Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2015
03/05/2015WO2015031833A2 Semiconductor device structures comprising polycrystalline cvd diamond with improved near-substrate thermal conductivity
03/05/2015WO2015031781A1 Tuning wafer inspection recipes using precise defect locations
03/05/2015WO2015031620A1 Compositions and methods for selectively etching titanium nitride
03/05/2015WO2015031444A1 Method of controlled crack propagation for material cleavage using electromagnetic forces
03/05/2015WO2015031397A1 Scratch filter for wafer inspection
03/05/2015WO2015031380A1 Substrate transport apparatus
03/05/2015WO2015031163A1 Method for laterally trimming a hardmask
03/05/2015WO2015031157A1 Anodization architecture for electro-plate adhesion
03/05/2015WO2015031096A1 Wafer dicing method for improving die packaging quality
03/05/2015WO2015031041A1 Barrier layers for electrostatic chucks
03/05/2015WO2015031030A1 ULTRA FINE PITCH PoP CORELESS PACKAGE
03/05/2015WO2015031023A1 Substrate support system
03/05/2015WO2015031017A1 Method and apparatus for plasma dicing a semi-conductor wafer
03/05/2015WO2015030968A1 Low temperature plasma anneal process for sublimative etch processes
03/05/2015WO2015030947A1 Hot wall reactor with cooled vacuum containment
03/05/2015WO2015030913A1 Method for reducing growth of non-uniformities and autodoping during column iii-v growth into dielectric windows
03/05/2015WO2015030889A1 Semiconductor constructions and methods of forming electrically conductive contacts
03/05/2015WO2015030806A1 Substrate etch
03/05/2015WO2015030803A1 Substrate etch
03/05/2015WO2015030802A1 Substrate etch
03/05/2015WO2015030787A1 Semiconductor device and method of making same
03/05/2015WO2015030670A1 Multilayer structure for a semiconductor device and a method of forming a multilayer structure for a semiconductor device
03/05/2015WO2015030657A1 Thin capping for mems devices
03/05/2015WO2015030589A1 Process and donor carrier for manufacturing a semi-conductor device using light induced transfer
03/05/2015WO2015030457A1 Plasma apparatus for vapor phase etching and cleaning
03/05/2015WO2015030454A1 Method and apparatus for generating puf by transforming photo mask in semiconductor process
03/05/2015WO2015030198A1 Method for forming resist pattern, and composition for forming resist pattern
03/05/2015WO2015030191A1 Microwave plasma processing device
03/05/2015WO2015030186A1 Sheet for processing semiconductor
03/05/2015WO2015030167A1 Susceptor
03/05/2015WO2015030159A1 Reflective mask blank, method for manufacturing reflective mask blank, reflective mask, and method for manufacturing semiconductor device
03/05/2015WO2015030151A1 Curable composition for photoimprint and method of producing film, optical component, circuit board, or electronic component using the composition
03/05/2015WO2015030064A1 METHOD FOR MANUFACTURING PNbZT THIN FILM
03/05/2015WO2015030060A1 Pattern forming method using resist underlayer film
03/05/2015WO2015030050A1 Polishing method
03/05/2015WO2015030047A1 Method for maintaining substrate processing device, method for manufacturing semiconductor device, substrate processing device, and storage medium from which substrate processing device maintenance program can be read
03/05/2015WO2015030035A1 Cleaning device and cleaning method
03/05/2015WO2015030032A1 Laminate and application thereof
03/05/2015WO2015030031A1 Laminate and application therefor
03/05/2015WO2015030030A1 Laminate and application therefor
03/05/2015WO2015030028A1 Cantilever-type probe and probe card
03/05/2015WO2015030009A1 Slurry, polishing solution set, polishing solution, substrate polishing method, and substrate
03/05/2015WO2015029988A1 Dicing device and dicing method
03/05/2015WO2015029987A1 Dicing blade
03/05/2015WO2015029938A1 Array substrate, radiation detector, and wiring substrate
03/05/2015WO2015029937A1 Power supply device for plasma generation
03/05/2015WO2015029871A1 Adhesive film and method for manufacturing seminconductor device
03/05/2015WO2015029858A1 Composition for forming n-type diffusion layer, method for forming n-type diffusion layer, method for producing semiconductor substrate with n-type diffusion layer, and method for manufacturing solar cell element
03/05/2015WO2015029819A1 Exposure apparatus
03/05/2015WO2015029818A1 Exposure device and exposure method
03/05/2015WO2015029817A1 Etching method
03/05/2015WO2015029806A1 Processing apparatus and processing method of stack
03/05/2015WO2015029797A1 Radiation sensitive composition, color filter, method for producing color filter, and solid-state imaging element
03/05/2015WO2015029786A1 Susceptor
03/05/2015WO2015029777A1 Plasma processing device and method for monitoring plasma processing device
03/05/2015WO2015029742A1 Device inspection method
03/05/2015WO2015029693A1 Mask blank, method for manufacturing mask blank, and method for manufacturing mask for transfer
03/05/2015WO2015029690A1 Pattern forming method, active light sensitive or radiation sensitive resin composition, resist film using same, method for manufacturing electronic device, and electronic device
03/05/2015WO2015029664A1 Method for producing sealed semiconductor element and method for manufacturing semiconductor device
03/05/2015WO2015029638A1 Semiconductor device for power generation, method for manufacturing same, and solder therefor
03/05/2015WO2015029635A1 Method for manufacturing wide band gap semiconductor device, method for manufacturing semiconductor module, wide band gap semiconductor device and semiconductor module
03/05/2015WO2015029622A1 Radical polymerization type adhesive composition, and method for producing electrical connection body
03/05/2015WO2015029607A1 Silicon carbide semiconductor device and method for manufacturing same
03/05/2015WO2015029578A1 Semiconductor device manufacturing method and semiconductor device
03/05/2015WO2015029577A1 Method for producing laminate, and laminate
03/05/2015WO2015029575A1 Sample-retainer
03/05/2015WO2015029563A1 Cleaning jig, cleaning jig set, cleaning substrate, cleaning method, and substrate processing device
03/05/2015WO2015029535A1 Semiconductor structure in which film including germanium oxide is provided on germanium layer, and method for manufacturing semiconductor structure
03/05/2015WO2015029527A1 Drive mechanism and manufacturing device
03/05/2015WO2015029524A1 Method and device for polishing semiconductor wafer
03/05/2015WO2015029456A1 Semiconductor device
03/05/2015WO2015029434A1 Semiconductor element
03/05/2015WO2015029360A1 Thiol group-containing colored compound, metal nanowire, dispersion, transparent conductive film, information input device, and electronic device
03/05/2015WO2015029323A1 Ingot cutting method and wire saw
03/05/2015WO2015029294A1 Wafer polishing method and wafer polishing device
03/05/2015WO2015029293A1 Semiconductor integrated circuit, and power supply control system provided with a plurality of semiconductor integrated circuits
03/05/2015WO2015029286A1 Thin film transistor substrate manufacturing method and thin film transistor substrate
03/05/2015WO2015029280A1 Semiconductor integrated circuit device
03/05/2015WO2015029277A1 Resist remover liquid
03/05/2015WO2015029270A1 Semiconductor device and method for manufacturing same
03/05/2015WO2015029175A1 Semiconductor device, and production method therefor
03/05/2015WO2015029173A1 Packing structure for packing substrate storing container
03/05/2015WO2015029152A1 Semiconductor device
03/05/2015WO2015029092A1 Etching method, manufacturing method for lsi device, and 3d-integrated lsi device manufacturing method
03/05/2015WO2015029090A1 Plasma processing device and plasma processing method
03/05/2015WO2015028838A1 Semiconductor device and method of manufacture therefor
03/05/2015WO2015028570A1 Apparatus, in particular end effector
03/05/2015WO2015028371A1 Stable metal compounds as hardmasks and filling materials, their compositions and methods of use
03/05/2015WO2015028263A1 Bipolar non-punch-through power semiconductor device
03/05/2015WO2015028213A1 Die with a crack detecting structure and manufacturing method thereof
03/05/2015WO2015027961A1 Reverse conduction insulated gate bipolar transistor (igbt) manufacturing method
03/05/2015WO2015027948A1 Insulated-gate bipolar transistor and method for fabricating same
03/05/2015WO2015027947A1 Insulated-gate bipolar transistor and method for fabricating same
03/05/2015WO2015027881A1 Method for manufacturing insulated gate bipolar transistor
03/05/2015WO2015027878A1 Insulated gate bipolar transistor and manufacturing method therefor
03/05/2015WO2015027850A1 Method for manufacturing reverse-conducting field-stop insulated-gate bipolar transistor
03/05/2015WO2015027843A1 Maskless dual silicide contact formation
03/05/2015WO2015027747A1 Thin film transistor, manufacturing method, array substrate and display device thereof
03/05/2015WO2015027676A1 Tunnelling field-effect transistor and preparation method therefor
03/05/2015WO2015027621A1 Method for manufacturing field stop igbt device
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