Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2001
10/17/2001EP1145283A2 A method for measuring stress induced leakage current and gate dielectric integrity using corona discharge
10/17/2001EP1145280A2 Vacuum compliant door hinge
10/17/2001EP1145279A2 Semiconductor element and method for its production
10/17/2001EP1145277A1 Gas injection system for plasma processing
10/17/2001EP1145276A1 Method and apparatus for etch rate stabilization
10/17/2001EP1145275A1 Apparatus and method for monitoring and tuning an ion beam in ion implantation apparatus
10/17/2001EP1145274A1 Particle optical apparatus
10/17/2001EP1145273A2 Low contamination high density plasma etch chambers and methods for making the same
10/17/2001EP1145252A2 Epitaxial thin films
10/17/2001EP1145159A2 Block based design methodology
10/17/2001EP1145082A1 Reticle, wafer and method for determining an alignment error in a stepper
10/17/2001EP1145081A1 Method for determining rotational error portion of total misalignment error in a stepper
10/17/2001EP1145080A1 Reticle, wafer, measuring stepper and methods for preventative maintenance
10/17/2001EP1145079A2 Method for determining misalignment between a reticle and a wafer
10/17/2001EP1144987A1 Method of determining the charge carrier concentration in materials, notably semiconductors
10/17/2001EP1144976A1 Method of producing a micromechanical structure for a micro-electromechanical element
10/17/2001EP1144737A2 Production of bulk single crystals of aluminum nitride, silicon carbide and aluminum nitride:silicon carbide alloy
10/17/2001EP1144735A1 Method and apparatus for low energy electron enhanced etching and cleaning of substrates
10/17/2001EP1144718A1 Indium source reagent compositions
10/17/2001EP1144716A2 Cvd process using bi alcoxides
10/17/2001EP1144712A1 Multiple-thickness gate oxide formed by oxygen implantation
10/17/2001EP1144706A2 Method and device for the heat treatment of substrates
10/17/2001EP1144527A2 Chemical mechanical polishing slurry and method for using same
10/17/2001EP1144523A2 Preparations containing fine-particulate inorganic oxides
10/17/2001EP1144310A1 Mesoporous silica film from a solution containing a surfactant and methods of making same
10/17/2001EP1144198A1 Thermal transfer element for forming multilayer devices
10/17/2001EP1144158A2 Stiffly bonded thin abrasive wheel
10/17/2001EP1144155A2 Ultrasonic transducer slurry dispenser
10/17/2001EP1057388B1 Device for positioning electronic circuits arranged on a foil
10/17/2001EP0978093B1 Chip card, process for manufacturing a chip card and semiconductor chip for use in a chip card
10/17/2001EP0975821B1 Cvd reactor and use thereof
10/17/2001EP0852065B1 Interconnect scheme for integrated circuits
10/17/2001EP0827634B1 Floating gate non-volatile memory device, and a method of manufacturing the device
10/17/2001EP0820642B1 METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE HAVING A SEMICONDUCTOR LAYER OF SiC COMPRISING A MASKING STEP
10/17/2001EP0800205B1 Method of separating electronic components using a carrier film
10/17/2001EP0795084B1 Getter pump module and system
10/17/2001EP0777902B1 Electrically erasable and programmable read only memory with non-uniform dielectric thickness
10/17/2001EP0751397B1 Test mode setting circuit of test circuit for semiconductor memory
10/17/2001EP0745275B1 Diode device to protect metal-oxide-metal capacitors
10/17/2001EP0698286B1 A virtual-ground flash eprom array with reduced cell pitch in the x direction
10/17/2001EP0682812B1 Thermally conductive integrated circuit package with radio frequency shielding
10/17/2001EP0668616B1 Insulated gate semiconductor device and manufacturing method thereof
10/17/2001EP0591342B1 Basic cell architecture for mask programmable gate array
10/17/2001CN2454076Y Target-form design of automatic target drilling machine of laser-ray apparatus for polycarbonate board
10/17/2001CN1318208A Lateral thin-film silicon-on-insulator (SOI) device having gate electrode and field palte electrode
10/17/2001CN1318207A Methods and appts. for electropolishing metal intennections on semiconductor devices
10/17/2001CN1318206A Method of dicing semiconductor wafer into chips, and structure of groove formed in dicing area
10/17/2001CN1318202A Method of mfg. magnetic tunnel junction device
10/17/2001CN1318198A Magnetoresistive memory having improved interference immunity
10/17/2001CN1318157A Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithography
10/17/2001CN1318011A Compsite wire with noble metal cladding
10/17/2001CN1318005A Solder ball placement appts.
10/17/2001CN1317997A Electroless metal deposition of electronic components in enclosable vessel
10/17/2001CN1317876A Terminal conjunction method, sonic surface wave device and and mfg. method for sonic surface wave device
10/17/2001CN1317834A Semiconductor device and mfg. method thereof
10/17/2001CN1317833A SEmiconductor device and mfg. method thereof
10/17/2001CN1317832A Dual-heterojunction CaAsSb/Inp transistor and its preparing process
10/17/2001CN1317830A Semiconductor device and driving method thereof
10/17/2001CN1317829A High frequency current inhibiting type electronic component and its conjunction wire
10/17/2001CN1317827A Semiconductor and liquid crystal module of utilizing semiconductor
10/17/2001CN1317826A Plastic netted array structure and its preparing process
10/17/2001CN1317825A Electroplating appts.
10/17/2001CN1317800A Improved memory unit programming method
10/17/2001CN1317725A Optical component keeper of exposure equipment
10/17/2001CN1317389A Wire welding tech. for copper metallized integrated circuit
10/17/2001CN1073285C 非易失性半导体存储器件 Non-volatile semiconductor memory device
10/17/2001CN1073284C 半导体器件 Semiconductor devices
10/17/2001CN1073283C Lead-on-chip lead frame
10/17/2001CN1073281C Semiconductor device and its making method
10/17/2001CN1073280C Method of making MOS transistor having LDD
10/17/2001CN1073279C Method for fabricating semiconductor device
10/17/2001CN1073008C Method and installation for encasing articles
10/17/2001CN1072998C Polishing machine with improved polishing pad structure
10/16/2001US6305002 Semiconductor integrated circuit having thereon on-chip capacitors
10/16/2001US6304999 Method and apparatus for embedded process control framework in tool systems
10/16/2001US6304792 Separation of a multi-layer integrated circuit device and package
10/16/2001US6304791 Method for controlling semiconductor equipment interlocked with a host computer
10/16/2001US6304630 Method of generating EUV radiation, method of manufacturing a device by means of said radiation, EUV radiation source unit, and lithographic projection apparatus provided with such a radiation source unit
10/16/2001US6304508 Semiconductor device
10/16/2001US6304494 Semiconductor device with decreased power consumption
10/16/2001US6304493 Single electron MOSFET memory device and method
10/16/2001US6304485 Flash EEprom system
10/16/2001US6304484 Multi-bit flash memory cell and programming method using the same
10/16/2001US6304480 Read only memory integrated semiconductor device
10/16/2001US6304478 Layout for a semiconductor memory
10/16/2001US6304424 Method and apparatus for minimizing plasma destabilization within a semiconductor wafer processing system
10/16/2001US6304385 Laser irradiation apparatus and method
10/16/2001US6304318 Lithography system and method of manufacturing devices using the lithography system
10/16/2001US6304117 Variable delay circuit and semiconductor integrated circuit device
10/16/2001US6304112 Integrated circuit provided with a fail-safe mode
10/16/2001US6304110 Buffer using dynamic threshold-voltage MOS transistor
10/16/2001US6304100 Programmable semiconductor device providing security of circuit information
10/16/2001US6304095 Semiconductor measurement instrument with the capability to dynamically change examination criteria
10/16/2001US6304093 transportation and active temperature control of integrated circuits for test
10/16/2001US6304073 IC testing apparatus
10/16/2001US6304051 Self teaching robotic carrier handling system
10/16/2001US6304005 Power supply apparatus and method, and fabrication apparatus
10/16/2001US6304001 Semiconductor device with alignment mark and manufacturing method thereof
10/16/2001US6304000 Semiconductor device comprising silicone adhesive sheet
10/16/2001US6303999 Interconnect structure with a passivation layer and chip pad