| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/06/2002 | EP1178528A2 Wafer pretreatment to decrease the deposition rate of silicon dioxide on silicon nitride in comparison to its deposition rate on a silicon substrate |
| 02/06/2002 | EP1178527A2 Method for removing silicon carbide from a substrate surface after oxidation |
| 02/06/2002 | EP1178526A2 Mixed acid solution in etching process, process for producing the same, etching process using the same and process for producing semiconductor device |
| 02/06/2002 | EP1178524A1 Method for fabricating device chips from thin sheet of pyroelectric material |
| 02/06/2002 | EP1178523A1 METHOD FOR GROWING GaN COMPOUND SEMICONDUCTOR CRYSTAL AND SEMICONDUCTOR SUBSTRATE |
| 02/06/2002 | EP1178522A1 Formation of Quantum Dots |
| 02/06/2002 | EP1178521A2 Method and apparatus for processing composite member |
| 02/06/2002 | EP1178520A2 Substrate heating system for heating simultaneously both sides of a wafer |
| 02/06/2002 | EP1178490A1 Low loss writing device for a MRAM |
| 02/06/2002 | EP1178462A2 Active matrix electroluminescent display device |
| 02/06/2002 | EP1178359A2 Stripping composition |
| 02/06/2002 | EP1178354A1 Antireflective coating compositions |
| 02/06/2002 | EP1178300A1 Arrangement and method for removing an organic material from a semiconductor device |
| 02/06/2002 | EP1178275A2 Purge chamber |
| 02/06/2002 | EP1178133A2 Method of extending life of a recyclable process kit |
| 02/06/2002 | EP1178131A1 Chemical vapor deposition of ruthemium films |
| 02/06/2002 | EP1177870A2 A cutter wheel for forming scribe lines on brittle materials |
| 02/06/2002 | EP1177859A2 Substrate holding apparatus and substrate polishing apparatus |
| 02/06/2002 | EP1177713A1 System and method for providing a lithographic light source for a semiconductor manufacturing process |
| 02/06/2002 | EP1177631A1 Heterogeneous programmable gate array |
| 02/06/2002 | EP1177622A1 Electronic device |
| 02/06/2002 | EP1177583A1 Silicon carbide lateral mosfet and method of making the same |
| 02/06/2002 | EP1177579A1 Chip holder for a chip module and method for producing said chip module |
| 02/06/2002 | EP1177578A1 Methods of forming local interconnects and conductive lines, and resulting structure |
| 02/06/2002 | EP1177577A1 Method for creating connection lines and underlying contact points in a dielectric substrate |
| 02/06/2002 | EP1177576A2 Integrated semiconductor device with one lateral power gate |
| 02/06/2002 | EP1177575A1 Method for etching doped polysilicon with high selectivity to undoped polysilicon |
| 02/06/2002 | EP1177574A1 Anti-reflective coatings and methods regarding same |
| 02/06/2002 | EP1177573A2 System for treating wafers |
| 02/06/2002 | EP1177572A2 Device for treating wafers |
| 02/06/2002 | EP1177571A1 Method for transferring wafers and ring |
| 02/06/2002 | EP1177570A1 Device for handling substrates inside and outside a clean room |
| 02/06/2002 | EP1177521A1 System and method for selection of a reference die |
| 02/06/2002 | EP1177479A1 Streamlined ic mask layout optical and process correction through correction reuse |
| 02/06/2002 | EP1177452A1 Cooling system for test head |
| 02/06/2002 | EP1177451A2 Sensor |
| 02/06/2002 | EP1177429A2 Reticle for use in photolithography and methods for making same and inspecting |
| 02/06/2002 | EP1177428A1 Inspection systems performing two-dimensional imaging with line light spot |
| 02/06/2002 | EP1177275A1 Compositions for cleaning organic and plasma etched residues for semiconductor devices |
| 02/06/2002 | EP1177112A1 Remote plasma generator |
| 02/06/2002 | EP1177068A1 Improved chemical mechanical polishing slurries for metal |
| 02/06/2002 | EP1064418B1 Apparatus for moving exhaust tube of barrel reactor |
| 02/06/2002 | EP1012358B1 Inflatable elastomeric element for rapid thermal processing (rtp) system |
| 02/06/2002 | EP1001852A4 Polymerizable fluxing agents and fluxing adhesive compositions therefrom |
| 02/06/2002 | EP0864177B1 Read-only memory cell array and method for the fabrication thereof |
| 02/06/2002 | EP0852062B1 Doping process for producing homojunctions in semiconductor substrates |
| 02/06/2002 | EP0796354B1 Sputtering apparatus having an on board service module |
| 02/06/2002 | EP0664033B1 Rasterizer for a pattern generation apparatus |
| 02/06/2002 | CN2476101Y Box dish locating device |
| 02/06/2002 | CN2476100Y Disposable tin ball body forming machine |
| 02/06/2002 | CN2476099Y Isopropyl alcohol crystal chip improvement structure for dryer |
| 02/06/2002 | CN1334966A Reduced diffusion of mobile ion from metal oxide ceramic into substrate |
| 02/06/2002 | CN1334965A Analogue switch |
| 02/06/2002 | CN1334964A Circuit assembly with at least one nanoelectronic component and method for producing same |
| 02/06/2002 | CN1334962A Reduced degradation of metal oxide ceramic due to diffusion of mobile matter therefrom |
| 02/06/2002 | CN1334961A Materials for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using same |
| 02/06/2002 | CN1334960A Microelectronic structure |
| 02/06/2002 | CN1334959A Device and method for handling substrates by means of self-levelling vacuum system in epitaxial induction reactors |
| 02/06/2002 | CN1334931A Novolac polymer planarization films with high temp. stability |
| 02/06/2002 | CN1334918A 半导体压力传感器 Semiconductor pressure sensor |
| 02/06/2002 | CN1334885A Large area plasma source |
| 02/06/2002 | CN1334849A Oxidizing polishing slurries for low dielectric constant materials |
| 02/06/2002 | CN1334652A 光数据传送装置 Optical data transfer means |
| 02/06/2002 | CN1334606A Semiconductor device and mfg. method thereof |
| 02/06/2002 | CN1334605A Semiconductor device |
| 02/06/2002 | CN1334604A Twice fuse density in TV window |
| 02/06/2002 | CN1334603A Planar plastic packaged module of integrated circuit |
| 02/06/2002 | CN1334602A Semiconductor device and packaging method |
| 02/06/2002 | CN1334601A Flip-chip semiconductor device and mfg. method thereof |
| 02/06/2002 | CN1334600A Tester for spherical grid array substrate |
| 02/06/2002 | CN1334599A Apparatus for forming conductor connection |
| 02/06/2002 | CN1334597A Method for extracting threshold voltage model parameters in BSIM3V3 model |
| 02/06/2002 | CN1334596A 液体处理装置 Liquid treatment apparatus |
| 02/06/2002 | CN1334595A Semiconductor structure having crystalline alkaline earth metal oxide interface with silicon |
| 02/06/2002 | CN1334594A Process for mfg. micromechanical inductor with suspended structure on single surface of silicon substrate |
| 02/06/2002 | CN1334593A Method for mfg. semioconductor structure having crystalline alkaline earth metal oxide interface with silicon |
| 02/06/2002 | CN1334567A MRAM memory unit |
| 02/06/2002 | CN1334415A Drag driven speed ruducer, transporting device and double-shaft output coder structure |
| 02/06/2002 | CN1334312A Polycrystalline silicon film surface treating solution and method for surface treatment of polycrystalline silicon film in said solution |
| 02/06/2002 | CN1334234A Method of horizontal growth of carbon nanotube and field effect transistor using carbon nanotube |
| 02/06/2002 | CN1078960C Non-volatile semiconductor memory unit |
| 02/06/2002 | CN1078836C Polishing apparatus |
| 02/05/2002 | USRE37541 Electrostatic chuck with reference electrode |
| 02/05/2002 | USRE37537 Method and apparatus for altering material |
| 02/05/2002 | US6345378 Synthesis shell generation and use in ASIC design |
| 02/05/2002 | US6345150 Single wafer annealing oven |
| 02/05/2002 | US6345063 Algainn elog led and laser diode structures for pure blue or green emission |
| 02/05/2002 | US6345011 Input/output line structure of a semiconductor memory device |
| 02/05/2002 | US6345010 Semiconductor storage device |
| 02/05/2002 | US6344999 Non-volatile semiconductor memory device and data programming method |
| 02/05/2002 | US6344997 Split-gate flash cell for virtual ground architecture |
| 02/05/2002 | US6344991 Nonvolatile semiconductor memory device |
| 02/05/2002 | US6344965 Capacitor using high dielectric constant film for semiconductor memory device and fabrication method therefor |
| 02/05/2002 | US6344964 Capacitor having sidewall spacer protecting the dielectric layer |
| 02/05/2002 | US6344897 Inspection apparatus for foreign matter and pattern defect |
| 02/05/2002 | US6344896 Method and apparatus for measuring positional shift/distortion by aberration |
| 02/05/2002 | US6344892 Exposure apparatus and device manufacturing method using same |
| 02/05/2002 | US6344885 Liquid crystal display device |
| 02/05/2002 | US6344815 Digital-to-analog converter |
| 02/05/2002 | US6344775 Semiconductor device |