H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2001
11/29/2001	US20010046647 Low temperature anti-reflective coating for IC lithography
11/29/2001	US20010046646 Stencil mask and method for manufacturing same
11/29/2001	US20010046640 Polyhydroxystyrene resin having a protective base which varies in polarity by acid catalyst and photoacid generator, admixed with a styrene derivative which increases contrast in dissolving rate between exposed and unexposed resist
11/29/2001	US20010046639 Nonvolatile floating gate tunneling oxide(FLOTOX) transistor, using self-structured masks and a controlled etch to form nanometer scale microtip arrays, and atomic layer epitaxy to create tunnel oxide layer; high tunneling current
11/29/2001	US20010046631 Divided reticles for charged-particle-beam microlithography apparatus, and methods for using same
11/29/2001	US20010046609 Diffusing aluminum (Al) through the zinc-selenide (ZnSe) substrate by forming an Al film on the substrate, heat treating in selenium atmosphere and then heat treating in a zinc atmosphere; monochromatic light emitting diodes (LED's)
11/29/2001	US20010046567 Siloxan polymer film on semiconductor substrate and method for forming same
11/29/2001	US20010046565 Method to produce high quality metal fill in deep submicron vias and lines
11/29/2001	US20010046315 Position detecting method and position detecting device for detecting relative positions of objects having position detecting marks by separate reference member having alignment marks
11/29/2001	US20010046276 Method for examining structures on a semiconductor substrate
11/29/2001	US20010046168 Structures for wafer level test and burn -in
11/29/2001	US20010046164 Dual floating gate programmable read only memory cell structure and method for its fabrication and operation
11/29/2001	US20010046158 Semiconductor memory device and method of fabricating the same
11/29/2001	US20010046156 Semiconductor integrated circuit device
11/29/2001	US20010046153 Semiconductor integrated circuit
11/29/2001	US20010046151 Memory-logic semiconductor device
11/29/2001	US20010046150 Symmetric architecture for memory cells having widely spread metal bit lines
11/29/2001	US20010046149 Semiconductor storage device having arrangement for controlling activation of sense amplifiers
11/29/2001	US20010046120 Chip scale packaging on cte matched printed wiring boards
11/29/2001	US20010046112 Monocrystalline ceramic electrostatic chuck
11/29/2001	US20010046073 Beam shaping element for use in a lithographic system
11/29/2001	US20010046053 Interferometric apparatus and method(s) for precision measurement of altitude above a surface
11/29/2001	US20010046044 Inspection apparatus for foreign matter and pattern defect
11/29/2001	US20010046043 Method and apparatus employing external light source for endpoint detection
11/29/2001	US20010046041 Exposure apparatus and device manufacturing apparatus and method
11/29/2001	US20010046038 Lithography apparatus
11/29/2001	US20010046016 Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same
11/29/2001	US20010045999 Semiconductor device, display apparatus using such devices and method of manufacturing such an apparatus as well as that of manufacturing such an apparatus
11/29/2001	US20010045995 Liquid crystal display and manufacturing method therfor
11/29/2001	US20010045945 Thin film transistor circuit and semiconductor display device using the same
11/29/2001	US20010045932 Semiconductor display device and electronic equipment
11/29/2001	US20010045931 Drive circuit of active matrix type display device having buffer with parallel connected elemental circuits and manufacturing method therefor
11/29/2001	US20010045873 Noise reduction circuit and semiconductor device including the same
11/29/2001	US20010045856 Delay circuit having low operating environment dependency
11/29/2001	US20010045855 Variable delay circuit and semiconductor integrated circuit having the same
11/29/2001	US20010045854 Semiconductor integrated circuit and method of compensating for device performance variations of semiconductor integrated circuit
11/29/2001	US20010045841 Semiconductor integrated circuit, test method for the same, and recording device and communication equipment having the same
11/29/2001	US20010045810 High performance stage assembly
11/29/2001	US20010045706 Sealing techniques suitable for different geometries and contrained spaces
11/29/2001	US20010045705 Sealing mechanism for sealing a vacuum chamber
11/29/2001	US20010045686 Method for encasing plastic array packages
11/29/2001	US20010045671 Wafer with resin layer comprising plural projected electrodes and cured resin layer formed on projected electrode-mounting side of wafer, formed by tablet comprising specified epoxy resin and curing agent; wafer has substantially no bowing
11/29/2001	US20010045670 Semiconductor device
11/29/2001	US20010045669 Semiconductor device
11/29/2001	US20010045668 Plug structure
11/29/2001	US20010045667 Semiconductor device and process of manufacturing the same
11/29/2001	US20010045666 Semiconductor device having self-aligned contact and fabricating method therefor
11/29/2001	US20010045665 Semiconductor device
11/29/2001	US20010045664 Semiconductor apparatus and method for fabricating the same
11/29/2001	US20010045663 Semiconductor circuit device and method for manufacturing thereof
11/29/2001	US20010045662 Semiconductor device and method for manufacturing the same
11/29/2001	US20010045661 Composite metallization process for filling high aspect ratio contact holes
11/29/2001	US20010045660 Semiconductor device and process for forming amorphous titanium silicon nitride on substrate
11/29/2001	US20010045659 Conductive implant structure in a dielectric
11/29/2001	US20010045658 Method and structure for reducing contact aspect ratios
11/29/2001	US20010045657 Semiconductor device and method of fabricating the same
11/29/2001	US20010045656 Multilayer wiring structure for semiconductor device
11/29/2001	US20010045655 Semiconductor device and manufacturing method thereof
11/29/2001	US20010045654 Utilization of energy absorbing layer to improve metal flow and fill in a novel interconnect structure
11/29/2001	US20010045653 Apparatus and method for metal layer streched conducting plugs
11/29/2001	US20010045652 Semiconductor device and manufacturing method thereof
11/29/2001	US20010045651 Semiconductor integrated circuit device and a method of manufacturing the same
11/29/2001	US20010045650 Local interconnect structure for integrated circuit devices, source structure for the same, and method for fabricating the same
11/29/2001	US20010045649 Semiconductor device
11/29/2001	US20010045648 Method and system for decreasing the spaces between wordlines
11/29/2001	US20010045646 Silicon oxynitride arc for metal patterning
11/29/2001	US20010045643 Semiconductor device keeping structural integrity under heat-generated stress
11/29/2001	US20010045641 Device for packaging electronic components
11/29/2001	US20010045640 Resin-molded semiconductor device and method for manufacturing the same
11/29/2001	US20010045638 Method of producing semiconductor device and configuration thereof, and lead frame used in said method
11/29/2001	US20010045637 Method and apparatus for injection molded flip chip encapsulation
11/29/2001	US20010045635 Vertical conduction flip-chip device with bump contacts on single surface
11/29/2001	US20010045630 Frame for semiconductor package
11/29/2001	US20010045628 Frame for semiconductor package
11/29/2001	US20010045625 Board for manufacturing a BGA and method of manufacturing semiconductor device using thereof
11/29/2001	US20010045623 Semiconductor device and method for fabricating the same
11/29/2001	US20010045622 Semiconductor integrated circuit having functional macro with improved power line connection structure
11/29/2001	US20010045620 Semiconductor device and production method thereof
11/29/2001	US20010045619 Semiconductor device and method of manufacturing same
11/29/2001	US20010045618 Use of non-ion-implanted resistive silicon oxynitride films as resistors
11/29/2001	US20010045617 Integrated circuit inductor
11/29/2001	US20010045616 Semiconductor device having an inductor and method for manufacturing the same
11/29/2001	US20010045614 Wafer trench article and process
11/29/2001	US20010045613 Silicon substrate and forming method thereof
11/29/2001	US20010045612 Method of forming an insulating zone
11/29/2001	US20010045609 Modified gate conductor processing for poly length control in high density drams
11/29/2001	US20010045608 Transister with a buffer layer and raised source/drain regions
11/29/2001	US20010045607 A method of recessing spacers to improve salicides resistance on polysilicon gates
11/29/2001	US20010045606 Semiconductor device and method for fabricating the same
11/29/2001	US20010045605 Semiconductor device comprising metal silicide films formed to cover gate electrode and source-drain diffusion layers and method of manufacturing the same
11/29/2001	US20010045604 Semiconductor device and manufacturing method
11/29/2001	US20010045603 Hybrid circuit and electronic device using same
11/29/2001	US20010045602 A partially depleted soi based tft
11/29/2001	US20010045601 Semiconductor device and method of manufacturing thereof
11/29/2001	US20010045600 Semiconductor device containing mos elements and method of fabricating the same
11/29/2001	US20010045597 Mis semiconductor device and method of fabricating the same
11/29/2001	US20010045596 Method and structure for textured surfaces in floating gate tunneling oxide devices
11/29/2001	US20010045595 Ferroelectric memory transistor with resistively coupled floating gate
11/29/2001	US20010045592 Eeprom with erasing gate adjacent floating gate and control gate
11/29/2001	US20010045591 Semiconductor device and method of manufacturing the same

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