Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2002
01/24/2002DE10133717A1 New copolymers, used in antireflection coating compositions for semiconductor devices, have 9-anthracenemethyliminoalkyl, hydroxyalkyl, glycidyl and methyl (meth)acrylate units
01/24/2002DE10133674A1 Semiconductor wafer test unit has CAD navigation unit to position pattern test unit
01/24/2002DE10133448A1 Alignment of cutting blade includes determining angle between tracks from workpiece surface image, determining correction angle per track, setting tracks parallel to x-axis
01/24/2002DE10132024A1 Halbleiter-Bauteil und Verfahren zu dessen Herstellung Semiconductor device and process for its preparation
01/24/2002DE10123616A1 Superjunction-Halbleiterbauteil sowie Verfahren zu seiner Herstellung Superjunction semiconductor device and process for its preparation
01/24/2002DE10114772A1 Manufacture of semiconductor device having trench insulation preventing residue of thick oxide film from being left after CMP step
01/24/2002DE10034412A1 Verfahren zur Elektronenstrahl-Lithographie und elektronen-optisches Lithographiesystem A method of electron beam lithography and electron-optical lithography system
01/24/2002DE10034062A1 Integrierter Halbleiterspeicher mit Speicherzellen in mehre-ren Speicherzellenfeldern und Verfahren zur Reparatur eines solchen Speichers Integrated semiconductor memory having memory cells in several-ren memory cell arrays and methods for repair of such a memory
01/24/2002DE10034006A1 Trägermatrix mit Bondkanal für integrierte Halbleiter und Verfahren zu ihrer Herstellung Carrier matrix with channel bonding for integrated semiconductors and methods for their preparation
01/24/2002DE10034005A1 Verfahren zum Erzeugen von Mikro-Rauhigkeiten auf einer Oberfläche A method for generating micro-roughness on a surface
01/24/2002DE10034003A1 Grabenkondensator mit Isolationskragen und entsprechendes Herstellungsverfahren Grave capacitor insulation collar and manufacturing method thereof
01/24/2002DE10033934A1 Galvanic formation of conducting structures of highly pure copper on semiconductor substrates used in the production of integrated circuits uses a copper bath contains a copper ion source, and an additive compound
01/24/2002DE10033486A1 Integrated memory (MRAM), whose memory cells contain magnetoresistive memory effect
01/24/2002DE10033112A1 Verfahren zur Herstellung und Strukturierung organischer-Feldeffekt-Transistoren (OFET) Process for the preparation and patterning of organic field effect transistors (OFET)
01/24/2002DE10032963A1 Separation of thinner surfaces of semiconductor and ceramic substrates uses saw with electromagnetic forces to control separation thickness
01/24/2002DE10032795A1 Semiconductor element used in the production of trench capacitors comprises a substrate with trenches whose walls are lined with a layer of insulating material and a liner layer of insulating material applied by a plasma process
01/24/2002DE10032579A1 Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement A process for producing a semiconductor device as well as a product produced by the process semiconductor device
01/24/2002DE10032412A1 Electronic storage element used in CMOS technology comprises carbon nanotubes arranged skew to each other or crossing each other so that an electrical coupling is produced between the tubes
01/24/2002DE10032282A1 Lithographic exposure and structuring process comprises applying anti-refection layer made up of several layers on substrate, and applying material layer to be treated
01/24/2002DE10032277A1 MRAM-Anordnung MRAM array
01/24/2002DE10032275A1 Integrierter Speicher mit Speicherzellen mit magnetoresistivem Speichereffekt und Verfahren zum Betrieb eines solchen Speichers Integrated memory having memory cells with magnetoresistive storage effect and methods of operation of such a memory
01/24/2002DE10032274A1 Magnetoresistive random access memory controls sense amplifier such that column lines not connected to selected memory cells, are electrically isolated in sense amplifier for selectively reading and writing data signal
01/24/2002DE10032273A1 Verfahren und Anordnung zur Kompensation von parasitären Stromverlusten Method and apparatus for compensating for parasitic power losses
01/24/2002DE10032272A1 Strom-Treiberanordnung für MRAM Current driver configuration for MRAM
01/24/2002DE10032271A1 MRAM-Anordnung MRAM array
01/24/2002DE10032005A1 Waferhalterad mit einer Andrückvorrichtung in einer Waferbeschichtungsanlage Waferhalterad with a pressing device in a wafer coating plant
01/24/2002CA2416502A1 Method for making an integrated circuit capable of being surface-mounted and resulting circuit
01/23/2002EP1175138A2 Method for mounting semiconductor element to circuit board, and semiconductor device
01/23/2002EP1175127A1 Ceramic heater
01/23/2002EP1174929A2 Power semiconductor device and method of manufacturing the same
01/23/2002EP1174928A1 Semiconductor device and semiconductor substrate
01/23/2002EP1174926A1 Semiconductor wafer and method for producing the same
01/23/2002EP1174925A2 Write conductor layout for magnetic memory
01/23/2002EP1174924A2 MRAM-cell
01/23/2002EP1174923A1 Electrostatic discharge protection device with monolithically formed resistor-capacitor portion
01/23/2002EP1174920A2 Semiconductor package
01/23/2002EP1174919A2 A method of dual gate processing
01/23/2002EP1174918A2 Method of copper transport prevention by a sputtered gettering layer on backside of wafer
01/23/2002EP1174917A1 Wafer container and dusting prevention method thereof and method for containing wafer
01/23/2002EP1174916A2 Semiconductor device and semiconductor device manufacturing method
01/23/2002EP1174915A2 Deposition of a silicon containing insulating thin film
01/23/2002EP1174914A2 Semiconductor device and semiconductor device manufacturing method
01/23/2002EP1174913A2 Process for etching heterojunction interfaces and corresponding layer structures
01/23/2002EP1174912A1 Semiconductor wafer processing apparatus and processing method
01/23/2002EP1174911A2 Silicon nitride as anti-reflective coating
01/23/2002EP1174910A2 Method and apparatus for dechucking a substrate
01/23/2002EP1174909A2 Apparatus for the placement and bonding of a die on a substrate
01/23/2002EP1174908A1 Apparatus for making wire connections
01/23/2002EP1174906A1 Apparatus for making wire connections
01/23/2002EP1174902A2 Coaxial electromagnet in a magnetron sputtering reactor
01/23/2002EP1174901A2 Integrated power oscillator RF source for plasma immersion ion implantation system
01/23/2002EP1174882A1 MRAM memory device
01/23/2002EP1174768A1 Exposure apparatus and device manufacturing method using the same
01/23/2002EP1174763A2 Method of fabricating a nickel etching mask
01/23/2002EP1174749A2 High numerical aperture catadioptric lens
01/23/2002EP1174723A1 Temperature control apparatus
01/23/2002EP1174679A2 Interferometer box
01/23/2002EP1174527A1 Atomic layer deposition (ALD) film deposition equipment and cleaning method
01/23/2002EP1174483A1 Polishing composition, manufacturing thereof and polishing method
01/23/2002EP1174400A1 Porous silicon carbide sintered compact and silicon carbide metal composite suitable for use in table for wafer polishing machine
01/23/2002EP1174007A1 A method for making flexible circuits
01/23/2002EP1173893A2 Polycrystalline silicon germanium films for forming micro-electromechanical systems
01/23/2002EP1173892A1 Field effect transistor with non-floating body and method for forming same on a bulk silicon wafer
01/23/2002EP1173890A1 Semiconductor device with junctions having dielectric pockets and method for making same
01/23/2002EP1173889A1 Device for protecting against electrostatic discharge
01/23/2002EP1173888A1 Web process interconnect in electronic assemblies
01/23/2002EP1173887A1 Nonvolatile memory
01/23/2002EP1173886A1 Method for fabricating high permitivity dielectric stacks having low buffer oxide
01/23/2002EP1173885A1 Dual process semiconductor heterostructures and methods
01/23/2002EP1173884A1 Etching of semiconductor wafer edges
01/23/2002EP1173883A2 Device for treating silicon wafers
01/23/2002EP1173882A2 Device for treating wafers
01/23/2002EP1173881A1 Integrated heating and cooling device in a reactor for thermal treatment of a substrate
01/23/2002EP1173817A1 Interconnect delay driven placement and routing of an integrated circuit design
01/23/2002EP1173632A1 Reaction chamber for an epitaxial reactor
01/23/2002EP1173375A1 Device for contactlessly gripping and positioning components
01/23/2002EP1173293A1 Surface treatment of semiconductor substrates
01/23/2002EP1085948A4 Micro-environment reactor for processing a microelectronic workpiece
01/23/2002EP0769204B1 Novolac polymer planarization films for microelectronic structures
01/23/2002EP0720418B1 Manufacturing method for ternary compound films
01/23/2002CN1332889A Ferroelectric transistor and method for the production thereof
01/23/2002CN1332686A Passively activated valve for carrier purging
01/23/2002CN1332667A Substrate transport apparatus with multiple arms on common axis of rotation
01/23/2002CN1332480A Single-crystal GaN base and its manufacture
01/23/2002CN1332479A Active matrix substrate, display device and method of making active matrix substrate
01/23/2002CN1332478A Multilayer silicon gallide material on insulating layer and its prepn
01/23/2002CN1332477A Isolated capacitor trench top medium for self-aligning device
01/23/2002CN1332476A Semiconductor device and its manufacture
01/23/2002CN1332474A Manufacture of flash memory
01/23/2002CN1332473A Laser circuit forming method and formed laser circuit
01/23/2002CN1332472A Fine graphic forming method and method for making semiconductor device using the same
01/23/2002CN1332471A Method for manufacture of semiconductor device
01/23/2002CN1332470A Exposure device, surface position regulating unit and method for making mask and device
01/23/2002CN1332458A Operation method of ferroelectric memory
01/23/2002CN1332267A Method and device for deposition of high melting metal layer using continuous deposition technology
01/23/2002CN1332265A Electronic line chip
01/23/2002CN1332216A Ultraviolet curing contact adhesive composition and piece
01/23/2002CN1332205A 辐射敏感树脂组合物 The radiation-sensitive resin composition
01/23/2002CN1332110A Part holding device
01/23/2002CN1078439C Chip element assembly