Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2000
12/12/2000US6159654 Comprising a photosensitive heat cure accelerator; forming a polyimide film pattern
12/12/2000US6159646 Removing the defect photoresist coatings on the semiconductor substrate by applying a thinner, then removing the dissolved photoresist and the thinner by rotating the vacuum chuck
12/12/2000US6159642 Exposure mask and method of manufacturing thereof, and pattern data generating method for an exposure mask
12/12/2000US6159609 Method and apparatus for applying atomized adhesive to a leadframe for chip bonding
12/12/2000US6159586 Multilayer wiring substrate and method for producing the same
12/12/2000US6159559 Heating substrate; providing a continuous plasma discharge about a surface of substrate to enable deposition of products on surface s providing a metered amount of tetramethylsilane (tms) in plasma; depositing silicon dioxide film
12/12/2000US6159541 Spin coating process
12/12/2000US6159438 Method and apparatus for manufacturing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers manufactured by the same
12/12/2000US6159420 Gold alloy wire containing palladium and bismuth
12/12/2000US6159413 Micro structure and its manufacture method
12/12/2000US6159388 Plasma etching method and plasma etching system for carrying out the same
12/12/2000US6159333 Substrate processing system configurable for deposition or cleaning
12/12/2000US6159332 System for etching polysilicon in fabricating semiconductor device
12/12/2000US6159322 Photosensitive ceramic green sheet, ceramic package, and process for producing the same
12/12/2000US6159303 Liquid displacement apparatus and liquid displacement method
12/12/2000US6159301 Resistant to fluorine based active species; easy replacing and cleaning
12/12/2000US6159300 Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
12/12/2000US6159299 Wafer pedestal with a purge ring
12/12/2000US6159298 Thermal processing system
12/12/2000US6159297 Semiconductor process chamber and processing method
12/12/2000US6159295 Limited-volume apparatus for forming thin film aerogels on semiconductor substrates
12/12/2000US6159287 Truncated susceptor for vapor-phase deposition
12/12/2000US6159284 Process and device for producing a cylindrical single crystal and process for cutting semiconductor wafers
12/12/2000US6159088 Polishing pad, polishing apparatus and polishing method
12/12/2000US6159079 Carrier head for chemical mechanical polishing a substrate
12/12/2000US6159077 Colloidal silica polishing abrasive
12/12/2000US6159076 A slurry for polishing a surface comprising a liquid phase, an abrasive comprising silica and a ligand of an element contained in the surface which is bonded with ion or atom of the element to form chelate compound
12/12/2000US6159075 Method and system for in-situ optimization for semiconductor wafers in a chemical mechanical polishing process
12/12/2000US6159073 Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing
12/12/2000US6159071 Semiconductor wafer grinding apparatus
12/12/2000US6159055 RF electrode contact assembly for a detachable electrostatic chuck
12/12/2000US6158951 Wafer carrier and method for handling of wafers with minimal contact
12/12/2000US6158946 Positioning apparatus for substrates to be processed
12/12/2000US6158941 Substrate transport apparatus with double substrate holders
12/12/2000US6158911 Method and apparatus for insertion and retainment of pomade within a dispenser
12/12/2000US6158649 Solder ball mounting apparatus and method
12/12/2000US6158647 Concave face wire bond capillary
12/12/2000US6158645 Method of bonding radiation plate
12/12/2000US6158644 Method for enhancing fatigue life of ball grid arrays
12/12/2000US6158596 Substrate holder, and system and method for cleaning and drying same
12/12/2000US6158449 Cleaning and drying method and apparatus
12/12/2000US6158447 Cleaning method and cleaning equipment
12/12/2000US6158446 Ultra-low particle semiconductor cleaner
12/12/2000US6158445 Flowing dionized water into the tank containing wafers to cover the wafers, injecting separately from the water, ammonium hydroxide and hydrogen peroxide to create dilute solution, dumping the solution after cleaning, filling water
12/12/2000US6158384 Plasma reactor with multiple small internal inductive antennas
12/12/2000US6158382 Method for forming a deposited film by plasma chemical vapor deposition and apparatus for forming a deposited film by plasma chemical vapor deposition
12/12/2000US6158298 Stage apparatus and exposure apparatus provided with the stage apparatus
12/12/2000US6158283 Semiconductor acceleration sensor
12/12/2000US6158141 Apparatus and method for drying semiconductor substrate
12/12/2000US6158115 Method of mounting a plurality of electronic parts on a circuit board
12/12/2000US6158075 Apparatus and method for washing substrate
12/12/2000CA2188101C Semiconductor memory device having small chip size and redundancy access time
12/12/2000CA2166228C A power integrated circuit
12/12/2000CA2051154C Method of producing electronic, electrooptical and optical components
12/07/2000WO2000074219A1 Charge pump
12/07/2000WO2000074150A1 Insulating device and method for producing an insulated region on a silicon substrate
12/07/2000WO2000074146A1 Power semiconductor devices having an insulating layer formed in a trench
12/07/2000WO2000074144A1 Current controlled field effect transistor
12/07/2000WO2000074143A1 Double gate mosfet transistor and method for the production thereof
12/07/2000WO2000074139A1 A single polysilicon flash eeprom and method for making same
12/07/2000WO2000074136A1 Method for producing three-dimensional circuits
12/07/2000WO2000074135A1 Integrated circuit with structure of gas-insulated wiring
12/07/2000WO2000074134A1 Method for the vertical integration of electric components by
12/07/2000WO2000074133A2 Method for curing thermally curable underfill material
12/07/2000WO2000074132A1 Method of protective coating bga solder alloy spheres
12/07/2000WO2000074131A1 A method of assembling a semiconductor device package
12/07/2000WO2000074130A1 Discrete schottky diode device with reduced leakage current
12/07/2000WO2000074129A1 Collector-up rf power transistor
12/07/2000WO2000074128A1 Method of manufacturing semiconductor device and manufacturing apparatus
12/07/2000WO2000074126A1 A method of manufacturing a semiconductor device
12/07/2000WO2000074125A1 Apparatus for manufacturing semiconductor device
12/07/2000WO2000074124A1 Apparatus for manufacturing semiconductor device
12/07/2000WO2000074123A1 Transparent window of process chamber of process apparatus, and method of manufacture thereof
12/07/2000WO2000074121A1 Method to produce high density memory cells and small spaces by using nitride spacer
12/07/2000WO2000074117A1 Rapid heating and cooling of workpiece chucks
12/07/2000WO2000074116A2 Apparatus and methods for drying batches of disks
12/07/2000WO2000074115A1 Wafer cascade scrubber
12/07/2000WO2000074114A1 Disk cascade scrubber
12/07/2000WO2000074113A1 Wafer drying apparatus and method
12/07/2000WO2000074111A2 Apparatus and methods for drying batches of wafers
12/07/2000WO2000074110A2 Integrated circuit wafer probe card assembly
12/07/2000WO2000074068A1 Method and apparatus for providing an embedded flash-eeprom technology
12/07/2000WO2000073994A1 Pixel classification in object inspection based on likelihood
12/07/2000WO2000073986A1 Head for depositing a substance on a support with an electronic circuit
12/07/2000WO2000073905A2 Test interface for electronic circuits
12/07/2000WO2000073823A1 MoRu/Be MULTILAYERS
12/07/2000WO2000073808A1 Use of converging beams for transmitting electromagnetic energy to power devices for die testing
12/07/2000WO2000073773A1 Combinatorial x-ray diffractor
12/07/2000WO2000073684A1 Seal ring using gas curtain
12/07/2000WO2000073543A1 Doping of crystalline substrates
12/07/2000WO2000073533A1 Cooled window
12/07/2000WO2000073531A2 Copper sputtering target assembly and method of making same
12/07/2000WO2000073396A1 Slurry composition and method of chemical mechanical polishing using same
12/07/2000WO2000073090A1 Microstructures and method for wafer to wafer bonding
12/07/2000WO2000073023A1 Abrasive tools for grinding electronic components
12/07/2000WO2000073021A1 Method and system for cleaning a chemical mechanical polishing pad
12/07/2000WO2000073020A1 Abrasive processing apparatus and method employing encoded abrasive product
12/07/2000WO2000073013A1 Beam shaping and projection imaging with solid state uv gaussian beam to form vias
12/07/2000WO2000072985A1 Jet coating system for semiconductor processing
12/07/2000WO2000049649A3 Method for preventing corrosion of a dielectric material
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