| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/07/2002 | US20020016047 Process for producing a large number of semiconductor chips from a semiconductor wafer |
| 02/07/2002 | US20020016046 Simox using controlled water vapor for oxygen implants |
| 02/07/2002 | US20020016045 Method for forming capacitor of semiconductor device |
| 02/07/2002 | US20020016044 Method of producing doped polysilicon layers and polysilicon layered structrues and method of structuring layers and layered structures which comprise polysilicon layers |
| 02/07/2002 | US20020016042 Method of fabricating T-shaped recessed polysilicon gate transistors |
| 02/07/2002 | US20020016041 Method of fabricating a non-volatile memory device having a tunnel-insulating layer including more than two portions of different thickness |
| 02/07/2002 | US20020016040 Method of manufacturing semiconductor device |
| 02/07/2002 | US20020016039 Structure with protruding source in split-gate flash |
| 02/07/2002 | US20020016038 Method for manufacturing a floating gate in a flash memory device |
| 02/07/2002 | US20020016037 Method for manufacturing capacitor in semiconductor device |
| 02/07/2002 | US20020016036 Method for fabricating a capacitor in a semiconductor device |
| 02/07/2002 | US20020016035 Method for making deep trench capacitors for DRAMs with reduced faceting at the substrate edge and providing a more uniform pad Si3N4 layer across the substrate |
| 02/07/2002 | US20020016034 Method of fabrication of semiconductor structures by ion implantation |
| 02/07/2002 | US20020016033 Method of fabricating integrated circuits, providing improved so-called saw bows |
| 02/07/2002 | US20020016032 Semiconductor device, method for refreshing the same, and electronic equipment |
| 02/07/2002 | US20020016030 Method for complementary oxide transistor fabrication |
| 02/07/2002 | US20020016029 Thin film transistor and producing method thereof |
| 02/07/2002 | US20020016028 Method of manufacturing semiconductor device |
| 02/07/2002 | US20020016027 Activating an impurity doped into the semiconductor layer by irradiating an energy beam , especially a pulsed laser beam, from the energy absorption layer side. |
| 02/07/2002 | US20020016026 Method and apparatus for manufacturing active matrix device including top gate type TFT |
| 02/07/2002 | US20020016025 Semiconductor device and method of manufacturing the same |
| 02/07/2002 | US20020016023 Method and apparatus for packaging a microelectronic die |
| 02/07/2002 | US20020016022 Semiconductor device and manufacturing method thereof |
| 02/07/2002 | US20020016020 Method of manufacturing an electronic device |
| 02/07/2002 | US20020016019 Process for producing semiconductor device package and organopolysiloxane composition used therefor |
| 02/07/2002 | US20020016018 Method of manufacturing multi-layer printed wiring board |
| 02/07/2002 | US20020016017 Process for producing a semiconductor device |
| 02/07/2002 | US20020016016 Process for producing a photovoltaic element |
| 02/07/2002 | US20020016013 Semiconductor device manufacturing method |
| 02/07/2002 | US20020016012 Precise local creation of openings in a layer |
| 02/07/2002 | US20020015916 Containing acid generator |
| 02/07/2002 | US20020015910 Semiconductor substrates |
| 02/07/2002 | US20020015909 Mixture of polymer and dye |
| 02/07/2002 | US20020015906 Micropatterns |
| 02/07/2002 | US20020015904 Pattern forming method using photolithography |
| 02/07/2002 | US20020015899 Optically transferring lithography patterns |
| 02/07/2002 | US20020015898 Efficient electrical tests |
| 02/07/2002 | US20020015866 Method of growing a semiconductor layer |
| 02/07/2002 | US20020015855 System and method for depositing high dielectric constant materials and compatible conductive materials |
| 02/07/2002 | US20020015803 Method for forming thin film with a gas cluster ion beam |
| 02/07/2002 | US20020015793 Method of manufacturing metallic film consisting of giant single crystal grains |
| 02/07/2002 | US20020015789 Vapor deposition using organometallic compound; integrated circuit; film |
| 02/07/2002 | US20020015778 Applying to surface; bonding using irradating light |
| 02/07/2002 | US20020015753 Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing |
| 02/07/2002 | US20020015748 Resin molding machine and method of resin molding |
| 02/07/2002 | US20020015636 FOUP door opening apparatus of FOUP opener and latch key control method |
| 02/07/2002 | US20020015633 Smif pod including independently supported wafer cassette |
| 02/07/2002 | US20020015518 Semiconductor wafer pattern shape evaluation method and device |
| 02/07/2002 | US20020015347 Semiconductor integrated circuit |
| 02/07/2002 | US20020015340 Method and apparatus for memory module circuit interconnection |
| 02/07/2002 | US20020015329 Nonvolatile semiconductor memory device having a hierarchial bit line structure |
| 02/07/2002 | US20020015327 Low voltage flash EEPROM memory cell with improved data retention |
| 02/07/2002 | US20020015322 Applications for non-volatile memory cells |
| 02/07/2002 | US20020015269 Magnetoresistance effect device, magnetic head therewith, magnetic recording/reproducing head, and magnetic storing apparatus |
| 02/07/2002 | US20020015187 Halftone phase shifting photomask and blanks for halftone phase shifting photomask therefor and a method for forming pattern by using the halftone phase shifting photomask |
| 02/07/2002 | US20020015158 Focus measurement in projection exposure apparatus |
| 02/07/2002 | US20020015156 Position detecting method and system for use in exposure apparatus |
| 02/07/2002 | US20020015146 Combined high speed optical profilometer and ellipsometer |
| 02/07/2002 | US20020015142 Illumination optical system and exposure apparatus having the same |
| 02/07/2002 | US20020015141 Exposure apparatus with a pulsed laser |
| 02/07/2002 | US20020015140 Stage device and exposure apparatus, and method of manufacturing a device |
| 02/07/2002 | US20020015128 LCD driver IC chip |
| 02/07/2002 | US20020015111 Image processing apparatus and its processing method |
| 02/07/2002 | US20020014915 Semiconductor integrated circuit device and method for mounting circuit blocks in semiconductor integrated circuit device |
| 02/07/2002 | US20020014911 Semiconductor integrated circuit |
| 02/07/2002 | US20020014909 Pump circuit boosting a supply voltage |
| 02/07/2002 | US20020014906 Voltage translator circuit |
| 02/07/2002 | US20020014904 Semiconductor device |
| 02/07/2002 | US20020014898 Semiconductor integrated circuit device and method of laying out clock driver used in the semiconductor integrated circuit device |
| 02/07/2002 | US20020014897 Architecture and interconnect scheme for programmable logic circuits |
| 02/07/2002 | US20020014896 Method for the testing of electronic components taking the drift of the mean into account |
| 02/07/2002 | US20020014895 Semiconductor chip, semiconductor device package, probe card and package testing method |
| 02/07/2002 | US20020014894 Temperature control apparatus |
| 02/07/2002 | US20020014881 Voltage regulator of vehicle AC generator |
| 02/07/2002 | US20020014705 Semiconductor device and manufacturing method of same |
| 02/07/2002 | US20020014704 Method of making wireless semiconductor device, and leadframe used therefor |
| 02/07/2002 | US20020014703 Semiconductor flip-chip package and method for the fabrication thereof |
| 02/07/2002 | US20020014702 Packaging structure and method |
| 02/07/2002 | US20020014701 Interconnect structure for semiconductor device and method of fabrication |
| 02/07/2002 | US20020014700 Method and system for forming film, semiconductor device and fabrication method thereof |
| 02/07/2002 | US20020014699 Semiconductor device, function setting method thereof, and evaluation method thereof |
| 02/07/2002 | US20020014698 Semiconductor device |
| 02/07/2002 | US20020014697 Semiconductor device and method for fabricating the same |
| 02/07/2002 | US20020014696 Semiconductor device having a contact struture using aluminum |
| 02/07/2002 | US20020014695 Semiconductor device having a layered wiring structure |
| 02/07/2002 | US20020014688 Controlled collapse chip connection (c4) integrated circuit package which has two dissimilar underfill materials |
| 02/07/2002 | US20020014687 Electronic part and manufacturing method therefor |
| 02/07/2002 | US20020014686 Semiconductor device and a method of manufacturing the same and an electronic device |
| 02/07/2002 | US20020014685 Electronic component with ball bonded pads connected to a plated lead frame |
| 02/07/2002 | US20020014683 BGA type semiconductor device having a solder-flow damping/stopping pattern |
| 02/07/2002 | US20020014682 Method of manufacturing a semiconductor device having a monitor pattern, and a semiconductor device manufactured thereby |
| 02/07/2002 | US20020014681 Nitride semiconductor structure, method for producing a nitride semiconductor structure, and light emitting device |
| 02/07/2002 | US20020014680 Semiconductor device and method of manufacturing the same |
| 02/07/2002 | US20020014679 Interconnect structure |
| 02/07/2002 | US20020014678 Integrated structure |
| 02/07/2002 | US20020014677 Semiconductor device having trench isolation layer and method for manufacturing the same |
| 02/07/2002 | US20020014676 Process for forming deep and shallow insulative regions of an integrated circuit |
| 02/07/2002 | US20020014675 Semiconductor temperature detecting method and its circuit |
| 02/07/2002 | US20020014673 Method of making membrane integrated circuits |
| 02/07/2002 | US20020014672 Highly conductive composite polysilicon gate for CMOS integrated circuits |