H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2001
10/18/2001	US20010031425 Before wet etching, surface treating by novolak coating, base treatment, or irradiating the patterned chemical amplification resist layer to form an insoluble layer on the resist layer, improving wet etching resistance
10/18/2001	US20010031420 Partially crosslinked polymer for bilayer photoresist
10/18/2001	US20010031419 Photosensitive polymer composition, method for forming relief patterns, and electronic parts
10/18/2001	US20010031385 Group III-V compound semiconductor and method of producing the same
10/18/2001	US20010031374 Magnetic film having a magnetic easy-axis or a multiple easy-axis and a method of manufacturing the magnetic film
10/18/2001	US20010031321 Film forming method in which flow rate is switched
10/18/2001	US20010031229 UV-enhanced, in-line, infrared phosphorous diffusion furnace
10/18/2001	US20010031191 Supporting system in exposure apparatus
10/18/2001	US20010031147 Substrate process method and substrate process apparatus
10/18/2001	US20010030981 157 nm laser system and method for multi-layer semiconductor failure analysis
10/18/2001	US20010030901 semiconductor integrated circuit device having fuses and fuse latch circuits
10/18/2001	US20010030894 Integrated memory with plate line segments
10/18/2001	US20010030886 Magnetoresistive memory with a low current density
10/18/2001	US20010030884 Read/write amplifier having vertical transistors for a DRAM memory
10/18/2001	US20010030846 Methods of forming capacitors having a polymer on a portion thereof that inhibits the formation of hemispherical grain (HSG) nodules on that portion and capacitors formed thereby
10/18/2001	US20010030845 Capacitor Constructions
10/18/2001	US20010030739 Exposure apparatus
10/18/2001	US20010030704 Semiconductor device and method of driving the same
10/18/2001	US20010030591 Integrated inductor
10/18/2001	US20010030553 Method and apparatus for inspecting semiconductor device
10/18/2001	US20010030552 Conductive material for integrated circuit fabrication
10/18/2001	US20010030550 Methods of forming apparatuses and a method of engaging electrically conductive test pads on a semiconductor substrate
10/18/2001	US20010030522 Guideless stage with isolated reaction stage
10/18/2001	US20010030382 Ultra mold for encapsulating very thin packages
10/18/2001	US20010030372 Semiconductor memory device and method of fabricating the same
10/18/2001	US20010030371 High density flip chip memory arrays
10/18/2001	US20010030370 Microelectronic assembly having encapsulated wire bonding leads
10/18/2001	US20010030369 Methods and apparatus for forming a film on s substrate
10/18/2001	US20010030368 Semiconductor device and fabrication method
10/18/2001	US20010030367 Semiconductor integrated circuit device and fabrication method for semiconductor integrated circuit device
10/18/2001	US20010030366 Semiconducting system and production method
10/18/2001	US20010030365 Damascene wiring structure and semiconductor device with damascene wirings
10/18/2001	US20010030364 High voltage generating circuit improved in parasitic capacitance of voltage-dividing resistance
10/18/2001	US20010030363 Conductive connection forming methods, oxidation reducing methods, and integrated circuits formed thereby
10/18/2001	US20010030355 Saw-singulated leadless plastic chip carrier
10/18/2001	US20010030354 MOS-type semiconductor device and method for making same
10/18/2001	US20010030352 Method for increasing the capacitance in a storage trench and trench capacitor having increased capacitance
10/18/2001	US20010030351 Low temperature process for forming intermetal gap-filling insulating layers in silicon wafer integrated circuitry
10/18/2001	US20010030350 MIS transistor and method for producing same
10/18/2001	US20010030349 Method of gate doping by ion implantation
10/18/2001	US20010030348 Silcon on insulator structrue having a low defect density handler wafer and process for the preparation thereof
10/18/2001	US20010030345 MOS transistor
10/18/2001	US20010030344 Semiconductor device and method for manufacturing the same
10/18/2001	US20010030343 Eeprom cell with tunneling across entire separated channels
10/18/2001	US20010030342 Semiconductor device and process for producing the same
10/18/2001	US20010030341 Virtual-ground, split-gate flash memory cell arrangements and method for producing same
10/18/2001	US20010030340 Nonvolatile semiconductor memory device and process of production and write method thereof
10/18/2001	US20010030339 Method of forming a capacitor and a capacitor construction
10/18/2001	US20010030338 Vertical gain cell and array for a dynamic random access memory and method for forming the same
10/18/2001	US20010030337 Memory cell with trench, and method for production thereof
10/18/2001	US20010030336 Semiconductor device with stack electrode formed using HSG growth
10/18/2001	US20010030335 Non-volatile high-performance memory device and relative manufacturing process
10/18/2001	US20010030334 Wiring for semiconductor device and method for forming the same
10/18/2001	US20010030333 Process of forming an ultra-shallow junction dopant layer having a peak concentration within a dielectric layer
10/18/2001	US20010030332 CMOS image sensor and manufacturing method of the same
10/18/2001	US20010030331 Semiconductor switching device and method of controlling a carrier lifetime in a semiconductor switching device
10/18/2001	US20010030330 High speed semiconductor photodetector and method of fabricating same
10/18/2001	US20010030323 Thin film semiconductor apparatus and method for driving the same
10/18/2001	US20010030322 Semiconductor device and method of manufacturing the same
10/18/2001	US20010030316 Nitride based semiconductor device and method of forming the same
10/18/2001	US20010030315 Aqueous solution of a triazole compound
10/18/2001	US20010030300 Method of inspecting pattern and apparatus thereof
10/18/2001	US20010030296 Surface inspection apparatus and method thereof
10/18/2001	US20010030294 Method and an apparatus of an inspection system using an electron beam
10/18/2001	US20010030293 Method for adjusting frequency of electronic component
10/18/2001	US20010030292 Method of crystallising a semiconductor film
10/18/2001	US20010030289 Methods, based on a genetic algorithm, for configuring parameters of an array of multiple components for cooperative operation to achieve a desired performance result
10/18/2001	US20010030184 Continuous-conduction wafer bump reflow system
10/18/2001	US20010030169 Method of etching organic film and method of producing element
10/18/2001	US20010030144 Chip tray
10/18/2001	US20010030143 Semiconductor wafer accommodating jig, handling method and production system
10/18/2001	US20010030125 PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter
10/18/2001	US20010030124 Support surface, flange
10/18/2001	US20010030123 Sputtering method utilizing an extended plasma region
10/18/2001	US20010030101 Modular semiconductor workpiece processing tool
10/18/2001	US20010030061 Surface-mounting substrate and structure comprising substrate and part mounted on the substrate
10/18/2001	US20010030059 Circuit component built-in module, radio device having the same, and method for producing the same
10/18/2001	US20010030024 Plasma-enhanced processing apparatus
10/18/2001	US20010030022 Connecting integrated circuits; blend of thermoplastic resin and curing agent
10/18/2001	US20010030013 Method and structure to reduce low force pin pull failures in ceramic substrates
10/18/2001	US20010029978 Photovoltaic element and method for manufacture thereof
10/18/2001	US20010029971 Inverted pressure vessel with shielded closure mechanism
10/18/2001	US20010029965 Contacting surface with oxidizing soluton, rinsing surface with solution to remove and inhibit further activity of oxidizing solution, exposing surface to oxide removal vapor comprising hydrogen halide vapor to remove oxide
10/18/2001	US20010029964 Method and apparatus for removing particles from surface of article
10/18/2001	US20010029938 Semiconductor wafer cutting machine
10/18/2001	US20010029895 Ceramic heater device and film forming device using the same
10/18/2001	US20010029894 Reacting fibrous materials with chemical digesting solution in presence of organosilicon compounds selected from specified organopolysiloxane compounds or organosilane compounds to produce pulp
10/18/2001	US20010029892 Vertical plasma enhanced process apparatus & method
10/18/2001	US20010029891 Apparatus and method for forming ultra-thin film of semiconductor device
10/18/2001	US20010029890 Heat treatment method, heat treatment apparatus and treatment system
10/18/2001	US20010029889 Combination differential and absolute pressure transducer for load lock control
10/18/2001	US20010029888 Method for improved chamber bake-out and cool-down
10/18/2001	US20010029885 Apparatus for spin-coating semiconductor substrate and method of doing the same
10/18/2001	US20010029884 Method for producing a single-crystalline film
10/18/2001	US20010029820 Method and device for separating products, mounted on a common substrate, from each other along (a) cutting lines(s)
10/18/2001	US20010029755 Method of forming an alignment marker for optical devices
10/18/2001	US20010029683 System and method for controlling a vapor dryer process
10/18/2001	US20010029681 Apparatus and method for cleaning a vertical furnace pedestal and cap
10/18/2001	US20010029667 Method of forming interconnection wire
10/18/2001	US20010029666 Printed-circuit board having projection electrodes and method for producing the same

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