Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2000
12/07/2000WO2000034989A9 Method for producing high quality heteroepitaxial growth using stress engineering and innovative substrates
12/07/2000WO2000016380A9 Method and apparatus for cooling substrates
12/07/2000WO2000003416A9 A wafer carrier having a low tolerance build-up
12/07/2000DE19958486A1 Verfahren zur vertikalen Integration von elektrischen Bauelementen mittels Rückseitenkontakt Method for vertical integration of electrical components by means of back-contact
12/07/2000DE19954867C1 Dynamic random access memory (DRAM) cells arrangement, each cell having one vertical transistor and one capacitor
12/07/2000DE19928950A1 Semiconductor disc surface polishing method has perpendicular oscillating movement superimposed on relative displacement of rotary polishing tool and rotating semiconductor disc
12/07/2000DE19925087A1 Void and fold free film coating of optical or electronic components involves component centering, transferring with a gripper and vacuum cylinder and cutting film in contact with the component
12/07/2000DE19925044A1 Semiconductor disc with crystal matrix defects has upper and lower surface layers separated by upper and lower internal layers with central region between them having maximum nitrogen concentration
12/07/2000DE19924320A1 Isoliervorrichtung und Verfahren zur Herstellung eines isolierten Bereiches Insulating device and method for producing an isolated area
12/07/2000DE19924302A1 Arrangement for drying substrates has lateral feed device with outlet openings directed towards substrates that direct further fluid into regions between substrates and onto meniscus
12/07/2000DE19924212A1 Conductor bonding method on semiconductor component
12/07/2000DE19924151A1 Semiconductor integrated circuit with differential amplifier, e.g. for DRAM
12/07/2000DE19923871A1 Device for sealed mounting of thin discs has ring groove with cross-section open to inside, wedge-shaped on outside, divided lever actuator element, eccentric element on both load arms
12/07/2000DE19923805A1 Electrical or electronic component solder contact formation method
12/07/2000DE19922936A1 Anlage zur Bearbeitung von Wafern Plant for the processing of wafers
12/07/2000DE19922919A1 Silicon wafers fabrication and processing installation
12/07/2000DE19922557A1 Verfahren zum Abscheiden einer Zweischicht-Diffusionsbarriere A method for depositing a two-layer diffusion barrier
12/07/2000DE19908428C2 Halbleiterspeicheranordnung mit Bitleitungs-Twist A semiconductor memory device with bit line twist
12/07/2000DE10024870A1 Verfahren und Einrichtung zum Waschen von Arbeitsgeräten der Halbleiterindustrie Method and apparatus for washing of equipment for the semiconductor industry
12/07/2000DE10014927A1 Capacitance coupling between power source voltages in gate array
12/07/2000CA2373602A1 Current controlled field effect transistor
12/07/2000CA2373580A1 Collector-up rf power transistor
12/06/2000EP1058489A2 Method and apparatus for generating a plasma
12/06/2000EP1058484A1 Electro-optical device with an insulating layer
12/06/2000EP1058386A1 Semiconductor integrated circuit device, recording medium stored with cell library, and method for designing semiconductor integrated circuit
12/06/2000EP1058319A2 Method for stabilizing SOI semiconductor device and SOI semiconductor device
12/06/2000EP1058317A2 Low voltage dual-well MOS device
12/06/2000EP1058314A2 Method for manufacturing an electro-optical device
12/06/2000EP1058312A2 Radio frequency power device
12/06/2000EP1058311A2 Electro-optical device and electronic device
12/06/2000EP1058310A2 Semiconductor device and manufacturing method thereof
12/06/2000EP1058309A1 Process for manufacturing electronic devices comprising nonvolatile memory cells with dimensional control of the floating gate regions
12/06/2000EP1058306A2 Electronic component to be mounted on a circuit board having electronic circuit device sealed therein and method of manufacturing the same
12/06/2000EP1058305A2 Method of fabricating semiconductor device with at least an LDD-MOSFET and a bipolar transistor
12/06/2000EP1058304A1 Method for autoaligning overlapped lines of conductor material provided in integrated electronic circuits
12/06/2000EP1058303A1 Fabrication of VDMOS structure with reduced parasitic effects
12/06/2000EP1058302A1 Method of manufacturing bipolar devices having self-aligned base-emitter junction
12/06/2000EP1058301A1 Method for modifying the surface of a substrate on which an insulating film is to be formed
12/06/2000EP1058300A2 Wafer edge cleaning method and apparatus
12/06/2000EP1058299A1 Process for manufacturing electronic devices comprising nonvolatile memory cells with dimensional control of the floating gate regions
12/06/2000EP1058298A1 Method of manufacturing a semiconductor memory device having a capacitor
12/06/2000EP1058297A2 Brush core for disk scrubbing apparatus and method
12/06/2000EP1058296A2 A roller for rotating a substrate
12/06/2000EP1058295A2 Magnetically coupled substrate roller
12/06/2000EP1058294A1 Compound semiconductor field effect transistor and method for the fabrication thereof
12/06/2000EP1058293A2 Process and apparatus for drying wafer-like objects
12/06/2000EP1058292A2 Tapered shadow clamp ring and method to provide improved edge exclusion
12/06/2000EP1058291A2 Load-lock with external staging area
12/06/2000EP1058290A1 Method and apparatus for cleaning a semiconductor device
12/06/2000EP1058267A2 Semiconductor memory
12/06/2000EP1058175A2 Semiconductor processing techniques
12/06/2000EP1058174A2 Semiconductor processing techniques
12/06/2000EP1058173A2 Semiconductor processing techniques
12/06/2000EP1058172A2 Semiconductor processing techniques
12/06/2000EP1058155A2 Method of forming fine pattern
12/06/2000EP1058111A2 Optical inspection system and method
12/06/2000EP1057850A2 LCP bonding method
12/06/2000EP1057799A2 Edged ceramic member, a punch for manufacturing a lead frame, a method of manufacturing lead frames and a method of manufacturing an edged ceramic member
12/06/2000EP1057779A2 Flip chip package for micromachined semiconductors
12/06/2000EP1057591A2 Selective damascene chemical mechanical polishing
12/06/2000EP1057546A1 Megasonic cleaner
12/06/2000EP1057388A1 Device for positioning electronic circuits arranged on a foil
12/06/2000EP1057262A1 Overvoltage-protected i/o buffer
12/06/2000EP1057218A1 A method of manufacturing a semiconductor device
12/06/2000EP1057217A1 Integrated circuit with capacitative elements
12/06/2000EP1057215A1 Method for producing cmos transistors and related devices
12/06/2000EP1057214A1 End effector for wafer handler in processing system
12/06/2000EP1057213A2 A method of component manufacture
12/06/2000EP1057212A1 System for the treatment of wafers
12/06/2000EP1057207A1 Rf powered plasma enhanced chemical vapor deposition reactor and methods
12/06/2000EP1057206A1 Low pressure inductively coupled high density plasma reactor
12/06/2000EP1057205A1 Rf powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition
12/06/2000EP1057202A1 Method and device for exposing a substrate to light
12/06/2000EP1057188A1 Magnetic random access memory with a reference memory array
12/06/2000EP1057187A1 Method of fabricating a magnetic random access memory
12/06/2000EP1057079A1 Filter for extreme ultraviolet lithography
12/06/2000EP1057078A1 Method of imaging a mask pattern on a substrate by means of euv radiation, and apparatus and mask for performing the method
12/06/2000EP1057006A1 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
12/06/2000EP1056816A1 Cerium oxide slurry for polishing, process for preparing the slurry, and process for polishing with the slurry
12/06/2000EP1056594A1 A-site and/or b-site modified pbzrtio3 materials and films
12/06/2000EP1056549A1 A cleaning/buffing apparatus for use in a wafer processing device
12/06/2000EP1055163A4 High-speed precision positioning apparatus
12/06/2000EP1023743A4 Composite electrical contact structure and method for manufacturing the same
12/06/2000EP1015176A4 Improved polishing pads and methods relating thereto
12/06/2000CN1276090A Semiconductor device and method for manufacturing the same
12/06/2000CN1276089A Dielectric element and manufacturing method therefor
12/06/2000CN1275938A Apparatus and method for utilizing a plasma density gradient to produce a flow of particles
12/06/2000CN1275937A Apparatus and method for adjusting density distribution of a plasma
12/06/2000CN1275933A Spinning device and spinning method
12/06/2000CN1275882A High speed module convertion system and method
12/06/2000CN1275813A Transistor and making method thereof
12/06/2000CN1275810A Insulator base semiconductor device and method for stabilizing same
12/06/2000CN1275809A Semiconductor device having capacitance element and formation method thereof
12/06/2000CN1275808A Semiconductor device and making method thereof
12/06/2000CN1275807A Vertical fuse and making method thereof
12/06/2000CN1275805A Semiconductor structure having conductive fuel and making method thereof
12/06/2000CN1275803A Semiconductive device design method and apparatus, memory medium stored marco-information
12/06/2000CN1275802A Semiconductor device and making method thereof
12/06/2000CN1275801A Semiconductor device and making method thereof
12/06/2000CN1275800A Semiconductor device and making method thereof
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