Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2000
03/07/2000US6033963 Patterning; doping; overcoating with dielectric; polishing
03/07/2000US6033962 Method of fabricating sidewall spacers for a self-aligned contact hole
03/07/2000US6033961 Isolation trench fabrication process
03/07/2000US6033960 Method to improve the breakdown voltage of P-channel devices
03/07/2000US6033959 Method of fabricating a multiple T-gate MOSFET device
03/07/2000US6033958 Method of fabricating dual voltage MOS transistors
03/07/2000US6033957 4F-square memory cell having vertical floating-gate transistors with self-aligned shallow trench isolation
03/07/2000US6033956 Method to form contactless array for high density nonvolatile memories
03/07/2000US6033955 Method of making flexibly partitioned metal line segments for a simultaneous operation flash memory device with a flexible bank partition architecture
03/07/2000US6033954 Method of fabricating flash memory cell
03/07/2000US6033953 Method for manufacturing dielectric capacitor, dielectric memory device
03/07/2000US6033952 Method of manufacturing a semiconductor device
03/07/2000US6033951 Process for fabricating a storage capacitor for semiconductor memory devices
03/07/2000US6033950 Dual layer poly deposition to prevent auto-doping in mixed-mode product fabrication
03/07/2000US6033949 Method and structure to reduce latch-up using edge implants
03/07/2000US6033948 Method of making high voltage metal oxide silicon field effect transistor
03/07/2000US6033947 Driving circuit for electronic semiconductor devices including at least a power transistor
03/07/2000US6033946 Method for fabricating an isolated NMOS transistor on a digital BiCMOS process
03/07/2000US6033944 Semiconductor device and semiconductor device manufacturing method
03/07/2000US6033943 Dual gate oxide thickness integrated circuit and process for making same
03/07/2000US6033942 Method of forming a metal-semiconductor field effect transistors having improved intermodulation distortion using different pinch-off voltages
03/07/2000US6033941 Method of forming a thin film transistor with asymmetrically arranged gate electrode and offset region
03/07/2000US6033940 Anodization control for forming offset between semiconductor circuit elements
03/07/2000US6033936 Method of mounting an LSI package
03/07/2000US6033934 Semiconductor chip fabrication method and apparatus therefor
03/07/2000US6033933 Method for attaching a removable tape to encapsulate a semiconductor package
03/07/2000US6033932 Lead frame supplying apparatus
03/07/2000US6033931 Semiconductor device including stacked chips having metal patterned on circuit surface and one edge side of chip
03/07/2000US6033930 Lead frame carrying method and lead frame carrying apparatus
03/07/2000US6033929 Method for making II-VI group compound semiconductor device
03/07/2000US6033928 Etching a silicon substrate using said dotted mask so as to form a first number of semiconductor micro-needles
03/07/2000US6033927 Method for separating a substrate of a group III nitride semiconductor light-emitting device
03/07/2000US6033925 Method for manufacturing a SOI-type semiconductor structure
03/07/2000US6033923 An optical constant such as a refractive index of the tin film is measured. if the refractive index relative to light having a wavelength of 700 nm is 2.0 or smaller, it is judged that a nitridation degree of the tin film is sufficiently high
03/07/2000US6033922 Monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer
03/07/2000US6033921 Method for depositing a material of controlled, variable thickness across a surface for planarization of that surface
03/07/2000US6033920 Method of manufacturing a high dielectric constant capacitor
03/07/2000US6033919 Method of forming sidewall capacitance structure
03/07/2000US6033830 Acrylate copolymers with pendant phenanthrenyl, anthracenyl, quinoline, quinoxaline, benzoxazine or benzothiazine groups; crosslinking; effectively absorb reflected deep uv exposure radiation.
03/07/2000US6033827 Alicyclic acrylic polymer and a photoacid generator, wherein resin having an aromatic ring and a molecular weight between 8,000 and 30,000 is added.
03/07/2000US6033812 Mask manufacturing method for forming an electron beam drawing pattern
03/07/2000US6033811 Optical proximity correction mask for semiconductor device fabrication
03/07/2000US6033764 Bumped substrate assembly
03/07/2000US6033728 Apparatus for spin coating, a method for spin coating and a method for manufacturing semiconductor device
03/07/2000US6033589 Method for depositing a coating layer on a wafer without edge bead formation
03/07/2000US6033588 Method for improving differential etching rate of a metallic layer
03/07/2000US6033586 Apparatus and method for surface treatment
03/07/2000US6033584 Process for reducing copper oxide during integrated circuit fabrication
03/07/2000US6033548 Rotating system and method for electrodepositing materials on semiconductor wafers
03/07/2000US6033542 Electrode and its fabrication method for semiconductor devices, and sputtering target for forming electrode film for semiconductor devices
03/07/2000US6033541 Deposition process for coating or filling re-entry shaped contact holes
03/07/2000US6033540 Plating apparatus for plating a wafer
03/07/2000US6033537 Sputtering target and method of manufacturing a semiconductor device
03/07/2000US6033534 Method for producing an Al-containing layer with a planar surface on a substrate having hole structures with a high aspect ratio in the surface
03/07/2000US6033532 Oxide film fabrication method and electronic device
03/07/2000US6033522 Surface treatment method and apparatus for rotatable disc
03/07/2000US6033521 Tilt mechanism for wafer cassette
03/07/2000US6033490 Growth of GaN layers on quartz substrates
03/07/2000US6033489 Semiconductor substrate and method of making same
03/07/2000US6033486 Method for cleaning a surface by using a cationic sponge material
03/07/2000US6033484 Method and apparatus for cleaning contaminated surfaces using energetic cluster beams
03/07/2000US6033478 Wafer support with improved temperature control
03/07/2000US6033474 Apparatus for baking photoresist applied on substrate
03/07/2000US6033472 Semiconductor single crystal manufacturing apparatus
03/07/2000US6033290 Chemical mechanical polishing conditioner
03/07/2000US6033288 Monitoring system for dicing saws
03/07/2000US6033233 Electrical connecting device, and semiconductor device testing method
03/07/2000US6033231 Semiconductor device having a pedestal and method of forming
03/07/2000US6033215 Heat treatment apparatus and heat treatment boat
03/07/2000US6033202 Mold for non - photolithographic fabrication of microstructures
03/07/2000US6033175 Docking mechanism for aligning, coupling and securing a movable cart to a stationary workstation
03/07/2000US6033135 Development system for manufacturing semiconductor devices, including a container equipped with cleaning and ventillation apparatus, and controlling method thereof
03/07/2000US6032997 Vacuum chuck
03/07/2000US6032852 Reworkable microelectronic multi-chip module
03/07/2000US6032817 Easily attachable/detachable lid mounted container
03/07/2000US6032802 Thin-plate supporting container with filter means
03/07/2000US6032724 Temperature control apparatus for sample susceptor
03/07/2000US6032715 Wafer bonding device
03/07/2000US6032704 Method and apparatus for storing wafers without moisture absorption
03/07/2000US6032683 System for cleaning residual paste from a mask
03/07/2000US6032682 Method for sulfuric acid resist stripping
03/07/2000US6032611 Apparatus for forming single-crystalline thin film by beam irradiator and beam reflecting device
03/07/2000US6032529 Liquid level sensor for buffered hydrofluoric acid
03/07/2000US6032512 Wafer centering device and method of using
03/07/2000US6032419 Vacuum processing apparatus with low particle generating vacuum seal
03/07/2000US6032382 Drying apparatus and method using IPA of a semiconductor wafer
03/07/2000US6032356 Wafer-level test and burn-in, and semiconductor process
03/07/2000CA2167457C Compound semiconductor photodetector and method of making same
03/04/2000CA2281291A1 A method of surface etching silica glass, for instance for fabricating phase masks
03/03/2000WO2000017921A1 Method for producing self-polarized ferro-electric layers, especially pzt layers, with a rhombohedral crystal structure
03/02/2000WO2000011766A1 Laser repetition rate multiplier
03/02/2000WO2000011726A1 Method for depositing layers of high quality semiconductor material
03/02/2000WO2000011722A1 Field effect transistors, integrated circuitry, methods of forming field effect transistor gates, and methods of forming integrated circuitry
03/02/2000WO2000011721A1 Electronic devices with barrier film and process for making same
03/02/2000WO2000011720A1 Power transistor device
03/02/2000WO2000011719A1 Semiconductor chip with surface coating
03/02/2000WO2000011715A1 Method for producing integrated switching circuits and semiconductor wafer comprising integrated switching circuits
03/02/2000WO2000011714A1 Collective method for conditioning a plurality of components initially formed in a common substrate
03/02/2000WO2000011713A1 Integrated electronic circuit comprising at least an electronic power component
03/02/2000WO2000011712A1 Method and structure for improved alignment tolerance in multiple, singularized plugs
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