H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2001
11/22/2001	US20010044161 Ventilating method and ventilating system for semiconductor manufacturing apparatuses
11/22/2001	US20010044160 Method for fabricating a patterned metal-oxide-containing layer
11/22/2001	US20010044091 Thermal treatment furnace having gas leakage preventing function
11/22/2001	US20010044058 For patterns formed by lithography or etching to manufacturing semiconductor or optical devices.
11/22/2001	US20010044055 Substrate for damping the beam; metallic filme for interrupting the beam; main patern with openings bored through the supstrate; auxiliary pattern with at least one window partion
11/22/2001	US20010044054 Photomask blank and photomask
11/22/2001	US20010044015 Ceramic board for apparatuses for semiconductor manufacture and inspection
11/22/2001	US20010043992 9-(alk)acryloylalkyleneanthracene; interpolymers with hydroxyalkyl (alk)acrylate and optionally alkyl (alk)acrylate; acetalized poly(alk)acrolein
11/22/2001	US20010043989 Film forming apparatus and film forming method
11/22/2001	US20010043985 Processing methods for providing metal-comprising materials within high aspect ratio openings
11/22/2001	US20010043984 Apparatus for monitoring thickness of deposited layer in reactor and dry processing method
11/22/2001	US20010043860 Reactor for the processing of wafers, with a protection device
11/22/2001	US20010043858 Edge gripping specimen prealigner
11/22/2001	US20010043856 Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces
11/22/2001	US20010043850 Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein
11/22/2001	US20010043849 Apparatus for storing and moving a cassette
11/22/2001	US20010043813 Developing unit and developing method
11/22/2001	US20010043803 Optical disc, recording apparatus, and computer-readable recording medium
11/22/2001	US20010043790 Optical disc, recording apparatus, and computer-readable recording medium
11/22/2001	US20010043734 Method and apparatus for combined particle location and removal
11/22/2001	US20010043666 X-ray exposure apparatus
11/22/2001	US20010043488 Magnetoresistive memory having elevated interference immunity
11/22/2001	US20010043487 Semiconductor memory device
11/22/2001	US20010043486 Asymmetric ram cell
11/22/2001	US20010043478 Ultraviolet cleaning apparatus of a substrate and the method thereof
11/22/2001	US20010043453 Method of forming metal electrodes
11/22/2001	US20010043452 Electrostatic chucks with flat film electrode
11/22/2001	US20010043448 Magnetoresistance effect device, magnetic head therewith, magnetic recording/reproducing head, and magnetic storing apparatus
11/22/2001	US20010043408 Microlithographic illuminating system and microlithographic projection exposure arrangement incorporating said system
11/22/2001	US20010043401 Laser optical apparatus
11/22/2001	US20010043391 Microlithographic reduction projection catadioptric objective
11/22/2001	US20010043326 Foreign substance inspecting method and apparatus, and exposure apparatus using this inspecting apparatus
11/22/2001	US20010043320 Illuminator, exposure apparatus, and method for fabricating device using the same
11/22/2001	US20010043319 Projection exposure apparatus and method
11/22/2001	US20010043318 Illumination optical system for use in projection exposure apparatus
11/22/2001	US20010043314 Exposure method and exposure apparatus
11/22/2001	US20010043204 Display device capable of collecting substantially all power charged to capacitive load in display panel
11/22/2001	US20010043136 Lateral high-Q inductor for semiconductor devices
11/22/2001	US20010043114 Voltage boosting circuit including capacitor with reduced parasitic capacitance
11/22/2001	US20010043085 Semiconductor integrated circuit
11/22/2001	US20010043078 Test configuration for the functional testing of a semiconductor chip
11/22/2001	US20010043076 Method and apparatus for testing semiconductor devices
11/22/2001	US20010043075 Apparatus for inspecting IC wafer
11/22/2001	US20010042926 Semiconductor memory device
11/22/2001	US20010042925 Wire bonding method and apparatus, and semiconductor device
11/22/2001	US20010042924 Semiconductor package
11/22/2001	US20010042923 Semiconductor apparatus and process of production thereof
11/22/2001	US20010042922 Trench interconnect formed in polyimide film using chemical vapor deposition and sputtering techniques; increased interlayer connection resistance
11/22/2001	US20010042921 Semiconductor device, method for manufacturing the same, method for generating mask data, mask and computer readable recording medium
11/22/2001	US20010042920 Semiconductor device
11/22/2001	US20010042919 Semiconductor device and manufacturing method thereof
11/22/2001	US20010042918 Semiconductor device and method of fabricating the same
11/22/2001	US20010042915 Packages having flash-proof structure and method for manufacturing the same
11/22/2001	US20010042913 Semiconductor device, method of manufacturing semiconductor device, resin molding die, and semiconductor manufacturing system
11/22/2001	US20010042911 Semiconductor device and semiconductor assembly apparatus for semiconductor device
11/22/2001	US20010042909 Matched thermal expansion carrier tape assemblage for semiconductor devices
11/22/2001	US20010042908 Semiconductor device and manufacturing method of semiconductor device
11/22/2001	US20010042906 Semiconductor device and process for producing the same
11/22/2001	US20010042904 Frame for semiconductor package
11/22/2001	US20010042903 Inter-metal dielectric layer structure and its forming method
11/22/2001	US20010042902 Semiconductor device and method of manufacturing the same
11/22/2001	US20010042901 Wafer-level package, a method of manufacturing thereof and a method of manufacturing semiconductor devices from such a wafer-level package
11/22/2001	US20010042900 Bipolar transistor in which impurities are introduced from emitter electrode material to form emitter region
11/22/2001	US20010042896 Semiconductor device and fabrication process thereof, method of forming a device isolation structure
11/22/2001	US20010042894 Transistor having a deposited dual-layer spacer structure
11/22/2001	US20010042893 Semiconductor memory device having multilevel memory cell and method of manufacturing the same
11/22/2001	US20010042892 Semiconductor device having an improved interlayer contact and manufacturing method thereof
11/22/2001	US20010042891 Method of fabricating a semiconductor device
11/22/2001	US20010042890 Isolated junction structure and method of manufacture
11/22/2001	US20010042889 Semiconductor device with a halo structure
11/22/2001	US20010042888 Transistor comprising semiconductor substrate, channel region between two source/drain regions, metallic intermediate layer on channel region and forming Schottky diode with substrate, ferroelectric layer on metallic layer, gate electrode
11/22/2001	US20010042887 Integrated circuit devices that use antiparallel diodes to reduce damage during plasma processing
11/22/2001	US20010042886 Depletion type MOS semiconductor device and MOS power IC
11/22/2001	US20010042885 Trenched semiconductor device and method of fabricating the same
11/22/2001	US20010042884 Gated semiconductor assemblies
11/22/2001	US20010042882 Method for forming a flash memory cell having contoured floating gate surface
11/22/2001	US20010042880 Dram cell with active area reclaim
11/22/2001	US20010042878 Methods of forming integrated circuit capacitors having composite titanium oxide and tantalum pentoxide dielectric layers therein and capacitors formed thereby
11/22/2001	US20010042874 Semiconductor device having a recessed gate structure and method of manufacturing the same
11/22/2001	US20010042873 Mosfet with a thin gate insulating film
11/22/2001	US20010042872 Field-effect transistor and method for manufacturing the field effect transistor
11/22/2001	US20010042871 Silicon-on-insulator islands
11/22/2001	US20010042868 Conductive material for integrated circuit fabrication
11/22/2001	US20010042867 Monolithic compound semiconductor integrated circuit and method of forming the same
11/22/2001	US20010042863 Semiconductor device and manufacturing method thereof
11/22/2001	US20010042862 Schottky diode
11/22/2001	US20010042853 Oxygen-containing, such as metal oxides, silicates, borates or titanates, small particle size, narrow particle size distribution; displays
11/22/2001	US20010042845 Wafer orientation sensor for GaAs wafers
11/22/2001	US20010042827 Dose monitor for plasma doping system
11/22/2001	US20010042819 Device and method for detecting and distinguishing shelf-forming supports in cassettes and disk-shaped objects deposited thereon
11/22/2001	US20010042818 Solid-state image pickup device and method for fabricating the same
11/22/2001	US20010042799 Showerhead apparatus for radical-assisted deposition
11/22/2001	US20010042781 Capillary for bonding copper wires between a semiconductor circuit chip and a corresponding terminal connector of a semiconductor device
11/22/2001	US20010042778 Flux cleaning method and method of manufacturing semiconductor device
11/22/2001	US20010042777 Wire bonding method
11/22/2001	US20010042776 Method of wire bonding for small clearance
11/22/2001	US20010042772 Bump bonding apparatus and method
11/22/2001	US20010042771 Bump bonding apparatus and method
11/22/2001	US20010042770 Offset measurement method, tool position detection method and bonding apparatus
11/22/2001	US20010042745 Hot plate unit

1 ... 5210 5211 5212 5213 5214 5215 5216 5217 5218 5219 5220 5221 5222 5223 5224 5225 5226 5227 5228 5229 5230 ... 6590