| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/15/2000 | US6024526 Integrated prober, handler and tester for semiconductor components |
| 02/15/2000 | US6024502 Method and apparatus for processing substrate |
| 02/15/2000 | US6024393 Robot blade for handling of semiconductor substrate |
| 02/15/2000 | US6024334 Self-locking mechanism for a semiconductor wafer cassette support |
| 02/15/2000 | US6024306 Device and method for fragmenting semiconductor material |
| 02/15/2000 | US6024275 Method of making flip chip and BGA interconnections |
| 02/15/2000 | US6024274 Method for tape automated bonding to composite bumps |
| 02/15/2000 | US6024271 Wire bonding apparatus |
| 02/15/2000 | US6024107 Apparatus for cleaning robot end effector |
| 02/15/2000 | US6024106 Post-CMP wafer clean process |
| 02/15/2000 | US6024105 Semiconductor manufacturing device and method of removing particles therefrom |
| 02/15/2000 | US6024045 Apparatus for fabricating semiconductor device and method for fabricating semiconductor device |
| 02/15/2000 | US6024044 Dual frequency excitation of plasma for film deposition |
| 02/15/2000 | US6023853 Method for cleaning molding compound tablets |
| 02/15/2000 | CA2010460C Circuit for regulationg the base current of a semiconductor power device |
| 02/10/2000 | WO2000007421A1 A method for controlling stress in thin film layers deposited over a high density interconnect common circuit base |
| 02/10/2000 | WO2000007419A1 Production method for flexible substrate |
| 02/10/2000 | WO2000007417A1 Low-impedance high-density deposited-on-laminate structures having reduced stress |
| 02/10/2000 | WO2000007267A1 Insulated conductive through-feature in conductive core materials |
| 02/10/2000 | WO2000007264A1 Rf electrode contact assembly for a detachable electrostatic chuck |
| 02/10/2000 | WO2000007250A1 Method of producing solar cells |
| 02/10/2000 | WO2000007248A1 High electron mobility transistor |
| 02/10/2000 | WO2000007246A1 Method and apparatus for superior step coverage and interface control for high k dielectric capacitors and related electrodes |
| 02/10/2000 | WO2000007243A1 Device comprising a semiconductor chip with insulating and transparent original substrate |
| 02/10/2000 | WO2000007241A1 Buried local interconnect |
| 02/10/2000 | WO2000007240A1 Three-dimensional packaging technology for multi-layered integrated circuits |
| 02/10/2000 | WO2000007237A1 METHOD OF MAKING HIGH PERFORMANCE MOSFET USING Ti-LINER TECHNIQUE |
| 02/10/2000 | WO2000007236A2 Method and apparatus for forming improved metal interconnects |
| 02/10/2000 | WO2000007235A1 Semiconductor device, method of manufacture thereof, semiconductor module, and electronic device including circuit board and electronic unit board |
| 02/10/2000 | WO2000007234A1 Semiconductor device and method for manufacturing the same |
| 02/10/2000 | WO2000007233A1 An improved method of planarizing thin film layers deposited over a common circuit base |
| 02/10/2000 | WO2000007232A1 Method for improved sputter etch processing |
| 02/10/2000 | WO2000007231A1 Pattern formation method using light-induced suppression of etching |
| 02/10/2000 | WO2000007230A1 Method and apparatus for chemical mechanical polishing |
| 02/10/2000 | WO2000007229A1 A system and a method for plating of a conductive pattern |
| 02/10/2000 | WO2000007228A1 Epitaxial growth furnace |
| 02/10/2000 | WO2000007226A1 Method and apparatus for endpoint detecting the formation of an hsg polysilicon layer |
| 02/10/2000 | WO2000007225A2 Method of and apparatus for sealing an hermetic lid to a microelectronic machine |
| 02/10/2000 | WO2000007224A1 Method and installation for etching a substrate |
| 02/10/2000 | WO2000007222A2 Method for forming low-impedance high-density deposited-on-laminate structures having reduced stress |
| 02/10/2000 | WO2000007221A2 Holographic, laser-induced fabrication of indium nitride quantum wires and quantum dots |
| 02/10/2000 | WO2000007220A2 Wet processing methods for the manufacture of electronic components using ozonated process fluids |
| 02/10/2000 | WO2000007216A1 A ceramic composition for an apparatus and method for processing a substrate |
| 02/10/2000 | WO2000007215A2 A method of allowing a stable power transmission into a plasma processing chamber |
| 02/10/2000 | WO2000007191A2 Method to write/read mram arrays |
| 02/10/2000 | WO2000007142A1 Clocked integrated semiconductor circuit and method for operating the same |
| 02/10/2000 | WO2000007030A1 Particle beam current monitoring technique |
| 02/10/2000 | WO2000007029A1 Holder of electroconductive contactor, and method for producing the same |
| 02/10/2000 | WO2000006997A1 Image processor |
| 02/10/2000 | WO2000006812A1 Control of crystal anisotropy for perovskite oxides on semiconductor-based substrates |
| 02/10/2000 | WO2000006795A1 Cvd tungsten deposition on oxide substrates |
| 02/10/2000 | WO2000006491A1 Method and device for producing aerogels |
| 02/10/2000 | WO2000006489A1 Method for forming an oxide film with non-uniform thickness at a silicon substrate surface |
| 02/10/2000 | WO2000006352A1 Apparatus for sensing the presence of a wafer |
| 02/10/2000 | WO1999066540A3 An integrated inorganic/organic complementary thin-film transistor circuit and a method for its production |
| 02/10/2000 | WO1999066445A8 Method for producing an integrated circuit card and card produced according to said method |
| 02/10/2000 | WO1999063583A3 Improved method and apparatus for contacting a wafer |
| 02/10/2000 | WO1999057330A9 Oxide/organic polymer multilayer thin films deposited by chemical vapor deposition |
| 02/10/2000 | WO1999056310A3 Method for etching low k dielectric layers |
| 02/10/2000 | WO1999036941A3 Trench isolation for micromechanical devices |
| 02/10/2000 | DE19935946A1 Dielectric layer production, e.g. for giga-DRAMs having deep recesses or trenches, comprises forming first dielectric portions at substrate recess bottoms and filling the recesses with a second dielectric layer |
| 02/10/2000 | DE19935143A1 Bipolar transistor with high negative resistance and improved high frequency characteristics at increased room temperatures |
| 02/10/2000 | DE19932640A1 Photovoltaic module for converting solar radiation into electrical energy, comprises substrate front and back dual layer contacts and at least one solar cell |
| 02/10/2000 | DE19918243A1 Styrenharzzusammensetzungen und Halbleiterträgervorrichtung Styrenharzzusammensetzungen and semiconductor carrier device |
| 02/10/2000 | DE19853598A1 Manufacture of thin film by atomic layer deposition |
| 02/10/2000 | DE19845003C1 Vertical MOS transistor in semiconductor substrate |
| 02/10/2000 | DE19835538A1 Reinraum Cleanroom |
| 02/10/2000 | DE19835528A1 Verfahren zur Einstellung der Trägerlebensdauer in einem Halbleiterbauelement Method for adjusting the carrier lifetime in a semiconductor device |
| 02/10/2000 | DE19835344A1 Bonding capillary, especially an ultrasonic ball-wedge bonding capillary, is produced by applying a hard material layer to form a nonstick coating without affecting ultrasonic transmission properties |
| 02/10/2000 | DE19834234A1 Integrierter Halbleiterchip mit modularen Füllstrukturen Integrated semiconductor chip with modular dummy |
| 02/10/2000 | DE19823938C1 Linear positioning and position detection method for substrate |
| 02/10/2000 | CA2338691A1 Method of and apparatus for sealing a hermetic lid to a semiconductor die |
| 02/10/2000 | CA2338335A1 Three-dimensional packaging technology for multi-layered integrated circuits |
| 02/10/2000 | CA2337029A1 Control of crystal anisotropy for perovskite oxides on semiconductor-based substrates |
| 02/09/2000 | EP0979028A1 Device for dosing a very viscous liquid |
| 02/09/2000 | EP0978882A2 An oxide-based method of making compound semiconductor films and making related electronic devices |
| 02/09/2000 | EP0978881A2 Ferroelectric capacitor and its manufacturing method |
| 02/09/2000 | EP0978873A1 Semiconductor structures and manufacturing methods |
| 02/09/2000 | EP0978872A1 An inexpensive method of manufacturing an SOI wafer |
| 02/09/2000 | EP0978871A2 A low power packaging design |
| 02/09/2000 | EP0978870A2 Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof |
| 02/09/2000 | EP0978869A2 Method for forming a minute resist pattern and method for forming a gate electrode |
| 02/09/2000 | EP0978868A1 Process for adjusting the carrier lifetime in a semiconductor device |
| 02/09/2000 | EP0978867A2 Heating device of the light irradiation type and holding device therefor |
| 02/09/2000 | EP0978866A2 Guard ring of a heating device of the light irradiation type |
| 02/09/2000 | EP0978865A2 Cooling arrangement of a heating device of the light irradiation type |
| 02/09/2000 | EP0978763A1 Lithographic process for device fabrication using electron beam imaging |
| 02/09/2000 | EP0978726A2 Semiconductor device having a test circuit |
| 02/09/2000 | EP0978691A2 Clean room |
| 02/09/2000 | EP0978326A2 Method for making a silicon dioxide containing coating |
| 02/09/2000 | EP0978159A1 Device for limiting electrical alternating currents, especially during short-circuits |
| 02/09/2000 | EP0978146A1 Columnar-grained polycrystalline solar cell substrate and improved method of manufacture |
| 02/09/2000 | EP0978144A2 Semiconductor device comprising a mos transistor |
| 02/09/2000 | EP0978143A2 Semiconductor device comprising a half-bridge circuit |
| 02/09/2000 | EP0978142A1 Improved solid state image sensor |
| 02/09/2000 | EP0978141A1 Method of making nmos and pmos devices with reduced masking steps |
| 02/09/2000 | EP0978140A1 Method for etching silicon wafer |
| 02/09/2000 | EP0978138A1 Method and apparatus for ionized sputtering of materials |
| 02/09/2000 | EP0978125A1 System for optimizing memory repair time using test data |
| 02/09/2000 | EP0978093A1 Chip card, process for manufacturing a chip card and semiconductor chip for use in a chip card |