Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2002
11/19/2002US6484303 Apparatus for layout designing of semiconductor device, method of layout designing, and semiconductor device
11/19/2002US6484300 Systems, methods and computer program products for obtaining an effective pattern density of a layer in an integrated circuit, and for simulating a chemical-mechanical polishing process using the same
11/19/2002US6484291 Library for storing pattern shape of connecting terminal and semiconductor circuit designed with different design rules
11/19/2002US6484113 Container inspection system and method of using in semiconductor manufacturing
11/19/2002US6484064 Method and apparatus for running metrology standard wafer routes for cross-fab metrology calibration
11/19/2002US6484054 Deep trench semiconductor capacitors having reverse bias diodes for implantable medical devices
11/19/2002US6483989 Substrate processing apparatus and semiconductor device producing method
11/19/2002US6483938 System and method for classifying an anomaly
11/19/2002US6483768 Current driver configuration for MRAM
11/19/2002US6483763 Semiconductor memory device
11/19/2002US6483759 Methods for testing a group of semiconductor devices simultaneously, and devices amenable to such methods of testing
11/19/2002US6483756 Sequence circuit and semiconductor device using sequence circuit
11/19/2002US6483755 Memory modules with high speed latched sense amplifiers
11/19/2002US6483749 Nonvolatile memory device having bulk bias contact structure in cell array region
11/19/2002US6483741 Magnetization drive method, magnetic functional device, and magnetic apparatus
11/19/2002US6483740 All metal giant magnetoresistive memory
11/19/2002US6483737 Ferroelectric memory device
11/19/2002US6483734 Memory device having memory cells capable of four states
11/19/2002US6483733 Dynamic content addressable memory cell
11/19/2002US6483691 Capacitor and method for manufacturing the same
11/19/2002US6483690 Ceramic electrostatic chuck assembly and method of making
11/19/2002US6483594 Apparatus and method for determining the active dopant profile in a semiconductor wafer
11/19/2002US6483580 Spectroscopic scatterometer system
11/19/2002US6483573 Projection exposure system and an exposure method in microlithography
11/19/2002US6483569 Exposure method and exposure apparatus
11/19/2002US6483374 Semiconductor integrated circuit
11/19/2002US6483365 Semiconductor device
11/19/2002US6483357 Semiconductor device reduced in through current
11/19/2002US6483349 Semiconductor integrated circuit device
11/19/2002US6483342 Multi-master multi-slave system bus in a field programmable gate array (FPGA)
11/19/2002US6483336 Indexing rotatable chuck for a probe station
11/19/2002US6483334 Method for reliability testing of semiconductor IC
11/19/2002US6483328 Probe card for probing wafers with raised contact elements
11/19/2002US6483326 Localized heating for defect isolation during die operation
11/19/2002US6483222 Frictionless transport apparatus and method
11/19/2002US6483195 Transfer bump street, semiconductor flip chip and method of producing same
11/19/2002US6483194 Semiconductor device having capacitor and method thereof
11/19/2002US6483193 Fabrication process for a semiconductor device with damascene interconnect lines of the same level separated by insulators with different dielectric constants
11/19/2002US6483192 Semiconductor device and method of manufacturing the same
11/19/2002US6483191 Semiconductor device having reinforced coupling between solder balls and substrate
11/19/2002US6483190 Semiconductor chip element, semiconductor chip element mounting structure, semiconductor chip element mounting device and mounting method
11/19/2002US6483179 Solid-state image pickup apparatus and fabricating method thereof
11/19/2002US6483177 Leaded semiconductor packages and method of trimming and singulating such packages
11/19/2002US6483175 Wiring board and semiconductor device using the same
11/19/2002US6483173 Solution to black diamond film delamination problem
11/19/2002US6483172 Semiconductor device structure with hydrogen-rich layer for facilitating passivation of surface states
11/19/2002US6483171 Vertical sub-micron CMOS transistors on (110), (111), (311), (511), and higher order surfaces of bulk, SOI and thin film structures and method of forming same
11/19/2002US6483170 RF power transistor
11/19/2002US6483167 Semiconductor device and production method thereof
11/19/2002US6483162 Semiconductor device having improved metal line structure and manufacturing method therefor
11/19/2002US6483159 Undoped polysilicon as the floating-gate of a split-gate flash cell
11/19/2002US6483158 Semiconductor memory device and fabrication method therefor
11/19/2002US6483157 Asymmetrical transistor having a barrier-incorporated gate oxide and a graded implant only in the drain-side junction area
11/19/2002US6483156 Double planar gated SOI MOSFET structure
11/19/2002US6483155 Semiconductor device having pocket and manufacture thereof
11/19/2002US6483154 Nitrogen oxide plasma treatment for reduced nickel silicide bridging
11/19/2002US6483153 Method to improve LDD corner control with an in-situ film for local interconnect processing
11/19/2002US6483152 Semiconductor device
11/19/2002US6483151 Semiconductor device and method of manufacturing the same
11/19/2002US6483150 Semiconductor device with both memories and logic circuits and its manufacture
11/19/2002US6483149 LDMOS device with self-aligned resurf region and method of fabrication
11/19/2002US6483148 Self-aligned elevated transistor
11/19/2002US6483147 Through wafer backside contact to improve SOI heat dissipation
11/19/2002US6483146 Nonvolatile semiconductor memory device and manufacturing method thereof
11/19/2002US6483145 Electrically erasable programmable read-only memory (EEPROM) devices including multilayer sense and select transistor gates
11/19/2002US6483144 Semiconductor device having self-aligned contact and landing pad structure and method of forming same
11/19/2002US6483143 Semiconductor device having a capacitor structure including a self-alignment deposition preventing film
11/19/2002US6483142 Dual damascene structure having capacitors
11/19/2002US6483141 Semiconductor memory device and manufacturing method thereof
11/19/2002US6483140 DRAM storage node with insulating sidewalls
11/19/2002US6483138 Semiconductor apparatus formed by SAC (self-aligned contact)
11/19/2002US6483137 Ferroelectricity
11/19/2002US6483136 Semiconductor integrated circuit and method of fabricating the same
11/19/2002US6483135 Field effect transistor
11/19/2002US6483133 EEPROM with high channel hot carrier injection efficiency
11/19/2002US6483131 High density and high speed cell array architecture
11/19/2002US6483129 Retrograde well structure for a CMOS imager
11/19/2002US6483124 Thin film transistors and their manufacture
11/19/2002US6483120 Control system for a charged particle exposure apparatus
11/19/2002US6483117 Symmetric blanking for high stability in electron beam exposure systems
11/19/2002US6483102 Method and apparatus for inspection of misplaced integrated circuits in a tray stack
11/19/2002US6483098 Side-illuminated type semiconductor photodetector device and method of manufacturing the same
11/19/2002US6483083 Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface
11/19/2002US6483082 Heater lift lead screw for vertical furnaces
11/19/2002US6483081 In-line cure furnace and method for using the same
11/19/2002US6483071 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site
11/19/2002US6483068 Apparatus for hard baking photoresist pattern
11/19/2002US6483042 Substrate for mounting semiconductor integrated circuit device
11/19/2002US6483039 Substrate of semiconductor package
11/19/2002US6483030 Snap lid image sensor package
11/19/2002US6482990 Prostaglandin E analogues
11/19/2002US6482755 HDP deposition hillock suppression method in integrated circuits
11/19/2002US6482754 Method of forming a carbon doped oxide layer on a substrate
11/19/2002US6482753 Substrate processing apparatus and method for manufacturing semiconductor device
11/19/2002US6482752 Substrate processing apparatus and method and a manufacturing method of a thin film semiconductor device
11/19/2002US6482751 Titanium dioxide layer serving as a mask and its removed method
11/19/2002US6482750 Using cleaning fluid that will not corrode silicon or tungsten materials, comprising an ethylene oxide-propylene oxide adduct or polymer, optionally endcapped with alcohols, amines or amino acids, a hydroxide, and organic solvent
11/19/2002US6482749 Method for etching a wafer edge using a potassium-based chemical oxidizer in the presence of hydrofluoric acid
11/19/2002US6482748 Poly gate silicide inspection by back end etching
11/19/2002US6482747 Plasma treatment method and plasma treatment apparatus
1 ... 4872 4873 4874 4875 4876 4877 4878 4879 4880 4881 4882 4883 4884 4885 4886 4887 4888 4889 4890 4891 4892 ... 6590