H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2001
11/15/2001	CA2308820A1 Wireless radio frequency technique design and method for testing of integrated circuits and wafers
11/14/2001	EP1154493A2 Light-emitting semiconductor device having quantum dots
11/14/2001	EP1154491A1 Semiconductor device and manufacturing method thereof
11/14/2001	EP1154488A1 A semiconductor memory device and a manufacturing method of the same
11/14/2001	EP1154487A1 Semiconductor memory and method of driving semiconductor memory
11/14/2001	EP1154481A2 Interposer and semiconductor device using it
11/14/2001	EP1154479A2 Multiple line grid for use in a packaging or a testing application
11/14/2001	EP1154478A2 Sheet-like board member, lead frame, and manufacture of a semiconductor device
11/14/2001	EP1154474A1 Semiconductor device and method of manufacture thereof
11/14/2001	EP1154473A2 Sheet-like board member and method of manufacturing a semiconductor device
11/14/2001	EP1154472A1 Process for fabrication of semiconductor devices having copper interconnects
11/14/2001	EP1154471A1 Semiconductor chip and manufacture method thereof
11/14/2001	EP1154470A2 Semiconductor unit packaging method
11/14/2001	EP1154468A2 Method of depositing an amorphous carbon layer
11/14/2001	EP1154467A2 Bi-layer etch stop for inter-level via
11/14/2001	EP1154466A1 Method and apparatus for plasma processing
11/14/2001	EP1154465A1 Device for encapsulating electronic components
11/14/2001	EP1154438A2 Programmable circuit with preview function
11/14/2001	EP1154437A2 Low voltage flash EEPROM mmory cell with improved data retention
11/14/2001	EP1154436A2 Semiconductor memory device
11/14/2001	EP1154324A1 Composition for antireflection coating
11/14/2001	EP1154321A1 Chemical amplification type positive resist compositions and sulfonium salts
11/14/2001	EP1154310A2 Semiconductor device and method of driving the same
11/14/2001	EP1154048A1 Silicon wafer for epitaxial wafer, epitaxial wafer, and method of manufacture thereof
11/14/2001	EP1154040A2 Reduction of plasma edge effect on plasma enhanced CVD processes
11/14/2001	EP1154039A1 A rapid thermal processing apparatus for processing semiconductor wafers
11/14/2001	EP1154038A1 Method of conditioning a chamber for chemical vapor deposition
11/14/2001	EP1154037A1 Methods for improving chemical vapor deposition processing
11/14/2001	EP1154036A1 Gas reactions to eliminate contaminates in a CVD chamber
11/14/2001	EP1154002A1 Pressure-sensitive adhesive sheet exfoliative with heat
11/14/2001	EP1153980A1 Epoxy resin composition
11/14/2001	EP1153915A2 Method for producing 1,2-naphthoquinone-diazide photosensitive agent
11/14/2001	EP1153888A1 Method of producing inorganic compound solid substance and method of manufacturing semiconductor device
11/14/2001	EP1153739A1 Aerogel substrate and method for preparing the same
11/14/2001	EP1153697A2 Method and apparatus for cutting a semiconductor wafer
11/14/2001	EP1153437A1 Bipolar transistor and method for producing same
11/14/2001	EP1153435A1 Mos transistor with dynamic threshold voltage equipped with a current limiting device and method for making same
11/14/2001	EP1153433A1 High density electronic package
11/14/2001	EP1153432A1 Method for the production of a chip-card type portable storage medium
11/14/2001	EP1153430A1 Method for galvanically forming conductor structures of high-purity copper in the production of integrated circuits
11/14/2001	EP1153428A1 Thin film transistor and method of manufacturing the same
11/14/2001	EP1153427A1 Improvement of liquid deposition by selection of liquid viscosity and other precursor properties
11/14/2001	EP1153426A1 Use of multifunctional si-based oligomer/polymer for the surface modification of nanoporous silica films
11/14/2001	EP1153425A1 Method for plasma etching with pulsed substrate electrode power
11/14/2001	EP1153424A1 Capacitor electrode structure
11/14/2001	EP1153423A1 Method for fabricating thin film semiconductor devices
11/14/2001	EP1153421A1 Method and device for treating tabular substrates, especially silicon wafers for producing microelectronic elements
11/14/2001	EP1153420A1 Resistively heated single wafer furnace
11/14/2001	EP1153418A1 Method and device for cleaning substrates
11/14/2001	EP1153417A1 Method and device for treating substrates
11/14/2001	EP1153411A1 Method and apparatus for electron beam column assembly with precise alignment using displaced semi-transparent membranes
11/14/2001	EP1153336A1 Chemical filtering for optimising the light transmittance of a gas
11/14/2001	EP1153267A1 Tuning fork gyroscope
11/14/2001	EP1153265A1 Method and device for inspecting objects
11/14/2001	EP1152964A1 Port door retention and evacuation system
11/14/2001	EP1152906A1 Local vectorial particle cleaning
11/14/2001	EP1152868A1 Robot having multiple degrees of freedom
11/14/2001	EP1152865A1 Polishing pad and process for forming same
11/14/2001	EP1152861A1 Method for producing building components, use thereof, airbearing workpiece and vacuum treatment chamber
11/14/2001	EP1152839A1 Method and device for treating substrates
11/14/2001	EP1078371B1 Circuit with a sensor and non-volatile memory
11/14/2001	EP1076930A4 Surface acoustic wave device package and method
11/14/2001	EP1036414A4 Chip scale package using large ductile solder balls
11/14/2001	EP1016092A4 Method and apparatus for producing extreme ultra-violet light for use in photolithography
11/14/2001	EP0928486B1 Device and method for testing integrated circuit dice in an integrated circuit module
11/14/2001	EP0919013B1 Antireflective coatings for photoresist compositions
11/14/2001	EP0896732B1 Sputtering installation with two longitudinally placed magnetrons
11/14/2001	EP0815480B1 Scanning lithography system having double pass wynne-dyson optics
11/14/2001	EP0804804B1 Method of etching a polysilicon pattern
11/14/2001	EP0793855B1 Plasma processor for large workpieces
11/14/2001	EP0742959B1 Method of producing a solar cell and solar cell produced using this method
11/14/2001	EP0731972B1 A capacitorless dram device on silicon-on-insulator substrate
11/14/2001	EP0719299B1 Adhesive paste containing polymeric resin
11/14/2001	CN2459831Y Image sensor
11/14/2001	CN2459755Y Structure of IC chip
11/14/2001	CN2459754Y Integrated circuit
11/14/2001	CN2459753Y Vacuum cabin door open/close mechanism
11/14/2001	CN1322379A Nonvolatile memory
11/14/2001	CN1322378A Method for reducing die cracking in integrated circuits
11/14/2001	CN1322375A Electronic device and method of manufacture thereof
11/14/2001	CN1322367A Method for mfg. electronic device of ceramic
11/14/2001	CN1322229A Adhesive for bonding circuit members, circuit board, and method of producing same
11/14/2001	CN1322185A Aluminium oxide particles
11/14/2001	CN1322105A Method for mfg. multilayer integrated substrate and multilayer ceramic element
11/14/2001	CN1322016A Silicon and germanium layer-contg. complementary metal oxide semiconductor device and substrate, and forming method thereof
11/14/2001	CN1322013A Integrated complementary metal oxide semiconductor circuit
11/14/2001	CN1322012A Semiconductor device and mfg. method thereof
11/14/2001	CN1322010A Protsusion forming method, semiconductor device and its mfg. method, circuit board and electronic machine
11/14/2001	CN1322009A Spin coating glass composition and method for forming silica layer in production of semiconductor
11/14/2001	CN1322007A Plasma processing device
11/14/2001	CN1322006A Growth method of gallium nitride series compound semiconductor with amorphous and polycrystalline structure
11/14/2001	CN1322005A Method and device for regeneration of waste solvent
11/14/2001	CN1321986A Integrated memory having plate conducting line segment
11/14/2001	CN1321985A Magnetic random access memory
11/14/2001	CN1321914A Method for mfg. thin film transistor panel with channel zone protection film
11/14/2001	CN1321898A Three-D installed element, its mfg. method and optical transmission device
11/14/2001	CN1321715A Adhesive of fixing matrix for microelectronic device
11/14/2001	CN1074857C Method for forming metal wiring of semiconductor device
11/14/2001	CN1074856C Method for forming tungsten wiring
11/14/2001	CN1074840C Acid development-less gas-phase photoresist and its process to photoetch silicon nitride

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