| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/20/2001 | US20010023115 Lower temperature method for forming high quality silicon-nitrogen dielectrics |
| 09/20/2001 | US20010023114 Method of manufacturing a semiconductor device comprising semiconductor elements formed in a toplayer of a silicon wafer situated on a buried insulating layer |
| 09/20/2001 | US20010023113 Method for sawing wafers employing multiple indexing techniques for multiple die dimensions |
| 09/20/2001 | US20010023112 Shallow trench isolation on a silicon substrate using nitrogen implant into the side wall |
| 09/20/2001 | US20010023111 Integrated circuit and method of using porous silicon to achieve component isolation in radio frequency applications |
| 09/20/2001 | US20010023110 Storage capacitor having undulated lower electrode for a semiconductor device |
| 09/20/2001 | US20010023109 Fabrication method for MIM capacitive circuit having little leakage current |
| 09/20/2001 | US20010023108 Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor |
| 09/20/2001 | US20010023107 Method for fabricating a hybrid isolation structure |
| 09/20/2001 | US20010023106 Method for fabricating high voltage transistor |
| 09/20/2001 | US20010023105 Insulated gate semiconductor device and method of manufacturing the same |
| 09/20/2001 | US20010023104 Field effect transistor and method of its manufacture |
| 09/20/2001 | US20010023103 Method for manufacturing a semiconductor memory device incorporating a capacitor therein |
| 09/20/2001 | US20010023102 Semiconductor memory device using hemispherical grain silicon and method for the manufacture thereof |
| 09/20/2001 | US20010023101 Capacitor and conductive line constructions and semiconductor processing methods of forming capacitors and conductive lines |
| 09/20/2001 | US20010023100 Method for forming a lower electrode for use in a semiconductor device |
| 09/20/2001 | US20010023099 Semiconductor integrated circuit device, and method of manufacturing the same |
| 09/20/2001 | US20010023098 Semiconductor devices and methods for manufacturing the same |
| 09/20/2001 | US20010023097 Novel cell design and process for making dynamic random access memory (DRAM) having one or more gigabits of memory cells |
| 09/20/2001 | US20010023096 Semiconductor integrated circuit device having capacitor element |
| 09/20/2001 | US20010023095 Method and structure for reducing leakage currents of active area diodes and source/drain diffusions |
| 09/20/2001 | US20010023094 Method for manufacturing a SOI wafer |
| 09/20/2001 | US20010023093 Semiconductor memory device employing row repair scheme |
| 09/20/2001 | US20010023092 Method of manufacturing a semiconductor device |
| 09/20/2001 | US20010023091 Method for producing semiconductor device |
| 09/20/2001 | US20010023090 Thin film transistor and a fabricating method thereof |
| 09/20/2001 | US20010023089 Semiconductor device and method of fabricating the same |
| 09/20/2001 | US20010023087 Method for housing sensors in a package |
| 09/20/2001 | US20010023086 Method for reducing dark current in image sensor |
| 09/20/2001 | US20010023083 Yield based, in-line defect sampling method |
| 09/20/2001 | US20010023082 Grind and single wafer etch process to remove metallic contamination in silicon wafers |
| 09/20/2001 | US20010023081 Process of top-surface-metallurgy plate-up bonding and rewiring for multilayer devices |
| 09/20/2001 | US20010023080 Integrated circuit ferroelectric capacitors including tensile stress applying layer on the upper electrode thereof and methods of fabricatiing same |
| 09/20/2001 | US20010023079 Methods of treating surfaces of substrates |
| 09/20/2001 | US20010023052 Patterning using mask by reduction projection |
| 09/20/2001 | US20010023051 Silicon nitride overcoated with silicon oxide photoresist;oxidation |
| 09/20/2001 | US20010023045 Transferring integrated circuit pattern from amask to semiconductor substarte |
| 09/20/2001 | US20010023042 Test object for detecting aberrations of an optical imaging system |
| 09/20/2001 | US20010023022 Group III-V compound semiconductor wafers and manufacturing method thereof |
| 09/20/2001 | US20010022996 Deposited-film formation apparatus, and deposited-film formation process |
| 09/20/2001 | US20010022991 Vacuum container; electrolytic cell |
| 09/20/2001 | US20010022990 Using mixture of organometallic compound and additive |
| 09/20/2001 | US20010022930 Elevating mechanism, carrier conveying apparatus and heat treatment installation |
| 09/20/2001 | US20010022929 Carrier conveying apparatus and heat treatment installment |
| 09/20/2001 | US20010022897 Substrate processing method and substrate processing apparatus |
| 09/20/2001 | US20010022803 Temperature-detecting element |
| 09/20/2001 | US20010022751 Redundancy circuit of semiconductor memory |
| 09/20/2001 | US20010022748 Virtual channel synchronous dynamic random access memory |
| 09/20/2001 | US20010022746 Memory repair circuit using antifuse of MOS structure |
| 09/20/2001 | US20010022743 Semiconductor integrated circuit device |
| 09/20/2001 | US20010022742 Reference layer structure in a magnetic storage cell |
| 09/20/2001 | US20010022691 Projection exposure system having a reflective reticle |
| 09/20/2001 | US20010022687 Reflection and refraction optical system and projection exposure apparatus using the same |
| 09/20/2001 | US20010022652 Substrate holder for lithographic apparatus |
| 09/20/2001 | US20010022528 Bias circuit for series connected decoupling capacitors |
| 09/20/2001 | US20010022527 Semiconductor device |
| 09/20/2001 | US20010022499 Dielectric barrier discharge lamp and dry cleaning device using the same |
| 09/20/2001 | US20010022484 Wire bonding method, surface acoustic wave apparatus and method for producing surface acoustic wave apparatus |
| 09/20/2001 | US20010022416 Manufacturing method for multilayer ceramic device |
| 09/20/2001 | US20010022405 Stepper alignment mark formation with dual field oxide process |
| 09/20/2001 | US20010022404 Semiconductor device, substrate for mounting semiconductor chip, processes for their production, adhesive, and double-sided adhesive film |
| 09/20/2001 | US20010022403 Bonding pad structure and method for making same |
| 09/20/2001 | US20010022402 Input-output circuit cell and semiconductor integrated circuit apparatus |
| 09/20/2001 | US20010022401 Solid-state image pickup apparatus and manufacturing method thereof |
| 09/20/2001 | US20010022400 Bus line wiring structure in a semiconductor device and method of manufacturing the same |
| 09/20/2001 | US20010022399 Semiconductor integrated circuit device |
| 09/20/2001 | US20010022398 Method and materials for integration of fluorine-containing low-k dielectrics |
| 09/20/2001 | US20010022396 Fan-out semiconductor chip assembly |
| 09/20/2001 | US20010022393 Semiconductor device including edge bond pads and methods |
| 09/20/2001 | US20010022389 Semiconductor junction profile and method for the production thereof |
| 09/20/2001 | US20010022388 Method of fabricating the same |
| 09/20/2001 | US20010022387 Pattern forming method for semiconductor manufacturing |
| 09/20/2001 | US20010022386 Bipolar transistor having recessed and rounded surface and its manufacturing method |
| 09/20/2001 | US20010022385 Semiconductor device having resistive element |
| 09/20/2001 | US20010022384 Resistive structure integrated in a semiconductor substrate |
| 09/20/2001 | US20010022383 Shallow trench isolation formation with sidewall spacer |
| 09/20/2001 | US20010022382 Method of and apparatus for sealing an hermetic lid to a semiconductor die |
| 09/20/2001 | US20010022381 Semiconductor raised source-drain structure |
| 09/20/2001 | US20010022379 Power trench transistor device source region formation using silicon spacer |
| 09/20/2001 | US20010022378 Column transistor for semiconductor devices |
| 09/20/2001 | US20010022377 Eeprom memory cell with increased dielectric integrity |
| 09/20/2001 | US20010022376 Semiconductor device incorporating an electrical contact to an internal conductive layer |
| 09/20/2001 | US20010022375 Method to fabricate a new structure with multi-self-aligned for split-gate flash |
| 09/20/2001 | US20010022374 Ferroelectric capacitor and a method for manufacturing thereof |
| 09/20/2001 | US20010022373 Magnetic memory element and magnetic memory using the same |
| 09/20/2001 | US20010022372 Semiconductor device having ferroelectric capacitor and method for manufacturing the same |
| 09/20/2001 | US20010022371 Multi-layered gate for a CMOS imager |
| 09/20/2001 | US20010022369 Semiconductor integrated circuit device |
| 09/20/2001 | US20010022367 Gallium nitride-based III-V group compound semiconductor |
| 09/20/2001 | US20010022364 Semiconductor device and method of manufacturing the same |
| 09/20/2001 | US20010022362 Thin film semiconductor device and manufacturing method thereof |
| 09/20/2001 | US20010022361 Thin film transistor, and manufacturing method thereof |
| 09/20/2001 | US20010022360 Test structure in an integrated semiconductor |
| 09/20/2001 | US20010022359 Gate isolated triple-well non-volatile cell |
| 09/20/2001 | US20010022347 Electron emitters for lithography tools |
| 09/20/2001 | US20010022345 Method of inspecting holes using charged-particle beam |
| 09/20/2001 | US20010022338 Probe signal outputting apparatus |
| 09/20/2001 | US20010022315 Structure of a ball bump for wire bonding and the formation thereof |
| 09/20/2001 | US20010022300 Steam generator |
| 09/20/2001 | US20010022295 Apparatus for fabricating semiconductor device and method for fabricating semiconductor using the same |