Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2001
12/04/2001US6326258 Method of manufacturing semiconductor device having thin film capacitor
12/04/2001US6326257 Method of fabricating static random access memory with spacers
12/04/2001US6326256 Method of producing a laser trimmable thin film resistor in an integrated circuit
12/04/2001US6326255 Semiconductor device
12/04/2001US6326254 Method of manufacturing semiconductor device
12/04/2001US6326253 Method for fabricating semiconductor device including MIS and bipolar transistors
12/04/2001US6326252 Method for fabricating MOS transistor having dual gate
12/04/2001US6326251 Method of making salicidation of source and drain regions with metal gate MOSFET
12/04/2001US6326250 Semiconductor processing method of fabricating field effect transistors
12/04/2001US6326249 Semiconductor device and process for producing same
12/04/2001US6326248 Process for fabricating semiconductor device
12/04/2001US6326246 Method for manufacturing thin film transistor
12/04/2001US6326245 Method and apparatus for fabricating electronic device
12/04/2001US6326243 Resin sealed semiconductor device including a die pad uniformly having heat conducting paths and circulating holes for fluid resin
12/04/2001US6326241 Solderless flip-chip assembly and method and material for same
12/04/2001US6326240 Apparatus for packaging semiconductor device and method for packaging the same
12/04/2001US6326239 Mounting structure of electronic parts and mounting method of electronic parts
12/04/2001US6326238 Die paddle clamping method for wire bond enhancement
12/04/2001US6326235 Long wire IC package fabrication method
12/04/2001US6326234 Semiconductor device and method for manufacturing the same
12/04/2001US6326233 Semiconductor device, method of fabricating the same and electronic apparatus
12/04/2001US6326232 Method of fabricating semiconductor device
12/04/2001US6326231 Use of silicon oxynitride ARC for metal layers
12/04/2001US6326227 Topographical electrostatic protection grid for sensors
12/04/2001US6326226 Method of crystallizing an amorphous film
12/04/2001US6326220 Method for determining near-surface doping concentration
12/04/2001US6326219 Methods for determining wavelength and pulse length of radiant energy used for annealing
12/04/2001US6326218 Semiconductor integrated circuit and its manufacturing method
12/04/2001US6326217 High-efficiency miniature magnetic integrated circuit structures
12/04/2001US6326216 Process for producing semiconductor integrated circuit device
12/04/2001US6326130 Alkaline solution containing 1-methyl-2-pyrrolidinone, ethanolamine and reducing agent
12/04/2001US6326126 Addition block polymer
12/04/2001US6326122 Heat sensitive elements
12/04/2001US6326107 Phase shift mask and process for manufacturing the same
12/04/2001US6326106 Overlay measuring pattern, and photomask
12/04/2001US6326064 Introducing carbon-free silicon reactant, halogen etchant, and oxygen reactant into reactor, growing film by decomposing and plasma reacting, removing atoms in disordered crystallographic state
12/04/2001US6325914 Method and device for transferring spin-polarized charge carriers
12/04/2001US6325865 Method for drying substrate
12/04/2001US6325861 Exposing substrate to activated cleaning gas comprising one or more of fluoromethane, bromomethane or chloromethane, oxygen gas and nitrogen gas supplied at specified volumetric flow ratio
12/04/2001US6325858 Long life high temperature process chamber
12/04/2001US6325857 CVD apparatus
12/04/2001US6325856 Vacuum treatment equipment
12/04/2001US6325855 Gas collector for epitaxial reactors
12/04/2001US6325850 Method for producing a gallium nitride epitaxial layer
12/04/2001US6325848 Method of making a silicon substrate with controlled impurity concentration
12/04/2001US6325706 Use of zeta potential during chemical mechanical polishing for end point detection
12/04/2001US6325698 Cleaning method and polishing apparatus employing such cleaning method
12/04/2001US6325696 Piezo-actuated CMP carrier
12/04/2001US6325676 Gas etchant composition and method for simultaneously etching silicon oxide and polysilicon, and method for manufacturing semiconductor device using the same
12/04/2001US6325638 Electrical assembly for coupling two circuit members
12/04/2001US6325610 Apparatus for precise molding and alignment of structures on a substrate using a stretchable mold
12/04/2001US6325606 Apparatus for filling a gap between spaced layers of a semiconductor
12/04/2001US6325571 Particulate object conveying apparatus
12/04/2001US6325359 Device and method for producing gas solution and cleaning device
12/04/2001US6325275 Bondhead lead clamp apparatus and method
12/04/2001US6325272 Apparatus and method for filling a ball grid array
12/04/2001US6325271 Continuous mode solder jet apparatus
12/04/2001US6325269 Wire bonding capillary
12/04/2001US6325081 Washing apparatus and washing method
12/04/2001US6325078 Apparatus and method for rapid photo-thermal surface treatment
12/04/2001US6325059 Techniques for dicing substrates during integrated circuit fabrication
12/04/2001US6325018 Flat antenna having openings provided with conductive materials accommodated therein and plasma processing apparatus using the flat antenna
12/04/2001US6325017 Apparatus for forming a high dielectric film
12/04/2001US6324754 Method for fabricating microelectronic assemblies
12/04/2001US6324715 Apparatus for cleaning semiconductor substrates
12/04/2001CA2278883C Very large scale immobilized peptide synthesis
11/2001
11/30/2001CA2343086A1 Esd resistant device
11/29/2001WO2001091451A2 Amorphous aluminum nitride emitter
11/29/2001WO2001091204A2 Displacement device
11/29/2001WO2001091194A1 Optoelectronic component and a method for producing the same
11/29/2001WO2001091192A1 A thin film field effect transistor
11/29/2001WO2001091189A1 Field effect device
11/29/2001WO2001091188A2 Semiconductor structures for hemt
11/29/2001WO2001091186A2 Semiconductor multilayer system and a method for producing a semiconductor multilayer system with increased resistance to thermal processing
11/29/2001WO2001091185A2 Ultra-late programming rom and method of manufacture
11/29/2001WO2001091183A1 Solder bar for high power flip chips
11/29/2001WO2001091181A2 Liner materials
11/29/2001WO2001091180A2 System and method of forming a vertically oriented device in an integrated circuit
11/29/2001WO2001091179A2 Semiconductor device with shallow trench isolation (sti) sidewall implant
11/29/2001WO2001091178A1 Wafer chuck mechanism
11/29/2001WO2001091177A2 Method and apparatus for controlling deposition parameters based on polysilicon grain size feedback
11/29/2001WO2001091176A2 Trilayer/bilayer solder bumps and fabrication methods therefor
11/29/2001WO2001091175A1 Method and device for bleed out control in solder bonding
11/29/2001WO2001091174A1 Die bonding device
11/29/2001WO2001091172A2 A semiconductor device and a method for forming patterns
11/29/2001WO2001091171A1 Method of dry etching an antireflection coating in semiconductor devices
11/29/2001WO2001091170A1 Method and apparatus for radiation-assisted electrochemical etching, and etched product
11/29/2001WO2001091169A1 Suppression of lateral dopant diffusion from source/drain regions of mosfets
11/29/2001WO2001091168A1 Bottom anti-reflective coating using rapid thermal anneal with oxidizing gas
11/29/2001WO2001091167A1 Substrate for transfer mask, transfer mask, and method of manufacture thereof
11/29/2001WO2001091166A1 Semiconductor manufacturing and inspecting device
11/29/2001WO2001091165A1 Device and method for managing semiconductor producing apparatus
11/29/2001WO2001091163A2 Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
11/29/2001WO2001091162A2 Bipolar transistor and method of manufacture thereof
11/29/2001WO2001091155A1 Quantum size effect type micro electron gun and flat display unit using it and method for manufacturing the same
11/29/2001WO2001091144A1 Structure and method for fabrication of an improved capacitor
11/29/2001WO2001090882A2 Programmable single-chip device and related development environment
11/29/2001WO2001090820A1 Flexible piezoelectric chuck
11/29/2001WO2001090819A2 Method and system for selective linewidth optimization during a lithographic process
11/29/2001WO2001090816A1 Method in connection with the production of a template and the template thus produced