Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2001
10/09/2001US6299318 Mirror projector system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system
10/09/2001US6299314 Semiconductor device with electrical isolation means
10/09/2001US6299228 Gripper apparatus for robots
10/09/2001US6299218 Connecting structure between fluid channel
10/09/2001US6299153 Wafer latch with a ball bearing assembly
10/09/2001US6299058 Positioning method for attaching a solder ball to an electrical connector and the connector using the same
10/09/2001US6299057 Apparatus and method of clamping semiconductor devices using sliding finger supports
10/09/2001US6299049 Device and method for clamping and wire-bonding the leads of a lead frame one set at a time
10/09/2001US6298737 Ceramic ring undersize detection device
10/09/2001US6298715 Scanning force microscope probe cantilever with reflective structure
10/09/2001US6298685 Consecutive deposition system
10/09/2001US6298684 Substrate transfer robot
10/09/2001US6298637 Packaging material
10/09/2001US6298551 Methods of forming compliant interface structures with partially open interiors for coupling two electrically conductive contact areas
10/09/2001CA2219766C Crystallization control method for organic compound and crystallization control solid-state component employed therefor
10/07/2001CA2343441A1 Method of forming a laser circuit having low penetration ohmic contact providing impurity gettering and the resultant laser circuit
10/04/2001WO2001074124A1 Simultaneous switching noise minimization technique for power lines using dual layer power line mutual inductors
10/04/2001WO2001074078A1 Audio source control techniques
10/04/2001WO2001074074A1 Techniques for controlling access to web content information and television content information using user modes
10/04/2001WO2001074073A1 Techniques for controlling access to web content information and television content information using user modes and least common denominator techniques
10/04/2001WO2001074063A1 User customizable interface to tv and internet content
10/04/2001WO2001074062A1 User interface with media bar
10/04/2001WO2001074061A1 L configured user interface to tv and internet content
10/04/2001WO2001074051A2 Single-button remote access to a synthetic channel page of specialized content
10/04/2001WO2001074050A2 System and method for picture-in-browser scaling
10/04/2001WO2001073957A2 Battery-operated wireless-communication apparatus and method
10/04/2001WO2001073883A2 Low-temperature fabrication of thin-film energy-storage devices
10/04/2001WO2001073870A2 Integrated capacitor-like battery and associated method
10/04/2001WO2001073868A2 Device enclosures and devices with integrated battery
10/04/2001WO2001073866A2 Method and apparatus for integrated-battery devices
10/04/2001WO2001073865A2 Continuous processing of thin-film batteries and like devices
10/04/2001WO2001073864A2 Thin-film battery having ultra-thin electrolyte and associated method
10/04/2001WO2001073854A2 Variable capacitor with programmability
10/04/2001WO2001073853A1 Hetero bipolar transistor with a t-shaped emitter contact and method for the production thereof
10/04/2001WO2001073852A1 Sigec semiconductor crystal and production method thereof
10/04/2001WO2001073848A1 Production method for bonding wafer and bonding wafer produced by this method
10/04/2001WO2001073846A1 Semiconductor device
10/04/2001WO2001073841A2 Method of preventing bridging between polycrystalline micro-scale features
10/04/2001WO2001073840A1 Substrate transfer device
10/04/2001WO2001073839A1 Method for producing electric connections between individual circuit elements
10/04/2001WO2001073838A1 Production method for annealed wafer
10/04/2001WO2001073837A1 Method for depositing a doped silicon oxide
10/04/2001WO2001073836A1 Method for modifying the surface of a fluorocarbon
10/04/2001WO2001073835A1 Method and arrangement for depositing a dielectric layer
10/04/2001WO2001073834A1 Method for etching sidewall polymer and other residues from the surface of semiconductor devices
10/04/2001WO2001073833A1 Wet etching apparatus for semiconductor circuit and method for manufacturing etching needle used in apparatus
10/04/2001WO2001073832A1 Method of surface treatment of semiconductor
10/04/2001WO2001073831A1 Production method for silicon wafer and soi wafer, and soi wafer
10/04/2001WO2001073830A2 Electrochemical nanostructuring method and device
10/04/2001WO2001073829A1 Iii nitride compound semiconductor element and electrode forming method
10/04/2001WO2001073828A1 Method of doping silicon with phosphorus and growing oxide on silicon in the presence of steam
10/04/2001WO2001073827A1 Semiconductor wafer and production method therefor
10/04/2001WO2001073826A1 Method for producing a high-frequency semiconductor structure and a high-frequency semiconductor structure
10/04/2001WO2001073824A1 Semiconductor wafer pod
10/04/2001WO2001073822A2 Visibly marked parts and method for using same
10/04/2001WO2001073821A2 Methods for annealing a substrate and article produced by such methods
10/04/2001WO2001073820A2 Flow control of process gas in semiconductor manufacturing
10/04/2001WO2001073815A1 Uniform charged particle exposure device and method using translatable stage and faraday cup
10/04/2001WO2001073814A2 Method and apparatus for controlling power delivered to a multiple segment electrode
10/04/2001WO2001073769A1 Apparatus having line source of radiant energy for exposing a substrate
10/04/2001WO2001073702A1 Individual arrangement
10/04/2001WO2001073617A2 Method for the surface optimisation of components in integrated circuits
10/04/2001WO2001073525A2 Method and apparatus for purchasing product over an interactive television network
10/04/2001WO2001073512A1 Chemical amplification type positive resist composition
10/04/2001WO2001073509A1 Novel photosensitive resin compositions
10/04/2001WO2001073475A1 X-ray plane detector
10/04/2001WO2001073459A2 System and method for testing signal interconnections using built-in self test
10/04/2001WO2001073457A2 Controllable and testable oscillator apparatus for an integrated circuit
10/04/2001WO2001073413A1 Methods for the automated testing of reticle feature geometries
10/04/2001WO2001073411A1 Through hole inspecting method and device
10/04/2001WO2001073169A1 Silicon wafer and method for producing silicon single crystal
10/04/2001WO2001073161A1 Method for producing ceramic and apparatus for producing the same, semiconductor device, and piezoelectric device
10/04/2001WO2001073159A1 Method for forming metallic film and apparatus for forming the same
10/04/2001WO2001073157A2 Method and apparatus for reducing contamination in a loadlock
10/04/2001WO2001073150A1 Scaffold-organized clusters and electronic devices made using such clusters
10/04/2001WO2001072898A1 Thermally degradable epoxy underfills for flip-chip applications
10/04/2001WO2001072649A1 Synthetic quartz glass member, photolithography apparatus, and method for producing photolithography apparatus
10/04/2001WO2001072629A2 Flexibly oriented ice dispenser
10/04/2001WO2001072618A1 Method and apparatus for processing semiconductor wafers
10/04/2001WO2001072473A2 Carrier head with controllable edge pressure
10/04/2001WO2001072472A2 Carrier head with a flexible membrane having parts made with different elastomers
10/04/2001WO2001072471A1 Work holding panel for polishing, and device and method for polishing
10/04/2001WO2001072470A1 Process end point detection apparatus and method, polishing apparatus, semiconductor device manufacturing method, and recording medium recorded with signal processing program
10/04/2001WO2001072430A2 Drip manifold for uniform chemical delivery
10/04/2001WO2001047025A8 Silicon carbide lateral mosfet and method of making the same
10/04/2001WO2001037626A3 Transport device and method for transferring product carriers for electronic components
10/04/2001WO2001032793A8 Use of cesium hydroxide in a dielectric cmp slurry
10/04/2001WO2001024227A3 IMPROVED PECVD AND CVD PROCESSES FOR WNx DEPOSITION
10/04/2001WO2001020669A3 Use of additional bonding finger rows to improve wire bond density
10/04/2001WO2001020643A3 Method for producing a memory, comprising a memory cell and a trench isolation
10/04/2001WO2001020304A3 Self-clearing optical measurement apparatus and methods of use
10/04/2001WO2001009940A3 Method and molding tool for coating electronic components
10/04/2001WO2001009913A3 Patterned heat conducting photocathode for electron beam source
10/04/2001WO2001001449A8 Semiconductor device manufacturing using low energy high tilt angle ion implantation
10/04/2001US20010027570 Stamp for use a lithographic process, method of manufacturing a stamp, and method of manufacturing a patterned layer on a substrate
10/04/2001US20010027548 Interchangeable FPGA-Gate array
10/04/2001US20010027546 Semiconductor integrated circuit
10/04/2001US20010027351 Stocker, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
10/04/2001US20010027167 By applying RF power to a substrate holder and irradiating positive ions having a moderate energy while preventing damage to the strained lattice film to be stacked by oxygen negative ions; good crystalline property
10/04/2001US20010027083 Method for forming a copper interconnect using a multi-platen chemical mechanical polishing (CMP) process
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