Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2001
10/04/2001US20010026575 Plasma processing system
10/04/2001US20010026486 Semiconductor memory production system and semiconductor memory production method
10/04/2001US20010026482 Semiconductor memory device and electrode therefor
10/04/2001US20010026480 Multi-level flash EEPROM cell and method of manufacture thereof
10/04/2001US20010026472 Flash EEprom system
10/04/2001US20010026471 Magnetic memory element, magnetic memory and manufacturing method of magnetic memory
10/04/2001US20010026470 Magnetic field element having a biasing magnetic layer structure
10/04/2001US20010026468 Electronic device and recording method using the same
10/04/2001US20010026448 Projection exposure apparatus
10/04/2001US20010026444 Electronic circuit board with built-in thin film capacitor and manufacturing method thereof
10/04/2001US20010026408 Drive apparatus, exposure apparatus, and method of using the same
10/04/2001US20010026402 Process for the decontamination of microlithographic projection exposure devices
10/04/2001US20010026368 Mark position detecting system and method for detecting mark position
10/04/2001US20010026366 Method of measuring displacement of optical axis, optical microscope and evaluation mark
10/04/2001US20010026364 Test structure for metal CMP process control
10/04/2001US20010026358 Lithographic apparatus, device manufacturing method, and device manufactured thereby
10/04/2001US20010026356 Scanning exposure apparatus and device manufacturing method
10/04/2001US20010026355 Exposure apparatus, exposure method, and device manufacturing method
10/04/2001US20010026344 Liquid crystal display device and method of manufacturing the same
10/04/2001US20010026342 Method of manufacturing an electrode substrate resistant to wire breakage for an active matrix display device
10/04/2001US20010026186 Semiconductor integrated circuit device and contactless electronic device
10/04/2001US20010026184 Hysteretic fuse control circuit with serial interface fusing
10/04/2001US20010026166 Probe contactor and production method thereof
10/04/2001US20010026152 Semiconductor package testing equipment including loader having package guider and method of loading a semiconductor package onto a test socket as aligned therewith
10/04/2001US20010026021 Flip-chip type semiconductor device and method of manufacturing the same
10/04/2001US20010026019 Interconnect structure and method for forming the same
10/04/2001US20010026018 Pad metallization over active circuitry
10/04/2001US20010026016 Electronic component of a high frequency current suppression type and bonding wire for the same
10/04/2001US20010026015 Semiconductor device having reliable electrical connection
10/04/2001US20010026014 Semiconductor device
10/04/2001US20010026013 Apparatus and methods of packaging and testing die
10/04/2001US20010026012 Method and apparatus for mounting component
10/04/2001US20010026010 Semiconductor device and process of production of same
10/04/2001US20010026007 Semiconductor device with light shielding metal film
10/04/2001US20010026006 Method and apparatus on (110) surfaces of silicon structures with conduction in the <110> direction
10/04/2001US20010026005 Substrate for mounting a semiconductor chip and method for manufacturing a semiconductor device
10/04/2001US20010026004 Edge stress reduction by noncoincident layers
10/04/2001US20010026003 Semiconductor device having capacitor and method of manufacturing the same
10/04/2001US20010026002 Cylindrical semiconductor capacitor
10/04/2001US20010026000 Semiconductor device and a method for manufacturing the same
10/04/2001US20010025999 Semiconductor device and method of manufacturing the same
10/04/2001US20010025998 Semiconductor integrated circuit manufacturing method and device
10/04/2001US20010025997 Semiconductor integrated circuit device and fabrication method
10/04/2001US20010025996 Power metal oxide semiconductor integrated circuit
10/04/2001US20010025995 Silicide structure and forming method thereof
10/04/2001US20010025994 Process for producing semiconductor device and semiconductor device
10/04/2001US20010025992 Liquid crystal display device and manufacturing method thereof
10/04/2001US20010025991 Silicon-on-insulator (SOI) substrate, method for fabricating SOI substrate and SOI mosfet using the SOI substrate
10/04/2001US20010025990 Semiconductor device and method of manufacturing the same
10/04/2001US20010025989 Semiconductor device and method of manufacturing the same
10/04/2001US20010025987 Semiconductor device and method of manufacturing the same
10/04/2001US20010025985 Circuits and methods using vertical, complementary transistors
10/04/2001US20010025984 Semiconductor device and method of manufacturing the same
10/04/2001US20010025982 Method of fabricating a transistor in a semiconductor device
10/04/2001US20010025981 Methods of fabricating nonvolatile memory devices including bird's beak oxide
10/04/2001US20010025980 Process for producing a semiconductor memory device comprising mass-storage memory cells and shielded memory cells for storing reserved information
10/04/2001US20010025979 Semiconductor device incorporated therein high K capacitor dielectric and method for the manufacture thereof
10/04/2001US20010025978 Magnetic random access memory capable of writing information with reduced electric current
10/04/2001US20010025977 Semiconductor device having a three-dimensional capacitor such as a stack-type capacitor
10/04/2001US20010025976 Method for manufacturing a capacitor of a semiconductor device
10/04/2001US20010025975 Semiconductor device and the method for manufacturing the same
10/04/2001US20010025974 Capacitor having an electrode formed from a transition metal or a conductive metal-oxide, and method of forming same
10/04/2001US20010025973 Semiconductor integrated circuit device and process for manufacturing the same
10/04/2001US20010025972 Semiconductor device and method for fabricating the same
10/04/2001US20010025971 Metal gate electrode stack with a passivating metal nitride layer
10/04/2001US20010025970 Solid state imaging device having a photodiode and a mosfet and method of manufacturing the same
10/04/2001US20010025968 Complementary MOS semiconductor device and method of manufacturing the same
10/04/2001US20010025967 Semiconductor device
10/04/2001US20010025966 Field effect transistor having comb-shaped lead-out electrodes capable of reducing parasitic capacitance therebetween
10/04/2001US20010025965 High electron mobility transistor and method of manufacturing the same
10/04/2001US20010025963 Semiconductor device and the process of manufacturing the semiconductor device
10/04/2001US20010025961 Semiconductor device improved in ESD reliability
10/04/2001US20010025960 Semiconductor device and method of manufacturing the same
10/04/2001US20010025958 Semiconductor device and manufacturing method thereof
10/04/2001US20010025955 Diamond semiconductor and diamond semiconductor light-emitting device that uses the semiconductor
10/04/2001US20010025932 Charged-particle-beam microlithography apparatus and methods including shielding of the beam from extraneous magnetic fields
10/04/2001US20010025931 Charged particle beam system and chamber of charged particle beam system
10/04/2001US20010025929 Secondary electron filtering method, defect detection method and device manufacturing method using the same method
10/04/2001US20010025926 Thermal infrared sensor and a method of manufacturing the same
10/04/2001US20010025925 Charged particle beam system and pattern slant observing method
10/04/2001US20010025893 Coating head
10/04/2001US20010025890 Treatment solution supply apparatus and treatment solution supply method
10/04/2001US20010025876 Method of integrated circuit assembly
10/04/2001US20010025874 Method of forming solder bumps, method of mounting flip chips, and a mounting structure
10/04/2001US20010025873 Soldering method for soldering electronic parts and soldering apparatus therefor
10/04/2001US20010025841 Process chamber cooling
10/04/2001US20010025826 Dense-plasma etching of InP-based materials using chlorine and nitrogen
10/04/2001US20010025805 Wafer Case
10/04/2001US20010025797 Nitride layer forming methods
10/04/2001US20010025795 High accuracy resist pattern by achieving temperature uniformity within surface between transition and steady states comprising thermal plate and temperature control elements; semiconductor, liquid crystal display, photomask
10/04/2001US20010025783 Supplying heating or cooling backside inert gas to mounted biased support maintaining pressure thereby improving thickness uniformity and morphology of sputter depositing metal seed layer; semiconductors
10/04/2001US20010025725 Electrically Conductive Apparatuses
10/04/2001US20010025721 Printed wiring board, IC card module using the same, and method for producing IC card module
10/04/2001US20010025691 Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe
10/04/2001US20010025660 Method for conserving a resource by flow interruption
10/04/2001US20010025645 Injecting plasma forming gas; moving susceptor vertically in face of wafer while applying radio frequency electric power; controlling plasma position and density
10/04/2001US20010025608 Method of holding substrate and substrate holding system
10/04/2001US20010025606 Plasma CVD apparatus and dry cleaning method of the same
10/04/2001US20010025605 Air-tight vessel equipped with gas feeder uniformly supplying gaseous component around plural wafers
10/04/2001US20010025604 Substrate processing apparatus
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