H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2001
10/24/2001	EP1148374A2 Active matrix substrate
10/24/2001	EP1148368A2 Device for combining housings or mountings for optical elements
10/24/2001	EP1148340A2 All digital built-in self-test circuit for phase-locked loops
10/24/2001	EP1148156A2 Copper Electroplating
10/24/2001	EP1148152A2 Chemical vapor deposition apparatus
10/24/2001	EP1148151A2 Ceramic heater device and film forming device using the same
10/24/2001	EP1148150A2 Method and apparatus for processing semiconductor substrates with hydroxyl radicals
10/24/2001	EP1148105A2 Composition for film formation, method of film formation, and silica-based film
10/24/2001	EP1147863A2 Vertically telescopic robot
10/24/2001	EP1147856A2 Method and apparatus for cleaning polishing surface of polisher
10/24/2001	EP1147855A2 Polishing carrier head
10/24/2001	EP1147605A1 Improved voltage translator circuit
10/24/2001	EP1147583A1 Energy stabilized gas discharge laser
10/24/2001	EP1147561A1 Lateral thin-film soi device having a lateral drift region and method of making such a device
10/24/2001	EP1147559A1 Device providing protection against electrostatic discharges for microelectronic components on a soi-type substrate
10/24/2001	EP1147558A1 Analogue switch
10/24/2001	EP1147557A1 Integrated circuit device, electronic module for chip card using said device and method for making same
10/24/2001	EP1147553A1 Method for housing electronic components
10/24/2001	EP1147552A1 Field effect transistor structure with abrupt source/drain junctions
10/24/2001	EP1147551A1 Top gate thin-film transistor and method of producing the same
10/24/2001	EP1147550A1 METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE COMPRISING SiGe HBTs
10/24/2001	EP1147549A1 Method of etching silicon dioxide using hydrogen-containing additive gases in fluorocarbon gas chemistry
10/24/2001	EP1147548A1 Production of multilayer semiconductor structures by changing the carrier gas
10/24/2001	EP1147547A2 Inflatable slit and/or gate valve
10/24/2001	EP1147546A1 Method to decrease dishing rate during cmp in metal semiconductor structures
10/24/2001	EP1147544A2 Rf plasma etch reactor with internal inductive coil antenna and electrically conductive chamber walls
10/24/2001	EP1147536A1 Method for precise molding and alignment of structures on a substrate using a stretchable mold
10/24/2001	EP1147520A1 Vertically integrated magnetic memory
10/24/2001	EP1147242A1 Large area plasma source
10/24/2001	EP1147241A1 Diffusion bonded sputter target assembly and method of making same
10/24/2001	EP1146967A1 Flow controller
10/24/2001	EP1146958A1 Apparatus and method for point-of-use treatment of effluent gas streams
10/24/2001	EP1080170A4 Cleaning composition and method for removing residues
10/24/2001	EP1018054B1 Microscope stand for a wafer inspection microscope
10/24/2001	EP0978159B1 Device for limiting electrical alternating currents, especially during short-circuits
10/24/2001	EP0904559B1 Short wavelength pulsed laser scanner
10/24/2001	EP0820639B1 Process for passivating a silicon carbide surface against oxygen
10/24/2001	EP0721669B1 Method for manufacturing a frequency control device
10/24/2001	EP0699606B1 Electrostatic levitation conveyor and electrostatic levitation electrodes thereof
10/24/2001	CN1319271A Protective circuit on integrated circuit
10/24/2001	CN1319256A Ferroelectric thin film of reduced tetragonality
10/24/2001	CN1319255A Single polysilicon flash EEPROM and method for making same
10/24/2001	CN1319254A Ferroelectric memory device and method of manufacturing the same
10/24/2001	CN1319253A Non-oxygen precipitating czochralski silicon wafers
10/24/2001	CN1319252A Semiconductor substrate and its production method, semiconductor device
10/24/2001	CN1319251A Hot plate unit
10/24/2001	CN1319247A Low contaminatino, high density plasma etch chamber and method for making the same
10/24/2001	CN1319233A Method and apparatus for providing embedded flash-EEPROM technology
10/24/2001	CN1319199A Photoresists, polymers and process for microlithography
10/24/2001	CN1319146A Method of passivating CVD chamber
10/24/2001	CN1319067A Transport system with integrated transport carrier and directors
10/24/2001	CN1318898A High-frequency power amplifier with bipolar transistor
10/24/2001	CN1318869A Method for making polysilicon-polysilicon/MOS stacked capacitor
10/24/2001	CN1318868A Electrooptical device, and its mfg. and electronic device
10/24/2001	CN1318864A Polycrystalline modular device
10/24/2001	CN1318862A Large workpiece plasma processor
10/24/2001	CN1318850A Method for cooling inductive coil
10/24/2001	CN1318773A Photoresist composition for etch-resistant agent flowing process and method for forming contact hole using the same
10/24/2001	CN1318611A Connecting material
10/24/2001	CN1073745C Method for isolating elements of semiconductor device
10/23/2001	USRE37416 Method for manufacturing a modular semiconductor power device
10/23/2001	US6308310 System for avoiding electromigration in LSI circuits
10/23/2001	US6308308 Semiconductor device using diode place-holders and method of manufacture thereof
10/23/2001	US6308306 Delay route searching method and apparatus for logical circuits, and machine-readable recording medium recording program thereon
10/23/2001	US6308305 Method and apparatus for circuit designing of an LSI circuit without error paths
10/23/2001	US6308112 Method for controlling emergency states of semiconductor fabricating equipment arranged in a processing line
10/23/2001	US6308107 Realtime decision making system for reduction of time delays in an automated material handling system
10/23/2001	US6307807 Nonvolatile semiconductor memory
10/23/2001	US6307801 Trimming circuit for system integrated circuit
10/23/2001	US6307796 Dynamic random access memory
10/23/2001	US6307791 Semiconductor device
10/23/2001	US6307786 Nonvolatile semiconductor memory device having a hierarchial bit line structure
10/23/2001	US6307780 Semiconductor non-volatile storage
10/23/2001	US6307770 Nonvolatile semiconductor memory device and a method of fabricating the same
10/23/2001	US6307731 Oxygen inclusion layer containing precious and transition metals; etching, annealing, microfabrication
10/23/2001	US6307730 Capacitor formed by lower electrode having inner and outer uneven surfaces
10/23/2001	US6307728 Method and apparatus for dechucking a workpiece from an electrostatic chuck
10/23/2001	US6307688 Optical system, in particular projection-illumination unit used in microlithography
10/23/2001	US6307620 Substrate holding apparatus, substrate transfer system, exposure apparatus, coating apparatus, method for making a device, and method for cleaning a substrate holding section
10/23/2001	US6307619 Scanning framing blade apparatus
10/23/2001	US6307618 Projection exposure apparatus and device manufacturing method including a projection optical system having a pair of diffractive members
10/23/2001	US6307602 Method for manufacturing liquid crystal display capable of preventing electrical shorts between neighboring pixel electrodes and the liquid crystal display
10/23/2001	US6307495 Resistor elements in a resistor divider digital-to-analog converter
10/23/2001	US6307423 Programmable circuit with preview function
10/23/2001	US6307421 Output circuit, input circuit and input/output circuit
10/23/2001	US6307392 Probe card and method of forming a probe card
10/23/2001	US6307390 Aligner and method for inspecting semiconductor wafer using shell
10/23/2001	US6307389 Test device for flat electronic assemblies
10/23/2001	US6307387 Membrane probing system with local contact scrub
10/23/2001	US6307322 Thin-film transistor circuitry with reduced sensitivity to variance in transistor threshold voltage
10/23/2001	US6307312 Immersion lens and electron beam projection system using the same
10/23/2001	US6307273 High contrast, low noise alignment mark for laser trimming of redundant memory arrays
10/23/2001	US6307272 Semiconductor device and method for manufacturing the same
10/23/2001	US6307271 Semiconductor device having pads, the intervals of which are adjusted and arranged in semiconductor chip corners
10/23/2001	US6307269 Semiconductor device with chip size package
10/23/2001	US6307267 Semiconductor device and manufacturing method thereof
10/23/2001	US6307265 Feasible, gas-dielectric interconnect process
10/23/2001	US6307264 Semiconductor device, active matrix substrate and process for production thereof
10/23/2001	US6307263 Integrated semiconductor chip with modular dummy structures
10/23/2001	US6307262 Condensed memory matrix

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