Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2001
10/09/2001US6300224 Methods of dicing semiconductor wafer into chips, and structure of groove formed in dicing area
10/09/2001US6300223 Method of forming die seal structures having substrate trenches
10/09/2001US6300221 Method of fabricating nanoscale structures
10/09/2001US6300220 Process for fabricating isolation structure for IC featuring grown and buried field oxide
10/09/2001US6300219 Method of forming trench isolation regions
10/09/2001US6300218 Method for patterning a buried oxide thickness for a separation by implanted oxygen (simox) process
10/09/2001US6300217 Vpor deposition, a substrate, setting the temperature and crystallizing
10/09/2001US6300216 Capacitor structure formed in semiconductor device, multilayer dielectric of yttrium barium copper oxide
10/09/2001US6300215 Methods of forming integrated circuit capacitors having composite titanium oxide and tantalum pentoxide dielectric layers therein
10/09/2001US6300214 Semiconductor processing methods of forming capacitor arrays on a substrate
10/09/2001US6300213 Semiconductor processing methods of forming a storage node of a capacitor
10/09/2001US6300212 Method of fabricating semiconductor device having memory capacitor including ferroelectric layer made of composite metal oxide
10/09/2001US6300211 Highly reliable trench capacitor type memory cell
10/09/2001US6300210 Method of manufacturing a semiconductor device comprising a bipolar transistor
10/09/2001US6300209 Method of fabricating triple well of semiconductor device using SEG
10/09/2001US6300208 Methods for annealing an integrated device using a radiant energy absorber layer
10/09/2001US6300207 Depleted sidewall-poly LDD transistor
10/09/2001US6300206 Method for manufacturing semiconductor device
10/09/2001US6300205 Method of making a semiconductor device with self-aligned active, lightly-doped drain, and halo regions
10/09/2001US6300204 Semiconductor processing methods of forming integrated circuitry, conductive lines, a conductive grid, a conductive network, an electrical interconnection to a node location, and an electrical interconnection with a transistor source/drain region
10/09/2001US6300203 Electrolytic deposition of dielectric precursor materials for use in in-laid gate MOS transistors
10/09/2001US6300202 Selective removal of a metal oxide dielectric
10/09/2001US6300201 Method to form a high K dielectric gate insulator layer, a metal gate structure, and self-aligned channel regions, post source/drain formation
10/09/2001US6300200 Device fabrication method for a non-volatile memory device used for non-overlapping implant
10/09/2001US6300199 Method of defining at least two different field effect transistor channel lengths using differently angled sidewall segments of a channel defining layer
10/09/2001US6300198 Method for producing a vertical MOS-transistor
10/09/2001US6300197 Method of fabricating semiconductor device
10/09/2001US6300196 Method of fabricating gate
10/09/2001US6300195 Process for manufacturing semiconductor integrated memory devices with cells matrix having virtual ground
10/09/2001US6300194 Method for manufacturing semiconductor integrated electronic memory devices having a virtual ground cells matrix
10/09/2001US6300192 Method for fabricating a DRAM cell capacitor using hemispherical grain (HSG) silicon
10/09/2001US6300191 Method of fabricating a capacitor under bit line structure for a dynamic random access memory device
10/09/2001US6300190 Method for fabricating semiconductor integrated circuit device
10/09/2001US6300189 Method for forming a metal capacitor
10/09/2001US6300188 Fabrication process for reduced area storage node junction
10/09/2001US6300187 Capacitor electrodes, silicon nitride, chlorine, layers and oxidization
10/09/2001US6300186 Method of measuring semiconductor device
10/09/2001US6300185 Polyacrystalline silicon film formation method
10/09/2001US6300184 Method of manufacturing a CMOS transistor
10/09/2001US6300183 Independently programmable memory segments within a PMOS electrically erasable programmable read only memory array achieved by N-well separation and method therefor
10/09/2001US6300182 Field effect transistor having dual gates with asymmetrical doping for reduced threshold voltage
10/09/2001US6300180 Method for forming an integrated circuit having improved polysilicon resistor structures
10/09/2001US6300179 Gate device with access channel formed in discrete post and method
10/09/2001US6300178 Semiconductor device with self-aligned contact and manufacturing method thereof
10/09/2001US6300177 Method to form transistors with multiple threshold voltages (VT) using a combination of different work function gate materials
10/09/2001US6300176 Laser processing method
10/09/2001US6300175 Method for fabricating thin film transistor
10/09/2001US6300174 Liquid crystal panel having a thin film transistor for driver circuit and a method for fabricating thereof
10/09/2001US6300173 Method and device relating to semiconductor components
10/09/2001US6300172 Method of field isolation in silicon-on-insulator technology
10/09/2001US6300171 Method of manufacturing an integrated edge structure for high voltage semiconductor devices, and related integrated edge structure
10/09/2001US6300169 Method for manufacturing a pressure sensor
10/09/2001US6300167 Semiconductor device with flame sprayed heat spreading layer and method
10/09/2001US6300166 Method for packaging a BGA and the structure of a substrate for use with the method
10/09/2001US6300163 Stacked leads-over-chip multi-chip module
10/09/2001US6300162 Method of applying a protective layer to a microelectronic component
10/09/2001US6300159 Method for producing semiconductor device and photodetector device
10/09/2001US6300157 Solid state image sensor and method for fabricating the same
10/09/2001US6300155 Method for producing semiconductor device by coating
10/09/2001US6300153 Metal organic vapor phase epitaxy and method for manufacturing semiconductor laser device
10/09/2001US6300149 Integrated circuit device manufacture
10/09/2001US6300148 Semiconductor structure with a backside protective layer and backside probes and a method for constructing the structure
10/09/2001US6300147 Method of inspecting semiconductor substrate
10/09/2001US6300144 Method for fabricating ferro-electric thin films using a sol-gel technique
10/09/2001US6300043 Controlling and reducing thickness prior to photolithographic exposure; applying acidic solution to resist film to make alkali soluble; dissolving
10/09/2001US6300036 Copolymer of maleic anhydride and 2-norbornene-5-methanol derivative; accurate patterns when exposed to argon fluoride lasers; dry etching resistance
10/09/2001US6300035 Chemically amplified positive photoresists
10/09/2001US6300033 Positive photoresist composition and process for forming resist pattern
10/09/2001US6300023 Microlithographic pattern-transfer methods for large segmented reticles, and device manufacturing methods using same
10/09/2001US6300020 Ball-shaped device exposure apparatus and ball-shaped device manufacturing method
10/09/2001US6300018 Photolithography mask having a subresolution alignment mark window
10/09/2001US6299982 Silicon single crystal wafer and method for producing silicon single crystal wafer
10/09/2001US6299938 Apparatus and method of applying resist
10/09/2001US6299932 Lead frame processing method and apparatus
10/09/2001US6299788 With hbr, he and he/o2 as reactive gas source; chamber pressure greater than 30 mtorr is held to achieve high selectivity to polysilicon over silicon oxide.
10/09/2001US6299785 Electrode formation process
10/09/2001US6299753 A fluid delivery system with particular application to electroplating.
10/09/2001US6299751 Apparatus and method for plating wafers, substrates and other articles
10/09/2001US6299749 Method of fabricating an electrical component
10/09/2001US6299741 Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus
10/09/2001US6299739 Method of forming metal wiring film
10/09/2001US6299725 Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor
10/09/2001US6299724 Direct vapor delivery of enabling chemical for enhanced HF etch process performance
10/09/2001US6299723 Anti-airlock apparatus for filters
10/09/2001US6299722 First gas supply means for supplying an o2 gas; second gas supply means for supplying a halogen-containing gas; switching means for switching supply by the first gas supply means to a gas supply by the second gas supply means
10/09/2001US6299698 Wafer edge scrubber and method
10/09/2001US6299697 Processing substrate with mixture of sulfuric acid and first hydrogen peroxide solution, supplying second hydrogen peroxide solution alone to substrate, rinsing substrate after supplying second solution for predetermined time period
10/09/2001US6299696 Substrate processing apparatus and substrate processing method
10/09/2001US6299693 Method and apparatus for aligning a wafer chuck in a semiconductor wafer processing procedure
10/09/2001US6299692 Head for vaporizing and flowing various precursor materials onto semiconductor wafers during chemical vapor deposition
10/09/2001US6299691 Method of and apparatus for processing a substrate under a reduced pressure
10/09/2001US6299689 Reflow chamber and process
10/09/2001US6299683 Method and apparatus for the production of SiC by means of CVD with improved gas utilization
10/09/2001US6299514 Double-disk polishing machine, particularly for tooling semiconductor wafers
10/09/2001US6299513 Method of fabricating a semiconductor device
10/09/2001US6299511 Chemical mechanical polishing conditioner
10/09/2001US6299506 Polishing apparatus including holder and polishing head with rotational axis of polishing head offset from rotational axis of holder and method of using
10/09/2001US6299456 Interposer with contact structures for electrical testing
10/09/2001US6299404 Substrate transport apparatus with double substrate holders
10/09/2001US6299363 Substrate processing apparatus
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