| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/20/2002 | CN1337063A Functional device and method of mfg. the same |
| 02/20/2002 | CN1337062A Equipment for UV wafer heating and photochemical processing |
| 02/20/2002 | CN1337014A Chemical filtering for optimising the light transmittance of a gas |
| 02/20/2002 | CN1337012A Multilayer attenuating phase-shift masks |
| 02/20/2002 | CN1336861A Improved polishing pads and methods relating thereto |
| 02/20/2002 | CN1336781A Method for depositing aluminium-lithium alloy cathode onto organic light emitting element |
| 02/20/2002 | CN1336691A Flashing storage unit having non-contact bit line, and its mfg. method |
| 02/20/2002 | CN1336688A Method of integrating antireflecting layer and metal silicide |
| 02/20/2002 | CN1336687A Semiconductor chip, semiconductor device and mfg. method therefor |
| 02/20/2002 | CN1336686A Method of reducing capacitance across inner leads |
| 02/20/2002 | CN1336685A Method of making semiconductor capacitor |
| 02/20/2002 | CN1336684A Semiconductor substrate, field effect transistor, and method for forming silicon germanide layer |
| 02/20/2002 | CN1336683A Prodn. of photoconductor or electroconductor device by using method of horizontal and solid phase over-growth |
| 02/20/2002 | CN1336573A Photoetching process |
| 02/20/2002 | CN1336549A Probe contacting system having plane adjusting mechanism |
| 02/20/2002 | CN1079585C Semiconductor unit and mfg. of same |
| 02/20/2002 | CN1079584C Method for producing defect inspection test sheet for semiconductor device |
| 02/20/2002 | CN1079583C Method for analyzing defects of semiconductor device with three-D |
| 02/20/2002 | CN1079582C Electronic package with multilever connections |
| 02/20/2002 | CN1079581C Exposing apparatus and method for forming thin film transistor |
| 02/20/2002 | CN1079580C Process and apparatus for the treatment of semiconductor wafers in a fluid |
| 02/20/2002 | CN1079579C Semiconductor substrate cleaning method and semiconductor device fabricating method |
| 02/20/2002 | CN1079578C Method for forming contact for semiconductive device |
| 02/20/2002 | CN1079577C Vertical rack used for semiconductor round chip |
| 02/20/2002 | CN1079548C Method for forming photoresist patterns |
| 02/19/2002 | US6349401 Semiconductor integrated circuit, design method and computer-readable medium using a permissive current ratio |
| 02/19/2002 | US6349271 Method and apparatus for simulating an oxidation process in a semiconductor device manufacturing step |
| 02/19/2002 | US6349240 Semiconductor device manufacturing system and method of manufacturing semiconductor devices |
| 02/19/2002 | US6349067 System and method for preventing noise cross contamination between embedded DRAM and system chip |
| 02/19/2002 | US6349065 Semiconductor memory device allowing acceleration testing, and a semi-finished product for an integrated semiconductor device that allows acceleration testing |
| 02/19/2002 | US6349054 Thin film magnetic memory device including memory cells having a magnetic tunnel junction |
| 02/19/2002 | US6349052 DRAM cell arrangement and method for fabricating it |
| 02/19/2002 | US6349005 Microlithographic reduction objective, projection exposure equipment and process |
| 02/19/2002 | US6348835 Semiconductor device with constant current source circuit not influenced by noise |
| 02/19/2002 | US6348810 Interface unit for a tester and method of connecting a tester with a semiconductor device to be tested |
| 02/19/2002 | US6348741 Semiconductor apparatus and a manufacturing method thereof |
| 02/19/2002 | US6348739 Semiconductor device and method of manufacturing the same |
| 02/19/2002 | US6348738 Flip chip assembly |
| 02/19/2002 | US6348737 Metallic interlocking structure |
| 02/19/2002 | US6348736 In situ formation of protective layer on silsesquioxane dielectric for dual damascene process |
| 02/19/2002 | US6348735 Electrode for semiconductor device and method for manufacturing same |
| 02/19/2002 | US6348734 Self-aligned copper interconnect architecture with enhanced copper diffusion barrier |
| 02/19/2002 | US6348733 Dual damascene process and structure with dielectric barrier layer |
| 02/19/2002 | US6348732 Amorphized barrier layer for integrated circuit interconnects |
| 02/19/2002 | US6348731 Copper interconnections with enhanced electromigration resistance and reduced defect sensitivity and method of forming same |
| 02/19/2002 | US6348730 Semiconductor device and fabricating method therefor |
| 02/19/2002 | US6348729 Semiconductor chip package and manufacturing method thereof |
| 02/19/2002 | US6348725 Plasma processes for depositing low dielectric constant films |
| 02/19/2002 | US6348724 Semiconductor device with ESD protection |
| 02/19/2002 | US6348723 Semiconductor device with a dummy wire positioned to prevent charging/discharging of the parasitic capacitance of a signal wire |
| 02/19/2002 | US6348722 Semiconductor memory with shield layer |
| 02/19/2002 | US6348721 Reducing reflectivity on a semiconductor wafer by annealing titanium and aluminum |
| 02/19/2002 | US6348720 Solid state image sensing device and method of manufacturing the same |
| 02/19/2002 | US6348719 Using a change in doping of poly gate to permit placing both high voltage and low voltage transistors on the same chip |
| 02/19/2002 | US6348718 Integrated CMOS circuit for use at high frequencies |
| 02/19/2002 | US6348717 Semiconductor integrated circuit having an improved voltage switching circuit |
| 02/19/2002 | US6348713 Method for fabricating semiconductor device |
| 02/19/2002 | US6348711 NROM cell with self-aligned programming and erasure areas |
| 02/19/2002 | US6348709 Electrical contact for high dielectric constant capacitors and method for fabricating the same |
| 02/19/2002 | US6348708 Semiconductor device utilizing a rugged tungsten film |
| 02/19/2002 | US6348707 Method of manufacturing semiconductor capacitor |
| 02/19/2002 | US6348706 Method to form etch and/or CMP stop layers |
| 02/19/2002 | US6348705 Low temperature process for high density thin film integrated capacitors and amorphously frustrated ferroelectric materials therefor |
| 02/19/2002 | US6348702 Image display system |
| 02/19/2002 | US6348701 Method for determining metal concentration in a field area |
| 02/19/2002 | US6348690 Method and an apparatus of an inspection system using an electron beam |
| 02/19/2002 | US6348540 Syndiotactic; styrene polymer, rubber elastomer, thermoplastic resin, fibrous and tabular fillers; heat, chemical and warp resistant moldings; impact strength |
| 02/19/2002 | US6348421 Dielectric gap fill process that effectively reduces capacitance between narrow metal lines using HDP-CVD |
| 02/19/2002 | US6348420 Situ dielectric stacks |
| 02/19/2002 | US6348419 Modification of the wet characteristics of deposited layers and in-line control |
| 02/19/2002 | US6348418 Etching tungsten silicide with hydrogen peroxide; exposing metal silicide film to hexamethyldisilazane diluted with xylene to make hydrophobic; coating with amplification photoresist; photolithograpy |
| 02/19/2002 | US6348417 Semiconductor device manufacturing apparatus and semiconductor device manufacturing method |
| 02/19/2002 | US6348416 Carrier substrate for producing semiconductor device |
| 02/19/2002 | US6348415 Planarization method for semiconductor device |
| 02/19/2002 | US6348414 Method for forming fine metal patterns by using damascene technique |
| 02/19/2002 | US6348413 High pressure N2 RTA process for TiS2 formation |
| 02/19/2002 | US6348412 Organometallic compound mixtures in chemical vapor deposition |
| 02/19/2002 | US6348411 Method of making a contact structure |
| 02/19/2002 | US6348410 Low temperature hillock suppression method in integrated circuit interconnects |
| 02/19/2002 | US6348409 Self aligned contact plug technology |
| 02/19/2002 | US6348408 Semiconductor device with reduced number of intermediate level interconnection pattern and method of forming the same |
| 02/19/2002 | US6348407 Exposing silicon layer to ultraviolet radiation; silylation and oxygen plasma processing; patterning, etching; depositing blanket conducting copper seed layer over barrier metal; electroplating |
| 02/19/2002 | US6348406 Method for using a low dielectric constant layer as a semiconductor anti-reflective coating |
| 02/19/2002 | US6348405 Interconnection forming method utilizing an inorganic antireflection layer |
| 02/19/2002 | US6348404 Wiring forming method |
| 02/19/2002 | US6348403 Sandwiching between layers of aluminum titanium nitride in semiconductors and integrated circuits |
| 02/19/2002 | US6348402 Method of manufacturing a copper interconnect |
| 02/19/2002 | US6348401 Method of fabricating solder bumps with high coplanarity for flip-chip application |
| 02/19/2002 | US6348399 Method of making chip scale package |
| 02/19/2002 | US6348398 Method of forming pad openings and fuse openings |
| 02/19/2002 | US6348397 Method for diffusion of an impurity into a semiconductor wafer with high in-plane diffusion uniformity |
| 02/19/2002 | US6348396 Semiconductor device and production thereof |
| 02/19/2002 | US6348395 Diamond as a polish-stop layer for chemical-mechanical planarization in a damascene process flow |
| 02/19/2002 | US6348394 Method and device for array threshold voltage control by trapped charge in trench isolation |
| 02/19/2002 | US6348393 Capacitor in an integrated circuit and a method of manufacturing an integrated circuit |
| 02/19/2002 | US6348390 Method for fabricating MOSFETS with a recessed self-aligned silicide contact and extended source/drain junctions |
| 02/19/2002 | US6348389 Method of forming and etching a resist protect oxide layer including end-point etch |
| 02/19/2002 | US6348388 Process for fabricating a uniform gate oxide of a vertical transistor |
| 02/19/2002 | US6348387 Field effect transistor with electrically induced drain and source extensions |
| 02/19/2002 | US6348386 Method for making a hafnium-based insulating film |