| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/24/2002 | US20020009835 Process for forming polycrystalline thin film transistor liquid crystal display |
| 01/24/2002 | US20020009833 Thin film transistor with sub-gates and schottky source/drain and a manufacturing method of the same |
| 01/24/2002 | US20020009832 Method of fabricating high voltage power mosfet having low on-resistance |
| 01/24/2002 | US20020009831 Method of making eeprom transistor for a dram |
| 01/24/2002 | US20020009830 Method of and apparatus for performing circuit-processing, method of and apparatus for controlling the motion of the circuit-processing performing apparatus, and information storage medium |
| 01/24/2002 | US20020009829 Surface treatment of darc films to reduce defects in subsequent cap layers |
| 01/24/2002 | US20020009827 Microelectronic unit forming methods and materials |
| 01/24/2002 | US20020009826 Method of manufacturing a cavity-down plastic ball grid array (CD-PBGA) substrate |
| 01/24/2002 | US20020009825 Deadhesion method and mechanism for wafer processing |
| 01/24/2002 | US20020009824 Semiconductor device having a solid state image sensing device and manufacturing method thereof |
| 01/24/2002 | US20020009820 Method of fabricating nickel etching mask |
| 01/24/2002 | US20020009819 Thin film transistors and their manufacture |
| 01/24/2002 | US20020009818 Method of manufacturing a semiconductor device |
| 01/24/2002 | US20020009816 Locking apparatus for a nozzle exchange apparatus |
| 01/24/2002 | US20020009815 Semi-conductor device with test element group for evaluation of interlayer dielectric and process for producing the same |
| 01/24/2002 | US20020009814 Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method |
| 01/24/2002 | US20020009813 Exposure apparatus, coating/developing apparatus, method of transferring a substrate, method of producing a device, semiconductor production factory, and method of maintaining an exposure apparatus |
| 01/24/2002 | US20020009791 Methods for processing a coating film and for manufacturing a semiconductor element |
| 01/24/2002 | US20020009675 Method for reducing photolithographic steps in a semiconductor interconnect process |
| 01/24/2002 | US20020009674 Photoresist stripping composition and process for stripping photoresist |
| 01/24/2002 | US20020009668 Radiation-sensitive resin composition |
| 01/24/2002 | US20020009667 Radiation-sensitive resin composition |
| 01/24/2002 | US20020009663 Positive or negative amplification |
| 01/24/2002 | US20020009658 Substrate processing apparatus |
| 01/24/2002 | US20020009657 Method and system for compensating exposure value for exposure process as well as exposure system and semiconductor Manufacturing system |
| 01/24/2002 | US20020009653 Phase shifter film and process for the same |
| 01/24/2002 | US20020009624 Reduction and oxidation reactions in positive and negative liquid electrolytes, without gas evolution at the electrodes; batteries |
| 01/24/2002 | US20020009612 Piezoelectric actuators/transducers; ferroelectric memory cells; perovskite heterostructure of monocrystalline silicon substrate and four layers of monocrystalline oxides, the first being of strontium/barium/titanium; high quality |
| 01/24/2002 | US20020009597 Heat curing an epoxy resin, a phenol compound having two or more phenolic hydroxyl groups and a latent curing agent; shrinkage inhibition; used in mounting of semiconductor devices, such as an LSI circuit, on a circuit substrate |
| 01/24/2002 | US20020009595 Organic anti-reflective coating polymer and preparation thereof |
| 01/24/2002 | US20020009592 Evaluating method of hydrophobic process, forming method of resist pattern, and forming system of resist pattern |
| 01/24/2002 | US20020009584 Encapsulation using microcellular foamed materials |
| 01/24/2002 | US20020009546 Method and apparatus for deposited film |
| 01/24/2002 | US20020009545 Method for vaporization of liquid organic feedstock and method for growth of insulation film |
| 01/24/2002 | US20020009539 Process for screening features on an electronic substrate with a low viscosity paste |
| 01/24/2002 | US20020009359 Mechanical gripper for wafer handling robots |
| 01/24/2002 | US20020009357 Semiconductor processing apparatus having lift and tilt mechanism |
| 01/24/2002 | US20020009219 Wafer pattern observation method and device |
| 01/24/2002 | US20020009175 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 01/24/2002 | US20020009120 Burn-in system and burn-in method |
| 01/24/2002 | US20020009006 Semiconductor wafer, semiconductor chip, and manufacturing method of semiconductor device |
| 01/24/2002 | US20020009003 Integrated semiconductor memory having memory cells in a plurality of memory cell arrays and method for repairing such a memory |
| 01/24/2002 | US20020009002 Semiconductor memory device |
| 01/24/2002 | US20020008999 Semiconductor integrated circuit device operating with low power consumption |
| 01/24/2002 | US20020008995 Semiconductor storage device and production method thereof |
| 01/24/2002 | US20020008992 Semiconductor non-volatile storage |
| 01/24/2002 | US20020008989 MRAM memory cell |
| 01/24/2002 | US20020008988 Magnetic memory |
| 01/24/2002 | US20020008987 Magnetic random access memory |
| 01/24/2002 | US20020008984 256 Meg dynamic random access memory |
| 01/24/2002 | US20020008966 Microelectronic contacts with asperities and methods of making same |
| 01/24/2002 | US20020008954 Method and apparatus for controlling chucking force in an electrostatic |
| 01/24/2002 | US20020008912 Littrow grating and uses of a littrow grating |
| 01/24/2002 | US20020008911 Projection optical system with diffractive optical element |
| 01/24/2002 | US20020008877 Stage apparatus which supports interferometer, stage position measurement method, projection exposure apparatus, projection exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 01/24/2002 | US20020008869 Method of measuring aberration in an optical imaging system |
| 01/24/2002 | US20020008864 Substrate holding apparatus and exposure apparatus including substrate holding apparatus |
| 01/24/2002 | US20020008862 Projection exposure method, manufacturing method for device using same, and projection exposure apparatus |
| 01/24/2002 | US20020008860 Reticle system for measurement of effective coherence factors |
| 01/24/2002 | US20020008857 Developing method and developing apparatus |
| 01/24/2002 | US20020008855 Projection optical system and projection exposure apparatus |
| 01/24/2002 | US20020008819 Liquid crystal display apparatus and method for manufacturing liquid crystal display apparatus |
| 01/24/2002 | US20020008818 Transmission liquid crystal display and method of forming the same |
| 01/24/2002 | US20020008814 Liquid crystal display device and liquid crystal projector apparatus |
| 01/24/2002 | US20020008801 Glass substrate assembly, semiconductor device and method of heat-treating glass substrate |
| 01/24/2002 | US20020008687 Liquid crystal display module capable of avoiding generation of rib-like patterns |
| 01/24/2002 | US20020008605 Integrated transformer |
| 01/24/2002 | US20020008597 Semiconductor circuit device having power and ground lines adapted for high-frequency operation |
| 01/24/2002 | US20020008566 Internal Voltage generation circuit |
| 01/24/2002 | US20020008560 Variable delay circuit and semiconductor integrated circuit device |
| 01/24/2002 | US20020008555 Semiconductor integrated circuit including a plurality of macros that can be operated although their operational voltages are different from each other |
| 01/24/2002 | US20020008550 Sense amplifier of semiconductor integrated circuit |
| 01/24/2002 | US20020008546 Shield circuit and integrated circuit in which the shield circuit is used |
| 01/24/2002 | US20020008545 Semiconductor integrated circuit, logic operation circuit, and flip flop |
| 01/24/2002 | US20020008540 Multi-master multi-slave system bus in a field programmable gate array (FPGA) |
| 01/24/2002 | US20020008535 Probe structure and manufacturing method thereof |
| 01/24/2002 | US20020008534 Prober and low-temperature test equipment having same incorporated therein |
| 01/24/2002 | US20020008529 High density, area array probe card apparatus |
| 01/24/2002 | US20020008528 Electronic part inspection method and an electronic part assembly apparatus |
| 01/24/2002 | US20020008500 Semiconductor integrated circuit and method for generating internal supply voltage |
| 01/24/2002 | US20020008345 Holder for a substrate cassette and device provided with such a holder |
| 01/24/2002 | US20020008326 Electrode structure of a carrier substrate of a semiconductor device |
| 01/24/2002 | US20020008325 Functional device unit and method of producing the same |
| 01/24/2002 | US20020008324 Semiconductor device and method of manufacturing same |
| 01/24/2002 | US20020008323 Semiconductor device with dual damascene wiring |
| 01/24/2002 | US20020008322 Enhanced barrier liner formation for via |
| 01/24/2002 | US20020008320 Semiconductor device and method of making the same, circuit board and electronic equipment |
| 01/24/2002 | US20020008318 Semiconductor device |
| 01/24/2002 | US20020008316 Semiconductor device having heat spreader attached thereto and method of manufacturing the same |
| 01/24/2002 | US20020008315 Semiconductor package and method of fabricating the same |
| 01/24/2002 | US20020008314 Semiconductor integrated circuit and printed wiring substrate provided with the same |
| 01/24/2002 | US20020008311 Semiconductor device and method of manufacturing the same |
| 01/24/2002 | US20020008309 Stacked subtrate and semiconductor device |
| 01/24/2002 | US20020008305 Method for enhancing selectivity between a film of a light-sensitive material and a layer to be etched in electronic semiconductor device fabrication processes |
| 01/24/2002 | US20020008303 Semiconductor device |
| 01/24/2002 | US20020008302 Polysilicon resistor having adjustable temperature coefficients and the method of making the same |
| 01/24/2002 | US20020008301 Monolithic high-q inductance device and process for fabricating the same |
| 01/24/2002 | US20020008299 Integrated device with a trench isolation structure, and fabrication process therefor |
| 01/24/2002 | US20020008298 Advanced isolation process for large memory arrays |
| 01/24/2002 | US20020008297 Gate structure and method for manufacture thereof |