Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2001
10/04/2001US20010027082 Cluster tool systems and methods for in fab wafer processing
10/04/2001US20010027080 Method and apparatus for determining polishing endpoint with multiple light sources
10/04/2001US20010027053 Electrical contact method and apparatus in semiconductor device inspection equipment
10/04/2001US20010027031 MOCVD method of tantalum oxide film
10/04/2001US20010027030 Method for cleaning a process chamber
10/04/2001US20010027029 Thin-film patterning method, manufacturing method of thin-film device and manufacturing method of thin-film magnetic head
10/04/2001US20010027028 Stock/transfer vessel for semiconductor substrate and method of manufacturing semiconductor device
10/04/2001US20010027027 Ferroelectric random access memory device and method for manufacture thereof
10/04/2001US20010027026 Gas distribution apparatus for semiconductor processing
10/04/2001US20010027024 Method of forming a polycide electrode in a semiconductor device
10/04/2001US20010027023 Organic substance removing methods, methods of producing semiconductor device, and organic substance removing apparatuses
10/04/2001US20010027022 Methods of forming materials over uneven surface topologies, and methods of forming insulative materials over and between conductive lines
10/04/2001US20010027021 Method for patterning semiconductor devices on a silicon substrate using oxynitride film
10/04/2001US20010027020 Semiconductor device, method of fabricating the same, and sputtering apparatus
10/04/2001US20010027019 Pattern forming method
10/04/2001US20010027018 Polishing; using mixture of oxidizer and copper compound
10/04/2001US20010027017 Minimizing metal corrosion during post metal solvent clean
10/04/2001US20010027016 Oxygen free plasma stripping process
10/04/2001US20010027015 Ion-implanting method and ion-implanting apparatus
10/04/2001US20010027014 Method of fabricating interconnect
10/04/2001US20010027013 Method for forming conductor members, manufacturing method of semiconductor element and manufacturing method of thin-film magnetic head
10/04/2001US20010027012 Method for fabricating a contact layer
10/04/2001US20010027011 Semiconductor device and manufacturing method therefor, circuit board, and electronic equipment
10/04/2001US20010027010 Method to reduce the damages of copper lines
10/04/2001US20010027009 Method of fabricating semiconductor device
10/04/2001US20010027008 Method for forming interconnect structure in semiconductor device
10/04/2001US20010027007 Semiconductor device having bump electrodes and method of manufacturing the same
10/04/2001US20010027006 Semiconductor device and method for fabricating the same
10/04/2001US20010027005 Semiconductor device and method for fabricating the device
10/04/2001US20010027004 Semiconductor device having capacitor and method of manufacturing the same
10/04/2001US20010027003 Dual damascene method for backened metallization using poly stop layers
10/04/2001US20010027002 Method for forming multi-layered interconnect structure
10/04/2001US20010027001 Method and apparatus for activating semiconductor impurities
10/04/2001US20010027000 Semiconductor processing methods of forming integrated circuitry and semiconductor processing methods of forming dynamic random access memory (DRAM) circuitry
10/04/2001US20010026999 Suppressing voltage oscillation without increasing forward voltage; reducing energy loss during reverse recovery operation
10/04/2001US20010026998 Methods of treating surfaces of substrates
10/04/2001US20010026997 Method and device for controlled cleaving process
10/04/2001US20010026996 Semiconductor device and process for producing the sme
10/04/2001US20010026995 Method of forming shallow trench isolation
10/04/2001US20010026994 Method for forming element isolating region
10/04/2001US20010026993 Method of fabricating an isolation structure in an integrated circuit
10/04/2001US20010026992 Semiconductor device and method for manufacturing the same
10/04/2001US20010026991 Semiconductor laser device and wire bonding method capable of easily performing reliable wire bonding
10/04/2001US20010026990 Method and semiconductor structure for implementing dual plane body contacts for silicon-on-insulator (SOI) transistors
10/04/2001US20010026989 Low voltage power MOSFET device and process for its manufacture
10/04/2001US20010026988 Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device
10/04/2001US20010026987 Method for forming a capacitor compatible with high dielectric constant materials having two independent insulative layers
10/04/2001US20010026986 Process for forming a silicon-germanium base of a heterojunction bipolar transistor
10/04/2001US20010026985 Fabrication method of submicron gate using anisotropic etching
10/04/2001US20010026984 Insulated gate bipolar transistor having high breakdown voltage in reverse blocking mode, and method for fabricating the same
10/04/2001US20010026983 Multi-voltage level semiconductor device and its manufacture
10/04/2001US20010026982 Method for fabricating semiconductor device using a cvd insulator film
10/04/2001US20010026981 Method for producing devices having piezoelectric films
10/04/2001US20010026980 Semiconductor device and a method of manufacturing the same
10/04/2001US20010026979 Method of performing threshold voltage adjustment for MOS transistors
10/04/2001US20010026978 Semiconductor device and method of manufacturing the same
10/04/2001US20010026977 Power semiconductor element capabale of improving short circuit withstand capability while maintaining low on-voltage and method of fabricating the same
10/04/2001US20010026976 Method of fabricating a semiconductor device
10/04/2001US20010026975 Method of manufacturing semiconductor device
10/04/2001US20010026974 Methods of forming capacitors and resultant capacitor structures
10/04/2001US20010026973 PIP capacitor for split-gate flash process
10/04/2001US20010026972 Integrated circuit device with MIM capacitance circuit and method of manufacturing the same
10/04/2001US20010026971 Method of manufacturing hetero-junction bipolar transistor
10/04/2001US20010026970 Method and circuit for minimizing the charging effect during manufacture of semiconductor devices
10/04/2001US20010026969 Hybrid device and a method of producing electrically active components by an assembly operation
10/04/2001US20010026968 Novel method for forming split-gate flash cell for salicide and self-align contact
10/04/2001US20010026965 Method of fabricating a thin film transistor
10/04/2001US20010026964 Method of manufacturing semiconductor device
10/04/2001US20010026963 Method and apparatus for manufacturing semiconductor devices
10/04/2001US20010026962 Top gate thin-film transistor and method of producing the same
10/04/2001US20010026961 Trench semiconductor device having gate oxide layer with multiple thicknesses and processes of fabricating the same
10/04/2001US20010026960 Process for forming low resistance metal silicide local interconnects
10/04/2001US20010026959 Method for making an encapsulated semiconductor chip module
10/04/2001US20010026958 Semiconductor device and method for manufacturing same
10/04/2001US20010026956 Fluorinated hard mask for micropattering of polymers
10/04/2001US20010026955 Flip chip thermally enhanced ball grid array
10/04/2001US20010026954 Semiconductor device and manufacturing method thereof
10/04/2001US20010026952 Forming conductive copper-containing material over substrate and barrier layer comprising methylated silicon nitride
10/04/2001US20010026951 Method for manufacturing integrated structures including removing a sacrificial region
10/04/2001US20010026950 Method of manufacturing a nitrogen-based semiconductor substrate and a semiconductor element by using the same
10/04/2001US20010026949 Semiconductor device manufacturing system and method of manufacturing semiconductor devices
10/04/2001US20010026948 Method for appraising the condition of a semiconductor polishing cloth
10/04/2001US20010026935 First and second column select transistors, the column select transistors being adapted for control by column selector, first and second row select transistors, being adapted for control by row selector, output connected to node
10/04/2001US20010026906 Process for manufacturing semiconductor device and exposure mask
10/04/2001US20010026905 A novolac resin, a radiation sensitive quinonediazide compound and a thioxanthone compound; used in fine processing of semiconductor integrated circuits
10/04/2001US20010026903 Composition for lithographic anti-reflection coating, and resist laminate using the same
10/04/2001US20010026897 For manufacturing a semiconductor integrated circuit or liquid display element; high precision
10/04/2001US20010026895 Alkali-soluble resin, photoacid generator, and dissolution inhibiting groups, increasing the sensitivity of the pattern formation material
10/04/2001US20010026873 Used in electronics and optoelectronics;
10/04/2001US20010026866 Anisotropically electroconductive adhesive material and connecting method
10/04/2001US20010026849 Depositing a silicon oxide film by oxidation of silicon compound, exposing to water or a hydrophobic-imparting surfactant such as hexamethyldisilazane and curing
10/04/2001US20010026847 Polyimidesiloxane copolymer
10/04/2001US20010026840 Aluminum ion vapor deposition chamber in argon gas voltage
10/04/2001US20010026839 Foaming insulating film under low pressure, drying, semiconductor; vacuum bubbles decrease relative dielectric constant
10/04/2001US20010026835 Two-step laser annealing at different wavelengths; crystalline thin film transister
10/04/2001US20010026778 Systems and methods for the active electronic control of biological reactions
10/04/2001US20010026749 Multi-position load lock chamber
10/04/2001US20010026748 Substrate transfer shuttle having a magnetic drive
10/04/2001US20010026747 Substrate transfer apparatus and substrate transfer method
10/04/2001US20010026691 Substrate process method and substrate process apparatus
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