H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2001
11/01/2001	US20010036698 Semiconductor processing methods of forming integrated circuitry memory devices, methods of forming capacitor containers, methods of making electrical connection to circuit nodes and related integrated circuitry
11/01/2001	US20010036696 Lateral patterning
11/01/2001	US20010036695 Chip scale package
11/01/2001	US20010036694 Semiconductor device and method of manufacturing it
11/01/2001	US20010036693 Shielded channel transistor structure with embedded source/drain junctions
11/01/2001	US20010036692 Crystalline semiconductor thin film, method of fabricating the same, semiconductor device and method of fabricating the same
11/01/2001	US20010036690 Semiconductor device and method of manufacturing the same
11/01/2001	US20010036689 Low dielectric constant insulating film resin composition, method of forming low dielectric constant insulating film, and method of producing semiconductor device
11/01/2001	US20010036687 Substrateless chip scale package and method of making same
11/01/2001	US20010036686 Methods of forming an integrated circuit device
11/01/2001	US20010036685 Manufacturing method for semiconductor device
11/01/2001	US20010036680 Method of manufacturing thin film transistor panel having protective film of channel region
11/01/2001	US20010036678 Group-III nitride semiconductor light-emitting device and manufacturing method for the same
11/01/2001	US20010036677 Semiconductor wafer having identification indication and method of manufacturing the same
11/01/2001	US20010036676 Semiconductor wafer polishing endpoint detecting system and method therefor
11/01/2001	US20010036675 Magnetic memory with structures that prevent disruptions to magnetization in sense layers
11/01/2001	US20010036612 Ramp rate limiter to control stress during ramping
11/01/2001	US20010036604 Projection optical system forming multiple patterns
11/01/2001	US20010036590 Alkali-soluble resin of specific structure, such as a vinylphenol-vinylnaphthalene copolymer, a crosslinking agent causing crosslinking by an acid, and an acid generator; storage stability, resolution, sensitivity
11/01/2001	US20010036589 Chemically amplified resist composition
11/01/2001	US20010036583 Semitransparent phase shifting (SPS) mask has in the periphery pattern element area, a light shielding portion formed by a SPS portion and a transparent portion with optimal size combination; prevents double exposure
11/01/2001	US20010036582 Comprising a rectangular portion, and band-shaped portions separated from opposite sides of the rectangular portion by an equal distance and parallel to the sides; overlay shift accurately obtained even when photoresist heat shrinks
11/01/2001	US20010036581 Photolithography; positioning an exposure mask and an object to be processed to locate the object in a region where near-field light is present, and controlling light intensity as a function of aperture density of the mask
11/01/2001	US20010036561 Device on a receptor substrate two active layers formed by transferring a multicomponent transfer unit from a thermal transfer element comprising the transfer unit and a substrate; organic electroluminescent device
11/01/2001	US20010036514 Partial plating system
11/01/2001	US20010036511 Method for producing organic insulating film
11/01/2001	US20010036509 CVD Process for forming a thin film
11/01/2001	US20010036506 Substrate and process for producing the same
11/01/2001	US20010036434 Single crystal silicon layer, its epitaxial growth method and semiconductor device
11/01/2001	US20010036398 Substrate transport apparatus with multiple arms on a common axis of rotation
11/01/2001	US20010036393 Three chamber load lock apparatus
11/01/2001	US20010036306 Method for evaluating pattern defects on a wafer surface
11/01/2001	US20010036219 Spatially resolved temperature measurement and irradiance control
11/01/2001	US20010036207 Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
11/01/2001	US20010036107 Nonvolatile semiconductor memory, method of reading from and writing to the same and method of manufacturing the same
11/01/2001	US20010036106 Nonvolatile semiconductor memory
11/01/2001	US20010036105 Nonvolatile semiconductor memory device
11/01/2001	US20010036104 Nonvolatile semiconductor memory device for storing multivalued data
11/01/2001	US20010036102 Integrated DRAM memory cell and DRAM memory
11/01/2001	US20010036101 Memory cell configuration
11/01/2001	US20010036099 Method for operating a ferroelectric memory configuration and a ferroelectric memory configuration
11/01/2001	US20010036055 Ferroelectric capacitor and a method for manufacturing thereof
11/01/2001	US20010035959 In-situ mirror characterization
11/01/2001	US20010035951 Surface inspection apparatus and method
11/01/2001	US20010035945 Exposure method, exposure apparatus and device producing method
11/01/2001	US20010035942 Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance method
11/01/2001	US20010035919 Display device
11/01/2001	US20010035911 Radiation detector
11/01/2001	US20010035783 Scan flip-flop circuit having scan logic output terminal dedicated to scan test
11/01/2001	US20010035774 Semiconductor integrated circuit
11/01/2001	US20010035773 I/O cell configuration for multiple I/O standards
11/01/2001	US20010035764 System for testing a semiconductor device
11/01/2001	US20010035763 Method of testing a semiconductive device
11/01/2001	US20010035762 Integrated circuit device and semiconductor wafer having test circuit therein
11/01/2001	US20010035682 Integrated circuit having power supply voltage monitor
11/01/2001	US20010035590 Transfer molding apparatus and method for manufacturing semiconductor devices
11/01/2001	US20010035589 Mask rom cell and method of fabricating the same
11/01/2001	US20010035586 Chip size package semiconductor device without an interposer and method of forming the same
11/01/2001	US20010035585 Semiconductor device having stress reducing laminate and method for manufacturing the same
11/01/2001	US20010035584 Semiconductor device and manufacturing method therefor
11/01/2001	US20010035583 Semiconductor device with pure copper wirings and method of manufacturing a semiconductor device with pure copper wirings
11/01/2001	US20010035582 Hard mask for copper plasma etch
11/01/2001	US20010035581 Electronic devices with barium barrier film and process for making same
11/01/2001	US20010035580 Semiconductor device and its manufacturing method
11/01/2001	US20010035579 Resin-molded unit including an electronic circuit component
11/01/2001	US20010035578 Thermal conducting trench in a semiconductor structure and method for forming the same
11/01/2001	US20010035575 Semiconductor device and manufacturing method thereof
11/01/2001	US20010035569 Resin-packaged semiconductor device
11/01/2001	US20010035567 Semiconductor wafer having a bank on a scribe line
11/01/2001	US20010035566 Semiconductor device and process for producing the same
11/01/2001	US20010035564 Semiconductor device for integrated injection logic cell and process for fabricating the same
11/01/2001	US20010035561 Semiconductor configuration
11/01/2001	US20010035560 Diode and method for manufacturing the same
11/01/2001	US20010035558 Sacrificial spacer for integrated circuit transistors
11/01/2001	US20010035557 Methods for fabricating CMOS integrated circuits including a source/drain plug
11/01/2001	US20010035556 Display apparatus and manufacture method thereof
11/01/2001	US20010035555 Semiconductor device and method of fabricating the same
11/01/2001	US20010035554 Semiconductor device and the method of manufacturing the same
11/01/2001	US20010035552 Semiconductor device producing method and semiconductor device
11/01/2001	US20010035551 Method of fabricating a stack capacitor DRAM
11/01/2001	US20010035550 Semiconductor device and manufacturing method therefor
11/01/2001	US20010035549 Circuits with a trench capacitor having micro-roughened semiconductor surfaces
11/01/2001	US20010035548 Dynamic random access memory
11/01/2001	US20010035547 Semiconductor device and method of fabricating same
11/01/2001	US20010035546 Semiconductor memory device
11/01/2001	US20010035545 MRAM memory
11/01/2001	US20010035544 Semiconductor device and method for fabricating the same
11/01/2001	US20010035543 Confinement of E-fields in high density ferroelectric memory device structures
11/01/2001	US20010035542 Frame shutter pixel with an isolated storage node
11/01/2001	US20010035541 Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures
11/01/2001	US20010035538 Charge coupled device having charge accumulating layer free from tow-dimensional effect under miniaturization and process for fabrication thereof
11/01/2001	US20010035536 Integrated semiconductor circuit, in particular a semiconductor memory configuration, and method for its operation
11/01/2001	US20010035535 Cutting blade detection mechanism for a cutting machine
11/01/2001	US20010035534 Semiconductor device
11/01/2001	US20010035533 Semiconductor device and process for fabrication thereof
11/01/2001	US20010035531 Nitride-based semiconductor device and manufacturing method thereof
11/01/2001	US20010035530 Vapor phase deposition system
11/01/2001	US20010035528 Method of fabricating thin-film transistor
11/01/2001	US20010035527 Active matrix substrate and manufacturing method thereof
11/01/2001	US20010035525 Semiconductor device having a test pattern same as conductive pattern to be tested and method for testing semiconductor device for short-circuit

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