| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/14/2001 | EP1076358A2 Processing apparatus and method for cleaning this processing apparatus |
| 02/14/2001 | EP1076357A1 Mounting apparatus for processing microsystem products |
| 02/14/2001 | EP1076356A2 Wet treatment nozzle, nozzle device and wet treatment apparatus |
| 02/14/2001 | EP1076355A2 Method and apparatus for cleaning a chamber configured for copper deposition |
| 02/14/2001 | EP1076354A2 Vacuum processing apparatus and operating method therefor |
| 02/14/2001 | EP1076352A2 High-density plasma source for ionized metal deposition |
| 02/14/2001 | EP1076264A2 Multi-channel grating interference alignment sensor |
| 02/14/2001 | EP1076261A1 Negative resist composition |
| 02/14/2001 | EP1076120A1 Method for producing silicon single crystal |
| 02/14/2001 | EP1076110A1 Cooling gas used with a self-sputtering method |
| 02/14/2001 | EP1075970A2 Pneumatic tyre |
| 02/14/2001 | EP1075898A2 Dresser and dressing apparatus |
| 02/14/2001 | EP1075896A2 Apparatus and method of grinding a semiconductor wafer surface |
| 02/14/2001 | EP1075878A1 Flushing vessel with ultra-clean liquid |
| 02/14/2001 | EP1075708A2 Method for producing contact structures in solar cells |
| 02/14/2001 | EP1075707A1 Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system |
| 02/14/2001 | EP1075672A1 Protection of lithographic components from particle contamination |
| 02/14/2001 | EP1075652A1 A system and method for inspecting semiconductor wafers |
| 02/14/2001 | EP1075418A1 Evacuation-driven smif pod purge system |
| 02/14/2001 | EP1075351A1 Apparatus and method for chemical-mechanical polishing (cmp) using a head having direct pneumatic wafer polishing pressure system |
| 02/14/2001 | EP1075346A1 Method and contact point for producing an electrical connection |
| 02/14/2001 | EP1075337A1 Container washing apparatus |
| 02/14/2001 | EP1075187A2 Method and apparatus for controlling the radial temperature gradient of a wafer while ramping the wafer temperature |
| 02/14/2001 | EP0864119B1 Photosensitive composition |
| 02/14/2001 | CN1284204A Field effect transistor |
| 02/14/2001 | CN1284203A Method of eliminating edga effect in chemical vapor deposition of metal |
| 02/14/2001 | CN1284199A Programmable sub-surface aggregating metallization structure and method of making same |
| 02/14/2001 | CN1284159A Improved chemical drying and cleaning system |
| 02/14/2001 | CN1284146A Flushable fiber structure |
| 02/14/2001 | CN1284082A Self-addressable self-assembling microelectronic integrated systems, component devices, mechanisms, methods, and procedures for molecular biological analysis and diagnostics |
| 02/14/2001 | CN1284041A Semiconductor wafer input/output handling system |
| 02/14/2001 | CN1283952A Method for mag. electroluminescence display and appts. for forming film |
| 02/14/2001 | CN1283874A Method for producing film monocrystal device, solar battery assembly and its prodn. method |
| 02/14/2001 | CN1283870A DRAM unit able to reduct leakage of transfering device, and its mfg. tech |
| 02/14/2001 | CN1283869A Deep silicon slot technology |
| 02/14/2001 | CN1283868A Semiconductor device and its mfg. method |
| 02/14/2001 | CN1061929C Resin molding machine with release film |
| 02/13/2001 | US6189135 Method of generating electron-beam data for creating a mask |
| 02/13/2001 | US6189129 Figure operation of layout for high speed processing |
| 02/13/2001 | US6189128 Design for testability method selectively employing two methods for forming scan paths in a circuit |
| 02/13/2001 | US6188935 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 02/13/2001 | US6188838 Apparatus for heat treating a semiconductor wafer to reduce stress |
| 02/13/2001 | US6188785 Pattern inspecting apparatus and inspecting method |
| 02/13/2001 | US6188625 Semiconductor memory |
| 02/13/2001 | US6188615 MRAM device including digital sense amplifiers |
| 02/13/2001 | US6188614 Structure of a channel write/erase flash memory cell and manufacturing method and operating method thereof |
| 02/13/2001 | US6188609 Ramped or stepped gate channel erase for flash memory application |
| 02/13/2001 | US6188607 Integrated circuit memory having divided-well architecture |
| 02/13/2001 | US6188600 Memory structure in ferroelectric nonvolatile memory and readout method therefor |
| 02/13/2001 | US6188599 Circuit for driving nonvolatile ferroelectric memory |
| 02/13/2001 | US6188597 Semiconductor memory having sub-select lines cross-connected to sub-decoders |
| 02/13/2001 | US6188580 Smart card and semiconductor chip for use in a smart card |
| 02/13/2001 | US6188564 Method and apparatus for compensating non-uniform wafer processing in plasma processing chamber |
| 02/13/2001 | US6188563 Platen for semiconductor workpieces |
| 02/13/2001 | US6188555 Device for limiting alternating electric currents, in particular in the event of a short circuit |
| 02/13/2001 | US6188467 Method and apparatus for fabricating semiconductor devices |
| 02/13/2001 | US6188452 Active matrix liquid crystal display and method of manufacturing same |
| 02/13/2001 | US6188323 Wafer mapping system |
| 02/13/2001 | US6188240 Programmable function block |
| 02/13/2001 | US6188235 System and method for verifying proper connection of an integrated circuit to a circuit board |
| 02/13/2001 | US6188233 Method for determining proximity effects on electrical characteristics of semiconductor devices |
| 02/13/2001 | US6188230 Pickup chuck for double sided contact |
| 02/13/2001 | US6188201 Device for converting direct current input into multiple voltage outputs |
| 02/13/2001 | US6188195 Exposure method, and method of making exposure apparatus having dynamically isolated support structure |
| 02/13/2001 | US6188162 High power megasonic transducer |
| 02/13/2001 | US6188147 Wedge and transverse magnet arrays |
| 02/13/2001 | US6188138 Bumps in grooves for elastic positioning |
| 02/13/2001 | US6188137 Ohmic electrode structure, semiconductor device including such ohmic electrode structure, and method for producing such semiconductor device |
| 02/13/2001 | US6188135 Copper interconnect with top barrier layer |
| 02/13/2001 | US6188134 Electronic devices with rubidium barrier film and process for making same |
| 02/13/2001 | US6188130 Exposed heat spreader with seal ring |
| 02/13/2001 | US6188128 Monoblock structure for stacked components |
| 02/13/2001 | US6188127 Semiconductor packing stack module and method of producing the same |
| 02/13/2001 | US6188126 Vertical interconnect process for silicon segments |
| 02/13/2001 | US6188125 Via formation in polymeric materials |
| 02/13/2001 | US6188123 Semiconductor element having vertical discrete bipolar transistor and semiconductor device having same |
| 02/13/2001 | US6188122 Buried capacitor for silicon-on-insulator structure |
| 02/13/2001 | US6188121 High voltage capacitor |
| 02/13/2001 | US6188120 Method and materials for through-mask electroplating and selective base removal |
| 02/13/2001 | US6188119 Semiconductor device having barrier metal layer between a silicon electrode and metal electrode and manufacturing method for same |
| 02/13/2001 | US6188117 Method and device for improved salicide resistance on polysilicon gates |
| 02/13/2001 | US6188116 Structure of a polysilicon plug |
| 02/13/2001 | US6188115 Semiconductor device with a conductive layer of small conductive resistance |
| 02/13/2001 | US6188114 Method of forming an insulated-gate field-effect transistor with metal spacers |
| 02/13/2001 | US6188113 High voltage transistor with high gated diode breakdown, low body effect and low leakage |
| 02/13/2001 | US6188112 High impedance load for integrated circuit devices |
| 02/13/2001 | US6188111 Dual gate semiconductor device for shortening channel length |
| 02/13/2001 | US6188110 Integration of isolation with epitaxial growth regions for enhanced device formation |
| 02/13/2001 | US6188109 Semiconductor device having a sense electrode |
| 02/13/2001 | US6188108 Thin film transistor and a fabricating method thereof |
| 02/13/2001 | US6188107 High performance transistor fabricated on a dielectric film and method of making same |
| 02/13/2001 | US6188106 MOSFET having a highly doped channel liner and a dopant seal to provide enhanced device properties |
| 02/13/2001 | US6188105 High density MOS-gated power device and process for forming same |
| 02/13/2001 | US6188104 Trench DMOS device having an amorphous silicon and polysilicon gate |
| 02/13/2001 | US6188103 Method of forming sharp beak of poly by nitrogen implant to improve erase speed for split-gate flash |
| 02/13/2001 | US6188102 Non-volatile semiconductor memory device having multiple different sized floating gates |
| 02/13/2001 | US6188101 Flash EPROM cell with reduced short channel effect and method for providing same |
| 02/13/2001 | US6188100 Concentric container fin capacitor |
| 02/13/2001 | US6188099 Storage capacitor structure |
| 02/13/2001 | US6188098 Semiconductor device and method of manufacturing the same |