H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2001
11/08/2001	US20010039123 Method of manufacturing a semiconductor integrated circuit device
11/08/2001	US20010039122 Method of manufacturing a semiconductor integrated circuit device
11/08/2001	US20010039121 Methods of forming an electrical contact to semiconductive material
11/08/2001	US20010039120 Use of residual organic compounds to facilitate gate break on a carrier substrate for a semiconductor device
11/08/2001	US20010039119 Semiconductor wafer and method for fabrication thereof
11/08/2001	US20010039118 Liquid treatment equipment, liquid treatment method, semiconductor device manufacturing method, and semiconductor device manufacturing equipment
11/08/2001	US20010039117 Film formation method, semiconductor element and method thereof, and method of manufacturing a disk-shaped storage medium
11/08/2001	US20010039116 Fabrication method for semiconductor device
11/08/2001	US20010039115 Method and apparatus for manufacturing semiconductor devices
11/08/2001	US20010039114 Method Of Forming Contact Or Wiring In Semiconductor Device
11/08/2001	US20010039112 Semiconductor processing methods of forming openings in a material
11/08/2001	US20010039111 Semiconductor devices and methods for manufacturing the same
11/08/2001	US20010039110 Semiconductor apparatus and semiconductor apparatus manufacturing method
11/08/2001	US20010039108 Method for forming gate
11/08/2001	US20010039107 Semiconductor device and method of manufacture thereof
11/08/2001	US20010039106 Process for producing an integrated semiconductor memory configuration
11/08/2001	US20010039105 Method for producing an ohmic contact
11/08/2001	US20010039104 Semiconductor substrate, light-emitting device, and method for producing the same
11/08/2001	US20010039103 Process for producing crystalline silicon thin film
11/08/2001	US20010039102 Methods of fabricating gallium nitride semiconductor layers by lateral growth from sidewalls into trenches, and gallium nitride semiconductor structures fabricated thereby
11/08/2001	US20010039101 Method for converting a reclaim wafer into a semiconductor wafer
11/08/2001	US20010039100 Isolated structure and method of fabricating such a structure on a substrate
11/08/2001	US20010039099 Method of forming STI oxide regions and alignment marks in a semiconductor structure with one masking step
11/08/2001	US20010039098 Method for fabricating silicon-on-insulator material
11/08/2001	US20010039097 Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same
11/08/2001	US20010039096 Low voltage high performance semiconductor devices and methods
11/08/2001	US20010039095 Process for producing a bipolar transistor with self-aligned emitter and extrinsic base
11/08/2001	US20010039094 Method of making an igfet using solid phase diffusion to dope the gate, source and drain
11/08/2001	US20010039093 Method for manufacturing semiconductor devices
11/08/2001	US20010039092 Semiconductor device and process of manufacturing the same
11/08/2001	US20010039091 Non-volatile semiconductor memory device having vertical transistors and fabrication method therefor
11/08/2001	US20010039090 Structure of capacitor and method for fabricating the same
11/08/2001	US20010039089 Memory array having a digit line buried in an isolation region and method for forming same
11/08/2001	US20010039088 Self-aligned trench capacitor capping process for high density dram cells
11/08/2001	US20010039087 Dram trench capacitor
11/08/2001	US20010039086 Semiconductor memory device and method of fabricating the same
11/08/2001	US20010039085 Methods of forming semicoductor circuit constructions and capacitor constructions
11/08/2001	US20010039084 Capacitor and method for fabricating the same
11/08/2001	US20010039083 Integrated circuit processing with improved gate electrode fabrication
11/08/2001	US20010039081 Thin film transistor for preventing a back channel effect and a method for fabricating the same
11/08/2001	US20010039080 Terpolymer of 1-adamantyl-1-alkylalkyl (meth)acrylate, a norbornene, and maleic anhydride or itaconic anhydride; acid generating agent; sensitivity; resolution
11/08/2001	US20010039079 Semiconductor device including a charge-dispersing region and fabricating method thereof
11/08/2001	US20010039077 Semiconductor Constructions Compromising Aluminum-Containing Layers
11/08/2001	US20010039076 Semiconductor device and tape carrier, and method of manufacturing the same, circuit board, electronic instrument, and tape carrier manufacturing device
11/08/2001	US20010039071 Method of forming board -on -chip packages
11/08/2001	US20010039069 Distributed feedback semiconductor laser element and method for making the same
11/08/2001	US20010039067 Novel optical sensor by using tunneling diode
11/08/2001	US20010039064 Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same
11/08/2001	US20010039063 Methods for determining wavelength and pulse length of radiant energy used for annealing
11/08/2001	US20010039062 Method and apparatus for sealing a chip carrier and lid
11/08/2001	US20010038988 Hot plate cooling method and heat processing apparatus
11/08/2001	US20010038973 Fabrication of semicoductor devices using anti- reflective coatings
11/08/2001	US20010038972 Multilayer; barrier oxide, silicon nitride and metal layer on substrate
11/08/2001	US20010038970 Deep ultraviolet radiation photoresists
11/08/2001	US20010038968 Alicyclic photosensitive polymer, resist composition containing the same and method of preparing the resist composition
11/08/2001	US20010038965 Cresol or xylenol resin that has been esterified with 1,2-naphthoquinonediazide-4 or 5-sulfonic acid
11/08/2001	US20010038953 Multilayer
11/08/2001	US20010038952 Light shield film pattern
11/08/2001	US20010038951 Photomask and method of manufacturing same
11/08/2001	US20010038950 Semiconductor
11/08/2001	US20010038919 Plasma curing process for porous silica thin film
11/08/2001	US20010038889 Method and system for modifying and densifying a porous film
11/08/2001	US20010038886 Method of manufacturing semiconductor device
11/08/2001	US20010038884 Method for forming coating film on a plate-like workpiece
11/08/2001	US20010038791 Method for aligning wafers in a cassette
11/08/2001	US20010038783 Dual loading port semiconductor processing equipment
11/08/2001	US20010038708 Inspection data analyzing system
11/08/2001	US20010038655 Semiconductor devices
11/08/2001	US20010038654 Semiconductor laser element, semiconductor etchant, and method of fabricating the semiconductor laser element
11/08/2001	US20010038637 Clocked integrated semiconductor circuit and method for operating such a circuit
11/08/2001	US20010038561 Integrated semiconductor memory having memory cells with a ferroelectric memory property
11/08/2001	US20010038556 Bus driving circuit and memory device having same
11/08/2001	US20010038555 Nonvolatile memory and semiconductor device
11/08/2001	US20010038552 Semiconductor memory with switches for reducing leakage current
11/08/2001	US20010038549 Cell array, operating method of the same and manufacturing method of the same
11/08/2001	US20010038548 Write circuit for large MRAM arrays
11/08/2001	US20010038518 Contol circuit for semiconductor device with overheat protecting function
11/08/2001	US20010038500 Optical element holding device for exposure apparatus
11/08/2001	US20010038497 Lens barrel and projection aligner
11/08/2001	US20010038485 Electro-optical device, manufacturing method for manufacturing electro-optical device, and electronic equipment
11/08/2001	US20010038455 Apparatus and method for measuring two opposite surfaces of a body
11/08/2001	US20010038448 Method of and device for detecting micro-scratches
11/08/2001	US20010038442 Method and apparatus for a non-contact scavenging seal
11/08/2001	US20010038441 Exposure apparatus and device manufacturing method using the same in which a door lock mechanism is controlled on the basis of temperature and an operation sequence
11/08/2001	US20010038367 Light emitting device
11/08/2001	US20010038307 Bias circuit of transistor
11/08/2001	US20010038296 Semiconductor component for controlling power semiconductor switches
11/08/2001	US20010038295 Rambus handler
11/08/2001	US20010038166 Method of underfilling an integrated circuit chip
11/08/2001	US20010038154 Semiconductor device
11/08/2001	US20010038153 Semiconductor substrate and process for its production
11/08/2001	US20010038152 Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate
11/08/2001	US20010038150 Semiconductor device manufactured by package group molding and dicing method
11/08/2001	US20010038149 Multilayered wiring structure and method of manufacturing the same
11/08/2001	US20010038147 Semiconductor device manufacturing method and semiconductor device
11/08/2001	US20010038146 High-frequency circuit and its module for communication devices
11/08/2001	US20010038139 Bipolar transistor and semiconductor device having the same
11/08/2001	US20010038138 High voltage shield
11/08/2001	US20010038137 Device isolation for semiconductor devices
11/08/2001	US20010038136 Metal-gate field effect transistor and method for manufacturing the same

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