Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2001
09/06/2001DE10007414A1 Process for through-plating a substrate comprises forming a through-hole in a metal plate in orientation with the through-hole of a ceramic plate, applying a solder paste to one side of the substrate, and passing through an oven
09/06/2001DE10006951A1 Production of integrated components comprises tensioning strip in frame, applying adhesive to join wafer and strip, welding connecting wires, filling bonding window
09/06/2001DE10006378A1 Production of ohmic contacts on silicon carbide semiconductor regions comprises making the semiconductor regions amorphous by ion implantation
09/06/2001DE10005330A1 Verfahren zur Herstellung von leitfähigen transparenten Strukturen sowie Verwendung von transparenten, leitfähigen Oxidschichten zur Strukturierung von leitfähigen, transparenten Bereichen A process for preparing conductive transparent structures as well as use of transparent conductive oxide layers for patterning conductive transparent areas
09/05/2001EP1130948A1 Inner-electrode plasma processing apparatus and method of plasma processing
09/05/2001EP1130761A2 A motor driving circuit, a method for driving a motor, and a semiconductor integrated circuit device
09/05/2001EP1130716A2 Distributed feedback semiconductor laser and method for producing the same
09/05/2001EP1130715A2 Dsistributed feedback semiconductor laser and method for producing the same
09/05/2001EP1130706A2 Optical semiconductor device and method for manufacturing the same
09/05/2001EP1130659A1 Method of manufacturing low resistivity p-type compound semiconductor material
09/05/2001EP1130655A2 Method of forming metal electrodes
09/05/2001EP1130654A1 Integrated device including a metal- insulator-metal capacitor
09/05/2001EP1130653A2 Field-effect transistor and method of making the same
09/05/2001EP1130652A1 Semiconductor device with improved protection against electrostatic discharges
09/05/2001EP1130651A2 Radio frequency modules and modules for moving target detection
09/05/2001EP1130649A2 Semiconductor integrated device with protection against ESD
09/05/2001EP1130647A2 Procedure for the wafer scale integration of gallium arsenide based optoelectronic devices with silicon based integrated circuits
09/05/2001EP1130646A1 Chip-mounted enclosure
09/05/2001EP1130643A2 Assembly of power semiconductors with a compensation layer facing the heatsink
09/05/2001EP1130642A1 High frequency module
09/05/2001EP1130641A1 Molded integrated circuit package
09/05/2001EP1130640A2 Method of increasing the capacity of a DRAM trench capacitor
09/05/2001EP1130639A1 Semiconductor device and manufacture thereof
09/05/2001EP1130638A2 Method and structure for reducing leakage currents of active area diodes and source/drain diffusions
09/05/2001EP1130637A1 A method of removing moulding residues during the manufacture of plastic packages for semiconductor devices
09/05/2001EP1130636A2 Remover for a ruthenium containing metal and use thereof
09/05/2001EP1130635A1 Method of manufacturing for a memory capacitor with a strontium bismuth titanate based dielectric
09/05/2001EP1130634A1 Semiconductor device, method for forming silicon oxide film, and apparatus for forming silicon oxide film
09/05/2001EP1130633A1 A method of depositing silicon oxynitride polimer layers
09/05/2001EP1130632A2 Electrically insulating crosslinked thin-film-forming organic resin composition
09/05/2001EP1130631A1 Process for forming a buried cavity in a semiconductor material wafer
09/05/2001EP1130630A1 Abrasive composition for polishing lsi device
09/05/2001EP1130629A1 Method of dicing semiconductor wafer into chips, and structure of groove formed in dicing area
09/05/2001EP1130628A1 Semiconductor device and method for manufacturing the same
09/05/2001EP1130627A1 Hot plate unit
09/05/2001EP1130626A2 Method and apparatus for manufacturing semiconductor device
09/05/2001EP1130625A2 Method of sputter depositing copper films
09/05/2001EP1130624A2 Coil and coil support for generating a plasma
09/05/2001EP1130623A1 Apparatus for ion implantation
09/05/2001EP1130566A2 Display device and method for fabricating the same
09/05/2001EP1130472A2 Exposure method, method of production of density filter, and exposure apparatus
09/05/2001EP1130470A2 Microlithographic projection illumination with tangential polarisation
09/05/2001EP1130469A1 A radiation-sensitive resist material and a process for device fabrication using the same
09/05/2001EP1130468A2 Polymer and photoresist compositions
09/05/2001EP1130467A2 Photo mask pattern designing method, resist pattern fabricating method and semiconductor device manufacturing method
09/05/2001EP1130465A2 Laser delivery system and method for photolithographic mask repair
09/05/2001EP1130419A2 Optical member for vacuum ultraviolet, and aligner and device manufacture method using same
09/05/2001EP1130408A2 Method and apparatus for adaptation/adjustment of the delay time of signal between integrated circuits in networks or line systems
09/05/2001EP1130389A1 Molecular recognition type chemical CCD sensor
09/05/2001EP1130372A1 Arrangement and method for temperature measurement of a semiconductor wafer
09/05/2001EP1130130A1 Method and reactor for SACVD deposition
09/05/2001EP1130002A1 Method for producing dielectric porcelain composition for electronic device
09/05/2001EP1129823A2 Method for reworking semiconductor wafers
09/05/2001EP1129821A1 Method and device for polishing semiconductor wafer
09/05/2001EP1129763A1 Abatement of semiconductor processing gases
09/05/2001EP1129491A1 Large area x-ray imager with vented seam and method of fabrication
09/05/2001EP1129490A1 Thyristors and their manufacture
09/05/2001EP1129489A1 Transistor array
09/05/2001EP1129488A1 Thin-film transistors and method for producing the same
09/05/2001EP1129486A1 Integrated circuit power and ground routing
09/05/2001EP1129485A1 Electronic component and use of a protective structure contained therein
09/05/2001EP1129483A1 Dram cell system and method for producing same
09/05/2001EP1129482A1 Dram cell system and method for producing same
09/05/2001EP1129481A1 Method and device for compensating wafer bias in a plasma processing chamber
09/05/2001EP1129480A1 Semiconductor copper bond pad surface protection
09/05/2001EP1129479A1 System for assembling substrates to bonding zones provided with cavities
09/05/2001EP1129478A1 Method and apparatus for improving accuracy of plasma etching process
09/05/2001EP1129477A1 Salicide process for mosfet integrated circuit
09/05/2001EP1129476A1 Method for producing transistors
09/05/2001EP1129475A1 Integrated polycrystalline silicon resistance with carbon or germanium
09/05/2001EP1129474A1 Dual surface reflector
09/05/2001EP1129472A2 Processing chamber with rapid wafer exchange
09/05/2001EP1129471A2 Thermally annealed silicon wafers having improved intrinsic gettering
09/05/2001EP1129415A1 Automatic generation of user definable memory bist circuitry
09/05/2001EP1129366A1 Magnetoresistive sensor or memory elements with decreased magnetic switch field
09/05/2001EP1129362A1 Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing
09/05/2001EP1129338A1 Method and apparatus for mapping surface topography of a substrate
09/05/2001EP1129237A2 Method and apparatus for electrochemical mechanical deposition
09/05/2001EP1129235A1 Internally heated exhaust unit
09/05/2001EP1129234A1 Dual channel gas distribution plate
09/05/2001EP1129145A1 Non-corrosive stripping and cleaning composition
09/05/2001EP1129035A1 Aluminum oxide particles
09/05/2001EP1129010A1 Stackable cassette for use with wafer cassettes
09/05/2001EP1128934A1 Chemical-mechanical-polishing system with continuous filtration
09/05/2001EP1128932A1 Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization
09/05/2001EP0964839B1 Hot pressed silicon carbide wafer and method of using it as a dummy wafer
09/05/2001EP0928485B1 Two-transistor flash eprom cell
09/05/2001EP0852897B1 Method for surface mounting a heatsink to a printed circuit board
09/05/2001EP0811167B1 Manipulator for automatic test equipment test head
09/05/2001EP0685112B1 Repair line structure for thin film electronic devices
09/05/2001EP0648374B1 Planarising process for integrated semiconductor circuits
09/05/2001EP0647355B1 Process for producing a semiconductor storage device
09/05/2001EP0621981B1 Electronic package having lead frame with improved adhesion
09/05/2001EP0562035B2 Minimization of particle generation in cvd reactors and methods
09/05/2001CN2446659Y Bearing plate for silver coated wafer
09/05/2001CN2446100Y Keeping toside aligning, receiving and conveying device of wire rack
09/05/2001CN1311898A Scaleable integrated data processing device
09/05/2001CN1311897A Misted precursor deposition apparatus and method with improved mist and mist flow
09/05/2001CN1311896A Low temp. process for fabricating layered superlattice materials and making electronic devices including same
09/05/2001CN1311892A Storage assembly consisting of resistive ferroelectric storage cells