| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/10/2002 | US20020003914 Optical semiconductor device, method for manufacturing the same, and optical module and optical communication apparatus provided with the optical semiconductor device |
| 01/10/2002 | US20020003858 Optical sample X-ray testing apparatus and method for testing optical sample with X-rays |
| 01/10/2002 | US20020003855 X-ray illumination optical system and x-ray reduction exposure apparatus |
| 01/10/2002 | US20020003742 Line segmentation in programmable logic devices having redundancy circuitry |
| 01/10/2002 | US20020003738 Semiconductor integrated circuit device |
| 01/10/2002 | US20020003736 Semiconductor integrated circuit device |
| 01/10/2002 | US20020003727 Integrated memory having memory cells with magnetoresistive memory effect |
| 01/10/2002 | US20020003725 Logic consolidated semiconductor memory device having memory circuit and logic circuit integrated in the same chip |
| 01/10/2002 | US20020003724 Boosted voltage generating circuit and semiconductor memory device having the same |
| 01/10/2002 | US20020003721 Solid-state memory with magnetic storage cells |
| 01/10/2002 | US20020003720 MRAM configuration |
| 01/10/2002 | US20020003718 Selective device coupling |
| 01/10/2002 | US20020003629 Positioning stage system and position measuring method |
| 01/10/2002 | US20020003626 Apparatus for detecting optical positional deviation |
| 01/10/2002 | US20020003616 Stage system for exposure apparatus and device manufacturing method using the same |
| 01/10/2002 | US20020003615 Alignment system and projection exposure apparatus |
| 01/10/2002 | US20020003611 Method of manufacturing solid-state image pickup device |
| 01/10/2002 | US20020003587 Active matrix substrate and manufacturing method thereof |
| 01/10/2002 | US20020003483 Trimming circuit of semiconductor apparatus |
| 01/10/2002 | US20020003449 Semiconductor device enabling high-speed generation of internal power-supply potential at the time of power on |
| 01/10/2002 | US20020003447 Trimming circuit of semiconductor integrated device |
| 01/10/2002 | US20020003445 Signal distribution scheme in field programmable gate array (FPGA) or field programmable system chip (FPSC) including cycle stealing units |
| 01/10/2002 | US20020003436 Double data rate input and output in a programmable logic device |
| 01/10/2002 | US20020003435 Multi-functional I/O buffers in a field programmable gate array (FPGA) |
| 01/10/2002 | US20020003432 Semiconductor wafer test and burn-in |
| 01/10/2002 | US20020003413 Table positioning device |
| 01/10/2002 | US20020003397 Film forming apparatus and method of manufacturing light emitting device |
| 01/10/2002 | US20020003311 Semiconductor device with high resistance element and process for manufacturing the same |
| 01/10/2002 | US20020003309 Semiconductor chip having pads with plural different junction type |
| 01/10/2002 | US20020003308 Semiconductor chip package and method for fabricating the same |
| 01/10/2002 | US20020003307 Semiconductor device and method for fabricating the device |
| 01/10/2002 | US20020003306 Method for reducing stress-induced voids for 0.25u and smaller semiconductor chip technology by annealing interconnect lines and using low bias voltage and low interlayer dielectric deposition rate and semiconductor chip made thereby |
| 01/10/2002 | US20020003305 Semiconductor integrated circuit device including an interlayer insulating film formed under a bonding pad and arranged to prevent peeling of the bonding pad |
| 01/10/2002 | US20020003303 Multi-layer interconnect |
| 01/10/2002 | US20020003302 Semiconductor device and method for producing the same |
| 01/10/2002 | US20020003299 Chip carrier and method of manufacturing and mounting the same |
| 01/10/2002 | US20020003296 Assembly of plurality of semiconductor devices |
| 01/10/2002 | US20020003295 Support matrix with bonding channel for integrated semiconductors, and method for producing it |
| 01/10/2002 | US20020003293 Semiconductor device and method for fabricating same |
| 01/10/2002 | US20020003290 Semiconductor devices and methods for manufacturing the same |
| 01/10/2002 | US20020003289 Semiconductor devices and methods for manufacturing the same |
| 01/10/2002 | US20020003288 Semiconductor apparatus and method for manufacturing the same |
| 01/10/2002 | US20020003287 Method for producing a high-speed power diode with soft recovery, and a power diode produced using such a method |
| 01/10/2002 | US20020003286 Vertical bipolar transistor including an extrinsic base with reduced roughness, and fabrication process |
| 01/10/2002 | US20020003285 Semiconductor device and process of production of same |
| 01/10/2002 | US20020003284 Amorphous aluminum nitride emitter |
| 01/10/2002 | US20020003283 Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry |
| 01/10/2002 | US20020003282 Integrated circuitry |
| 01/10/2002 | US20020003280 Electric fuse whose dielectric breakdown resistance is controlled by injecting impurities into an insulating film of a capacitor structure, and a method for manufacturing the same |
| 01/10/2002 | US20020003277 Technique for forming shallow trench isolation structure without corner exposure and resulting structure |
| 01/10/2002 | US20020003276 Semiconductor device and method of manufacturing same |
| 01/10/2002 | US20020003275 Shallow trench isolation type semiconductor device and method of the same |
| 01/10/2002 | US20020003273 Igfet with silicide contact on ultra-thin gate |
| 01/10/2002 | US20020003272 Ultra short channel length dictated by the width of a sacrificial sidewall spacer |
| 01/10/2002 | US20020003271 Field-effect transistor |
| 01/10/2002 | US20020003270 Semiconductor device |
| 01/10/2002 | US20020003269 Semiconductor memory and method of producing the same |
| 01/10/2002 | US20020003268 A device having thin first spacers and partially recessed thick second spacers for improved salicide resistance on polysilicon gates |
| 01/10/2002 | US20020003267 Gate electrode having agglomeration preventing layer on metal silicide layer, and method for forming the same |
| 01/10/2002 | US20020003266 Apparatus improving latchup immunity in a dual-polysilicon gate |
| 01/10/2002 | US20020003264 Method to form shallow junction transistors while eliminating shorts due to junction spiking |
| 01/10/2002 | US20020003263 Semiconductor device having MOS transistor for coupling two signal lines |
| 01/10/2002 | US20020003262 Semiconductor device and method for fabricating the same |
| 01/10/2002 | US20020003261 Thin-film capacitor element and electronic circuit board on which thin-film capacitor element is formed |
| 01/10/2002 | US20020003260 SOI type MOS element and manufacturing method thereof |
| 01/10/2002 | US20020003259 Semiconductor device and method of fabricating same |
| 01/10/2002 | US20020003258 Method of forming a thin gate dielectric layers |
| 01/10/2002 | US20020003257 Mosfet device |
| 01/10/2002 | US20020003256 MOS semiconductor device and method of manufacturing the same |
| 01/10/2002 | US20020003255 Semiconductor device and method for fabricating the same |
| 01/10/2002 | US20020003254 Nvram cell with planar control gate |
| 01/10/2002 | US20020003253 Nonvolatile semiconductor memory device and its manufacturing method |
| 01/10/2002 | US20020003252 Flash memory circuit with with resistance to disturb effect |
| 01/10/2002 | US20020003249 Capacitor and method of manufacturing the same |
| 01/10/2002 | US20020003248 Semiconductor device and method for fabricating the same |
| 01/10/2002 | US20020003247 Semiconductor memory device and production method of the same |
| 01/10/2002 | US20020003246 Semiconductor memory device and method of producing the same |
| 01/10/2002 | US20020003245 Compound semiconductor device and method of manufacturing the same |
| 01/10/2002 | US20020003243 Semiconductor integrated circuit and layout design method thereof |
| 01/10/2002 | US20020003241 Static semiconductor memory cell formed in an n-well and p-well |
| 01/10/2002 | US20020003239 Semiconductor structure and device including a carbon film and method of forming the same |
| 01/10/2002 | US20020003238 Structure including cubic boron nitride films and method of forming the same |
| 01/10/2002 | US20020003225 Slurry includes abrasive particles have a small particle size, narrow size distribution and a spherical morphology, and the particles are substantially unagglomerated, selected from silica, alumina, zirconia, ceria etc. and mixture |
| 01/10/2002 | US20020003216 Exposure apparatus, surface position adjustment unit, mask, and device manufacturing method |
| 01/10/2002 | US20020003208 Space charge neutralization of an ion beam |
| 01/10/2002 | US20020003160 Components with conductive solder mask layers |
| 01/10/2002 | US20020003137 Contact heating device |
| 01/10/2002 | US20020003130 Laser system and method for processing a memory link with a burst of laser pulses having ultrashort pulse widths |
| 01/10/2002 | US20020003126 Method of etching silicon nitride |
| 01/10/2002 | US20020003123 Cleaning solution for removing damaged portion of ferroelectric layer and cleaning method using the same |
| 01/10/2002 | US20020003101 Tray for semiconductor integrated circuit device |
| 01/10/2002 | US20020003080 Leadframe transport and method therefor |
| 01/10/2002 | US20020003048 Metal interconnections and active matrix substrate using the same |
| 01/10/2002 | US20020003037 Temperature-controlled chuck with recovery of circulating temperature control fluid |
| 01/10/2002 | US20020002993 Photovoltaic element and method of manufacturing the same |
| 01/10/2002 | US20020002991 Device for treating a disc-shaped object |
| 01/10/2002 | US20020002951 Heating installation for a reactor |
| 01/10/2002 | US20020002950 Wafer processing apparatus |
| 01/10/2002 | US20020002948 Plasma processing apparatus having an evacuating arrangement to evacuate gas from a gas-introducing part of a process chamber |
| 01/10/2002 | US20020002947 Inductive coupling plasma processing apparatus |