Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2001
10/10/2001EP1143494A1 Method of heat treatment
10/10/2001EP1143493A2 Sublimation growth of silicon carbide crystals
10/10/2001EP1143490A1 Semiconductor device with capacitor insulating film and method for fabricating the same
10/10/2001EP1143488A2 Vacuum processing apparatus and semiconductor manufacturing line using the same
10/10/2001EP1143487A1 Linear guide with an air bearing
10/10/2001EP1143465A2 Chip capacitor, a fabrication method for the same, and a metal mold
10/10/2001EP1143455A2 Nonvolatile semiconductor memory device
10/10/2001EP1143378A1 Method for manufacturing of RFID inlet
10/10/2001EP1143300A1 Photoresist compositions and use of same
10/10/2001EP1143295A2 Halftone phase shifting photomask and blanks for halftone phase shifting photomask therefor and a method for forming pattern by using said mask
10/10/2001EP1143256A2 Test device for the functional testing of a semiconductor chip
10/10/2001EP1143222A1 Method and apparatus for detecting the thickness of copper oxide
10/10/2001EP1143047A1 Wafer, epitaxial filter, and method of manufacture thereof
10/10/2001EP1143045A1 Silicon single-crystal wafer for epitaxial wafer, epitaxial wafer, methods for producing them, and evaluating method
10/10/2001EP1143036A2 Apparatus and method for controlling the temperature of a wall of a reaction chamber
10/10/2001EP1143035A2 Apparatus and method for controlling the temperature of a wall of a reaction chamber
10/10/2001EP1142894A2 Volatile precursors for deposition of metals and metal-containing films
10/10/2001EP1142849A1 Silicon nitride composite substrate
10/10/2001EP1142832A1 Ionic additives for extreme low dielectric constant chemical formulations
10/10/2001EP1142672A1 Grinding slurry recycling apparatus
10/10/2001EP1142461A2 Device for increasing heat transfer
10/10/2001EP1142119A1 On-chip decoupling capacitor system with parallel fuse
10/10/2001EP1142027A1 Reduced diffusion of a mobile specie from a metal oxide ceramic
10/10/2001EP1142023A1 Peripheral structure for monolithic power device
10/10/2001EP1142021A1 Reduced diffusion of a mobile ion from a metal oxide ceramic into the substrate
10/10/2001EP1142020A1 Cmos high-to-low voltage buffer
10/10/2001EP1142019A1 Circuit assembly with at least one nanoelectronic component and method for producing the same
10/10/2001EP1142018A1 Semiconductor device having shared gate electrode and fabrication thereof
10/10/2001EP1142017A1 Method for producing a semiconductor component with wiring partly extending in the substrate and semiconductor component produced according to said method
10/10/2001EP1142016A1 A polysilicon resistor and a method of producing it
10/10/2001EP1142014A1 Peripheral transistor of a non-volatile memory
10/10/2001EP1142013A1 Method for producing a buried material layer in another material
10/10/2001EP1142012A1 Method of fabricating a high power rf field effect transistor with reduced hot electron injection and resulting structure
10/10/2001EP1142011A1 Devices with graded top oxide and graded drift region
10/10/2001EP1142010A2 Epitaxial silicon wafer with intrinsic gettering and method for the preparation thereof
10/10/2001EP1142009A1 Semiconductor fabrication processes
10/10/2001EP1142008A1 Reduced degradation of metal oxide ceramic due to diffusion of a mobile specie therefrom
10/10/2001EP1142007A1 System and method for surface passivation
10/10/2001EP1142006A1 Bpsg reflow method
10/10/2001EP1142005A1 Arrangement and method for detecting the end of life of an aqueous bath utilized in semiconductor processing
10/10/2001EP1142004A1 Method for boron doping wafers using a vertical oven system
10/10/2001EP1142003A1 Method for storing carrier for polishing wafer
10/10/2001EP1142002A1 Apparatus for processing wafers
10/10/2001EP1142001A1 Fast heating and cooling apparatus for semiconductor wafers
10/10/2001EP1142000A1 Transport device
10/10/2001EP1141999A1 Heating device for heating semiconductor wafers in thermal processing chambers
10/10/2001EP1141995A1 Array of multiple charged particle beamlet emitting columns
10/10/2001EP1141961A1 Integrated circuit with a non-volatile mos ram cell
10/10/2001EP1141960A1 Read/write architecture for a mram
10/10/2001EP1141868A2 Mechanisms for making and inspecting reticles
10/10/2001EP1141867A2 Method and arrangement for verifying the layout of an integrated circuit with the aid of a computer and use thereof in the production of an integrated circuit
10/10/2001EP1141801A1 Method and apparatus for synchronizing a substrate processing system
10/10/2001EP1141793A1 Method and apparatus for controlling a system using hierarchical state machines
10/10/2001EP1141782A1 Using block copolymers as supercritical fluid developable photoresists
10/10/2001EP1141781A1 Large-apertured projection lens with minimal diaphragm error
10/10/2001EP1141779A1 Method for depositing photoresist onto a substrate
10/10/2001EP1141778A1 Novolac polymer planarization films with high temperature stability
10/10/2001EP1141777A2 Photoresists and processes for microlithography
10/10/2001EP1141775A1 Multilayer attenuating phase-shift masks
10/10/2001EP1141735A2 Test method and assembly including a test die for testing a semiconductor product die
10/10/2001EP1141611A1 System for conveying liquids without pulsing
10/10/2001EP1141444A1 Novel composition for selective etching of oxides over metals
10/10/2001EP1141439A2 Distributed control system architecture and method for a material transport system
10/10/2001EP1141128A1 A composition containing a cross-linkable matrix precursor and a poragen, and a porous matrix prepared therefrom
10/10/2001EP1141116A1 Conductive, low warp polyetherimide resin compositions
10/10/2001EP1141073A1 Electronic circuit device comprising an epoxy-modified aromatic vinyl-conjugated diene block copolymer
10/10/2001EP0970267B1 Susceptor designs for silicon carbide thin films
10/10/2001EP0868745B1 Method of producing a neuron mos transistor on the basis of a cmos process
10/10/2001EP0788027B1 Phase shift mask blank and production method therefor
10/10/2001EP0766870B1 Method of manufacturing a progammable semiconductor device in the form of an anti-fuse
10/10/2001EP0733267B1 Wafer heating chuck with dual zone backplane heating and segmented clamping member
10/10/2001CN1317225A Laminates for encapsulating devices
10/10/2001CN1317224A Interconnect assembly for printed circuit boards and manufacturing method thereof
10/10/2001CN1317155A Zinc oxide films containing P-type dopant and process for preparing same
10/10/2001CN1317154A Device packaging
10/10/2001CN1317152A Process for preparing ideal oxygen precipitating silicon wafer
10/10/2001CN1317151A Microelectronic structure, production method thereof and use in the storage cell
10/10/2001CN1317150A Vapor deposition routes to nanoporous silica
10/10/2001CN1317149A Non-uniform minority carrier lifetime distribution in high performance silicon power devices
10/10/2001CN1317147A Method and apparatus for reducing contamination of substrate in substrate processing system
10/10/2001CN1317141A Magnetoresistive element and use of same as storage element in storage system
10/10/2001CN1317127A Security system
10/10/2001CN1317106A Active matrix liquid crystal display and method for producing the same
10/10/2001CN1317056A Cvd装置 Cvd device
10/10/2001CN1316940A Polishing pad for semiconductor substrate
10/10/2001CN1316939A Polishing pad for semiconductor substrate
10/10/2001CN1316872A Panel and its making method and installation method for electronic circuit component
10/10/2001CN1316783A Semiconductor device and manufacturing method thereof and its used semconductor device substrate
10/10/2001CN1316781A Silicon insulator structure semiconductor device
10/10/2001CN1316778A Resine moulded unit including electronic circuit component
10/10/2001CN1316777A Electromagnetic noise eliminator, semiconductor device using the eliminator and making method thereof
10/10/2001CN1316774A Manufacturing method of structured metalliferous oxide coating
10/10/2001CN1316773A Method for guiding cracking on ceamic thick-film circuit
10/10/2001CN1316771A Reflection interference type longitudinal electric field detector for electro-optical organic material
10/10/2001CN1316770A Process for preparing polysilicon film
10/10/2001CN1316769A Semiconductor manufacturing technology and semiconductor device manufacturing technology
10/10/2001CN1316768A Control for supplying level of semiconductor chip polishing size
10/10/2001CN1316767A Semiconductor manufacturing technology and semiconductor device manufacturing technology
10/10/2001CN1316746A Multidigit magnetic memory element
10/10/2001CN1316715A Analytical method for testing software tool
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