Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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02/23/2000 | EP0980701A1 Gas recovery unit |
02/23/2000 | EP0980590A2 Method and apparatus for self-doping negative and positive electrodes for silicon solar cells and other devices |
02/23/2000 | EP0980589A1 A PN-DIODE OF SiC AND A METHOD FOR PRODUCTION THEREOF |
02/23/2000 | EP0980588A1 Device based on quantic islands and method for making same |
02/23/2000 | EP0980585A1 Multiple single-wafer loadlock wafer processing apparatus and loading and unloading method therefor |
02/23/2000 | EP0980542A1 Method of patterning sub-0.25 lambda line features with high transmission, "attenuated" phase shift masks |
02/23/2000 | EP0980541A1 Method and apparatus for direct writing of semiconductor die using microcolumn array |
02/23/2000 | EP0980446A1 Silicon etching process for making microchannel plates |
02/23/2000 | EP0980305A1 Method and apparatus for molding plastic packages |
02/23/2000 | EP0980301A1 Coaxial drive loader arm |
02/23/2000 | EP0944840A4 Probe card for high speed testing |
02/23/2000 | EP0846325B1 Reduced area sense amplifier isolation layout in a dynamic ram architecture |
02/23/2000 | EP0759893A4 Coating of substrates |
02/23/2000 | CN1245629A Ceramic composite wiring structure for semiconductor devices and method of manufacture thereof |
02/23/2000 | CN1245587A Film-like composite structure and method of manufacture thereof |
02/23/2000 | CN1245586A Bumps in grooves for elastic positioning |
02/23/2000 | CN1245520A Reducing void formation in curable adhesive formulations |
02/23/2000 | CN1245351A Semiconductor chip with surface covering layer |
02/23/2000 | CN1245350A Semiconductor device and method for manufacturing same |
02/23/2000 | CN1245349A Method for manufacturing high-density semiconductor storage device |
02/23/2000 | CN1245348A Method for producing material layer for composition of picture |
02/23/2000 | CN1049765C Inter-connecting contact on integrated circuit and its making method |
02/23/2000 | CN1049764C Method for making dielectric layer of integrated circuit |
02/23/2000 | CN1049763C Method for forming metal interconnection of semiconductor device |
02/23/2000 | CN1049762C Method of manufacturing semiconductor device |
02/22/2000 | US6028994 Method for predicting performance of microelectronic device based on electrical parameter test data using computer model |
02/22/2000 | US6028991 Layout parameter extraction device |
02/22/2000 | US6028988 System for logic synthesis-for-testability capable of improving testability for an FSM having an asynchronous reset state |
02/22/2000 | US6028986 Methods of designing and fabricating intergrated circuits which take into account capacitive loading by the intergrated circuit potting material |
02/22/2000 | US6028953 Mask defect repair system and method which controls a dose of a particle beam |
02/22/2000 | US6028813 NOR type semiconductor memory device and a method for reading data stored therein |
02/22/2000 | US6028788 Flash memory device |
02/22/2000 | US6028763 Capacitor and method for forming a capacitor |
02/22/2000 | US6028762 Electrostatic chuck |
02/22/2000 | US6028756 Using topological features to lower the blowing current needed for fuses |
02/22/2000 | US6028660 Illumination unit for an optical apparatus |
02/22/2000 | US6028659 Scanning projection-exposure apparatus and methods |
02/22/2000 | US6028652 Array substrate for display device and manufacturing method thereof |
02/22/2000 | US6028629 Solid-state imaging device and method of manufacturing the same |
02/22/2000 | US6028474 Semiconductor integrated circuit |
02/22/2000 | US6028447 FPGA having predictable open-drain drive mode |
02/22/2000 | US6028443 Test circuit for semiconductor integrated logic circuit using tristate buffers allowing control circuit for tristate to be tested |
02/22/2000 | US6028435 Semiconductor device evaluation system using optical fiber |
02/22/2000 | US6028395 Vacuum plasma processor having coil with added conducting segments to its peripheral part |
02/22/2000 | US6028394 Cold electron plasma reactive ion etching using a rotating electromagnetic filter |
02/22/2000 | US6028376 Positioning apparatus and exposure apparatus using the same |
02/22/2000 | US6028368 Semiconductor device with potting resin structures |
02/22/2000 | US6028366 Ball grid array semiconductor device |
02/22/2000 | US6028362 Damascene wiring with flat surface |
02/22/2000 | US6028361 Method of manufacturing of semiconductor device having low leakage current |
02/22/2000 | US6028360 Semiconductor integrated circuit device in which a conductive film is formed over a trap film which in turn is formed over a titanium film |
02/22/2000 | US6028359 Integrated circuit having amorphous silicide layer in contacts and vias and method of manufacture therefor |
02/22/2000 | US6028358 Package for a semiconductor device and a semiconductor device |
02/22/2000 | US6028357 Semiconductor device with a solder bump over a pillar form |
02/22/2000 | US6028356 Plastic-packaged semiconductor integrated circuit |
02/22/2000 | US6028348 Low thermal impedance integrated circuit |
02/22/2000 | US6028346 Isolated trench semiconductor device |
02/22/2000 | US6028345 Reduced resistance base contact for single polysilicon bipolar transistors using extrinsic base diffusion from a diffusion source dielectric layer |
02/22/2000 | US6028344 Bipolar transistor on a semiconductor-on-insulator substrate |
02/22/2000 | US6028340 Static random access memory cell having a field region |
02/22/2000 | US6028339 Dual work function CMOS device |
02/22/2000 | US6028338 Semiconductor integrated circuit device with electrostatic damage protection |
02/22/2000 | US6028337 Lateral thin-film silicon-on-insulator (SOI) device having lateral depletion means for depleting a portion of drift region |
02/22/2000 | US6028336 Triple polysilicon flash EEPROM arrays having a separate erase gate for each row of floating gates, and methods of manufacturing such arrays |
02/22/2000 | US6028335 Semiconductor device |
02/22/2000 | US6028334 Semiconductor device and method of manufacturing the same |
02/22/2000 | US6028333 Electric device, matrix device, electro-optical display device, and semiconductor memory having thin-film transistors |
02/22/2000 | US6028329 Bipolar junction transistor device and a method of fabricating the same |
02/22/2000 | US6028326 Thin film transistor including a catalytic element for promoting crystallization of a semiconductor film |
02/22/2000 | US6028325 Semiconductor device contact registration structure |
02/22/2000 | US6028317 Charged particle beam optical element charged particle beam exposure apparatus and method of adjusting the same |
02/22/2000 | US6028286 Method for igniting a plasma inside a plasma processing reactor |
02/22/2000 | US6028022 Method for producing joined body of a1n substrates and joining agent used for the joining |
02/22/2000 | US6028015 Process for treating damaged surfaces of low dielectric constant organo silicon oxide insulation material to inhibit moisture absorption |
02/22/2000 | US6028014 Controlling selected parameter of the plasma to alter the ratio of molecular oxygen cations to atomic oxygen cations detected in the plasma, then supplying tetraethoxysilane into vapor deposition reactor to coat semiconductor with silica |
02/22/2000 | US6028013 Moisture repellant integrated circuit dielectric material combination |
02/22/2000 | US6028012 Process for forming a gate-quality insulating layer on a silicon carbide substrate |
02/22/2000 | US6028010 Style gas ring with a guard extension |
02/22/2000 | US6028009 Process for fabricating a device with a cavity formed at one end thereof |
02/22/2000 | US6028005 Methods for reducing electric fields during the fabrication of integrated circuit devices |
02/22/2000 | US6028004 Process for controlling the height of a stud intersecting an interconnect |
02/22/2000 | US6028003 Method of forming an interconnect structure with a graded composition using a nitrided target |
02/22/2000 | US6028002 Refractory metal roughness reduction using high temperature anneal in hydrides or organo-silane ambients |
02/22/2000 | US6028001 Methods of fabricating contact holes for integrated circuit substrates by etching to define a sidewall and concurrently forming a polymer on the sidewall |
02/22/2000 | US6028000 Method of forming contact plugs in semiconductor device having different sized contact holes |
02/22/2000 | US6027999 Pad definition to achieve highly reflective plate without affecting bondability |
02/22/2000 | US6027998 Method for fully planarized conductive line for a stack gate |
02/22/2000 | US6027997 An electroconductive layer, e.g. tungsten, deposited in a plug opening is chemomechanical polished using slurry comprising abrasive and copper sulfate or copper perchlorate to form plug |
02/22/2000 | US6027996 Method of planarizing a pre-metal dielectric layer using chemical-mechanical polishing |
02/22/2000 | US6027995 Method for fabricating an interconnect structure with hard mask and low dielectric constant materials |
02/22/2000 | US6027994 Method to fabricate a dual metal-damascene structure in a substrate |
02/22/2000 | US6027993 Method of forming an opening in an insulation film over a semiconductor substrate |
02/22/2000 | US6027992 Semiconductor device having a gallium and nitrogen containing barrier layer and method of manufacturing thereof |
02/22/2000 | US6027991 Method of making a silicide semiconductor device with junction breakdown prevention |
02/22/2000 | US6027990 Coating refractory metal film onto substrate, implanting silicon, annealing to form silicide |
02/22/2000 | US6027989 Bandgap tuning of semiconductor well structure |
02/22/2000 | US6027988 Method of separating films from bulk substrates by plasma immersion ion implantation |
02/22/2000 | US6027987 Method of manufacturing a crystalline semiconductor |
02/22/2000 | US6027985 Method for forming element isolating film of semiconductor device |
02/22/2000 | US6027984 Method for growing oxide |