Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2001
09/11/2001US6287937 Method for simultaneous dopant driving and dielectric densification in making a semiconductor structure
09/11/2001US6287936 Method of forming porous silicon in a silicon substrate, in particular for improving the performance of an inductive circuit
09/11/2001US6287935 Semiconductor processing methods of forming hemispherical grain polysilicon layers, methods of forming capacitors, and capacitors
09/11/2001US6287934 Capacitor structure of semiconductor memory cell and method for fabricating capacitor structure of semiconductor cell
09/11/2001US6287933 Semiconductor device having thin film resistor and method of producing same
09/11/2001US6287931 Method of fabricating on-chip inductor
09/11/2001US6287930 Methods of forming bipolar junction transistors having trench-based base electrodes
09/11/2001US6287929 Method of forming a bipolar transistor for suppressing variation in base width
09/11/2001US6287928 Two-dimensionally arrayed quantum device
09/11/2001US6287927 Methods of thermal processing and rapid thermal processing
09/11/2001US6287926 Self aligned channel implant, elevated S/D process by gate electrode damascene
09/11/2001US6287925 Formation of highly conductive junctions by rapid thermal anneal and laser thermal process
09/11/2001US6287924 Integrated circuit and method
09/11/2001US6287923 Method of forming a MOS transistor
09/11/2001US6287922 Method for fabricating graded LDD transistor using controlled polysilicon gate profile
09/11/2001US6287921 Method of performing threshold voltage adjustment for MOS transistors
09/11/2001US6287920 Method of making multiple threshold voltage integrated of circuit transistors
09/11/2001US6287918 Process for fabricating a metal semiconductor device component by lateral oxidization
09/11/2001US6287917 Process for fabricating an MNOS flash memory device
09/11/2001US6287916 Method for forming a semiconductor device using LPCVD nitride to protect floating gate from charge loss
09/11/2001US6287915 Semiconductor device and manufacturing method therefor
09/11/2001US6287914 Method of forming a MISFET device with a bit line completely surrounded by dielectric
09/11/2001US6287913 Double polysilicon process for providing single chip high performance logic and compact embedded memory structure
09/11/2001US6287912 Method of fabricating semiconductor device
09/11/2001US6287911 Semiconductor device with silicide layers and fabrication method thereof
09/11/2001US6287910 Method for forming a capacitor using tantalum nitride as a capacitor dielectric
09/11/2001US6287909 Method of fabricating a static random access memory
09/11/2001US6287908 Transistor device configurations for high voltage applications and improved device performance
09/11/2001US6287907 Method of manufacturing a flash memory having a select transistor
09/11/2001US6287906 Semiconductor device having MOS transistor and method of manufacturing the same
09/11/2001US6287905 Method for fabricating semiconductor device
09/11/2001US6287904 Two step mask process to eliminate gate end cap shortening
09/11/2001US6287903 Structure and method for a large-permittivity dielectric using a germanium layer
09/11/2001US6287902 Methods of forming etch inhibiting structures on field isolation regions
09/11/2001US6287901 Method and semiconductor structure for implementing dual plane body contacts for silicon-on-insulator (SOI) transistors
09/11/2001US6287900 Semiconductor device with catalyst addition and removal
09/11/2001US6287899 Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same
09/11/2001US6287898 Thin film transistor manufacturing method
09/11/2001US6287897 Gate dielectric with self forming diffusion barrier
09/11/2001US6287895 Semiconductor package having enhanced ball grid array protective dummy members
09/11/2001US6287894 Acoustic device packaged at wafer level
09/11/2001US6287893 Method for forming chip scale package
09/11/2001US6287891 Method for transferring semiconductor device layers to different substrates
09/11/2001US6287890 Low cost decal material used for packaging
09/11/2001US6287889 Diamond thin film or the like, method for forming and modifying the thin film, and method for processing the thin film
09/11/2001US6287881 Semiconductor device with low parasitic capacitance
09/11/2001US6287878 Method of fabricating chip scale package
09/11/2001US6287876 Reticle-substrate alignment methods for charged-particle-beam microlithography, and associated semiconductor-device manufacturing methods
09/11/2001US6287850 Bioarray chip reaction apparatus and its manufacture
09/11/2001US6287752 Stacking films of various conductivity; patterning; etching
09/11/2001US6287751 Forming gettering on dielectric; masking; patterning
09/11/2001US6287750 Method of manufacturing semiconductor device in which opening can be formed with high precision
09/11/2001US6287747 Photosensitive polymer having cyclic backbone and resist composition comprising the same
09/11/2001US6287746 Chemically amplified resist large in transparency and sensitivity to exposure light less than 248 nanometer wavelength and process of forming mask
09/11/2001US6287734 Transferring pattern formed on mask using projection optical system
09/11/2001US6287731 Methods for making microlithography masks utilizing temperature control
09/11/2001US6287710 Generic process for preparing a crystalline oxide upon a group IV semiconductor substrate and a crystalline oxide-on-semiconductor structure
09/11/2001US6287699 Mask for the selective growth of a solid
09/11/2001US6287673 Method for producing high surface area foil electrodes
09/11/2001US6287637 Multi-layer approach for optimizing ferroelectric film performance
09/11/2001US6287635 High rate silicon deposition method at low pressures
09/11/2001US6287517 Active electrodes especially adapted for electrophoretic transport of nucleic acids, their hybridization and analysis
09/11/2001US6287503 Method for encasing array packages
09/11/2001US6287482 Semiconductor device
09/11/2001US6287477 Removal of edge bead from substrate
09/11/2001US6287443 Plating, drying using gases
09/11/2001US6287435 Method and apparatus for ionized physical vapor deposition
09/11/2001US6287413 Apparatus for processing both sides of a microelectronic device precursor
09/11/2001US6287390 Apparatus and method of cleaning nozzle and apparatus of processing substrate
09/11/2001US6287386 Carousel wafer transfer system
09/11/2001US6287385 Spring clip for sensitive substrates
09/11/2001US6287380 Low defect density silicon
09/11/2001US6287192 Slurry supply system for chemical mechanical polishing process having sonic wave generator
09/11/2001US6287178 Wafer carrier rinsing mechanism
09/11/2001US6287112 Wafer boat
09/11/2001US6287067 Processing unit and processing unit structure by assembling thereof
09/11/2001US6287025 Substrate processing apparatus
09/11/2001US6287004 Fluid bearing operable in a vacuum region
09/11/2001US6286825 Wafer holder
09/11/2001US6286749 Apparatus for moving a bonding head of a wire bonder in X, Y and Z axial directions
09/11/2001US6286688 Compliant silicon wafer handling system
09/11/2001US6286685 System and method for wafer thickness sorting
09/11/2001US6286684 Protective system for integrated circuit (IC) wafers retained within containers designed for storage and shipment
09/11/2001US6286644 Active vibration isolator, exposure apparatus, exposure method and device manufacturing method
09/11/2001US6286554 Apparatus and method to shield and open a tube
09/11/2001US6286526 Method for treatment of semiconductor substrate with chemical solution and apparatus used for said treatment
09/11/2001US6286525 Substrate cleaning apparatus and method
09/11/2001US6286524 Wafer drying apparatus and method with residual particle removability enhancement
09/11/2001US6286499 Method of cutting and separating a bent board into individual small divisions
09/11/2001US6286454 Plasma process device
09/11/2001US6286452 Sputtering apparatus
09/11/2001US6286231 Method and apparatus for high-pressure wafer processing and drying
09/11/2001US6286230 Method of controlling gas flow in a substrate processing system
09/11/2001US6286204 Method for fabricating double sided ceramic circuit boards using a titanium support substrate
09/11/2001US6286178 Jet cleaning device for developing station
09/11/2001CA2229170C Laser plasma x-ray source, semiconductor lithography apparatus using the same and a method thereof
09/11/2001CA2225681C Barrier layer for ferroelectric capacitor integrated on silicon
09/07/2001WO2001065895A2 Electrically controlled plasma uniformity in a high density plasma source
09/07/2001WO2001065610A1 Integrated component comprising a metal-insulator-metal capacitor
09/07/2001WO2001065609A1 Semiconductor device and method of manufacturing same