| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/06/2001 | US6197647 Method of forming ultra-thin oxides with low temperature oxidation |
| 03/06/2001 | US6197646 Manufacture of semiconductor device with salicide electrode |
| 03/06/2001 | US6197645 Method of making an IGFET with elevated source/drain regions in close proximity to gate with sloped sidewalls |
| 03/06/2001 | US6197644 High density mosfet fabrication method with integrated device scaling |
| 03/06/2001 | US6197643 Method for making level converting circuit, internal potential generating circuit and internal potential generating unit |
| 03/06/2001 | US6197642 Method for manufacturing gate terminal |
| 03/06/2001 | US6197641 Process for fabricating vertical transistors |
| 03/06/2001 | US6197640 Semiconductor component and method of manufacture |
| 03/06/2001 | US6197639 Method for manufacturing NOR-type flash memory device |
| 03/06/2001 | US6197638 Oxide formation process for manufacturing programmable logic device |
| 03/06/2001 | US6197637 Method for fabricating a non-volatile memory cell |
| 03/06/2001 | US6197636 Electrically erasable programmable read-only memory device and method for fabricating the same |
| 03/06/2001 | US6197635 Method of manufacturing a semiconductor device with reduced masking and without ARC loss in peripheral circuitry region |
| 03/06/2001 | US6197634 Rugged metal electrodes for metal-insulator-metal capacitors |
| 03/06/2001 | US6197633 Method for the production of an integrated semiconductor memory configuration |
| 03/06/2001 | US6197632 Method for dual sidewall oxidation in high density, high performance DRAMS |
| 03/06/2001 | US6197631 Semiconductor storage device with a capacitor using a ferroelectric substance and fabricating method thereof |
| 03/06/2001 | US6197630 Method of fabricating a narrow bit line structure |
| 03/06/2001 | US6197629 Method of fabricating a polysilicon-based load circuit for static random-access memory |
| 03/06/2001 | US6197628 Providing a substrate assembly having a surface and forming a diffusion barrier layer over at least a portion of the surface, wherein the diffusion barrier layer is formed of ruthenium silicide |
| 03/06/2001 | US6197627 MOS device and method of fabricating the same |
| 03/06/2001 | US6197626 Method for fabricating semiconductor device |
| 03/06/2001 | US6197625 Method of fabricating a thin film transistor |
| 03/06/2001 | US6197624 Method of adjusting the threshold voltage in an SOI CMOS |
| 03/06/2001 | US6197623 Method for crystallizing amorphous silicon thin-film for use in thin-film transistors and thermal annealing apparatus therefor |
| 03/06/2001 | US6197619 Method for reinforcing a semiconductor device to prevent cracking |
| 03/06/2001 | US6197618 Semiconductor device fabrication using adhesives |
| 03/06/2001 | US6197617 Semiconductor device with high reliability of connection between projective electrode of semiconductor element and conductive wire of substrate and method of manufacturing the same |
| 03/06/2001 | US6197616 Method of fabricating semiconductor device |
| 03/06/2001 | US6197614 Quick turn around fabrication process for packaging substrates and high density cards |
| 03/06/2001 | US6197613 Wafer level packaging method and devices formed |
| 03/06/2001 | US6197612 Semiconductor chip mounting apparatus capable of preventing connected portion between semiconductor chip and substrate from thermal stress and method thereof |
| 03/06/2001 | US6197611 Method for producing silicon solar cell |
| 03/06/2001 | US6197609 Method for manufacturing semiconductor light emitting device |
| 03/06/2001 | US6197608 Mask for area forming selective grating and selective area growth and method for fabricating semiconductor device by utilizing the same |
| 03/06/2001 | US6197606 Determination of the thickness of a denuded zone in a silicon wafer |
| 03/06/2001 | US6197604 Method for providing cooperative run-to-run control for multi-product and multi-process semiconductor fabrication |
| 03/06/2001 | US6197603 Semiconductor device and manufacturing method thereof including a probe test step and a burn-in test step |
| 03/06/2001 | US6197602 Burn-in method for microwave semiconductor transistor |
| 03/06/2001 | US6197601 Method of correcting temperature of semiconductor substrate |
| 03/06/2001 | US6197600 Ferroelectric thin film, manufacturing method thereof and device incorporating the same |
| 03/06/2001 | US6197473 Photosensitive composition and a pattern forming process using the same |
| 03/06/2001 | US6197457 X-ray mask and method of fabricating the same |
| 03/06/2001 | US6197452 Prevents an exposure failure in a wiring pattern element of small dimensions |
| 03/06/2001 | US6197441 Cubic nitride semiconductor device and fabrication method of the same |
| 03/06/2001 | US6197388 Processing a substrate having an aluminum neodymium containing layer, an etch surface of said aluminum |
| 03/06/2001 | US6197372 Cassette station and substrate with carriers, coating, heating and mounting |
| 03/06/2001 | US6197222 Lead free conductive composites for electrical interconnections |
| 03/06/2001 | US6197218 Phosphor spherical particles of yttrium-gadolinium borate, zinc silicate, barium magnesium aluminate and barium aluminate in a liquid vehicle to be applied to a substrate; flat panel displays, e.g. plasma type; fluorescent lighting elements |
| 03/06/2001 | US6197182 Providing cathode electrode not in physical contact with second region of article, second region is electrically connected to first region; providing non-plating electrically conductive liquid; separating liquid from plating solution |
| 03/06/2001 | US6197181 Apparatus and method for electrolytically depositing a metal on a microelectronic workpiece |
| 03/06/2001 | US6197171 Pin contact mechanism for plating pin grid arrays |
| 03/06/2001 | US6197167 Step coverage and overhang improvement by pedestal bias voltage modulation |
| 03/06/2001 | US6197165 Method and apparatus for ionized physical vapor deposition |
| 03/06/2001 | US6197150 Apparatus for wafer treatment for the manufacture of semiconductor devices |
| 03/06/2001 | US6197123 Providing chamber having nozzle and exhaust from chamber; providing production mode in chamber; providing count of particles exhaust; causing gas supply mechanism to effect cleaning of chamber by supplying gas through nozzle to chamber |
| 03/06/2001 | US6197121 Chemical vapor deposition apparatus |
| 03/06/2001 | US6197119 Method and apparatus for controlling polymerized teos build-up in vacuum pump lines |
| 03/06/2001 | US6197118 Thin film deposition apparatus |
| 03/06/2001 | US6197117 Wafer out-of-pocket detector and susceptor leveling tool |
| 03/06/2001 | US6197109 Method for producing low defect silicon single crystal doped with nitrogen |
| 03/06/2001 | US6197102 Small amount of separation (segregation, precipitation) of excessive metallic elements' particles, little leakage current, hydrogen heat treatment resistance as well as voltage resistance |
| 03/06/2001 | US6196901 Method of double-side lapping a wafer and an apparatus therefor |
| 03/06/2001 | US6196900 Ultrasonic transducer slurry dispenser |
| 03/06/2001 | US6196532 3 point vacuum chuck with non-resilient support members |
| 03/06/2001 | US6196445 Method for positioning the bond head in a wire bonding machine |
| 03/06/2001 | US6196444 Method and apparatus for soldering ball grid array modules to substrates |
| 03/06/2001 | US6196441 Solder bump measuring method and apparatus |
| 03/06/2001 | US6196264 System and method for shielding an opening of a tube from a liquid |
| 03/06/2001 | US6196251 Gas inlet device for a coating system |
| 03/06/2001 | US6196211 Support members for wafer processing fixtures |
| 03/06/2001 | US6196155 Plasma processing apparatus and method of cleaning the apparatus |
| 03/06/2001 | US6196096 Method for sawing wafers employing multiple indexing techniques for multiple die dimensions |
| 03/06/2001 | US6196042 Coining tool and process of manufacturing same for making connection components |
| 03/06/2001 | US6196001 Environment controlled WIP cart |
| 03/06/2001 | US6195893 Method of manufacture of heat exchange unit |
| 03/06/2001 | US6195873 Method for decreasing contact resistance |
| 03/01/2001 | WO2001015236A1 Ferroelectric transistor and method for producing the same |
| 03/01/2001 | WO2001015234A1 Thin-film transistors and method for producing the same |
| 03/01/2001 | WO2001015230A1 Electronic device |
| 03/01/2001 | WO2001015227A1 Microbeam assembly and associated method for integrated circuit interconnection to substrates |
| 03/01/2001 | WO2001015224A1 Method for protecting integrated circuit chips by depositing a thin insulation layer |
| 03/01/2001 | WO2001015222A1 Trench with buried trench plate and method of production thereof |
| 03/01/2001 | WO2001015221A1 Selective oxide etch for forming a protection layer with different oxide thicknesses |
| 03/01/2001 | WO2001015220A1 Method for bottomless deposition of barrier layers in integrated circuit metallization schemes |
| 03/01/2001 | WO2001015219A2 Method for producing an integrated circuit having at least one metalicized surface |
| 03/01/2001 | WO2001015218A1 Method for treating substrates for microelectronics and substrates obtained by said method |
| 03/01/2001 | WO2001015217A2 Method for producing a semiconductor chip with an electrical property that can be adjusted after the silicon process |
| 03/01/2001 | WO2001015216A1 Semiconductor device and method of manufacture thereof |
| 03/01/2001 | WO2001015215A1 Method for treating substrates for microelectronics and substrates obtained according to said method |
| 03/01/2001 | WO2001015214A1 Nanoporous silica treated with siloxane polymers for ulsi applications |
| 03/01/2001 | WO2001015213A1 Method of etching |
| 03/01/2001 | WO2001015212A1 Plasma processing apparatus and method of plasma processing |
| 03/01/2001 | WO2001015211A1 Improved fill material for dual damascene processes |
| 03/01/2001 | WO2001015200A1 Implanting system and method |
| 03/01/2001 | WO2001015199A1 Electron beam plasma formation for surface chemistry |
| 03/01/2001 | WO2001015171A2 Flash memory architecture employing three layer metal interconnect |
| 03/01/2001 | WO2001015076A1 Method for making a mini-smart card |
| 03/01/2001 | WO2001014934A1 Photoresist remover composition |
| 03/01/2001 | WO2001014933A1 Silylation method for reducing critical dimension loss and resist loss |