| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/17/2002 | US20020005938 Projection optical system, exposure apparatus incorporating this projection optical system, and manufacturing method for micro devices using the exposure apparatus |
| 01/17/2002 | US20020005905 Semiconductor device and manufacturing method thereof |
| 01/17/2002 | US20020005796 Data converter with vertical resistor meander |
| 01/17/2002 | US20020005747 Semiconductor device with signal transfer line |
| 01/17/2002 | US20020005737 256 Meg dynamic random access memory |
| 01/17/2002 | US20020005732 Semiconductor integrated circuit and testing method thereof |
| 01/17/2002 | US20020005731 Electromigration evaluation circuit |
| 01/17/2002 | US20020005729 Method and system for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus |
| 01/17/2002 | US20020005726 Relative-displacement detecting unit |
| 01/17/2002 | US20020005723 Semiconductor wafer test system |
| 01/17/2002 | US20020005722 Signal supply apparatus and method for examining the same, and semiconductor device, electro-optical apparatus and electronic apparatus using the same |
| 01/17/2002 | US20020005594 Semiconductor device and method for manufacturing the same |
| 01/17/2002 | US20020005593 Growth of GaN with a low density of structural defects using an interlayer |
| 01/17/2002 | US20020005591 Bumpless flip chip assembly with strips-in-via and plating |
| 01/17/2002 | US20020005589 Semiconductor device and production method thereof |
| 01/17/2002 | US20020005587 Semiconductor device and manufacturing method thereof |
| 01/17/2002 | US20020005583 Semiconductor device and fabrication process therefor |
| 01/17/2002 | US20020005582 Pad structure for copper interconnection and its formation |
| 01/17/2002 | US20020005581 Semiconductor device having an insulated gate and a fabrication process thereof |
| 01/17/2002 | US20020005579 Semiconductor apparatus and frame used for fabricating the same |
| 01/17/2002 | US20020005576 Semiconductor device and method of manufacturing the same |
| 01/17/2002 | US20020005575 Stack package and method for fabricating the same |
| 01/17/2002 | US20020005573 Surface mounting semiconductor device |
| 01/17/2002 | US20020005572 Integrated circruit and layout method for the same |
| 01/17/2002 | US20020005571 Plastic lead frames for semiconductor devices, packages including same, and methods of fabrication |
| 01/17/2002 | US20020005570 Plastic lead frames for semiconductor devices, packages including same, and methods of fabrication |
| 01/17/2002 | US20020005568 Semiconductor device and method for manufacturing |
| 01/17/2002 | US20020005566 Process for growing epitaxial gallium nitride and composite wafers |
| 01/17/2002 | US20020005562 Semiconductor power integrated circuit and method for fabricating the same |
| 01/17/2002 | US20020005561 Non-volatile semiconductor memory device and manufacturing method thereof |
| 01/17/2002 | US20020005560 Shallow trench isolation having an etching stop layer and method for fabricating same |
| 01/17/2002 | US20020005559 Lateral semiconductor device |
| 01/17/2002 | US20020005556 Silicate gate dielectric |
| 01/17/2002 | US20020005555 Semiconductor device comprising a silicon body with bipolar and mos transistors |
| 01/17/2002 | US20020005554 Integrated radio frequency circuits |
| 01/17/2002 | US20020005553 Semiconductor integrated circuit device and a method of manufacturing the same |
| 01/17/2002 | US20020005552 Semiconductor device having different field oxide sizes |
| 01/17/2002 | US20020005551 Semiconductor device and method for fabricating the same |
| 01/17/2002 | US20020005550 Semiconductor device and manufacturing method of the same |
| 01/17/2002 | US20020005549 Power semiconductor device and method of manufacturing the same |
| 01/17/2002 | US20020005548 Trench-gate power semiconductor device preventing latch-up and method for fabricating the same |
| 01/17/2002 | US20020005546 Non-volatile semiconductor memory and manufacturing method thereof |
| 01/17/2002 | US20020005545 Semiconductor device |
| 01/17/2002 | US20020005544 Semiconductor memory and semiconductor device |
| 01/17/2002 | US20020005543 Low voltage single poly deep sub-micron flash eeprom |
| 01/17/2002 | US20020005542 Manufacturing method of semiconductor integrated circuit device, and semiconductor integrated circuit device |
| 01/17/2002 | US20020005540 Thin film transistor and fabricating method thereof |
| 01/17/2002 | US20020005539 Spin coating for maximum fill characteristic yielding a planarized thin film surface |
| 01/17/2002 | US20020005538 Integrated circuit configuration having at least one buried circuit element and an insulating layer, and a method of manufacturing the integrated circuit configuration |
| 01/17/2002 | US20020005537 DRAM with vertical transistors and deep trench capacitors |
| 01/17/2002 | US20020005536 Method for fabricating a semiconductor component |
| 01/17/2002 | US20020005535 Memory cell configuration |
| 01/17/2002 | US20020005534 Semiconductor memory device and method of manufacturing the same |
| 01/17/2002 | US20020005533 Substrate plate trench dram cell with lightly doped substrate |
| 01/17/2002 | US20020005532 Ferroelectric memory and method for manufacturing same |
| 01/17/2002 | US20020005529 Semiconductor device and method for manufacturing same |
| 01/17/2002 | US20020005528 High-speed compound semiconductor device operable at large output power with minimum leakage current |
| 01/17/2002 | US20020005525 Semiconductor device and power amplifier using the same |
| 01/17/2002 | US20020005521 Semiconductor light emitting device and method for manufacturing the same |
| 01/17/2002 | US20020005520 Semiconductor device |
| 01/17/2002 | US20020005519 Crystalline silicon semiconductor device and method for fabricating same |
| 01/17/2002 | US20020005518 Method for fabricating a simplified CMOS polysilicon thin film transistor and resulting structure |
| 01/17/2002 | US20020005517 Thin film transistor, manufacturing method thereof, and circuit and liquid crystal display device using the thin film transistor |
| 01/17/2002 | US20020005516 Thin film circuit |
| 01/17/2002 | US20020005514 Low threading dislocation density relaxed mismatched epilayers without high temperature growth |
| 01/17/2002 | US20020005504 Ta barrier slurry containing an organic additive |
| 01/17/2002 | US20020005496 Apparatusn for determining exposure conditions, method for determining exposure conditions and process apparatus |
| 01/17/2002 | US20020005495 Exposure method and device manufacturing method using the same |
| 01/17/2002 | US20020005491 Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method |
| 01/17/2002 | US20020005485 Infrared detecting element, infrared two-dimensional image sensor, and method of manufcturing the same |
| 01/17/2002 | US20020005471 Solid-state pickup element and method for producing the same |
| 01/17/2002 | US20020005442 Nozzle plate member for supplying fluids in dispersed manner and manufacturing method of the same |
| 01/17/2002 | US20020005400 Rapid thermal processing chamber for processing multiple wafers |
| 01/17/2002 | US20020005392 Systems and methods for variable mode plasma enhanced processing of semiconductor wafers |
| 01/17/2002 | US20020005391 Methods and apparatus for forming submicron patterns on films |
| 01/17/2002 | US20020005369 Door guide for a wafer container |
| 01/17/2002 | US20020005359 Connecting multilayers; fine grooves |
| 01/17/2002 | US20020005348 Sputtering method to generate ionized metal plasma using electron beams and magnetic field |
| 01/17/2002 | US20020005294 Electro-fluidic assembly process for integration of electronic devices onto a substrate |
| 01/17/2002 | US20020005293 Method of mounting a semiconductor device to a substrate and a mounted structure |
| 01/17/2002 | US20020005260 Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing |
| 01/17/2002 | US20020005253 Modular device of tubular plasma source |
| 01/17/2002 | US20020005252 Plasma etching apparatus and plasma etching method |
| 01/17/2002 | US20020005248 Heat sink having bonded cooling fins |
| 01/17/2002 | US20020005247 Electrically conductive paste materials and applications |
| 01/17/2002 | US20020005245 Method for bonding heat sinks to overmolds and device formed thereby |
| 01/17/2002 | US20020005240 Method of adhering wafers and wafer adhering device |
| 01/17/2002 | US20020005215 Apparatus for rinsing and drying semiconductor wafers in a chamber with a movable side wall |
| 01/17/2002 | US20020005214 Using mixture of ozone and ammonia; cleaning wafer with recesses |
| 01/17/2002 | US20020005212 For semiconductor wafers; removal of residues afterpolishing |
| 01/17/2002 | US20020005171 Foaming mixture; pressurization |
| 01/17/2002 | US20020005169 Thin film electrostatic shield for inductive plasma processing |
| 01/17/2002 | US20020005168 Dual wafer load lock |
| 01/17/2002 | US20020005167 Substrate processing apparatus |
| 01/17/2002 | US20020005166 Semiconductor manufactring apparatus, and positioning jig used for same |
| 01/17/2002 | US20020005165 Coating installation for disk-form workpieces |
| 01/17/2002 | US20020005159 Method of producing thin semiconductor film and apparatus therefor |
| 01/17/2002 | US20020005017 Aqueous dispersion for chemical mechanical polishing |
| 01/17/2002 | US20020004991 Micro positioning device with shared actuators |
| 01/17/2002 | US20020004981 Method and apparatus for forming metal contacts on a substrate |