substrate and a component of the block copolymer is modified with ozone and physically removed so that the dense periodic pattern of the block copolymer can be transferred onto the |
09/07/1999 | US5948467 Enhanced CVD copper adhesion by two-step deposition process |
09/07/1999 | US5948300 Process tube with in-situ gas preheating |
09/07/1999 | US5948286 Diffusion bonding of lead interconnections using precise laser-thermosonic energy |
09/07/1999 | US5948283 Method and apparatus for enhancing outcome uniformity of direct-plasma processes |