H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2001
10/11/2001	US20010029100 Microelectronic Contacts
10/11/2001	US20010029099 Thick copper layer is deposited by disproportionation caused by water which is added to the stabilized cuprous ion solution, hydration energy of cupric ions increased causing cuprous ion disproportionate into cupric and solid copper
10/11/2001	US20010029098 Process for fabricating semiconductor device and apparatus for fabricating semiconductor device
10/11/2001	US20010029097 Method of forming a self-aligned contact opening
10/11/2001	US20010029096 Version with markings to show changes made
10/11/2001	US20010029094 Semiconductor device fabrication method using an interface control layer to improve a metal interconnection layer
10/11/2001	US20010029093 Method of manufacturing semiconductor device and semiconductor device
10/11/2001	US20010029092 Method for forming aluminum oxide as a gate dielectric
10/11/2001	US20010029091 Method for manufacturing an electronic device comprising an organic- containing material
10/11/2001	US20010029090 Dissolving barium, strontium, and titanium dipivaloyl compounds in an organic solvent, vaporizing, depositing to form barium strontium titanium oxide coating
10/11/2001	US20010029088 Method and apparatus for separating semiconductor elements, and mounting method of semiconductor elements
10/11/2001	US20010029086 Semiconductor device, method for fabricating the same and method for fabricating semiconductor substrate
10/11/2001	US20010029085 Methods of forming field oxide and active area regions on a semiconductor substrate
10/11/2001	US20010029084 Thermal conductivity enhanced semiconductor structures and fabrication processes
10/11/2001	US20010029083 Method for forming shallow trench isolation structure
10/11/2001	US20010029081 Method for producing semiconductor device
10/11/2001	US20010029080 Method of processing metal and method of manufacturing semiconductor device using the metal
10/11/2001	US20010029079 Semiconductor device with multiple emitter contact plugs
10/11/2001	US20010029078 Semiconductor apparatus, manufacturing method therefor, solid state image device and manufacturing method therefor
10/11/2001	US20010029077 Ultra high density flash memory
10/11/2001	US20010029075 Non-volatile memory device and manufacturing method thereof
10/11/2001	US20010029074 Semiconductor device and process of producing the same
10/11/2001	US20010029073 Double recessed transistor
10/11/2001	US20010029072 Method of recycling a delaminated wafer and a silicon wafer used for the recycling
10/11/2001	US20010029070 Semiconductor device and manufacturing method thereof
10/11/2001	US20010029069 Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same
10/11/2001	US20010029068 Semiconductor device structure including a tantalum pentoxide layer sandwiched between silicon nitride layers
10/11/2001	US20010029067 Semiconductor device and manufacturing method thereof
10/11/2001	US20010029066 Method for planarizing circuit board and method for manufacturing semiconductor device
10/11/2001	US20010029064 Method and apparatus for separating semiconductor elements, and mounting method of semiconductor elements
10/11/2001	US20010029062 Semiconductor device, method of making the same, circuit board, and film carrier tape
10/11/2001	US20010029061 Insulator/metal bonding island for active-area silver epoxy bonding
10/11/2001	US20010029059 Chip photoelectric sensor assembly and method for making same
10/11/2001	US20010029058 Method for producing optically planar surfaces for micro-electromechanical system devices
10/11/2001	US20010029057 Method of making a TFT array with photo-imageable insulating layer over address lines
10/11/2001	US20010029055 Method of manufacturing array substrate for display device and method of manufacturing display device
10/11/2001	US20010029054 Method for manufacturing electro-optic element
10/11/2001	US20010029053 Capacitor containing amorphous and polycrystalline ferroelectric films and fabrication method therefor, and method for forming amorphous ferroelectric film
10/11/2001	US20010029052 Semiconductor memory device and manufacturing method thereof
10/11/2001	US20010028998 For an exposure lens in semiconductor lithography; leaves/sheets adjust opening
10/11/2001	US20010028991 Semiconductors; integrated circuits; lasers
10/11/2001	US20010028989 Pattern formation material and method
10/11/2001	US20010028984 Electron beam exposure mask and pattern designing method thereof
10/11/2001	US20010028982 Fluorine doped molybdenum silicide film
10/11/2001	US20010028981 Data processing apparatus, method and program product for compensating for photo proximity effect with reduced data amount, and photomask fabricated using same
10/11/2001	US20010028924 Sequential chemical vapor deposition
10/11/2001	US20010028923 Vapor deposition
10/11/2001	US20010028922 Vapor deposition
10/11/2001	US20010028872 Multilayer
10/11/2001	US20010028734 System and method for selection of a reference die
10/11/2001	US20010028666 Semiconductor light emitting device, method of producing the same, and optical device
10/11/2001	US20010028595 Semiconductor memory device having a word line activation block
10/11/2001	US20010028588 Semiconductor memory
10/11/2001	US20010028582 Ferroelectric memory element
10/11/2001	US20010028578 Method and apparatus for providing an embedded flash-EEPROM technology
10/11/2001	US20010028577 Split-gate flash cell for virtual ground architecture
10/11/2001	US20010028544 Chip capacitor, a fabrication method for the same, and a metal mold
10/11/2001	US20010028495 Compositions and methods involving direct write optical lithography
10/11/2001	US20010028457 Semiconductor device and alignment apparatus and alignment method for same
10/11/2001	US20010028456 Exposure method, exposure apparatus, and method for producing device
10/11/2001	US20010028452 Unit for inspecting a surface
10/11/2001	US20010028449 Stage device, an exposure apparatus and a device manufacturing method using the same
10/11/2001	US20010028448 Exposure amount control method in exposure apparatus
10/11/2001	US20010028447 Exposure apparatus and method of cleaning optical element of the same
10/11/2001	US20010028446 Optical exposure apparatus of scanning exposure system and its exposing method
10/11/2001	US20010028443 Exposure apparatus, gas replacing method, and method of manufacturing a semiconductor device
10/11/2001	US20010028417 Liquid crystal display device and defect repairing method therefor
10/11/2001	US20010028415 Semiconductor device, electro-optical device substrate, liquid crystal device substrate and manufacturing method therefor, liquid crystal device, and projection liquid crystal display device and electronic apparatus using the liquid crystal device
10/11/2001	US20010028265 Semiconductor integrated circuit device
10/11/2001	US20010028255 Measuring apparatus for semiconductor device
10/11/2001	US20010028254 Test device for flat electronic assemblies
10/11/2001	US20010028117 Thiol or sulfur portion of an alkyl mercaptan or a disulfide derivative bonds with a noble metal, alkyl portion is oriented away from the surface
10/11/2001	US20010028116 Apparatus and methods of reinforcement of lead bonding in microelectronics packages
10/11/2001	US20010028115 semiconductor device and method of manufacturing the same
10/11/2001	US20010028113 Method of manufacturing semiconductor device
10/11/2001	US20010028112 Method for reducing capacitive coupling between conductive lines
10/11/2001	US20010028110 Semiconductor device and method for manufacturing the same
10/11/2001	US20010028109 Solder alloy, a circuit substrate, a semiconductor device and a method of manufacturing the same
10/11/2001	US20010028108 Semiconductor device having external connecting terminals and process for manufacturing the device
10/11/2001	US20010028107 Semiconductor device and a method of manufacturing the same
10/11/2001	US20010028105 Semiconductor device and method of manufacturing the same, circuit board and electronic instrument
10/11/2001	US20010028103 Semiconductor device and method of manufacturing the same
10/11/2001	US20010028102 Electronic component having microscopically small contact areas and method for fabricating it
10/11/2001	US20010028101 Method of fabricating semiconductor having through hole
10/11/2001	US20010028099 Semiconductor device and manufacturing method therefor
10/11/2001	US20010028098 Method and structure of manufacturing a high-q inductor with an air trench
10/11/2001	US20010028097 Semiconductor device having buried-type element isolation structure and method of manufacturing the same
10/11/2001	US20010028096 Semiconductor devices which have analog and digital circuits integrated on a common substrate
10/11/2001	US20010028095 Semiconductor processing methods, semiconductor circuitry, and gate stacks
10/11/2001	US20010028094 Semiconductor chip with surface cover
10/11/2001	US20010028093 Fabrication method for semiconductor integrated circuit devices and semiconductor integrated circuit device
10/11/2001	US20010028092 Method of fabricating conductive straps to interconnect contacts to corresponding digit lines by employing an angled sidewall implant and semiconductor devices fabricated thereby
10/11/2001	US20010028091 Semiconductor device capable of surely fixing voltage at well
10/11/2001	US20010028090 Semiconductor circuit configuration
10/11/2001	US20010028089 Semiconductor device of SOI structure
10/11/2001	US20010028088 Semiconductor device and method of manufacturing the same
10/11/2001	US20010028087 Structure of a field effect transistor having metallic silicide and manufacturing method thereof
10/11/2001	US20010028086 High-performance MOS transistor of LDD structure and manufacturing method of the same
10/11/2001	US20010028085 Trench DMOS transistor structure having a low resistance path to a drain contact located on an upper surface
10/11/2001	US20010028084 Trench transistor with self-aligned source

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