Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1999
08/03/1999US5932007 Method and apparatus for securely supporting a growing crystal in a czochralski crystal growth system
08/03/1999US5932006 BaF2 /GaAs electronic components
08/03/1999US5932003 Method of producing recrystallized-material-member, and apparatus and heating method therefor
08/03/1999US5931725 Wafer polishing machine
08/03/1999US5931723 Polishing apparatus
08/03/1999US5931722 Chemical mechanical polishing apparatus
08/03/1999US5931721 For removing foreign material from the surface of a substrate
08/03/1999US5931685 Interconnect for making temporary electrical connections with bumped semiconductor components
08/03/1999US5931666 Slip free vertical rack design having rounded horizontal arms
08/03/1999US5931662 Silicon single crystal wafer annealing method and equipment and silicon single crystal wafer and manufacturing method related thereto
08/03/1999US5931631 Method and apparatus for vertical transfer of a semiconductor wafer cassette
08/03/1999US5931627 Wafer transport apparatus that can transfer multiple wafers in a short period of time
08/03/1999US5931626 Robot mounting de-coupling technique
08/03/1999US5931610 Fiber dispensing system
08/03/1999US5931518 Gripper for wafer-shaped articles
08/03/1999US5931512 Latch mechanism for wafer container
08/03/1999US5931452 Wire clamper for bonding apparatus
08/03/1999US5931371 Standoff controlled interconnection
08/03/1999US5931368 Long life bonding tool
08/03/1999US5931349 Viscous fluid discharging apparatus for manufacturing semiconductors having a removable bubble capturing portion
08/03/1999US5931337 Semiconductor accommodating devices and method for inserting and taking out semiconductor devices
08/03/1999US5931173 Monitoring cleaning effectiveness of a cleaning system
08/03/1999US5931048 Manipulator for automatic test equipment test head
08/03/1999US5930890 Structure and fabrication procedure for a stable post
08/03/1999CA2139709C Method of processing an epitaxial wafer of inp
08/03/1999CA2078930C Register mark
07/1999
07/30/1999CA2260574A1 Ohmic contact and process for producing the same
07/29/1999WO1999038213A1 Memory device and method of manufacturing the same, and integrated circuit and method of manufacturing semiconductor device
07/29/1999WO1999038210A1 Method for producing stacked vias
07/29/1999WO1999038208A1 Method of fabricating semiconductor device
07/29/1999WO1999038207A1 Method and apparatus for detecting wafer
07/29/1999WO1999038206A1 Method and apparatus for wafer processing
07/29/1999WO1999038205A1 Method for producing diodes
07/29/1999WO1999038204A1 Damascene interconnection and semiconductor device
07/29/1999WO1999038203A1 Integrated capacitor device and method of fabricating the same
07/29/1999WO1999038202A1 Deposition of a siloxane containing polymer
07/29/1999WO1999038201A1 Method for the production of a monocrystalline layer on a substrate with a non-adapted lattice and component containing one or several such layers
07/29/1999WO1999038200A1 Wafer cassette load station
07/29/1999WO1999038199A1 System for the treatment of wafers
07/29/1999WO1999038198A1 Device and method for treating substrates
07/29/1999WO1999038197A2 Test head structure for integrated circuit tester
07/29/1999WO1999037832A1 Solution synthesis of mixed-metal chalcogenide nanoparticles and spray deposition of precursor films
07/29/1999WO1999037441A1 Polishing apparatus
07/29/1999WO1999031732A3 Semiconductor processing method and field effect transistor
07/29/1999WO1999031713A3 Integrated material management module
07/29/1999WO1999026296A3 A SEMICONDUCTOR DEVICE OF SiC AND A TRANSISTOR OF SiC HAVING AN INSULATED GATE
07/29/1999WO1999025003A3 Manufacture of a semiconductor device with a poly-emitter bipolar transistor
07/29/1999WO1999021190A3 Rom and dram fabricated using a dram process
07/29/1999WO1999019537A9 Dual frequency excitation of plasma for film deposition
07/29/1999WO1999003128A3 Singulation system for chip-scale packages
07/29/1999DE19902999A1 Isolation trench fabrication within semiconductors using a two layer etch mask
07/29/1999DE19902336A1 Optical projection system for manufacturing semiconductor components
07/29/1999DE19860782A1 5-beta-cholan-24-yl-3-(meth)acrylate compounds useful for preparing copolymers resins for photoresists
07/29/1999DE19838491A1 Measuring consistency evaluation method for semiconductor component testing device, e.g. for integrated circuit quality control testing
07/29/1999DE19806406C1 Rough etching semiconductor surface e.g. silicon wafer prior to layer deposition
07/29/1999DE19802977A1 Single crystal layer production on a non-lattice-matched single crystal substrate in microelectronic or optoelectronics component manufacture
07/29/1999DE19802579A1 Substrate treatment apparatus e.g. for wet treatment of wafers for chip manufacture
07/29/1999DE19801247A1 Device for the precise alignment of semi-conductor chips having controlled collapse connection pads onto a substrate
07/28/1999EP0932328A1 Substrate for mounting electronic part and process for manufacturing the same
07/28/1999EP0932255A2 MCM with high Q overlapping resonator
07/28/1999EP0932206A2 High electron mobility transistor
07/28/1999EP0932205A1 PN junction semiconductor device having an epitaxial layer with graded resistivity
07/28/1999EP0932204A1 Integrated circuit and method for radio frequency applications
07/28/1999EP0932203A1 Method and circiut for improving the performances of an ESD protection on semiconductor circuit structures
07/28/1999EP0932202A1 ESD protection network on semiconductor circuit structures
07/28/1999EP0932198A1 Process for manufacturing semiconductor package and circuit board assembly
07/28/1999EP0932197A1 Method of varying MOS transistor electrical characteristics of integrated circuits
07/28/1999EP0932196A2 Adhesive sheet
07/28/1999EP0932195A1 Method and system for semiconductor wafer fabrication process real-time in-situ supervision
07/28/1999EP0932194A1 Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision
07/28/1999EP0932193A2 Method of forming bump electrodes
07/28/1999EP0932192A1 Etching of a platinum electrode
07/28/1999EP0932191A1 Method of plasma etching doped polysilicon layers with uniform etch rates
07/28/1999EP0932190A1 Method of plasma etching the tungsten silicide layer in the gate conductor stack formation
07/28/1999EP0932189A2 Inductor structure with air dielectric
07/28/1999EP0932188A2 Glass formation on a semi-conductor wafer
07/28/1999EP0932187A2 Trench etching using borosilicate glass mask
07/28/1999EP0932186A2 Improved polycide
07/28/1999EP0932182A2 Method and an apparatus for testing a substrate
07/28/1999EP0932161A1 Method for controlled erasing memory devices, in particular analog and multi-level flash-EEPROM devices
07/28/1999EP0932110A1 Method for evaluating the performance of vlsi circuits
07/28/1999EP0932082A2 Chemically amplified resist composition and method of creating a patterned resist using electron beam
07/28/1999EP0931355A1 Semiconductor device with a protected barrier for a stack cell
07/28/1999EP0931354A1 Power mos component
07/28/1999EP0931353A1 Threshold adjust in vertical dmos transistor
07/28/1999EP0931350A1 Short channel self aligned vmos field effect transistor
07/28/1999EP0931348A1 Process for producing barrier-free semiconductor storage assemblies
07/28/1999EP0931347A1 Integrated semiconductor storage assembly with buried-plate electrode
07/28/1999EP0931342A1 Process for producing barrier-free semiconductor storage assemblies
07/28/1999EP0931341A1 Process for producing barrier-free semiconductor storage assemblies
07/28/1999EP0931340A1 Semiconductor read only memory and method for the production thereof
07/28/1999EP0931339A1 Dram capacitor with stacked electrodes and method for the production thereof
07/28/1999EP0931338A1 Method of producing a mos transistor
07/28/1999EP0931337A1 Storage assembly with self-aligning non-integrated capacitor arrangement
07/28/1999EP0931336A1 A method for producing a silicon carbide bipolar device and a silicon carbide bipolar device
07/28/1999EP0931335A1 MULTI LAYERED ELECTRODES COMPOSED OF Pt AND A BASE METAL FOR STORAGE CAPACITORS
07/28/1999EP0931334A1 Semiconductor device with a layer of precious metal and a process for production of same
07/28/1999EP0931333A1 PROCESS FOR THE MANUFACTURE OF A HIGHLY $g(e) DIELECTRIC OR FERROELECTRIC COATING
07/28/1999EP0931332A1 Method for separating two material layers and electronic components produced therewith
07/28/1999EP0931331A1 Process for joining inorganic substrates in a permanent manner
1 ... 5656 5657 5658 5659 5660 5661 5662 5663 5664 5665 5666 5667 5668 5669 5670 5671 5672 5673 5674 5675 5676 ... 6590