| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/10/2002 | US20020002946 Processing apparatus for processing sample in predetermined atmosphere |
| 01/10/2002 | US20020002944 Method and apparatus for controlling a temperature of a microelectronic substrate |
| 01/10/2002 | US20020002942 Comprising a single crystal of zinc oxide (ZnO) that contains a p-type dopant composed of nitrogen (N), and an n-type dopant composed of any one or more elements selected from boron, aluminum, gallium, and hydrogen |
| 01/10/2002 | US20020002869 Traction drive speed reducer, conveyance apparatus using traction drive speed reducer, and arrangement of two-axis output encoder in conveyance apparatus |
| 01/10/2002 | US20020002798 CMP polishing slurry dewatering and reconstitution |
| 01/10/2002 | US20020002767 Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus |
| 01/10/2002 | DE19963588C2 Optische Anordnung Optical arrangement |
| 01/10/2002 | DE19927284C2 Verfahren zur Herstellung einer elektrisch leitfähigen Verbindung in einer mikroelektronischen Struktur A process for producing an electrically conductive connection in a microelectronic structure |
| 01/10/2002 | DE10130713A1 Semiconductor acceleration sensor chip comprises peripheral grooves formed on substrate surface |
| 01/10/2002 | DE10129019A1 Targetmarke, Verfahren zu deren Herstellung und Elektronenstrahl-Belichtungsvorrichtung Target mark, to processes for their preparation and to electron beam exposure apparatus |
| 01/10/2002 | DE10125345A1 Planarization mechanism for test contact system, includes distance sensor which detects the gap between the contact substrate and a semiconductor wafer or a reference plate |
| 01/10/2002 | DE10119775A1 Halbleitervorrichtung, Verfahren zu deren Herstellung und Widerstand A semiconductor device, method for their preparation and resistance |
| 01/10/2002 | DE10107710A1 Halbleitervorrichtung Semiconductor device |
| 01/10/2002 | DE10063621A1 Production of a fine pattern used in the production of a semiconductor device and a liquid crystal display comprises producing a hard mask pattern by etching a hard mask film formed on working film on a substrate |
| 01/10/2002 | DE10031983A1 Expansion ring for film to be glued to semiconductor wafer comprises outer frame with aperture over which film fits, and outwardly-facing clips fitting into sprung apertures around frame to stretch film |
| 01/10/2002 | DE10031876A1 Verfahren zum Aufbringen einer strukturierten Isolationsschicht auf eine Metallschicht A method of applying a structured insulation layer on a metal layer |
| 01/10/2002 | DE10031719A1 Beleuchtungseinrichtung und Koordinaten-Meßgerät mit einer Beleuchtungseinrichtung Illumination device and coordinate measuring instrument with a lighting device |
| 01/10/2002 | DE10031577A1 Kondensator für ein Halbleiterpeicherbauelement und Verfahren zu dessen Herstellung A capacitor for Halbleiterpeicherbauelement and process for its preparation |
| 01/10/2002 | DE10031407A1 Hermetic high-frequency module and method for producing it has a ceramic casing base and a ceramic casing cover with an adjusting device for positioning in a hollow conductor on the casing base. |
| 01/10/2002 | DE10031259A1 Production of gallium nitride-based III-V Group compound LED involves electroplating film of beryllium containing material on exposed surface of p-type layer of gallium nitride on substrate |
| 01/10/2002 | DE10031252A1 Sectioning of substrate wafer into substrate chips comprises separating substrate chips from one another by selective deep patterning |
| 01/10/2002 | DE10031002A1 Production of thin oxide or nitride layers used as tunnel barrier material for magnetoresistive sensors comprises using a plasma beam to convert the substrate into the corresponding oxide or nitride and adjusting the reaction speed |
| 01/10/2002 | DE10030940A1 Device used in chemical processes, e.g. purification, for wetting object with medium, comprises pressure wave generator using pressure waves to move object relative to medium |
| 01/10/2002 | DE10030697A1 Method for securing semiconductor chip on substrate compensates for mechanical stresses in substrate using tape/adhesive layer applied to substrate |
| 01/10/2002 | DE10030696A1 Integrated circuit used in DRAMs and SDRAMs comprises a switching element formed in a substrate, a further switching element buried in the substrate, and an insulating layer lying between the elements and locally limited in the substrate |
| 01/10/2002 | DE10030431A1 Cleaning and bonding wafers involves rotating wafers while moving nozzle over wafers and spraying cleaning liquid onto surfaces, drying and directly bonding wafers |
| 01/10/2002 | DE10030427A1 Method for treating lead frame provides selective removal of adhesive coating on contact pads using ink jet printer |
| 01/10/2002 | DE10027931C1 Verfahren zur rückseitigen elektrischen Kontaktierung eines Halbleitersubstrats während seiner Bearbeitung A method of rear-side electrical contact of a semiconductor substrate during its processing |
| 01/10/2002 | CA2667783A1 A laser diode and method of manufacture of the diode using a surface gallium nitride seed |
| 01/10/2002 | CA2632737A1 A laser diode and method of manufacture of the diode using a surface gallium nitride seed |
| 01/10/2002 | CA2413803A1 Polishing pad grooving method and apparatus |
| 01/10/2002 | CA2382984A1 Device for forming nanostructures on the surface of a semiconductor wafer by means of ion beams |
| 01/09/2002 | EP1170982A1 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 01/09/2002 | EP1170865A2 Semiconductor integrated circuit, logic operation circuit, and flip flop |
| 01/09/2002 | EP1170841A2 Optical semiconductor device, method for manufacturing the same |
| 01/09/2002 | EP1170804A2 Trench capacitor with insulating collar and corresponding manufacturing process |
| 01/09/2002 | EP1170803A2 Trench gate MOSFET and method of making the same |
| 01/09/2002 | EP1170802A2 Semiconductor gate with semi-insulating diffusion barrier |
| 01/09/2002 | EP1170801A1 Bonded wafer producing method and bonded wafer |
| 01/09/2002 | EP1170800A2 Nonvolatile semiconductor memory device, process of manufacturing the same and method of operating the same |
| 01/09/2002 | EP1170797A2 Thin-film capacitor element and electronic circuit board on which thin-film capacitor element is formed |
| 01/09/2002 | EP1170796A2 High frequency carrier with an adapted interconnect structure |
| 01/09/2002 | EP1170794A1 Method of fabricating a power electronic component and power electronic component obtained thereby |
| 01/09/2002 | EP1170793A2 Support matrix with a bonding channel for an integrated circuit and manufacturing method thereof |
| 01/09/2002 | EP1170792A2 Metalization for semiconductor structure and corresponding manufacturing process |
| 01/09/2002 | EP1170791A2 Semiconductor device with multilayer wiring structure of laminated damascene wiring and fabrication method thereof |
| 01/09/2002 | EP1170790A1 Ceramic heater and support pin |
| 01/09/2002 | EP1170788A2 Method and apparatus for mounting semiconductor chips onto a flexible substrate |
| 01/09/2002 | EP1170787A1 Method and apparatus for mounting semiconductor chips on a flexible substrate |
| 01/09/2002 | EP1170786A1 Silicon-on-insulator (SOI) semiconductor structure and method of manufacture |
| 01/09/2002 | EP1170785A2 Process for forming microroughness on a surface |
| 01/09/2002 | EP1170784A1 Semiconductor device and its production method |
| 01/09/2002 | EP1170783A1 Pick-up-tool |
| 01/09/2002 | EP1170782A2 Device for handling a disk-like workpiece |
| 01/09/2002 | EP1170781A1 Die collet |
| 01/09/2002 | EP1170777A2 Multi-purpose processing chamber with removable chamber liner |
| 01/09/2002 | EP1170775A1 Method and apparatus for ion implantation |
| 01/09/2002 | EP1170774A1 Method and apparatus for ion implantation |
| 01/09/2002 | EP1170755A1 Integral lens for high energy particle flow, method for producing such lenses and use thereof in analysis devices and devices for radiation therapy and lithography |
| 01/09/2002 | EP1170752A1 Method and device for compensating parasitic sneak currents |
| 01/09/2002 | EP1170751A1 Method for preventing electromigration in a MRAM memory |
| 01/09/2002 | EP1170750A1 Current driver for MRAM |
| 01/09/2002 | EP1170636A2 Exposure apparatus and surface position adjustment unit |
| 01/09/2002 | EP1170634A1 Exposure apparatus and device manufacturing method using the same |
| 01/09/2002 | EP1170633A1 Exposure apparatus and device manufacturing method using the same |
| 01/09/2002 | EP1170603A2 Method of fabricating silica microstructures |
| 01/09/2002 | EP1170564A1 Method and device for drying substrate |
| 01/09/2002 | EP1170405A1 Silicon single crystal wafer and production method thereof and soi wafer |
| 01/09/2002 | EP1170404A1 Silicon wafer and production method thereof and evaluation method for silicon wafer |
| 01/09/2002 | EP1170402A1 Coated anode system |
| 01/09/2002 | EP1170397A2 Deposition of amorphous silicon films by high density plasma CVD at low temperatures |
| 01/09/2002 | EP1170345A2 Ultraviolet-curable pressure sensitive adhesive composition and ultraviolet-curable pressure sensitive adhesive sheet |
| 01/09/2002 | EP1170089A1 Polishing apparatus |
| 01/09/2002 | EP1170088A2 Semiconductor wafer grinding method and machine |
| 01/09/2002 | EP1169896A1 Low stress die attachment |
| 01/09/2002 | EP1169740A1 Capacitor for analog circuit, and manufacturing method thereof |
| 01/09/2002 | EP1169739A1 Semiconductor device with a diode, and method of manufacturing such a device |
| 01/09/2002 | EP1169738A1 Semiconductor device with voltage divider for increased reverse blocking voltage |
| 01/09/2002 | EP1169737A1 High speed ge channel heterostructures for field effect devices |
| 01/09/2002 | EP1169734A1 Semiconductor device with deep substrate contacts |
| 01/09/2002 | EP1169733A1 Method for filling gaps on a semiconductor wafer |
| 01/09/2002 | EP1169732A1 Method and device for treating thin layers of amorphous silicon |
| 01/09/2002 | EP1169731A1 Semiconductor device having a self-aligned contact structure and methods of forming the same |
| 01/09/2002 | EP1169729A1 Method and apparatus for processing a wafer |
| 01/09/2002 | EP1169726A1 Object carrier for a particle-optical apparatus |
| 01/09/2002 | EP1169671A1 Device and method for detecting a workpiece in an automatic processing device |
| 01/09/2002 | EP1169670A2 Photolithography method and apparatus configuration for performing photolithography |
| 01/09/2002 | EP1169657A1 Calibration of sensors |
| 01/09/2002 | EP1169613A1 Systems and methods for characterizing and correcting cyclic errors in distance measuring and dispersion interferometry |
| 01/09/2002 | EP1169491A1 Low dielectric nano-porous material obtainable from polymer decomposition |
| 01/09/2002 | EP1169490A1 Vacuum processing apparatus |
| 01/09/2002 | EP1169357A1 Hydroxy-epoxide thermally cured undercoat for 193 nm lithography |
| 01/09/2002 | EP1169162A1 Method and apparatus for plating and polishing a semiconductor substrate |
| 01/09/2002 | EP1169145A1 Method and device for cleaning substrates |
| 01/09/2002 | EP1137968A4 Novel photosensitive resin compositions |
| 01/09/2002 | EP1060215B1 High-melting polyamide composition for electronic applications |
| 01/09/2002 | EP0956376B1 A susceptor for a device for epitaxially growing objects and such a device |
| 01/09/2002 | EP0907461B1 Grinding machine spindle flexibly attached to platform |
| 01/09/2002 | EP0827632B1 Semiconductor device having a semiconductor chip electrically connected to a wiring substrate |
| 01/09/2002 | CN2471058Y Improved packaging device of image sensor |