Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2000
12/20/2000EP1061557A2 Substrate processing apparatus
12/20/2000EP1061448A1 Semiconductor memory device with built-in self test and built-in self repair
12/20/2000EP1061417A2 Method and apparatus for overlay measurement
12/20/2000EP1061396A2 Projection optical system and projection exposure apparatus using the same
12/20/2000EP1061381A2 Method for optimizing probe card analysis and scrub mark analysis data
12/20/2000EP1061360A2 Pattern inspection method and pattern inspection apparatus
12/20/2000EP1061359A2 Inspection equipment
12/20/2000EP1061358A2 Apparatus and method for reviewing defects on an object
12/20/2000EP1061160A1 Silicon with structural oxygen doping, preparation and application thereof
12/20/2000EP1061159A1 Plating apparatus, plating system, method for plating using the same
12/20/2000EP1061157A1 Substrate plating device
12/20/2000EP1061156A2 Method and system of post-deposition treating a carbon-containing layer on a substrate
12/20/2000EP1061111A1 Abrasive composition for polishing semiconductor device and process for producing semiconductor device with the same
12/20/2000EP1061109A2 Re-release type adhesive and re-release type adhesive sheet
12/20/2000EP1061083A1 Adduct of a dialkylgalliumazide with hydrazine for MOCVD of GaN
12/20/2000EP1060836A2 Wafer tranfer station for a chemical mechanical polisher
12/20/2000EP1060835A2 Method and apparatus for controlling flatness of polished semiconductor wafers
12/20/2000EP1060825A1 Ultrasonic vibration bonding machine
12/20/2000EP1060647A1 Method of making microwave, multifunction modules using fluoropolymer composite substrates
12/20/2000EP1060646A1 Method for manufacturing a resistor
12/20/2000EP1060645A1 Electric conductor with a surface structure in the form of flanges and etched grooves
12/20/2000EP1060522A1 Display devices
12/20/2000EP1060519A1 Mos transistor memory cell and method for producing the same
12/20/2000EP1060518A1 Trench-gate mos transistor, its use in an eeprom device and process for manufacturing the same
12/20/2000EP1060515A1 Electrically programmable memory cell arrangement and method for producing the same
12/20/2000EP1060514A1 Field isolated integrated injection logic gate
12/20/2000EP1060511A2 Reflow chamber and process
12/20/2000EP1060510A1 Method of forming dual field isolation structures
12/20/2000EP1060509A1 Crystal ion-slicing of single-crystal films
12/20/2000EP1060508A1 Underfilling material for flip-chip fitted printed circuit boards, a printed circuit board equipped therewith, and a method for filling ratio verification of chips which are underfilled therewith
12/20/2000EP1060507A1 Mould part, mould and method for encapsulating electronic components mounted on a carrier
12/20/2000EP1060506A1 Low dielectric constant films with high glass transition temperatures made by electron beam curing
12/20/2000EP1060505A1 Method for producing a microelectronic semiconductor component
12/20/2000EP1060504A2 Device for the thermal treatment of substrates
12/20/2000EP1060503A2 Ultra-small capacitor array
12/20/2000EP1060500A1 An apparatus and method for controlling a beam shape
12/20/2000EP1060498A1 A method and apparatus that determines charged particle beam shape codes
12/20/2000EP1060474A2 Memory cell arrangement and method for producing the same
12/20/2000EP1060443A1 Improved modulator design for pattern generator
12/20/2000EP1060442A1 Pattern generator with improved address resolution
12/20/2000EP1060441A1 Improved pattern generator
12/20/2000EP1060440A1 Pattern generator using euv
12/20/2000EP1060439A1 Improved pattern generator for avoiding stitching errors
12/20/2000EP1060287A1 Method of depositing silicon with high step coverage
12/20/2000EP1060286A1 Method of forming phosphosilicate glass having a high wet-etch rate
12/20/2000EP1060285A1 Apparatus and method for depositing a semiconductor material
12/20/2000EP1060215A1 High-melting polyamide composition for electronic applications
12/20/2000EP1060027A2 Circuit and method for specifying performance parameters in integrated circuits
12/20/2000EP0838100B1 Separable electrical connector assembly having a planar array of conductive protrusions
12/20/2000CN1277737A Semiconductor device, method of manufacture thereof, circuit board, and electronic device
12/20/2000CN1277736A Method for producing electrically conductive cross connections between two layers of wiring on a substrate
12/20/2000CN1277735A Apparatus for manufacturing semiconductor device and its manufacturing method
12/20/2000CN1277682A Composition and method for removing resist and etching residues using hydroxylammonium carboxylates
12/20/2000CN1277677A Polymer optical waveguide and method for fabricating the same
12/20/2000CN1277572A Manufacturing a memory disk or semiconductor device using an abrasive polishing system, and polishing pad
12/20/2000CN1277460A Nonvolatile semi-conductor storage and its producing method
12/20/2000CN1277458A Producing method of relay base plate for installation of semi-conductor elements
12/20/2000CN1277448A Slotted contact for making required voltage of electrofusion fuse minimum
12/20/2000CN1277142A Manufacture of integrated minuature movable silicon mechanical-structure on glass substrate
12/20/2000CN1277138A Equipment for producing semi-conductor products
12/20/2000CN1059756C Method for producing semiconductor thin films and method for producing electromagnetic inverting element
12/20/2000CN1059755C Buffer structure between silicon carbide and gallium nitride and semiconductor obtained from the same
12/19/2000USRE36993 Dynamic random access memory device with the combined open/folded bit-line pair arrangement
12/19/2000US6163875 Semiconductor testing equipment
12/19/2000US6163866 System level IC testing arrangement and method
12/19/2000US6163862 On-chip test circuit for evaluating an on-chip signal using an external test signal
12/19/2000US6163860 Layout for a semiconductor memory device having redundant elements
12/19/2000US6163648 Heating device of the light irradiation type and holding device therefor
12/19/2000US6163557 Mesas provide reduced area surfaces for epitaxially growing group iii-v nitride films, to reduce thermal film stresses in the films to reduce cracking
12/19/2000US6163499 Programmable impedance output buffer drivers, semiconductor devices and static random access memories provided with a programmable impedance output port
12/19/2000US6163493 Semiconductor integrated circuit device with large internal bus width, including memory and logic circuit
12/19/2000US6163488 Semiconductor device with antifuse
12/19/2000US6163481 Flash memory wordline tracking across whole chip
12/19/2000US6163477 MRAM device using magnetic field bias to improve reproducibility of memory cell switching
12/19/2000US6163475 Bit line cross-over layout arrangement
12/19/2000US6163463 Integrated circuit chip to substrate interconnection
12/19/2000US6163448 Apparatus and method for ex-situ testing of performance parameters on an electrostatic chuck
12/19/2000US6163446 Protective circuit
12/19/2000US6163376 Alignment apparatus, aberration measuring method and aberration measuring mark
12/19/2000US6163369 Plane position detecting method and exposing method and exposure apparatus using same
12/19/2000US6163365 Exposure apparatus and device manufacturing method using the same
12/19/2000US6163171 Pull-up and pull-down circuit
12/19/2000US6163170 Level converter and semiconductor device
12/19/2000US6163163 Semiconductor material characterizing method and apparatus
12/19/2000US6163146 IC testing method
12/19/2000US6163075 Multilayer wiring structure and semiconductor device having the same, and manufacturing method therefor
12/19/2000US6163074 Integrated circuit bonding pads including intermediate closed conductive layers having spaced apart insulating islands therein
12/19/2000US6163069 Semiconductor device having pads for connecting a semiconducting element to a mother board
12/19/2000US6163067 Semiconductor apparatus having wiring groove and contact hole in self-alignment manner
12/19/2000US6163066 Porous silicon dioxide insulator
12/19/2000US6163062 Semiconductor device having a metallic fuse member and cutting method thereof with laser light
12/19/2000US6163060 Semiconductor device with a composite gate dielectric layer and gate barrier layer and method of making same
12/19/2000US6163059 Integrated circuit including source implant self-aligned to contact via
12/19/2000US6163057 Field effect transistor with improved source/drain diffusion regions having an extremely small capacitance
12/19/2000US6163056 Semiconductor device having electrostatic discharge
12/19/2000US6163055 Semiconductor device and manufacturing method thereof
12/19/2000US6163054 SRAM cell
12/19/2000US6163053 Semiconductor device having opposite-polarity region under channel
12/19/2000US6163052 Trench-gated vertical combination JFET and MOSFET devices
12/19/2000US6163051 High breakdown voltage semiconductor device