H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2002
11/26/2002	US6485573 Apparatus for reduced-pressure epitaxial growth and method of controlling the apparatus
11/26/2002	US6485572 Use of pulsed grounding source in a plasma reactor
11/26/2002	US6485568 Apparatus for coating substrates with materials, particularly for lacquering si-wafers
11/26/2002	US6485564 Thin film forming method
11/26/2002	US6485554 Solution raw material for forming composite oxide type dielectric thin film and dielectric thin film
11/26/2002	US6485534 Contaminant collector trap for ion implanter
11/26/2002	US6485531 Process chamber
11/26/2002	US6485361 Apparatus for holding and delayering a semiconductor die
11/26/2002	US6485358 Wafer polishing device
11/26/2002	US6485356 Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives
11/26/2002	US6485355 Method to increase removal rate of oxide using fixed-abrasive
11/26/2002	US6485354 Polishing pad with built-in optical sensor
11/26/2002	US6485297 Thermal treatment furnace having gas leakage preventing function
11/26/2002	US6485253 Edge gripped substrate loading and unloading method
11/26/2002	US6485250 Substrate transport apparatus with multiple arms on a common axis of rotation
11/26/2002	US6485248 Multiple wafer lift apparatus and associated method
11/26/2002	US6485203 Substrate processing method and substrate processing apparatus
11/26/2002	US6485153 Exposure apparatus and method
11/26/2002	US6485009 Holding apparatus
11/26/2002	US6484927 Method and apparatus for balling and assembling ball grid array and chip scale array packages
11/26/2002	US6484922 Apparatus and method of clamping semiconductor devices using sliding finger supports
11/26/2002	US6484881 Electronic component package for standard and odd form components
11/26/2002	US6484775 IC-card manufacturing apparatus
11/26/2002	US6484613 Electromagnetic bounce back braking for punch press and punch press process
11/26/2002	US6484415 Vacuum processing apparatus
11/26/2002	US6484414 Vacuum processing apparatus
11/26/2002	US6484395 Ultra-miniature electrical contacts and method of manufacture
11/26/2002	US6484394 Encapsulation method for ball grid array semiconductor package
11/23/2002	CA2387241A1 Fluid control apparatus
11/21/2002	WO2002093991A1 Method for electroless deposition and patterning of a metal on a substrate
11/21/2002	WO2002093906A1 A tdi detecting device, a feed-through equipment and electron beam apparatus using these devices
11/21/2002	WO2002093745A2 Reconfigurable logic device
11/21/2002	WO2002093700A1 Laser spectral engineering for lithographic process
11/21/2002	WO2002093652A1 Structure for an integrated circuit arrangement arranged over a substrate
11/21/2002	WO2002093651A1 Channel gate type field effect transistor and its manufacturing method
11/21/2002	WO2002093650A1 Group-iii nitride based high electron mobility transistor (hemt) with barrier/spacer layer
11/21/2002	WO2002093649A2 Electronic module and method for assembling same
11/21/2002	WO2002093648A2 Semiconductor device interconnect
11/21/2002	WO2002093646A1 Carrier with metal bumps for semiconductor die packages
11/21/2002	WO2002093642A2 Integrated sensor packaging and methods of making the same
11/21/2002	WO2002093641A1 Layered hard mask and dielectric materials and methods therefor
11/21/2002	WO2002093639A2 Arrangement and method for detecting defects on a substrate in a processing tool
11/21/2002	WO2002093638A1 Mounting structure and mounting method for semiconductor chip
11/21/2002	WO2002093637A2 Product comprising a substrate and a chip attached to the substrate
11/21/2002	WO2002093636A1 Cmos structure with maximized activation of the polysilicon gate dopant and method of manufacturing the same
11/21/2002	WO2002093635A1 Semiconductor integrated circuit device and production method thereof
11/21/2002	WO2002093634A1 Plasma ashing process
11/21/2002	WO2002093633A1 Method for the planarisation of a semiconductor structure
11/21/2002	WO2002093632A1 Plasma processing device, and method of cleaning the same
11/21/2002	WO2002093631A1 Plasma processor
11/21/2002	WO2002093629A1 Production method for a semiconductor component
11/21/2002	WO2002093627A1 Doped silicon deposition process in resistively heated single wafer chamber
11/21/2002	WO2002093625A1 Method of making a flexible substrate containing self-assembling microstructures
11/21/2002	WO2002093624A2 Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber
11/21/2002	WO2002093623A2 Assembly comprising heat distributing plate and edge support
11/21/2002	WO2002093622A2 Substrate transport container
11/21/2002	WO2002093621A1 Method and device for doping, diffusion and oxidation of silicon wafers under reduced pressure
11/21/2002	WO2002093620A2 Device for wetting a surface
11/21/2002	WO2002093619A2 Semiconductor structures and devices utilizing a compliant substrate
11/21/2002	WO2002093618A2 Semiconductor structure including low-leakage, high crystalline dielectric
11/21/2002	WO2002093617A2 Device for loading and unloading silicon wafers in an oven from a multiple-cassette station
11/21/2002	WO2002093605A2 Cylinder-based plasma processing system
11/21/2002	WO2002093595A2 Package level pre-applied underfills for thermo-mechanical reliability enhancements of electronic assemblies
11/21/2002	WO2002093581A2 Magnetic memory arrangement
11/21/2002	WO2002093485A1 Method for performing an alignment measurement of two patterns in different layers on a semiconductor wafer
11/21/2002	WO2002093263A1 Photoresist composition for deep ultraviolet lithography
11/21/2002	WO2002093262A1 Thick film photoresists and methods for use thereof
11/21/2002	WO2002093261A1 Use of partially fluorinated polymers in applications requiring transparency in the ultraviolet and vacuum ultraviolet
11/21/2002	WO2002093257A2 Microlithographic projection illumination system
11/21/2002	WO2002093254A1 Lithography system and method for device manufacture
11/21/2002	WO2002093253A1 Backside alignment system and method
11/21/2002	WO2002093209A2 Lens system consisting of fluoride crystal lenses
11/21/2002	WO2002093201A2 Preferred crystal orientation optical elements from cubic materials
11/21/2002	WO2002093185A1 Wafer map display apparatus and method for semiconductor test system
11/21/2002	WO2002092886A1 High-resistivity silicon carbide substrate for semiconductor devices with high breakdown voltage
11/21/2002	WO2002092878A2 Electroless plating method and device, and substrate processing method and apparatus
11/21/2002	WO2002092877A2 Catalyst-imparting treatment solution and electroless plating method
11/21/2002	WO2002092480A2 Device and method for moving substrates with motion coupling
11/21/2002	WO2002092242A1 Selective deposition of materials for the fabrication of interconnects and contacts on semiconductors devices
11/21/2002	WO2002092211A2 Bis (perfluoroalkanesulfonyl) imides and their salts as surfactants/additives for applications having extreme environments and methods therefor
11/21/2002	WO2002080232A3 Substrate storage pod access device
11/21/2002	WO2002078163A3 Device for introducing electric components into continuous tapes
11/21/2002	WO2002078095A3 Method of forming enhanced transistor gate using e-beam radiation and integrated circuit including this transistor gate
11/21/2002	WO2002073307A3 Thermally cured underlayer for lithographic application
11/21/2002	WO2002069368A3 Multiple material stacks with a stress relief layer between a metal structure and a passivation layer and method
11/21/2002	WO2002068127A3 Manifolded fluid delivery system
11/21/2002	WO2002065518A3 Method for producing ferroelectric capacitors and integrated semiconductor memory chips
11/21/2002	WO2002065108A3 Laser scanning wafer inspection using nonlinear optical phenomena
11/21/2002	WO2002063346A3 Method of mounting optoelectronic devices on an optical element and article
11/21/2002	WO2002059934A3 Plasma generation apparatus and method
11/21/2002	WO2002058444A3 High-g mounting arrangement for electronic chip carrier
11/21/2002	WO2002057071A3 Catalytic reactive pad for metal cmp
11/21/2002	WO2002054495A3 Metal oxynitrides on monocrystalline substrates
11/21/2002	WO2002054443A3 Ion accelaration method and apparatus in an ion implantation system
11/21/2002	WO2002052633A3 Assembly for mounting an integrated circuit on a support
11/21/2002	WO2002045165A3 Compact semiconductor structure and a method for producing the same
11/21/2002	WO2002039186A3 Photoacid generators in photoresist compositions for microlithography
11/21/2002	WO2002037549A3 Method for structuring a silicon oxide layer
11/21/2002	WO2002033489A3 Compositions for microlithography
11/21/2002	WO2002027799A3 Process for the fabrication of mosfet devices depletion, silicided source and drain junctions

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