Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2001
09/13/2001CA2398359A1 Quantum well intermixing
09/13/2001CA2398301A1 Quantum well intermixing
09/12/2001EP1132976A2 Optoelectronic material and device application, and method for manufacturing optoelectronic material
09/12/2001EP1132973A1 Metal-insulator-metal capacitor and process for making the same
09/12/2001EP1132972A1 Negative resistance limiter device
09/12/2001EP1132971A2 Electrostatic discharge protection transistor
09/12/2001EP1132970A2 Power semiconductor element capable of improving short circuit withstand capability while maintaining low on-voltage and method of fabricating the same
09/12/2001EP1132967A2 Image-pickup apparatus, fabrication method thereof, and camera system
09/12/2001EP1132966A2 Bit and word line layout for DRAM memory
09/12/2001EP1132965A2 Integrated Helix coil inductor on silicon
09/12/2001EP1132962A2 Wiring board, semiconductor device and production methods thereof
09/12/2001EP1132960A2 Semiconductor device and manufacturing method thereof
09/12/2001EP1132959A1 A method of forming low-resistivity connections in non-volatile memories
09/12/2001EP1132958A2 Memory cell with trench and method of making the same
09/12/2001EP1132957A2 Process for the fabrication of a conductive structure for an integrated circuit
09/12/2001EP1132956A1 Vacuum processor apparatus
09/12/2001EP1132955A1 Method of manufacturing a bipolar transistor with a self-aligned double polysilicon layer
09/12/2001EP1132954A2 Process for forming a silicon-germanium base of a heterojunction bipolar transistor
09/12/2001EP1132953A1 Process and apparatus for cleaning a silicon surface
09/12/2001EP1132952A1 Method for the formation and lift-off of porous silicon layers
09/12/2001EP1132951A1 Process of cleaning silicon prior to formation of the gate oxide
09/12/2001EP1132950A1 Wafer support of semiconductor manufacturing system
09/12/2001EP1132949A2 Semiconductor structure and manufacturing method
09/12/2001EP1132948A2 Substrate holding device, semiconductor manufacturing apparatus and device manufacturing device
09/12/2001EP1132947A2 Fabrication system with extensible equipment sets
09/12/2001EP1132946A1 Ion beam processing apparatus
09/12/2001EP1132944A2 Method of aligning an electron beam with a target position on a substrate surface
09/12/2001EP1132936A2 Electron source, image display device manufacturing apparatus and method, and substrate processing apparatus and method
09/12/2001EP1132920A2 MRAM device
09/12/2001EP1132919A2 Memory cell
09/12/2001EP1132918A2 Improved reference layer structure in a magnetic storage cell
09/12/2001EP1132792A2 Method and apparatus for managing scheduling a multiple cluster tool
09/12/2001EP1132772A1 Halftone phase shift photomask and blanks for halftone phase shift photomask for it and pattern forming method using this
09/12/2001EP1132732A2 Method of evaluating structural flaws on a wafer surface
09/12/2001EP1132506A1 Thermal processing apparatus
09/12/2001EP1132504A1 Thin film depositing process and device, ftir gas analyzer used in the thin film depositing process, and mixed gas supplying device used in the thin film depositing process
09/12/2001EP1132502A2 Method and apparatus for supplying electricity uniformly to a workpiece
09/12/2001EP1132500A2 Method for electrochemical deposition of metal using modulated waveforms
09/12/2001EP1132496A1 Method and apparatus for cleaning a vacuum line in a CVD system
09/12/2001EP1132495A1 Plasma-inert cover and plasma cleaning process and apparatus employing same
09/12/2001EP1132494A2 Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors
09/12/2001EP1131850A2 Method for dicing mesa-diodes
09/12/2001EP1131849A2 Pseudomorphic high electron mobility transistors
09/12/2001EP1131847A1 A method and apparatus for etching a substrate
09/12/2001EP1131846A1 Cvd nanoporous silica low dielectric constant films
09/12/2001EP1131845A1 Equipment for uv wafer heating and photochemical processing
09/12/2001EP1131749A1 Approach for routing an integrated circuit
09/12/2001EP1131679A1 System to reduce heat-induced distortion of photomasks during lithography
09/12/2001EP1131678A2 Antireflective composition for a deep ultraviolet photoresist
09/12/2001EP1131677A1 Photoresists, polymers and processes for microlithography
09/12/2001EP1131675A1 A mixed solvent system for positive photoresists
09/12/2001EP1131657A2 Laser scanning system mirror
09/12/2001EP0898808A4 Three-terminal power mosfet switch for use as synchronous rectifier or voltage clamp
09/12/2001EP0868752A4 Integrated circuit devices and methods employing amorphous silicon carbide resistor materials
09/12/2001EP0842538B1 Method for making a flat screen active matrix
09/12/2001EP0719452B1 Bonded wafer process incorporating diamond insulator
09/12/2001EP0699343B1 Thin film capacitors on gallium arsenide substrate and process for making the same
09/12/2001EP0680384B1 Microwave energized process for the preparation of high quality semiconductor material
09/12/2001CN2447103Y Locating ring for grinding semiconductor chip
09/12/2001CN2447102Y Locating ring for grinding semiconductor chip
09/12/2001CN1312970A Chuck apparatus for clamping a planar substrate in an electrostatic coating method
09/12/2001CN1312958A An integrated inorganic/organic complementary thin-film transistor circuit and a method for its production
09/12/2001CN1312955A Integrated circuit laying-out structure comprising vertical transistors and method for production thereof
09/12/2001CN1312954A Elastomer bonded parts for plasma processes and method for manufacture and use thereof
09/12/2001CN1312953A Wafer cleaning apparatus
09/12/2001CN1312943A Storage cell array and corresponding production method
09/12/2001CN1312910A Holder of electroconductive contactor and method for producing same
09/12/2001CN1312845A Chemical mechanical polishing slurry useful for copper/tantalum substrate
09/12/2001CN1312843A Chemical mechanical polishing slurry useful for copper/tantalum substrates
09/12/2001CN1312747A Waffer edge polishing method and apparatus
09/12/2001CN1312745A Device for automated tooling works
09/12/2001CN1312671A Multi-layer flexible wiring board and its production method
09/12/2001CN1312670A Formation of metal interconnection structure
09/12/2001CN1312644A Active pixel sensor fitted with photosensitive diode discharging circuit
09/12/2001CN1312591A Semiconductor device, liquid crystal display device and producing method thereof
09/12/2001CN1312590A Semiconductor device and producing method thereof
09/12/2001CN1312589A Semiconductor and producing method thereof
09/12/2001CN1312587A Semiconductor circuit for electronic optical device and producing method
09/12/2001CN1312586A Resin moulding-die and method for making semiconductor device using same
09/12/2001CN1312585A Semiconductor making method and semiconductor making apparatus
09/12/2001CN1312583A Preparation of self-organization grown quantum line structure material in molecular beam epitaxy
09/12/2001CN1312489A Chemical-amplifying type positive photoetching gel composition
09/12/2001CN1312488A Chemical-amplifying type positive photoetching gel composition
09/12/2001CN1312347A Radiation-solidified therrno-stripping pressure-sensitive binder sheet material and method for making cutting cube made thereby
09/12/2001CN1071032C Camara with internal supporting structure for preventing red-eye light
09/12/2001CN1070933C Material of chemical compounds with a metal in group IVB of the periodic system, nitrogen and oxygen and process for producing it
09/11/2001USRE37361 Scanning type exposure apparatus and exposure method
09/11/2001US6289494 Optimized emulation and prototyping architecture
09/11/2001US6289493 Layout editor and its text generating method
09/11/2001US6289492 Methods and apparatuses for defining a region on an elongated object
09/11/2001US6289469 Semiconductor integrated circuit having a plurality of processing circuits respectively executing necessary processes and a plurality of data holding circuits corresponding to the processing circuits
09/11/2001US6289291 Statistical method of monitoring gate oxide layer yield
09/11/2001US6289257 Method and apparatus for analyzing correlation for semiconductor chips
09/11/2001US6289030 Fabrication of semiconductor devices
09/11/2001US6288968 Semiconductor integrated circuit exhibiting improved high speed performance without wait time in operation
09/11/2001US6288967 Semiconductor integrated circuit device
09/11/2001US6288965 Reference voltage generating circuit, semiconductor memory device and burn-in method therefor
09/11/2001US6288949 Semiconductor memory device including an SOI substrate
09/11/2001US6288943 Method for programming and reading 2-bit p-channel ETOX-cells with non-connecting HSG islands as floating gate
09/11/2001US6288942 Nonvolatile semiconductor storage device and its manufacturing method