| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 10/18/2001 | WO2001078130A1 Electronic device manufacture comprising a thin-film-transistor |
| 10/18/2001 | WO2001078129A1 Inhibition of titanium corrosion |
| 10/18/2001 | WO2001078128A2 Abrasive-free metal cmp in passivation domain |
| 10/18/2001 | WO2001078127A2 A method of improving adhesion of a cap layer to a porous material layer on a wafer |
| 10/18/2001 | WO2001078126A2 A method of passivating a metal line on a wafer |
| 10/18/2001 | WO2001078125A1 Method for producing semiconductor wafer and semiconductor wafer |
| 10/18/2001 | WO2001078124A1 Conditioner and conditioning process for polishing pad of chemical mechanical polishing apparatus |
| 10/18/2001 | WO2001078123A1 Method of forming metal interconnects |
| 10/18/2001 | WO2001078122A1 Method of forming structures on a semiconductor substrate |
| 10/18/2001 | WO2001078121A1 Method of manufacturing a semiconductor device |
| 10/18/2001 | WO2001078120A1 Method of forming vias in silicon carbide and resulting devices and circuits |
| 10/18/2001 | WO2001078119A2 Multilayered capacitor structure with alternately connected concentric lines for deep submicron cmos |
| 10/18/2001 | WO2001078118A1 Wafer preparation systems and methods for preparing wafers |
| 10/18/2001 | WO2001078117A2 Gaseous process for surface preparation |
| 10/18/2001 | WO2001078116A2 System for the preferential removal of silicon oxide |
| 10/18/2001 | WO2001078115A2 Barrier coating for vitreous materials |
| 10/18/2001 | WO2001078114A1 WAFER ORIENTATION SENSOR FOR GaAs WAFERS |
| 10/18/2001 | WO2001078113A1 Desiccant containing product carrier |
| 10/18/2001 | WO2001078112A1 Method for charging and discharging a process tank |
| 10/18/2001 | WO2001078111A1 Device for handling components |
| 10/18/2001 | WO2001078110A2 Low dielectric constant organic dielectrics based on cage-like structures |
| 10/18/2001 | WO2001078108A2 Wafer chuck having piezoelectric elements and method |
| 10/18/2001 | WO2001078105A1 Reaction chamber with at least one hf feedthrough |
| 10/18/2001 | WO2001078104A1 Method and apparatus for real-time correction of resist heating in lithography |
| 10/18/2001 | WO2001078103A2 Bi-directional electron beam scanning apparatus |
| 10/18/2001 | WO2001078070A1 A magnetic film having a magnetic easy-axis or a multiple easy-axis and a method of manufacturing the magnetic film |
| 10/18/2001 | WO2001078045A1 Production method for flat panel display |
| 10/18/2001 | WO2001077652A1 Surface inspection device |
| 10/18/2001 | WO2001077421A1 Method for growing semiconductor crystalline materials containing nitrogen |
| 10/18/2001 | WO2001077406A2 A method of determining the end point of a plasma cleaning operation |
| 10/18/2001 | WO2001077243A1 Die-attaching paste and semiconductor device |
| 10/18/2001 | WO2001077008A1 Micromechanical component and corresponding production method |
| 10/18/2001 | WO2001076990A1 Ergonomic load port |
| 10/18/2001 | WO2001076819A1 Integrated chemical-mechanical polishing |
| 10/18/2001 | WO2001076789A1 Making integral heat spreader by coining |
| 10/18/2001 | WO2001076771A2 Low temperature oxidizing method of making a layered superlattice material |
| 10/18/2001 | WO2001076725A1 Method for treating exhaust gas containing fluorine-containing compound |
| 10/18/2001 | WO2001041190A3 A method for measuring stress induced leakage current and gate dielectric integrity using corona discharge |
| 10/18/2001 | WO2001027991B1 Centrifugal gripper mechanism for dynamic force compensation |
| 10/18/2001 | WO2001027974A3 Dram with bit lines in two metallised sheets |
| 10/18/2001 | WO2001026139A3 Dram bit lines and support circuitry contacting scheme |
| 10/18/2001 | WO2001026133A3 High transmission, low energy beamline apparatus for ion implanter |
| 10/18/2001 | WO2000049197A9 Wafer processing reactor having a gas flow control system and method |
| 10/18/2001 | US20010032330 Semiconductor device simulation method, semiconductor device simulator, computer program for semiconductor device simulation, and method of manufacturing the semiconductor device |
| 10/18/2001 | US20010032329 Storage media being readable by a computer, and a method for designing a semiconductor integrated circuit device |
| 10/18/2001 | US20010031925 Apparatus and method for collecting data useful for determining the parameters of an alert window for timing delivery or etc signals to a heart under varying cardiac conditons |
| 10/18/2001 | US20010031828 Film-type adhesive for electronic components, and electronic components bonded therewith |
| 10/18/2001 | US20010031615 Chemical mechanical planarization or polishing pad with sections having varied groove patterns |
| 10/18/2001 | US20010031610 Polishing pad with a transparent portion |
| 10/18/2001 | US20010031608 Apparatus for optical inspection of wafers during polishing |
| 10/18/2001 | US20010031575 High density interconnection test connector especially for verification of integrated circuits |
| 10/18/2001 | US20010031563 Semiconductor device and method of fabricating the same |
| 10/18/2001 | US20010031562 Method of forming ultrathin oxide layer |
| 10/18/2001 | US20010031561 Method for minimizing the critical dimension growth of a feature on a semiconductor wafer |
| 10/18/2001 | US20010031560 Apparatus and method for selectively restricting process fluid flow in semiconductor processing |
| 10/18/2001 | US20010031559 Semiconductor device and method of manufacturing the same |
| 10/18/2001 | US20010031558 Elimination of pad glazing for al cmp |
| 10/18/2001 | US20010031557 Electrode for plasma processes and method for manufacture and use thereof |
| 10/18/2001 | US20010031556 System and method for integrated oxide removal and processing of a semiconductor wafer |
| 10/18/2001 | US20010031555 Method for forming aluminum interconnection |
| 10/18/2001 | US20010031554 Method for forming a cvd silicon film |
| 10/18/2001 | US20010031552 MOSFET with lateral resistor ballasting |
| 10/18/2001 | US20010031551 High speed trench DMOS |
| 10/18/2001 | US20010031550 Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads |
| 10/18/2001 | US20010031549 Magnetic layer processing |
| 10/18/2001 | US20010031548 Method for forming chip scale package |
| 10/18/2001 | US20010031546 Method of manufacturing a semiconductor device |
| 10/18/2001 | US20010031545 Bonding layer method in a semiconductor device |
| 10/18/2001 | US20010031544 Method of and apparatus for manufacturing circuit |
| 10/18/2001 | US20010031541 Hot wire chemical vapor deposition method and apparatus using graphite hot rods |
| 10/18/2001 | US20010031540 Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts |
| 10/18/2001 | US20010031539 Solutions of metal-comprising materials, and methods of making solutions of metal-comprising materials |
| 10/18/2001 | US20010031538 Method of producing a schottky varicap |
| 10/18/2001 | US20010031537 Circuit manufacturing method and apparatus, anneal control method and apparatus, information storage medium |
| 10/18/2001 | US20010031536 Method of making a MOSFET structure having improved source/drain junction performance |
| 10/18/2001 | US20010031535 Semiconductor chip having both compact memory and high performance logic |
| 10/18/2001 | US20010031534 Semiconductor device and method of manufacturing the same |
| 10/18/2001 | US20010031533 Semiconductor device and method of manufacturing the same |
| 10/18/2001 | US20010031532 Methods for manufacturing semiconductor devices and semiconductor devices |
| 10/18/2001 | US20010031531 Crown or stack capacitor with a monolithic fin structure |
| 10/18/2001 | US20010031530 Method for fabricating an open can-type stacked capacitor on an uneven surface |
| 10/18/2001 | US20010031529 Method for fabricating a memory cell |
| 10/18/2001 | US20010031528 Semiconductor devices and methods for manufacturing the same |
| 10/18/2001 | US20010031527 Semiconductor memory device incorporating therein ruthenium electrode and method for the manufacture thereof |
| 10/18/2001 | US20010031526 DRAM memory capacitor, and method for its production |
| 10/18/2001 | US20010031525 Bipolar-CMOS (BiCMOS) process for fabricating integrated circuits |
| 10/18/2001 | US20010031524 Nonvolatile memory device and manufacturing method therefor |
| 10/18/2001 | US20010031523 Method of manufacturing semiconductor device having gate insulating films in different thickness |
| 10/18/2001 | US20010031522 Method of manufacturing a semiconductor device |
| 10/18/2001 | US20010031521 Integration of bipolar and CMOS devices for sub-0.1 micrometer transistors |
| 10/18/2001 | US20010031520 Patent withdrawn after electronic o.g. published |
| 10/18/2001 | US20010031519 Electronic device manufacture |
| 10/18/2001 | US20010031515 Semiconductor device and method of manufacturing the same, circuit board and electronic instrument |
| 10/18/2001 | US20010031514 Method and apparatus for fabricating self-assembling microstructures |
| 10/18/2001 | US20010031512 Method and apparatus for applying a semiconductor chip to a carrier element |
| 10/18/2001 | US20010031510 Liquid crystal display and method of manufacturing the same |
| 10/18/2001 | US20010031508 Method and apparatus for evaluating a known good die using both wire bond and flip-chip interconnects |
| 10/18/2001 | US20010031507 Method and device for adapting/tuning signal transit times on line systems or networks between integrated circuits |
| 10/18/2001 | US20010031505 Low imprint ferroelectric material for long retention memory and method of making the same |
| 10/18/2001 | US20010031428 Made by reacting a hydroxyalkyl cellulose with an aryl isocyanate such as phenyl isocyanate; coatings have high etch rate and optical density |