H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2001
11/07/2001	EP1152457A1 Process and apparatus for treatment of a substrate
11/07/2001	EP1152456A2 Method and apparatus for robots having temperature sensitive applications
11/07/2001	EP1152455A1 Transportation container and method for opening and closing lid thereof
11/07/2001	EP1152430A2 Ram devices
11/07/2001	EP1152429A2 Data storage device
11/07/2001	EP1152295A1 Tertiary-butyl acrylate polymers and their use in photoresist compositions
11/07/2001	EP1152291A2 Photomask blank and photomask
11/07/2001	EP1152290A2 Method for fabricating a photolithographic mask
11/07/2001	EP1152289A2 Hybrid phase-shift mask
11/07/2001	EP1152288A1 Phase-shift mask
11/07/2001	EP1152250A2 Integrated circuit having power supply voltage monitor
11/07/2001	EP1152071A1 Copper plating method
11/07/2001	EP1152046A1 Polishing composition and polishing method employing it
11/07/2001	EP1152044A1 Solution for forming silica coating film, process for producing the same, and silica coating film and process for producing the same
11/07/2001	EP1152036A1 Water-soluble resin composition
11/07/2001	EP1151479A2 Optical detector with a filter layer made of porous silicon and method for the production thereof
11/07/2001	EP1151478A1 Power mos element and method for producing the same
11/07/2001	EP1151476A1 Semiconductor device having a field effect transistor and a method of manufacturing such a device
11/07/2001	EP1151475A1 Ferrolectric memory with ferroelectric thin film and method of fabrication
11/07/2001	EP1151474A1 Programmable semiconductor device structures and methods for making the same
11/07/2001	EP1151473A1 Air gap dielectric in self-aligned via structures
11/07/2001	EP1151472A1 Method for vertically integrating active circuit planes and vertically integrated circuit produced using said method
11/07/2001	EP1151471A1 Method for protecting an integrated circuit chip
11/07/2001	EP1151470A1 Ferroelectric device with capping layer and method of making same
11/07/2001	EP1151465A1 High-density plasma source for ionized metal deposition
11/07/2001	EP1151365A1 Rapid on chip voltage generation for low power integrated circuits
11/07/2001	EP1151314A1 Imaging using spatial frequency filtering and masking
11/07/2001	EP1151211A1 Method and device for vibration control
11/07/2001	EP1151155A1 Cdv method of and reactor for silicon carbide monocrystal growth
11/07/2001	EP1151147A1 Plasma deposition method and apparatus with magnetic bucket and concentric plasma and material source
11/07/2001	EP1150808A1 Workpiece handling robot
11/07/2001	EP1150807A1 Improved handling of wet thin wafers
11/07/2001	EP1068214A4 Lewis base adducts of anhydrous mononuclear tris(beta-diketonate) bismuth compositions for deposition of bismuth-containing films, and method of making the same
11/07/2001	EP1007761B1 Gas distribution system for a process reactor and method for processing semiconductor substrates
11/07/2001	EP0944923B1 Ultra-low power-delay product nnn/ppp logic devices
11/07/2001	EP0944915B1 Process for manufacturing a capacitor in a semiconductor arrangement
11/07/2001	EP0907481B1 Injection molding apparatus and method
11/07/2001	EP0857224A4 Durable plasma treatment apparatus and method
11/07/2001	EP0838092B1 Electrically erasable programmable rom memory cell array and a method of producing the same
11/07/2001	EP0757846B1 Electronic component comprising a thin-film structure with passive elements
11/07/2001	EP0748521B1 Over-erase detection in a low voltage one transistor flash eeprom cell using fowler-nordheim programming and erase
11/07/2001	CN1321411A Printed wiring board and method of producing same
11/07/2001	CN1321410A Printed wiring board and method of producing same
11/07/2001	CN1321409A Soldering of semiconductor chip to substrate
11/07/2001	CN1321359A Very fine grain field programmable gate array architecture and circuitry
11/07/2001	CN1321336A Silicon on insulator structure from low-defect density single crystal silicon
11/07/2001	CN1321335A Heat sink mfg. device and mfg. method
11/07/2001	CN1321334A Thermally annealed silicon wafers having improved intrinsic gettering
11/07/2001	CN1321333A Wafer holder
11/07/2001	CN1321263A Semiconductor device
11/07/2001	CN1321060A Laser imaging of thin film circuit material
11/07/2001	CN1320973A Magnetic memory element, magnetic memory and method for mfg magnetic memory
11/07/2001	CN1320970A Method and apparatus for mfg. compound semiconductor device
11/07/2001	CN1320968A Semiconductor device and mfg. method thereof
11/07/2001	CN1320967A CMOS semiconductor device and mfg. method thereof
11/07/2001	CN1320965A Semiconductor package and mfg. method thereof
11/07/2001	CN1320964A Semiconductor device and mfg. method thereof
11/07/2001	CN1320962A Method for controlling cracking of ceramic thick-film circuit
11/07/2001	CN1320961A Anisotropic electrically conductive binding material and connecting method
11/07/2001	CN1320960A Interconnection method without lead bosses
11/07/2001	CN1320959A Process for preparing tin balls used for package welding of chip
11/07/2001	CN1320958A Semiconductor device with reliable electric connection
11/07/2001	CN1320957A Method for installing semiconductor chip
11/07/2001	CN1320956A Electronic device without wiring
11/07/2001	CN1320955A Process for preparing structural material and device of quantum wire FET
11/07/2001	CN1320954A Laser treating method
11/07/2001	CN1320953A Method for forming electroless plated metal lining
11/07/2001	CN1320952A Process for preparing film cathode of nm carbon tubes used for generating catalyst particles
11/07/2001	CN1320951A Semiconductor device, its mfg. method and chip contg. epoxy resin compoistion
11/07/2001	CN1320950A Semiconductor device producing system and method
11/07/2001	CN1320948A Internal surface ion implantation apparatus
11/07/2001	CN1320947A DC plasma ion implantation apparatus with grounded conducting net
11/07/2001	CN1320928A Method for reading-out and storing ferroelectric transistor state, and storage array
11/07/2001	CN1320840A Shield nozzle for control of gas spray in super ultraviolet light source
11/07/2001	CN1074583C Drycorrosion apparatus
11/07/2001	CN1074550C Method for forming photoresist pattern
11/06/2001	US6314554 Method of generating mask pattern data for graphics and apparatus for the same
11/06/2001	US6314548 Automatic maximum theoretical yield calculating apparatus and computer-readable recording medium storing programs for automatic maximum theoretical yield calculation with a computer
11/06/2001	US6314543 Method of placing marks for alignment accuracy measurement
11/06/2001	US6314440 Pseudo random number generator
11/06/2001	US6314385 Method for controlling maintenance of semiconductor fabricating equipment arranged in a processing line
11/06/2001	US6314379 Integrated defect yield management and query system
11/06/2001	US6314332 Multiple semiconductor test system for testing a plurality of different semiconductor types
11/06/2001	US6314022 Nonvolatile semiconductor memory device and method for manufacturing the same, microcomputer-mixed flash memory and method for manufacturing the same
11/06/2001	US6314021 Nonvolatile semiconductor memory device and semiconductor integrated circuit
11/06/2001	US6314020 Analog functional module using magnetoresistive memory technology
11/06/2001	US6314017 Semiconductor memory device
11/06/2001	US6313953 Gas chemical filtering for optimal light transmittance; and methods
11/06/2001	US6313916 Position detecting system and projection exposure apparatus with the same
11/06/2001	US6313905 Apparatus and method for defining a pattern on a substrate
11/06/2001	US6313903 Resist coating and developing unit
11/06/2001	US6313898 Liquid crystal display device having intermediate alignment film in a region between adjacent pixels
11/06/2001	US6313728 Stabilized polysilicon resistor and a method of manufacturing it
11/06/2001	US6313694 Internal power voltage generating circuit having a single drive transistor for stand-by and active modes
11/06/2001	US6313676 Synchronous type semiconductor integrated circuit having a delay monitor controlled by a delay control signal obtained in a delay measuring mode
11/06/2001	US6313655 Semiconductor component and method for testing and operating a semiconductor component
11/06/2001	US6313654 Device testing apparatus and test method
11/06/2001	US6313652 Test and burn-in apparatus, in-line system using the test and burn-in apparatus, and test method using the in-line system
11/06/2001	US6313650 Insert testing system
11/06/2001	US6313649 Wafer probe station having environment control enclosure

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