| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 11/13/2001 | US6316337 Production process of SOI substrate |
| 11/13/2001 | US6316336 Method for forming buried layers with top-side contacts and the resulting structure |
| 11/13/2001 | US6316335 Method for fabricating semiconductor device |
| 11/13/2001 | US6316333 Method for obtaining a thin film in particular semiconductor, comprising a protected ion zone and involving an ion implantation |
| 11/13/2001 | US6316332 Method for joining wafers at a low temperature and low stress |
| 11/13/2001 | US6316331 Method of making dishing-free insulator in trench isolation |
| 11/13/2001 | US6316330 Method of fabricating a shallow trench isolation semiconductor device |
| 11/13/2001 | US6316329 Forming a trench mask comprising a DLC and ASH protecting layer |
| 11/13/2001 | US6316328 Fabrication method for semiconductor device utilizing parallel alignment slits |
| 11/13/2001 | US6316327 Semiconductor processing methods of forming devices on a substrate, forming device arrays on a substrate, forming conductive lines on a substrate, and forming capacitor arrays on a substrate, and integrated circuitry |
| 11/13/2001 | US6316326 Gapped-plate capacitor |
| 11/13/2001 | US6316325 Method for fabricating a thin film resistor |
| 11/13/2001 | US6316324 Method of manufacturing semiconductor device without forming selective region by lithography |
| 11/13/2001 | US6316323 Method for forming bridge free silicide by reverse spacer |
| 11/13/2001 | US6316322 Method for fabricating semiconductor device |
| 11/13/2001 | US6316321 Method for forming MOSFET |
| 11/13/2001 | US6316320 DRAM device with improved memory cell reliability |
| 11/13/2001 | US6316319 Method of manufacturing a semiconductor device having shallow junctions |
| 11/13/2001 | US6316318 Angled implant to build MOS transistors in contact holes |
| 11/13/2001 | US6316317 Nonvolatile semiconductor memory device including two-transistor type memory cells and its manufacturing method |
| 11/13/2001 | US6316316 Method of forming high density and low power flash memories with a high capacitive-coupling ratio |
| 11/13/2001 | US6316315 Method for fabricating a memory cell having a MOS transistor |
| 11/13/2001 | US6316314 Nonvolatile semiconductor memory device and fabrication method |
| 11/13/2001 | US6316313 Method of manufacturing a flash memory device |
| 11/13/2001 | US6316312 Capacitor structures, DRAM cell structures, methods of forming capacitors, methods of forming DRAM cells, and integrated circuits incorporating capacitor structures and DRAM cell structures |
| 11/13/2001 | US6316311 Method of forming borderless contact |
| 11/13/2001 | US6316310 Method of forming a buried plate |
| 11/13/2001 | US6316309 Method of forming self-isolated and self-aligned 4F-square vertical FET-trench DRAM cells |
| 11/13/2001 | US6316308 Methods to form electronic devices |
| 11/13/2001 | US6316307 Method of forming a capacitor for a semiconductor memory device |
| 11/13/2001 | US6316306 Memory cell array in a dynamic random access memory and method for fabricating the same |
| 11/13/2001 | US6316305 Compact SRAM cell using tunnel diodes |
| 11/13/2001 | US6316304 Method of forming spacers of multiple widths |
| 11/13/2001 | US6316303 Method of fabricating a MOS transistor having SEG silicon |
| 11/13/2001 | US6316302 Isotropically etching sidewall spacers to be used for both an NMOS source/drain implant and a PMOS LDD implant |
| 11/13/2001 | US6316300 Method of manufacturing a semiconductor device having an oxidation process for selectively forming an oxide film |
| 11/13/2001 | US6316299 Formation of laterally diffused metal-oxide semiconductor device |
| 11/13/2001 | US6316298 Fabrication method for a flash memory device |
| 11/13/2001 | US6316297 Semiconductor device and method for fabricating the same |
| 11/13/2001 | US6316296 Field-effect transistor and method of manufacturing same |
| 11/13/2001 | US6316295 Thin film transistor and its fabrication |
| 11/13/2001 | US6316294 Thin film transistor and a fabricating method thereof |
| 11/13/2001 | US6316293 Method of forming a nand-type flash memory device having a non-stacked gate transistor structure |
| 11/13/2001 | US6316291 Method of fabricating a non-laminate carrier substrate utilizing a mold |
| 11/13/2001 | US6316290 Method of fabricating a semiconductor device utilizing a residual organic compound to facilitate gate break on a carrier substrate |
| 11/13/2001 | US6316289 Method of forming fine-pitch interconnections employing a standoff mask |
| 11/13/2001 | US6316288 Semiconductor device and methods of manufacturing film camera tape |
| 11/13/2001 | US6316287 Chip scale surface mount packages for semiconductor device and process of fabricating the same |
| 11/13/2001 | US6316285 Passivation layer for packaged integrated circuits |
| 11/13/2001 | US6316284 Infrared correction in color scanners |
| 11/13/2001 | US6316282 Method of etching a wafer layer using multiple layers of the same photoresistant material |
| 11/13/2001 | US6316278 Methods for fabricating a multiple modular assembly |
| 11/13/2001 | US6316277 Tuning substrate/resist contrast to maximize defect inspection sensitivity for ultra-thin resist in DUV lithography |
| 11/13/2001 | US6316276 Apparatus and method of planarizing a semiconductor wafer that includes a first reflective substance and a second reflective substance |
| 11/13/2001 | US6316275 Method for fabricating a semiconductor component |
| 11/13/2001 | US6316170 Developing solution and method of forming polyimide pattern by using the developing solution |
| 11/13/2001 | US6316169 Removal of photoresist from semiconductors, masking and forming polymer layer |
| 11/13/2001 | US6316168 Top layer imaging lithography for semiconductor processing |
| 11/13/2001 | US6316167 Lithography structure with multilayer element |
| 11/13/2001 | US6316166 Forming micro patterns, masking layer, etching a photoresists pattern for semiconductors |
| 11/13/2001 | US6316165 Planarizing antireflective coating compositions |
| 11/13/2001 | US6316151 Exposure mask in nonoptical lithographic process using electron beams, x-rays or ion beams |
| 11/13/2001 | US6316150 Low thermal distortion extreme-UV lithography reticle |
| 11/13/2001 | US6316123 Microwave annealing |
| 11/13/2001 | US6316100 Nickel powders, methods for producing powders and devices fabricated from same |
| 11/13/2001 | US6316064 Chemical vapor deposition using a specific organoruthenium complex, a beta-diketonato ruthenium useful as a ruthenium source |
| 11/13/2001 | US6316045 Using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and first gas analyzer means for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. |
| 11/13/2001 | US6315953 Devices for molecular biological analysis and diagnostics including waveguides |
| 11/13/2001 | US6315936 Encapsulation method using non-homogeneous molding compound pellets |
| 11/13/2001 | US6315913 Structuring method |
| 11/13/2001 | US6315912 Process for forming a lower electrode of a cylindrical capacitor |
| 11/13/2001 | US6315883 Providing partially fabricated integrated circuit having dielectric layer with trenches; forming conformal layer of conductive material over dielectric layer, selectively applying diffusion barrier film to recesses; electropolishing |
| 11/13/2001 | US6315879 Modular deposition system having batch processing and serial thin film deposition |
| 11/13/2001 | US6315878 Substrate support and lift apparatus and method |
| 11/13/2001 | US6315874 Method of depositing thin film of metal oxide by magnetron sputtering apparatus |
| 11/13/2001 | US6315872 Coil for sputter deposition |
| 11/13/2001 | US6315859 Apparatus and method for improving uniformity in batch processing of semiconductor wafers |
| 11/13/2001 | US6315858 Gas polishing apparatus and method |
| 11/13/2001 | US6315836 Such as a semiconductor, semi-conductor wafer, glass for lcd or magnetic disk. |
| 11/13/2001 | US6315833 Silicon carbide sleeve for substrate support assembly |
| 11/13/2001 | US6315832 Single chamber processing apparatus having multi-chamber functions |
| 11/13/2001 | US6315826 Semiconductor substrate and method of manufacturing the same |
| 11/13/2001 | US6315819 Apparatus for making exhaust gas non-toxic |
| 11/13/2001 | US6315803 Polishing composition and polishing process |
| 11/13/2001 | US6315649 Wafer mounting plate for a polishing apparatus and method of using |
| 11/13/2001 | US6315644 Apparatus and process for supplying abrasives for use in the manufacture of semiconductors |
| 11/13/2001 | US6315641 Method and apparatus for chemical mechanical polishing |
| 11/13/2001 | US6315637 Photoresist removal using a polishing tool |
| 11/13/2001 | US6315634 Method of optimizing chemical mechanical planarization process |
| 11/13/2001 | US6315633 Processing jig |
| 11/13/2001 | US6315574 Method for real-time in-line testing of semiconductor wafers |
| 11/13/2001 | US6315540 Molding die for concurrently molding semiconductor chips without voids and wire weep |
| 11/13/2001 | US6315512 Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber |
| 11/13/2001 | US6315501 Air stream particulate collecting transfer apparatus |
| 11/13/2001 | US6315190 Wire bonding method |
| 11/13/2001 | US6315189 Semiconductor package lead plating method and apparatus |
| 11/13/2001 | US6315124 Container for transporting precision substrates |
| 11/13/2001 | US6314974 Potted transducer array with matching network in a multiple pass configuration |
| 11/13/2001 | US6314658 Vacuum processing apparatus and operating method therefor |
| 11/13/2001 | US6314639 Chip scale package with heat spreader and method of manufacture |