Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2000
03/09/2000WO2000012786A1 Method for producing silicon single crystal wafer and silicon single crystal wafer
03/09/2000WO2000012785A1 Low-temperature process for forming an epitaxial layer on a semiconductor substrate
03/09/2000WO2000012779A1 Methods for preparing ruthenium oxide films
03/09/2000WO2000012777A1 Methods for preparing ruthenium metal films
03/09/2000WO2000012643A1 Wafer retainer and method for attaching/detaching the wafer retainer to/from polishing machine base plate
03/09/2000WO2000012642A1 Polishing cloth and method for attaching/detaching the polishing cloth to/from polishing machine base plate
03/09/2000WO2000012640A1 Coating fluid for forming low-permittivity silica-based coating film and substrate with low-permittivity coating film
03/09/2000WO2000012446A1 Plasma-resistant member and plasma treatment apparatus using the same
03/09/2000WO2000012437A1 Glass powders, methods for producing glass powders and devices fabricated from same
03/09/2000WO2000012427A1 Micromechanical component and its production method
03/09/2000WO2000012417A1 Gas jetting structure for float transport devices and method of forming jet holes
03/09/2000WO2000012416A1 Float transport device and float transport system
03/09/2000WO2000012263A1 Method and apparatus for wireless transfer of chemical-mechanical planarization measurements
03/09/2000WO2000012255A1 Wire bonding capillary with a conical or beveled end
03/09/2000WO2000012231A1 Method of removing organic materials from substrates
03/09/2000WO1999066539A3 Lateral thin-film soi devices with graded top oxide and graded drift region
03/09/2000WO1999064205A8 Method and apparatus for endpoint detection for chemical mechanical polishing
03/09/2000WO1999053531A3 Post-cmp wet-hf cleaning station
03/09/2000WO1999048139A3 Apparatus for reducing heat loss
03/09/2000DE19941129A1 Measuring attachment for structural element with integrated circuit; has several test points with top casing having cavity for structural element with integrated circuit and bottom casing having apertures for solid test pins
03/09/2000DE19940515A1 A photoresist monomer useable in photolithography for producing highly integrated semiconductor elements
03/09/2000DE19939484A1 Schottky diode with barrier metal layer leaving five micron guard ring at edge of p-type diffusion layer
03/09/2000DE19937820A1 Mixed IC tester used in testing mixed IC comprising of logic portion and memory portion
03/09/2000DE19934336A1 High temperature silicon carbide semiconductor substrate production and treatment apparatus, especially for silicon carbide epitaxy, has a susceptor completely covered by a cover plate and the substrate
03/09/2000DE19929605A1 DRAM cell capacitor production, especially for highly integrated DRAMs, comprises stabilizing the crystalline phase of a constricted HSG layer portion adjoining a storage node surface
03/09/2000DE19915704A1 Resistzusammensetzung und Musterbildungsprozess Resist composition and patterning process
03/09/2000DE19846232A1 Back face contacted semiconductor device, e.g. an ion-sensitive FET, is produced by metabolizing a back face contact hole for contacting a connection region or metallization level of a front face circuit structure
03/09/2000DE19842106A1 Vertikaler Bipolartransistor und Verfahren zu seiner Herstellung A vertical bipolar transistor and method for its preparation
03/09/2000DE19840210A1 Verfahren zur Handhabung einer Mehrzahl von Schaltungschips A method of handling a plurality of circuit chips
03/09/2000DE19840197A1 Method to identify and characterize crystal defects in monocrystalline semiconductor material; involves testing sample of monocrystalline semiconductor material using micro-Raman spectroscopy
03/09/2000DE19839641A1 Different transistors, especially PMOS and NMOS transistors of CMOS ICs useful for chip cards, are produced in a semiconductor substrate using only two photo-levels instead of the usual five
03/09/2000DE19839092A1 Verfahren und Vorrichtung für die Wärmebehandlung von Halbleiterplatten Method and apparatus for heat treatment of semiconductor plates
03/09/2000DE19839023A1 Protected epitaxially coated semiconductor wafers are produced using a central clean room chamber for integration of epitaxial layer and protective layer forming operations
03/09/2000DE19838847A1 Reduction of reflection effects in photolithographic processes, used in semiconductor processing, comprises forming a dielectric anti-reflection coating layer below a hard mask layer
03/09/2000DE19838612A1 Tray for etching semiconductor disks comprises sealing ring of microporous fluoropolymer and corresponding bearing element for holding a semiconductor disk in an etching plane between them
03/09/2000DE19838407A1 Contact device, especially for testing electrical components, comprises dielectric-separated electrical connections for connecting contacts on both sides of translator and contact elements
03/09/2000DE19822794C1 Mehrfachnutzen für elektronische Bauelemente, insbesondere akustische Oberflächenwellen-Bauelemente Multiple uses for electronic components, especially surface acoustic wave devices
03/09/2000CA2342332A1 Abrasive liquid for metal and method for polishing
03/09/2000CA2341403A1 Methods and apparatus for measuring the thickness of a film, particularly of a photoresist film on a semiconductor substrate
03/09/2000CA2340653A1 Layered dielectric on silicon carbide semiconductor structures
03/08/2000WO2000045430A1 Electronic parts mounting method and device therefor
03/08/2000EP0984492A2 Semiconductor device comprising organic resin and process for producing semiconductor device
03/08/2000EP0984490A1 Process for the manufacture of structured material layers
03/08/2000EP0984489A1 Method and device for cleaving semiconductor wafer
03/08/2000EP0984488A2 Multilayer copper interconnect structure with copper oxide portions and manufacturing method thereof
03/08/2000EP0984487A2 Method of making shallow well MOSFET structure
03/08/2000EP0984486A2 Combined preanneal/oxidation step using rapid thermal processing (RTP)
03/08/2000EP0984485A1 Wiring forming method for semiconductor device and semiconductor device
03/08/2000EP0984484A2 Semiconductor subtrate and method for producing the same
03/08/2000EP0984483A2 Semiconductor substrate and method for producing the same
03/08/2000EP0984466A2 Integrated capacitor with high voltage linearity and low series resistance
03/08/2000EP0984403A1 Security system
03/08/2000EP0984329A2 Position detection apparatus having a plurality of detection sections, and exposure apparatus
03/08/2000EP0984328A2 A method of surface etching silica glass, for instance for fabricating phase masks
03/08/2000EP0984327A2 Process for producing halftone mask
03/08/2000EP0984317A2 Active matrix display device and semiconductor device
03/08/2000EP0984051A1 Heat-resistant adhesives and semiconductor devices produced therewith
03/08/2000EP0983843A2 Low temperature co-fired ceramic
03/08/2000EP0983822A1 Surface polishing apparatus
03/08/2000EP0983612A1 A thermal conducting trench in a semiconductor structure and method for forming the same
03/08/2000EP0983611A1 An integrated circuit package having interchip bonding and method therefor
03/08/2000EP0983610A1 Method and apparatus for manufacturing a micromechanical device
03/08/2000EP0983607A1 Bump forming method and bump bonder
03/08/2000EP0983605A1 Plasma processing apparatus
03/08/2000EP0983594A1 An electrically-programmable read-only memory fabricated using a dynamic random access memory fabrication process and methods for programming same
03/08/2000EP0983394A1 Method and apparatus for low pressure sputtering
03/08/2000EP0983208A1 Material with reduced optical absorption
03/08/2000EP0815592A4 Single-etch stop process for the manufacture of silicon-on-insulator wafers
03/08/2000EP0763147B1 Method and apparatus for producing thin films
03/08/2000EP0708694B1 Static megasonic cleaning system for cleaning objects
03/08/2000CN2368161Y Mould for making vacuum micro-diode
03/08/2000CN1246964A Radio architecture
03/08/2000CN1246963A Resin sealed semiconductor device and method for manufacturing the same
03/08/2000CN1246962A Manufacturing a heterobipolar transistor and a laser diode on the same sustrate
03/08/2000CN1246733A DRAM with alternating capacitor and manufacturing method thereof
03/08/2000CN1246732A Blinking memory, method of writing and deleting thereof and manufacturing method thereof
03/08/2000CN1246731A Chip dimention packaging and method for preparing wafer-class chip dimention packing
03/08/2000CN1246729A Semiconductor device and manufacture method thereof
03/08/2000CN1246727A Manufacture technology of semiconductor integrated circuit device
03/08/2000CN1246726A Method for manufacturing capacitor using hemisphere grain silicon
03/08/2000CN1246724A Plasma elched equipment and liquid crystal display module manufactured by the equipment
03/08/2000CN1246709A Storage structure in ferroelectric nonvolatile memory and its read method
03/08/2000CN1246708A Magnetic memory cell with off-axis reference layer oriented for improving response
03/08/2000CN1246655A Sulfonic acid oxime kind for high light sensitivity high elch-resistant thick coating i-line photoetching rubber
03/08/2000CN1246433A Chip transfer device
03/08/2000CN1050253C Method for detecting state of focusing
03/08/2000CN1050228C Thin film transistor and method of fabrication thereof
03/08/2000CN1050225C Method for manufacturing capacity of DRAM
03/08/2000CN1050224C Packaging method for chip plugging module and apparatus for implementing the method
03/08/2000CN1050223C Device and method for producing surface sticking diode
03/08/2000CN1050222C Method for fabricating semiconductor device
03/08/2000CN1050221C Method for forming polycrystalline thin-film and method for fabricating thin-film transistor
03/07/2000US6035431 Semiconductor integrated circuit with test device
03/07/2000US6035430 Semiconductor integrated circuit device with restoring circuit
03/07/2000US6035112 Cell library generating method and apparatus
03/07/2000US6035101 High temperature multi-layered alloy heater assembly and related methods
03/07/2000US6035100 Reflector cover for a semiconductor processing chamber
03/07/2000US6034983 Method of fabricating compound semiconductor device and optical semiconductor device
03/07/2000US6034903 Semiconductor memory device with identification fuse
03/07/2000US6034896 Method of fabricating a fast programmable flash E2 PROM cell
1 ... 5565 5566 5567 5568 5569 5570 5571 5572 5573 5574 5575 5576 5577 5578 5579 5580 5581 5582 5583 5584 5585 ... 6590