| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 11/20/2001 | US6319785 Method for forming a contact in a semiconductor device |
| 11/20/2001 | US6319784 Using high temperature H2 anneal to recrystallize S/D and remove native oxide simultaneously |
| 11/20/2001 | US6319783 Process to fabricate a novel source-drain extension |
| 11/20/2001 | US6319782 Semiconductor device and method of fabricating the same |
| 11/20/2001 | US6319781 Method of fabricating self-aligned multilevel mask ROM |
| 11/20/2001 | US6319780 Process for the fabrication of an integrated circuit comprising MOS transistors for low voltage, EPROM cells and MOS transistors for high voltage |
| 11/20/2001 | US6319779 Semiconductor transistor devices and methods for forming semiconductor transistor devices |
| 11/20/2001 | US6319777 Trench semiconductor device manufacture with a thicker upper insulating layer |
| 11/20/2001 | US6319776 Forming high voltage complementary semiconductor device (HV-CMOS) with gradient doping electrodes |
| 11/20/2001 | US6319775 Nitridation process for fabricating an ONO floating-gate electrode in a two-bit EEPROM device |
| 11/20/2001 | US6319774 Method for forming a memory cell |
| 11/20/2001 | US6319773 Construction and application for non-volatile, reprogrammable switches |
| 11/20/2001 | US6319772 Method for making low-leakage DRAM structures using selective silicon epitaxial growth (SEG) on an insulating layer |
| 11/20/2001 | US6319771 Fabrication process for a lower electrode of a memory capacitor |
| 11/20/2001 | US6319770 Method for fabricating a bottom electrode of a dynamic random access memory capacitor |
| 11/20/2001 | US6319769 Capacitor in a semiconductor device and a fabricating method thereof |
| 11/20/2001 | US6319768 Method for fabricating capacitor in dram cell |
| 11/20/2001 | US6319767 Method to eliminate top metal corner shaping during bottom metal patterning for MIM capacitors via plasma ashing and hard masking technique |
| 11/20/2001 | US6319766 Method of tantalum nitride deposition by tantalum oxide densification |
| 11/20/2001 | US6319765 Method for fabricating a memory device with a high dielectric capacitor |
| 11/20/2001 | US6319764 Method of forming haze-free BST films |
| 11/20/2001 | US6319763 Manufacturing method for semiconductor device |
| 11/20/2001 | US6319762 Method for fabricating poly-spacers |
| 11/20/2001 | US6319761 Method of fabricating a thin film transistor |
| 11/20/2001 | US6319759 Method for making oxide |
| 11/20/2001 | US6319757 Adhesion and/or encapsulation of silicon carbide-based semiconductor devices on ceramic substrates |
| 11/20/2001 | US6319754 Wafer-dicing process |
| 11/20/2001 | US6319753 Semiconductor device having lead terminals bent in J-shape |
| 11/20/2001 | US6319752 Single-layer autorouter |
| 11/20/2001 | US6319751 Bumpless flip chip assembly with solder via |
| 11/20/2001 | US6319746 Optical semiconductor device and method for fabricating the same |
| 11/20/2001 | US6319745 Formation of charge-coupled-device with image pick-up array |
| 11/20/2001 | US6319742 Method of forming nitride based semiconductor layer |
| 11/20/2001 | US6319741 Method for fabricating metal interconnections and wiring board having the metal interconnections |
| 11/20/2001 | US6319740 Multilayer protective coating for integrated circuits and multichip modules and method of applying same |
| 11/20/2001 | US6319739 Mold compound selection for TSOP post mold cure processing |
| 11/20/2001 | US6319738 Two-dimensionally arrayed quantum device fabrication method |
| 11/20/2001 | US6319737 Method and apparatus for characterizing a semiconductor device |
| 11/20/2001 | US6319735 Photoresist dispense method by compensation for substrate reflectivity |
| 11/20/2001 | US6319734 Method for establishing differential injection conditions in mosfet source/drain regions based on determining the permitted amount of energy contamination with respect to desired junction depth |
| 11/20/2001 | US6319733 Method of manufacturing semiconductor device, semiconductor equipment and manufacturing system |
| 11/20/2001 | US6319732 Method for controlling the temperature of a layer growing on a wafer |
| 11/20/2001 | US6319731 Method for manufacturing a non-volatile memory device |
| 11/20/2001 | US6319730 Method of fabricating a semiconductor structure including a metal oxide interface |
| 11/20/2001 | US6319728 Decreasing chemical resistance of copper on surface; deposit copper containing moisture upon substrate, plasma treat copper and monitor chemical resistance |
| 11/20/2001 | US6319727 Method for manufacturing low stress metallic interconnect lines for use in integrated circuits |
| 11/20/2001 | US6319656 Photosensitive polyimide precursor and its use for pattern formation |
| 11/20/2001 | US6319655 Modification of 193 nm sensitive photoresist materials by electron beam exposure |
| 11/20/2001 | US6319654 Preparing a chemical amplification photoresist; coating on a substrate of a semiconductor element to form photoresist film; exposing film to light; silylation; developing to form pattern; etching substrate |
| 11/20/2001 | US6319650 High resolution crosslinkable photoresist composition, compatable with high base concentration aqueous developers method and for use thereof |
| 11/20/2001 | US6319649 Photosensitive resin composition and method of forming resist images |
| 11/20/2001 | US6319644 Methods of reducing proximity effects in lithographic processes |
| 11/20/2001 | US6319642 Analyzing pattern data to determine stripes of pattern to be successively lithographed; successively, for each determined stripe: extracting part of pattern data corresponding to stripe; dividing extracted part of pattern data; distribution |
| 11/20/2001 | US6319641 Scanning exposure method utilizing alignment marks based on scanning direction |
| 11/20/2001 | US6319638 Semiconductor device manufacturing method of accurately performing alignment of patterning, mask for exposure |
| 11/20/2001 | US6319637 Forming patterns and masking to form opaque films |
| 11/20/2001 | US6319636 Frames with membranes over them, absorbers and electron beams |
| 11/20/2001 | US6319635 Mitigation of substrate defects in reticles using multilayer buffer layers |
| 11/20/2001 | US6319634 Projection lithography photomasks and methods of making |
| 11/20/2001 | US6319616 Conductive line structures, substrates, metal oxides and outer metal blanket layer |
| 11/20/2001 | US6319566 Method of molecular-scale pattern imprinting at surfaces |
| 11/20/2001 | US6319565 Applying metal such as antimony from metal hydride and metal hydride mixtures |
| 11/20/2001 | US6319564 Multilayer element with coating a nonconductive organic heavy metal complex to a microporous surface, breaking up the complex and metallization the conductor tracks |
| 11/20/2001 | US6319556 Reflective surface for CVD reactor walls |
| 11/20/2001 | US6319553 Isolation of incompatible processes in a multi-station processing chamber |
| 11/20/2001 | US6319551 Methods and compositions for forming silica, germanosilicate and metal silicate films, patterns and multilayers |
| 11/20/2001 | US6319542 Forming a thin-film microelectronic capacitor on an integrated circuit by forming an buffer layer, a lanthanum doped barium strontium titanate layer, a barium strontium titanate dielectric layer and an upper electrode |
| 11/20/2001 | US6319472 Stacked, multilayer, electronically reconfigurable; for the transport and/or analysis of biological materials like nucleic acids, biological pathogens and toxins |
| 11/20/2001 | US6319450 Encapsulated circuit using vented mold |
| 11/20/2001 | US6319427 Fast luminescent silicon |
| 11/20/2001 | US6319420 Method and apparatus for electrically endpointing a chemical-mechanical planarization process |
| 11/20/2001 | US6319419 Method of manufacturing member for thin-film formation apparatus and the member for the apparatus |
| 11/20/2001 | US6319387 Copper alloy electroplating bath for microelectronic applications |
| 11/20/2001 | US6319386 Submerged array megasonic plating |
| 11/20/2001 | US6319384 Immersion substrate and counterelectrode in electroplating bath; electrolysis with modulated reversing electric current of cathodic pulses; free of brighteners; filling, leveling |
| 11/20/2001 | US6319373 Substrate transfer apparatus of substrate processing system |
| 11/20/2001 | US6319370 Apparatus for photoelectrochemical polishing of silicon wafers |
| 11/20/2001 | US6319355 Plasma processor with coil responsive to variable amplitude rf envelope |
| 11/20/2001 | US6319354 System and method for dicing semiconductor components |
| 11/20/2001 | US6319333 Structure fully undercut, electrically isolated from substrate defining a vertical gap fully separating silicon island and supporting surface; integrated-circuit-processing structure |
| 11/20/2001 | US6319331 Method for processing semiconductor substrate |
| 11/20/2001 | US6319330 Applying surfactant solution to the semiconductor substrate surface, scrubbing the surface; spin-rinsing surface of the substrate using de-ionized water to complete a removal of any contaminants from surface |
| 11/20/2001 | US6319329 Method of cleaning objects to be processed |
| 11/20/2001 | US6319327 MOCVD system |
| 11/20/2001 | US6319324 Method and apparatus for elimination of TEOS/ozone silicon oxide surface sensitivity |
| 11/20/2001 | US6319322 Substrate processing apparatus |
| 11/20/2001 | US6319317 Coating film forming method and coating apparatus |
| 11/20/2001 | US6319316 System and method for performing low contamination extrusion for microelectronics applications |
| 11/20/2001 | US6319297 Modular SMIF pod breather, adsorbent, and purge cartridges |
| 11/20/2001 | US6319106 Wafer polishing apparatus |
| 11/20/2001 | US6319105 Polishing apparatus |
| 11/20/2001 | US6319102 Capacitor coupled chuck for carbon dioxide snow cleaning system |
| 11/20/2001 | US6319099 Apparatus and method for feeding slurry |
| 11/20/2001 | US6319096 Fumed metal oxide liquid carrier for generating uniformed, layered surfaces with minimal defects |
| 11/20/2001 | US6319095 Colloidal suspension of abrasive particles containing magnesium as CMP slurry |
| 11/20/2001 | US6319093 Chemical-mechanical polishing system and method for integrated spin dry-film thickness measurement |
| 11/20/2001 | US6319065 Method and apparatus for forming modular sockets using flexible interconnects and resulting structures |
| 11/20/2001 | US6319019 Selectively reinforced flexible tape carrier packages for liquid crystal display modules |
| 11/20/2001 | US6318957 Method for handling of wafers with minimal contact |
| 11/20/2001 | US6318953 SMIF-compatible open cassette enclosure |