Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2000
03/29/2000EP0989609A1 Multilevel Interconnect Structure
03/29/2000EP0989605A2 Package for electronic component, lid material for package lid, and production method for lid material
03/29/2000EP0989604A2 In situ deposition of gate oxide and amorphous silicon electrode and corresponding structure
03/29/2000EP0989603A2 Trench capacitor with insulating collar and process for its manufacturing
03/29/2000EP0989602A1 Method of manufacturing a semiconductor device using lithography and etching of stacked layers
03/29/2000EP0989601A2 Method of and apparatus for bonding component
03/29/2000EP0989600A2 Surface cleaning method for manufacturing II-VI compound semiconductor epitaxial wafers
03/29/2000EP0989599A1 Process for fabricating vertical transistors
03/29/2000EP0989598A2 Process for wet etching a semiconductor structure
03/29/2000EP0989597A1 A composition and method for selectively etching a silicon nitride film
03/29/2000EP0989596A1 Substrate for device manufacturing, process for manufacturing the substrate, and method of exposure using the substrate
03/29/2000EP0989595A2 Device for processing a surface of a substrate
03/29/2000EP0989594A2 Process chamber
03/29/2000EP0989593A2 Substrate separating apparatus and method, and substrate manufacturing method
03/29/2000EP0989592A1 Tape stripping apparatus and tape stripping method
03/29/2000EP0989579A2 Device comprising a carbon nanotube field emitter structure and process for forming device
03/29/2000EP0989495A1 Electronic circuit for protecting data contained in a semiconductor device
03/29/2000EP0989465A1 Method for one-shot removal of resist member and sidewall protection layer
03/29/2000EP0989463A2 Bottom anti-reflective coating material composition for photoresist and method of forming resist pattern
03/29/2000EP0989460A1 Pattern forming method
03/29/2000EP0989459A1 Chemically amplified resist composition
03/29/2000EP0989458A2 Chemically amplified positive photoresist composition
03/29/2000EP0989434A2 Catadioptric optical system and exposure apparatus having the same
03/29/2000EP0989399A1 Apparatus and method for measuring crystal lattice strain
03/29/2000EP0989203A1 Cu(hfac)TMVS precursor with water additive to increase the condcuctivity of Cu
03/29/2000EP0989090A1 Methods and systems for distributing liquid chemicals
03/29/2000EP0988931A2 Carrier and polishing apparatus
03/29/2000EP0988930A2 Method of effecting a precision sawtoothed grinding on the surface of a given workpiece
03/29/2000EP0988695A1 Method and system for locally annealing a microstructure formed on a substrate and device formed thereby
03/29/2000EP0988651A1 Lateral diffused mos transistor with trench source contact
03/29/2000EP0988650A2 Method of manufacturing semiconductor devices with "chip size package"
03/29/2000EP0988647A1 Shaped shadow projection for an electron beam column
03/29/2000EP0988491A1 High capacity gas storage and dispensing system
03/29/2000EP0988407A1 Method for producing coated workpieces, uses and installation for the method
03/29/2000EP0988129A1 Method and device for repairing defective soldered joints
03/29/2000EP0988116A1 High efficiency photoresist coating
03/29/2000EP0966421A4 A method for purification of acids for use in semiconductor processing
03/29/2000EP0925178A4 Memory device using movement of protons
03/29/2000EP0902843B1 Method for making a thin film of solid material, and uses thereof
03/29/2000EP0616335B1 Nonvolatile semiconductor memory device having a status register and test method for the same
03/29/2000CN1249066A Semiconductor IC device with its layout designed by the cell base method
03/29/2000CN1249065A Process for producing semiconductor IC device
03/29/2000CN1248994A Composition for oxide CMP
03/29/2000CN1248882A Multi-layer circuit board for semiconductor chip set unit and making method thereof
03/29/2000CN1248809A Ionization system for low-voltage modularized room
03/29/2000CN1248797A Improvement for controllable property buried in device layer
03/29/2000CN1248795A Polycrystal chip semiconductor package structure and making method
03/29/2000CN1248794A Insulating grid bipolar transistor modular block capable of preventing short circuit
03/29/2000CN1248793A Design for enhancement avalanche mode insulator substrate silicon complementary MOS device
03/29/2000CN1248792A Semiconductor device and making method thereof
03/29/2000CN1248791A Method for forming wiring layer on integrated circuit with high-low topotactic area
03/29/2000CN1248790A Electric capacitor with high 'epsilon' dielectric material
03/29/2000CN1248789A Laminated element with material layer and barrier layer for preventing diffusion material from diffusion
03/29/2000CN1248788A Method for making semiconductor substrate parts
03/29/2000CN1248787A Method for making semiconductor device
03/29/2000CN1248757A Active array display device
03/29/2000CN1248730A Stripping agent, stripping method, stripping agent circulation equipment and stripping agent controller
03/29/2000CN1248603A Small chip adhesion agent for microelectronic device
03/29/2000CN1050941C Device and method for electric/mechanical connection structure
03/29/2000CN1050939C Thin film semiconductor device for display and method of producing same
03/29/2000CN1050938C Solid-state imaging device and method of manufacturing same
03/29/2000CN1050936C Light source and technique for mounting LED
03/29/2000CN1050934C Method for making integrated circuit
03/29/2000CN1050933C Method for making capacitors of semiconductor device
03/29/2000CN1050932C Method of forming a field oxide film in a semiconductor device
03/29/2000CN1050931C Apparatus for inner lead bonding
03/29/2000CN1050930C Belt-rolling automatic welding ball array IC package method
03/29/2000CN1050929C Sub-micron bonded solicon by trench planarization
03/29/2000CN1050924C 半导体存储装置 The semiconductor memory device
03/28/2000US6044213 Process simulation method for calculating a surface oxidant concentration in oxidation process
03/28/2000US6044208 Incremental critical area computation for VLSI yield prediction
03/28/2000US6044203 Rapid thermal anneal system and method including improved temperature sensing and monitoring
03/28/2000US6044035 Semiconductor memory device having level-shifted precharge signal
03/28/2000US6044034 Multiport memory having plurality of groups of bit lines
03/28/2000US6044028 Semiconductor storage device and electronic equipment using the same
03/28/2000US6044024 Interactive method for self-adjusted access on embedded DRAM memory macros
03/28/2000US6044016 Nand-type semiconductor memory device
03/28/2000US6044009 DRAM cell arrangement and method for its production
03/28/2000US6043985 Thermal connecting structure for connecting materials with different expansion coefficients
03/28/2000US6043968 ESD protection circuit
03/28/2000US6043932 Laser microscope and a pattern inspection apparatus using such laser microscope
03/28/2000US6043892 Exposure field sensor of a chip leveling apparatus having an aperture for changing at least one dimension of the incident light of the sensor
03/28/2000US6043876 Method and apparatus for detecting a solder bridge in a ball grid array
03/28/2000US6043800 Head mounted liquid crystal display system
03/28/2000US6043724 Two-stage power noise filter with on and off chip capacitors
03/28/2000US6043687 Integrated circuit precision resistor ratio matching
03/28/2000US6043683 Output pad circuit using control signal
03/28/2000US6043671 Semiconductor inspection device with guide member for probe needle for probe card and method of controlling the same
03/28/2000US6043670 Method for testing integrated circuits
03/28/2000US6043666 Electroconductive spring contact unit
03/28/2000US6043638 Reference voltage generating circuit capable of generating stable reference voltage independent of operating environment
03/28/2000US6043637 Voltage generator circuit
03/28/2000US6043608 Plasma processing apparatus
03/28/2000US6043572 Linear motor, stage device, and exposing device
03/28/2000US6043564 Semiconductor device having ball-bonded pads
03/28/2000US6043563 Electronic components with terminals and spring contact elements extending from areas which are remote from the terminals
03/28/2000US6043561 Electronic material, its manufacturing method, dielectric capacitor, non-volatile memory and semiconductor device
03/28/2000US6043557 Tape application platform and processes therefor
03/28/2000US6043554 Bipolar transistor and its manufacturing method
03/28/2000US6043553 Multi-emitter bipolar transistor of a self-align type