| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 10/04/2001 | EP1138060A1 Gas driven rotating susceptor for rapid thermal processing (rtp) system |
| 10/04/2001 | EP1138059A1 Rapid thermal processing chamber for processing multiple wafers |
| 10/04/2001 | EP1138058A2 Method of manufacturing a variable work function gate mosfet using a dummy gate |
| 10/04/2001 | EP1138055A1 Semiconductor processing equipment having tiled ceramic liner |
| 10/04/2001 | EP1138044A1 Capacitive sensing array devices |
| 10/04/2001 | EP1137969A1 Method of using a modulated exposure mask |
| 10/04/2001 | EP1137968A1 Novel photosensitive resin compositions |
| 10/04/2001 | EP1137967A1 Method for mask repair using defect compensation |
| 10/04/2001 | EP1137951A1 Scanning single electron transistor microscope for imaging ambient temperature objects |
| 10/04/2001 | EP1137929A1 Non-contact topographical analysis apparatus and method thereof |
| 10/04/2001 | EP1137675A1 Preparation of partially cross-linked polymers and their use in pattern formation |
| 10/04/2001 | EP1137514A1 Modular machine for polishing and planing substrates |
| 10/04/2001 | EP1007919B1 Method for improved temperature control in rapid thermal processing (rtp) systems |
| 10/04/2001 | EP0990269A4 Metal contact scheme using selective silicon growth |
| 10/04/2001 | EP0985007A4 Oxygen-containing phosphor powders, methods for making phosphor powders and devices incorporating same |
| 10/04/2001 | EP0972094B1 Low defect density, vacancy dominated silicon |
| 10/04/2001 | EP0843888B1 Process for manufacturing a self-aligned contact and doped region |
| 10/04/2001 | EP0826238B1 Semiconductor body with a substrate glued to a support body |
| 10/04/2001 | EP0767970B1 Electronic multilayer component and method of its manufacture |
| 10/04/2001 | EP0538457B1 Fabrication of metal matrix composites by vacuum die casting |
| 10/04/2001 | DE10114029A1 III-V-Halbleiter und Verfahren zu seiner Herstellung III-V semiconductors and process for its preparation |
| 10/04/2001 | DE10113853A1 Magnetspeicherelement, Magnetspeicher und Herstellungsverfahren für einen Magnetspeicher The magnetic memory element, magnetic memory and manufacturing method for a magnetic memory |
| 10/04/2001 | DE10110955A1 Device for mounting semiconductor chips on a substrate especially a metallic lead-frame has a sensor for detecting a first longitudinal edge of the substrate enabling accurate chip positioning across the substrate |
| 10/04/2001 | DE10108358A1 Poliervorrichtung Polishing apparatus |
| 10/04/2001 | DE10054098A1 Semiconductor device with element-insulating insulation films, has stacked structure comprising semiconductor substrate, insulating layer, and semiconductor layer in given sequence |
| 10/04/2001 | DE10029501C1 Vertical field effect transistor made from a semiconductor wafer comprises a residual transistor consisting of a source region, a channel region, a drain region, and a moving gate structure made from the semiconductor material |
| 10/04/2001 | DE10016176A1 Microlithographic illumination system, has optical element that can detect entire light beam with continuously differentiable surface in near field and asymmetrical with respect to optical axis |
| 10/04/2001 | DE10015931A1 Verfahren zur elektrochemischen Nanostrukturierung Method of electrochemical nanostructuring |
| 10/04/2001 | DE10015286A1 Automated experimental result evaluation for wafer manufacture in semiconductor factory, involves comparing condition of attributes after each experiment, and listing out mismatching attributes in separate table |
| 10/04/2001 | DE10015278A1 Halbleiterspeicher mit einem Speicherzellenfeld A semiconductor memory comprising a memory cell array |
| 10/04/2001 | DE10014917A1 Production of a contact layer used in the production of diodes, resistors and transistors comprises sputtering a first contact layer in the trench of a substrate, and sputtering a second contact layer on the first layer |
| 10/04/2001 | DE10014916A1 Adjusting threshold voltage of MOS transistor having a polycrystalline silicon gate comprises implanting germanium ions into gate to change electron affinity of gate |
| 10/04/2001 | DE10014915A1 Removing titanium nitride from a bond pad used in the production of a semiconductor element comprises removing the titanium nitride using an aqueous solution and removing the oxide layer present on the bond pad |
| 10/04/2001 | DE10014914A1 Verfahren zur Herstellung und Überprüfung von Strukturen elektronischer Schaltungen in einem Halbleitersubstrat Process for the preparation and verification of structures of electronic circuits in a semiconductor substrate, |
| 10/04/2001 | DE10014650A1 Silicon semiconductor wafer used as a substrate wafer is doped with specified concentration of hydrogen |
| 10/04/2001 | DE10014458A1 Cooling body for electronic component or electric circuit e.g. for fan controller in motor vehicle, has intermediate element for accommodating component or circuit mounted at least partly in base body by reshaping process |
| 10/04/2001 | DE10014380A1 Vorrichtung zum Verpacken von elektronischen Bauteilen Apparatus for packaging electronic components |
| 10/04/2001 | DE10014308A1 Device for forming multiple connections on semiconductor chips, has heatable and pressurizable projections and low melting metal layers on contact surfaces |
| 10/04/2001 | DE10014300A1 Halbleiterbauelement und Verfahren zu dessen Herstellung Semiconductor device and process for its preparation |
| 10/04/2001 | DE10014299A1 Chip structure used in electronic devices comprises a semiconductor chip arranged on a substrate with a surface having connecting surfaces facing away from the substrate |
| 10/04/2001 | DE10014269A1 Halbleiterbauelement zur Ansteuerung von Leistungshalbleiterschaltern Semiconductor device for actuating power semiconductor switches |
| 10/04/2001 | DE10012043A1 Device for aligning objects bearing reference marks, has module with two parallel high quality objectives, deflection unit, cameras for transferring acquired images to evaluation unit |
| 10/04/2001 | DE10010284A1 Semiconductor element manufacturing method e.g. for dynamic random-access memory manufacture |
| 10/04/2001 | CA2403277A1 Flexibly oriented ice dispenser |
| 10/03/2001 | CN2452133Y Ohmic electrode for Te Zn Cd semiconductor material |
| 10/03/2001 | CN1316123A Process for producing nitride semiconductor device |
| 10/03/2001 | CN1316102A Data storage processing apparatus, and method for fabricating |
| 10/03/2001 | CN1316101A Method for measuring number of yield loss chips and number of poor chips |
| 10/03/2001 | CN1316100A Bump joining judging device and method, and semiconductor component production device and method |
| 10/03/2001 | CN1316099A Method and apparatus for forming film on substrate |
| 10/03/2001 | CN1316098A Method for producing thin membrane and resulting structure with membrane |
| 10/03/2001 | CN1316096A Feedthrough overlap coil |
| 10/03/2001 | CN1316095A Improved stationary uniformity ring design |
| 10/03/2001 | CN1316086A FeRAM arrangement |
| 10/03/2001 | CN1316068A Photosensitive resin composition and method for improving dry etching resistance of photosensitive resin composition |
| 10/03/2001 | CN1316023A Method and apparatus for copper plating using electroless plating and electroplating |
| 10/03/2001 | CN1316021A ESRF chamber cooling system and process |
| 10/03/2001 | CN1315989A Chemical mechanical polishing slurry and method for using same |
| 10/03/2001 | CN1315896A Device for automated machining of workpieces |
| 10/03/2001 | CN1315823A Method for manufacturing circuit device and circuit device |
| 10/03/2001 | CN1315747A Semiconductor device |
| 10/03/2001 | CN1315746A Power semiconductor device |
| 10/03/2001 | CN1315745A Semiconductor device and its manufacturing method |
| 10/03/2001 | CN1315744A Magnetic guide piece, its making method and light mask using it |
| 10/03/2001 | CN1315742A Semiconductor chip device and its package method |
| 10/03/2001 | CN1315587A Device and method for forming deposition film by plasma CVD method |
| 10/03/2001 | CN1072400C Method for making capacitors |
| 10/03/2001 | CN1072399C Mode detecting and testing system and method thereof |
| 10/03/2001 | CN1072398C Chip connection method and device |
| 10/03/2001 | CN1072397C Winding automatic-welding spherical-array type integrated circuit packaging method |
| 10/03/2001 | CN1072396C Bead array-type IC package method without substrate and tin bead |
| 10/03/2001 | CN1072395C Dual-modes microwave/mm wave integrated circuit sealing pack |
| 10/03/2001 | CN1072394C Method for IC package |
| 10/03/2001 | CN1072393C Bead array type integrated circuit package method |
| 10/03/2001 | CN1072392C Production method of high-density metallic-gate MOS |
| 10/03/2001 | CN1072391C Method for forming aluminium plug by selectively chemical vapour deposition |
| 10/03/2001 | CN1072390C Ion implantation method in semiconductor substrate |
| 10/03/2001 | CN1072389C Equipment for transferring semiconductor chip |
| 10/03/2001 | CN1072283C Cleaning process for hydrophobic silicon wafers |
| 10/03/2001 | CN1072105C Surface smoothing unit |
| 10/02/2001 | USRE37396 Semiconductor wire bonding method |
| 10/02/2001 | US6298473 Apparatus and method for inhibiting pattern distortions to correct pattern data in a semiconductor device |
| 10/02/2001 | US6298470 Method for efficient manufacturing of integrated circuits |
| 10/02/2001 | US6298469 Method and system for allowing an integrated circuit to be portably generated from one manufacturing process to another |
| 10/02/2001 | US6298319 Incremental compilation of electronic design for work group |
| 10/02/2001 | US6298282 Robot crash sensor system |
| 10/02/2001 | US6298280 Method for in-cassette wafer center determination |
| 10/02/2001 | US6298274 Conveyance system in a semiconductor manufacturing process and method for processing semiconductor wafer therein |
| 10/02/2001 | US6298001 Semiconductor memory device enabling direct current voltage test in package status |
| 10/02/2001 | US6297995 Circuit configuration with a temperature-dependent semiconductor component test and repair logic circuit |
| 10/02/2001 | US6297994 Single electron MOSFET memory device and method |
| 10/02/2001 | US6297989 Applications for non-volatile memory cells |
| 10/02/2001 | US6297983 Reference layer structure in a magnetic storage cell |
| 10/02/2001 | US6297974 Method and apparatus for reducing stress across capacitors used in integrated circuits |
| 10/02/2001 | US6297964 Semiconductor device, method of fabricating the same film carrier tape, circuit board, and electronic apparatus |
| 10/02/2001 | US6297876 Lithographic projection apparatus with an alignment system for aligning substrate on mask |
| 10/02/2001 | US6297690 Booster circuit |
| 10/02/2001 | US6297688 Current generating circuit |
| 10/02/2001 | US6297674 Semiconductor integrated circuit for low power and high speed operation |
| 10/02/2001 | US6297659 Test system for testing semiconductor device |