| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/22/2002 | US6340326 System and method for controlled polishing and planarization of semiconductor wafers |
| 01/22/2002 | US6340325 Polishing pad grooving method and apparatus |
| 01/22/2002 | US6340281 Method and apparatus for positioning a disk-shaped object |
| 01/22/2002 | US6340253 Resist peeling system and control method of a resist peeling solution |
| 01/22/2002 | US6340112 Stepwise autorotation of wire bonding capilliary |
| 01/22/2002 | US6340109 Solder bump measuring method and apparatus |
| 01/22/2002 | US6340098 Chemical delivery systems and methods of delivery |
| 01/22/2002 | US6340090 Substrate fixturing device |
| 01/22/2002 | US6339997 Plasma processing apparatus |
| 01/22/2002 | US6339955 Thickness measurement using AFM for next generation lithography |
| 01/22/2002 | US6339875 Method for removing heat from an integrated circuit |
| 01/22/2002 | CA2232796C Thin film forming process |
| 01/22/2002 | CA2077720C Process of forming electrical connections between conductive layers using thermosonic wire bonded bump vias and thick film techniques |
| 01/21/2002 | CA2353338A1 Folded-fin heat sink manufacturing method and apparatus |
| 01/21/2002 | CA2352088A1 High numerical aperture catadioptric lens |
| 01/17/2002 | WO2002005470A2 Magnetoresistive trimming of gmr circuits |
| 01/17/2002 | WO2002005360A1 Method for the production and configuration of organic field-effect transistors (ofet) |
| 01/17/2002 | WO2002005353A1 Semiconductor non-volatile memory device |
| 01/17/2002 | WO2002005352A2 Partially transparent photovoltaic modules |
| 01/17/2002 | WO2002005349A1 Electrical passivation of silicon-containing surfaces using organic layers |
| 01/17/2002 | WO2002005347A2 Electronic component and method of manufacture |
| 01/17/2002 | WO2002005344A1 Method for cutting a block of material and for forming a thin film |
| 01/17/2002 | WO2002005343A2 System and method for comparing electronics manufacturing data |
| 01/17/2002 | WO2002005341A1 Method of manufacturing power silicon transistor |
| 01/17/2002 | WO2002005340A1 Crosslinked resin and method for making oxides using same |
| 01/17/2002 | WO2002005339A1 Plasma processing apparatus |
| 01/17/2002 | WO2002005338A1 Cleaning gas and etching gas |
| 01/17/2002 | WO2002005337A1 Mirror chamfered wafer, mirror chamfering polishing cloth, and mirror chamfering polishing machine and method |
| 01/17/2002 | WO2002005336A1 Method for producing a gate for a cmos transistor structure having a channel of reduced length |
| 01/17/2002 | WO2002005335A1 Single crystal wafer and solar battery cell |
| 01/17/2002 | WO2002005334A1 Method for maintaining processor, method of automatically inspecting processor and method of automatically resetting processor, method for self-diagnosing software for driving processor |
| 01/17/2002 | WO2002005333A2 Dual post centrifugal wafer clip for spin rinse dry unit |
| 01/17/2002 | WO2002005332A2 Loadlock chamber |
| 01/17/2002 | WO2002005331A2 Removable gripper pads |
| 01/17/2002 | WO2002005330A2 Door assembly for sealing an opening of a chamber |
| 01/17/2002 | WO2002005329A2 Chemical vapor deposition of barrier layers |
| 01/17/2002 | WO2002005328A2 Pod load interface equipment adapted for implementation in a fims system |
| 01/17/2002 | WO2002005327A2 Semiconductor substrate processing tool and fabrications facilities integration plate |
| 01/17/2002 | WO2002005326A2 Robotic end effector provided with wafer supporting pads elastically mounted |
| 01/17/2002 | WO2002005325A2 Chuck with heat exchanger and temperature control fluid |
| 01/17/2002 | WO2002005323A2 Thermally processing a substrate |
| 01/17/2002 | WO2002005322A2 Automatic slit/gate valve |
| 01/17/2002 | WO2002005321A2 Method to isolate multi zone heater from atmosphere |
| 01/17/2002 | WO2002005320A1 Storage device, especially for the intermediate storage of test wafers |
| 01/17/2002 | WO2002005319A2 Component source interchange gantry |
| 01/17/2002 | WO2002005318A2 High density giant magnetoresistive memory cell |
| 01/17/2002 | WO2002005317A2 Method of etching tungsten or tungsten nitride electrode gates in semiconductor structures |
| 01/17/2002 | WO2002005316A2 Wafer container washing apparatus |
| 01/17/2002 | WO2002005315A2 System and method for improving thin films by gas cluster ion be am processing |
| 01/17/2002 | WO2002005314A2 Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly |
| 01/17/2002 | WO2002005313A2 Automated processing system |
| 01/17/2002 | WO2002005312A2 Automated semiconductor immersion processing system |
| 01/17/2002 | WO2002005308A2 A plasma reactor having a symmetric parallel conductor coil antenna |
| 01/17/2002 | WO2002005305A1 Hot electron emission array for e-beam photolithography and display screens |
| 01/17/2002 | WO2002005300A2 Feedback control of strip time to reduce post strip critical dimension variation in a transistor gate electrode |
| 01/17/2002 | WO2002005298A2 Semiconductor inductor and methods for making the same |
| 01/17/2002 | WO2002005286A1 Magnetic memory |
| 01/17/2002 | WO2002005268A2 All metal giant magnetoresistive memory |
| 01/17/2002 | WO2002005145A1 Convergence technique for model-based optical and proximity correction |
| 01/17/2002 | WO2002005051A2 Apparatus and method for controlling temperature in a wafer and a device under test using integrated temperature sensitive diode |
| 01/17/2002 | WO2002005034A1 Resist resin, chemical amplification type resist, and method of forming pattern with the same |
| 01/17/2002 | WO2002005033A1 Method of reducing metal ion content of film-forming resins using a liquid/liquid centrifuge |
| 01/17/2002 | WO2002005032A1 Method of manufacturing integrated circuit |
| 01/17/2002 | WO2002005030A1 Control technique for microlithography lasers |
| 01/17/2002 | WO2002005029A1 A method of illuminating a photomask using chevron illumination |
| 01/17/2002 | WO2002004961A2 Self-retained spring probe |
| 01/17/2002 | WO2002004887A1 Methods and apparatus for processing microelectronic workpieces using metrology |
| 01/17/2002 | WO2002004886A1 Apparatus and method for processing a microelectronic workpiece using metrology |
| 01/17/2002 | WO2002004774A2 Automatic door opener |
| 01/17/2002 | WO2002004715A2 Deposition uniformity control for electroplating apparatus, and associated method |
| 01/17/2002 | WO2002004712A2 Flow diffuser to be used in electro-chemical plating system |
| 01/17/2002 | WO2002004711A2 Method and associated apparatus for tilting a substrate upon entry for metal deposition |
| 01/17/2002 | WO2002004704A2 Method and apparatus for patching electrochemically deposited layers using electroless deposited materials |
| 01/17/2002 | WO2002004573A2 Ready-to-use stable chemical-mechanical polishing slurries |
| 01/17/2002 | WO2002004541A2 No-flow flux adhesive compositions |
| 01/17/2002 | WO2002004322A2 Smif container latch mechanism |
| 01/17/2002 | WO2002004311A1 Smif container including an electrostatic dissipative reticle support structure |
| 01/17/2002 | WO2002004233A1 Compositions for cleaning organic and plasma etched residues for semiconductor devices |
| 01/17/2002 | WO2002004176A1 Robot having independent end effector linkage motion |
| 01/17/2002 | WO2002004171A1 Method and apparatus for heating a polishing block |
| 01/17/2002 | WO2002004136A1 Dual cassette centrifugal processor |
| 01/17/2002 | WO2002004134A1 Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices |
| 01/17/2002 | WO2001078127A3 A method of improving adhesion of a cap layer to a porous material layer on a wafer |
| 01/17/2002 | WO2001052320A3 A method for requesting trace data reports from fault detection controlled semiconductor fabrication processes |
| 01/17/2002 | WO2001050198A3 Method for production of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows |
| 01/17/2002 | WO2001043170A3 Dynamic brake for non-contact wafer holder |
| 01/17/2002 | WO2001040943A3 A system, method and apparatus pertaining to flexible selection scan test |
| 01/17/2002 | WO2001039256A3 Method for producing an insulation collar in a trench capacitor |
| 01/17/2002 | WO2001033240A3 High resolution skew detection apparatus and method |
| 01/17/2002 | WO2001032951A3 Chemical fluid deposition for the formation of metal and metal alloy films on patterned and unpatterned substrates |
| 01/17/2002 | WO2001024234A3 A method for cleaning and treating a semiconductor wafer after chemical mechanical polishing |
| 01/17/2002 | WO2001020647A3 Novel chip interconnect and packaging deposition methods and structures |
| 01/17/2002 | WO2001018860A3 Improved apparatus and methods for integrated circuit planarization |
| 01/17/2002 | WO2000060645A3 Dual cmp pad conditioner |
| 01/17/2002 | WO2000051168A3 Slurry delivery control apparatus and method |
| 01/17/2002 | US20020007481 Apparatus and method of correcting layout pattern data, method of manufacturing semiconductor devices and recording medium |
| 01/17/2002 | US20020007259 Method of creating reference data table |
| 01/17/2002 | US20020007258 Semi-physical modeling of HEMT high frequency small signal equivalent circuit models |
| 01/17/2002 | US20020007227 Multiple head dispensing system and method |
| 01/17/2002 | US20020007042 Die attach adhesives for use in microelectronic devices |