| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/21/2002 | US20020022185 Shade pattern; photolithography |
| 02/21/2002 | US20020022184 Shade pattern; photolithography |
| 02/21/2002 | US20020022088 Purified silicon production system |
| 02/21/2002 | US20020022087 Mixing organometallic compound gases |
| 02/21/2002 | US20020022082 Changing local compressibility of a wafer support member |
| 02/21/2002 | US20020021959 Method and apparatus for alignment of automated workpiece handling systems |
| 02/21/2002 | US20020021952 Substrate processing apparatus |
| 02/21/2002 | US20020021934 Fastening device for conveying cart |
| 02/21/2002 | US20020021837 ID recognition apparatus and ID recognition sorter system for semiconductor wafer |
| 02/21/2002 | US20020021613 Semiconductor integrated circuit capable of reducing area occupied by data bus |
| 02/21/2002 | US20020021597 Semiconductor integrated circuit device |
| 02/21/2002 | US20020021587 Nonvolatile semiconductor memory |
| 02/21/2002 | US20020021585 Nonvolatile semiconductor memory device and semiconductor integrated circuit |
| 02/21/2002 | US20020021579 Nonvolatile semiconductor memory device having ferroelectric capacitors |
| 02/21/2002 | US20020021546 Ferroelectric capacitor and a mehtod for manufacturing thereof |
| 02/21/2002 | US20020021545 Electrostatic chucking device and manufacturing method thereof |
| 02/21/2002 | US20020021544 Integrated circuit devices having dielectric regions protected with multi-layer insulation structures and methods of fabricating same |
| 02/21/2002 | US20020021543 Configuration and method for the low-loss writing of an MRAM |
| 02/21/2002 | US20020021507 Method of connecting a multiplicity of optical elements to a basic body |
| 02/21/2002 | US20020021497 Laser system |
| 02/21/2002 | US20020021452 Technique for determining curvatures of embedded line features on substrates |
| 02/21/2002 | US20020021435 Substrate conveying system in exposure apparatus |
| 02/21/2002 | US20020021434 Evaluation mask, focus measuring method and aberration measuring method |
| 02/21/2002 | US20020021432 Method and instrument for measuring vacuum ultraviolet light beam, method of producing device and optical exposure apparatus |
| 02/21/2002 | US20020021430 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 02/21/2002 | US20020021428 Charged-particle-beam microlithography stage including actuators for moving a reticle or substrate relative to the stage, and associated methods |
| 02/21/2002 | US20020021427 Cantilever reticle stage for electron beam projection lithography system |
| 02/21/2002 | US20020021425 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 02/21/2002 | US20020021423 Stage apparatus, and exposure apparatus and device manufacturing method using the same |
| 02/21/2002 | US20020021422 Method of manufacturing exposure apparatus and method for exposing a pattern on a mask onto a substrate |
| 02/21/2002 | US20020021378 Electro-optical device |
| 02/21/2002 | US20020021375 Display panel with structure for suppressing effects of electrostatic charge |
| 02/21/2002 | US20020021235 D/a conversion circuit and semiconductor device |
| 02/21/2002 | US20020021142 Inspection method and inspection apparatus |
| 02/21/2002 | US20020021141 Apparatus for testing semiconductor devices |
| 02/21/2002 | US20020021138 Method of wafer level burn-in |
| 02/21/2002 | US20020021137 Method for calibrating a semiconductor testing device, a semiconductor testing apparatus, and a method for testing a semiconductor device |
| 02/21/2002 | US20020021118 Controller for a linear accelerator |
| 02/21/2002 | US20020021009 SMIF container latch mechanism |
| 02/21/2002 | US20020020940 Semiconductor resin mold and semiconductor resin molding method using the mold |
| 02/21/2002 | US20020020929 Semiconductor device and a method of manufacturing the same |
| 02/21/2002 | US20020020927 Apparatus and methods of testing and assembling bumped devices using an anisotropically conductive layer |
| 02/21/2002 | US20020020926 Heat dissipation module for a BGA IC |
| 02/21/2002 | US20020020925 Semiconductor module and producing method therefor |
| 02/21/2002 | US20020020923 Semiconductor device and manufacturing method thereof |
| 02/21/2002 | US20020020922 Ohmic contact plug having an improved crack free TiN barrier metal in a contact hole and method of forming the same |
| 02/21/2002 | US20020020920 Forming submicron integrated-circuit wiring from gold, silver, copper, and other metals |
| 02/21/2002 | US20020020919 Semiconductor devices, and semiconductor processing methods |
| 02/21/2002 | US20020020918 Semiconductor device and method of manufacturing the same |
| 02/21/2002 | US20020020917 Semiconductor device and manufacturing process |
| 02/21/2002 | US20020020913 Method of producing a buffer element to reduce mechanical stresses |
| 02/21/2002 | US20020020912 Method of constructing an electronic assembly having an indium thermal couple and an electronic assembly having an indium thermal couple |
| 02/21/2002 | US20020020909 Substrate for use in package of semiconductor device, semiconductor package using the substrate, and methods for manufacturing the substrate and the semiconductor package |
| 02/21/2002 | US20020020908 Semiconductor packages and methods for making the same |
| 02/21/2002 | US20020020907 Semiconductor package |
| 02/21/2002 | US20020020906 Lead frame, semiconductor device produced by using the same and method of producing the semiconductor device |
| 02/21/2002 | US20020020902 Semiconductor packages and methods for making the same |
| 02/21/2002 | US20020020899 Semiconductor device and electronic device having the same |
| 02/21/2002 | US20020020898 Microelectronic substrates with integrated devices |
| 02/21/2002 | US20020020895 Low loss high Q inductor |
| 02/21/2002 | US20020020893 Monolithic assembly of semiconductor components including a fast diode |
| 02/21/2002 | US20020020891 High voltage mos devices with high gated-diode breakdown voltage and punch-through voltage |
| 02/21/2002 | US20020020890 Memory cell and production method |
| 02/21/2002 | US20020020889 Memory masking for periphery salicidation of active regions |
| 02/21/2002 | US20020020888 Semiconductor device having a retrograde well structure and method of manufacturing thereof |
| 02/21/2002 | US20020020887 Shallow trench isolation type semiconductor device and method of forming the same |
| 02/21/2002 | US20020020884 Method of forming spacers in CMOS devices |
| 02/21/2002 | US20020020883 Integrated circuitry |
| 02/21/2002 | US20020020882 Nonvolatile memory and semiconductor device |
| 02/21/2002 | US20020020881 Semiconductor device having electrostatic protection circuit |
| 02/21/2002 | US20020020879 Semiconductor device and a method of manufacturing thereof |
| 02/21/2002 | US20020020878 Semiconductor integrated circuit and method of manufacturing the same |
| 02/21/2002 | US20020020877 Pair of FETs including a shared SOI body contact and the method of forming the FETs |
| 02/21/2002 | US20020020876 Semiconductor device and method for manufacturing the same |
| 02/21/2002 | US20020020875 Semiconductor device and manufacturing method therefor |
| 02/21/2002 | US20020020872 Memory cell of the EEPROM type having its threshold adjusted by implantation |
| 02/21/2002 | US20020020870 Nonvolatile semiconductor memory device and method of manufacturing the same |
| 02/21/2002 | US20020020869 Semiconductor device incorporated therein high K capacitor dielectric and method for the manufacture thereof |
| 02/21/2002 | US20020020868 Semiconductor device having a capacitor and method for the manufacture thereof |
| 02/21/2002 | US20020020867 Semiconductor device and method of manufacturing same |
| 02/21/2002 | US20020020866 Method for manufacturing a capacitor having a two-layer lower electrode |
| 02/21/2002 | US20020020865 MRAM with an effective noise countermeasure |
| 02/21/2002 | US20020020862 Substrate interconnect for power distribution on integrated circuits |
| 02/21/2002 | US20020020861 Semiconductor device and method of fabricating the same |
| 02/21/2002 | US20020020860 Semiconductor memory device and method for fabricating the same |
| 02/21/2002 | US20020020857 Gate array layout for interconnect |
| 02/21/2002 | US20020020856 Contact electrode for n-type gallium nitride-based compound semiconductor and method for forming the same |
| 02/21/2002 | US20020020855 Method for fabricating a semiconductor device |
| 02/21/2002 | US20020020854 Integrated circuit, test structure and method for testing integrated circuits |
| 02/21/2002 | US20020020852 Silicon-germanium base and a heterojunction bipoplar transistor with the silicon-germanium base |
| 02/21/2002 | US20020020851 Heterobipolar transistor and a method of forming a SiGeC mixed crystal layer |
| 02/21/2002 | US20020020850 Photonic device, a substrate for fabricating a photonic device, a method for fabricating the photonic device and a method for manufacturing the photonic device-fabricating substrate |
| 02/21/2002 | US20020020849 J-FET semiconductor configuration |
| 02/21/2002 | US20020020840 Semiconductor device and manufacturing method thereof |
| 02/21/2002 | US20020020838 Array substrate for liquid crystal display device and the fabrication method of the same |
| 02/21/2002 | US20020020837 Particle detection and removal apparatus for use on wafer fabrication equipment to lower tool related defects from particle contamination |
| 02/21/2002 | US20020020836 Thin film capacitor avoiding short circuit between electrodes |
| 02/21/2002 | US20020020835 A conductive spacer in a via |
| 02/21/2002 | US20020020833 Oxidizing reactant selected from ammonium persulfate, hydrogen peroxide, nitric acid, co-reactant selected from phosphoric acid, sulfuric acid, nitric acid, oxalic acid, acetic acid, organic acids, additives |
| 02/21/2002 | US20020020824 Electron beam drawing apparatus and method of the same |