Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2002
11/14/2002US20020167837 Memory cell with increased capacitance
11/14/2002US20020167836 Retention time of memory cells by reducing leakage current
11/14/2002US20020167835 Multi-port memory cell with refresh port
11/14/2002US20020167834 Memory cell having reduced leakage current
11/14/2002US20020167804 Polymeric encapsulation material with fibrous filler for use in microelectronic circuit packaging
11/14/2002US20020167781 Static electricity chuck apparatus and semiconductor producing apparatus provided with the static electricity chuck apparatus
11/14/2002US20020167780 Electrostatic sensing chuck using area matched electrodes
11/14/2002US20020167779 Method and apparatus for the grounding of process wafers by the use of conductive regions created by ion implantation into the surface of an electrostatic clamp
11/14/2002US20020167737 Catadioptric reduction lens
11/14/2002US20020167734 Catadioptric projection objective
11/14/2002US20020167675 Interferometer system
11/14/2002US20020167674 Apparatus and method for measuring flatness of thin plate
11/14/2002US20020167666 Method of measuring oscillatory semiconductor membranes and shielding for external excitations in the measurement
11/14/2002US20020167661 Inspection device for crystal defect of silicon wafer and method for detecting crystal defect of the same
11/14/2002US20020167653 Lithography apparatus
11/14/2002US20020167651 Lithographic apparatus, device manufacturing method, and device manufactured thereby
11/14/2002US20020167650 Projection optical system and exposure apparatus with the same
11/14/2002US20020167649 Backside alignment system and method
11/14/2002US20020167636 Active-matrix addressing liquid-crystal display device and method of fabricating same
11/14/2002US20020167623 Electrooptic device, driving IC, and electronic apparatus
11/14/2002US20020167581 Methods and systems for thermal-based laser processing a multi-material device
11/14/2002US20020167387 Chip inductor and manufacturing method therefor
11/14/2002US20020167329 Probe station thermal chuck with shielding for capacitive current
11/14/2002US20020167323 Method for measuring fuse resistance in a fuse array
11/14/2002US20020167312 Compact sensing apparatus having an orthogonal sensor and methods for forming same
11/14/2002US20020167122 Latch for detachably attaching and mounting a semiconductor wafer to a support ring
11/14/2002US20020167093 Semiconductor device, resin sealing method and resin sealing device
11/14/2002US20020167092 Interposer, packages including the interposer, and methods
11/14/2002US20020167091 Semiconductor device having aluminum conductors
11/14/2002US20020167090 Dual damascene structure having capacitors
11/14/2002US20020167089 Copper dual damascene interconnect technology
11/14/2002US20020167088 Semiconductor device and a method of manufacturing the same
11/14/2002US20020167086 Barrier structures for integration of high K oxides with Cu and AI electrodes
11/14/2002US20020167085 Semiconductor device and method of fabricating the same
11/14/2002US20020167083 RF circuit chip, RF circuit device having the same, and manufacturing method therefor
11/14/2002US20020167082 Compensation component, circuit configuration, and method
11/14/2002US20020167081 Semiconductor device
11/14/2002US20020167079 Chip-on-chip based multi-chip module with molded underfill and method of fabricating the same
11/14/2002US20020167078 Electronic component with a semiconductor chip and method of producing an electronic component
11/14/2002US20020167077 Flip-chip package with underfill having low density filler
11/14/2002US20020167075 Carrier with metal bumps for semiconductor die packages
11/14/2002US20020167073 Semiconductor device with analysis prevention feature
11/14/2002US20020167070 Hybrid semiconductor structure and device
11/14/2002US20020167068 Silicon on sapphire structure (devices) with buffer layer
11/14/2002US20020167067 Methods of forming a trench isolation region in a substrate by removing a portion of a liner layer at a boundary between a trench etching mask and an oxide layer in a trench and integrated circuit devices formed thereby
11/14/2002US20020167066 Semiconductor device and manufacturing method therefor
11/14/2002US20020167061 Photoelectric converter, its driving method, and system including the photoelectric converter
11/14/2002US20020167059 Magnetoresistive element, memory element using the magnetoresistive element, and recording/reproduction method for the memory element
11/14/2002US20020167057 Integrated decoupling capacitors
11/14/2002US20020167056 Insulated gate semiconductor device with control circuit
11/14/2002US20020167050 Method and structures for dual depth oxygen layers in silicon-on-insulator processes
11/14/2002US20020167049 Field-effect transistor and manufacture thereof
11/14/2002US20020167048 Enhanced mobility NMOS and PMOS transistors using strained Si/SiGe layers on silicon-on-insulator substrates
11/14/2002US20020167046 Semiconductor device and method for manufacturing the same
11/14/2002US20020167045 Increase in deep trench capacitance by a central ground electrode
11/14/2002US20020167043 Semiconductor memory device and method for manufacturing the same
11/14/2002US20020167042 Integrated circuit and associated design method with antenna error control using spare gates
11/14/2002US20020167041 Method of forming flash memories with high coupling ratio and the structure of the same
11/14/2002US20020167040 Capacitor for semiconductor device and method for manufacturing the same
11/14/2002US20020167039 Semiconductor device and process for fabricating the same
11/14/2002US20020167038 Novel high-k dielectric materials and processes for manufacturing them
11/14/2002US20020167037 Capacitor of an integrated circuit device and method of manufacturing the same
11/14/2002US20020167036 Method for fabricating DRAM cell and DRAM cell fabricated thereby
11/14/2002US20020167035 Semiconductor device having storage node contact plug of dram (dynamic random access memory)
11/14/2002US20020167034 Semiconductor device evaluation method and apparatus, semiconductor device manufacturing control method, semiconductor device manufacturing method, and recording medium
11/14/2002US20020167033 Magnetic memory and method of operation thereof
11/14/2002US20020167032 Semiconductor device and method for fabricating the same
11/14/2002US20020167029 Group III nitride compound semiconductor device
11/14/2002US20020167028 Nitride-based semiconductor element and method of forming nitride-based semiconductor
11/14/2002US20020167027 Integrated circuit device that can suppress undesired inter-device effects
11/14/2002US20020167025 Semiconductor device and manufacturing method thereof
11/14/2002US20020167023 Group-III nitride based high electron mobility transistor (HEMT) with barrier/spacer layer
11/14/2002US20020167022 Semiconductor device and method of making same
11/14/2002US20020167011 Silicon carbide semiconductor device and manufacturing method
11/14/2002US20020167010 High-resistivity silicon carbide substrate for semiconductor devices with high break down voltage
11/14/2002US20020167009 Thin film transistor for liquid crystal display and method of manufacturing the same
11/14/2002US20020167007 Semiconductor device and method of fabricating the same
11/14/2002US20020167006 Semiconductor wafer and device for semiconductor device manufacturing process
11/14/2002US20020167005 Semiconductor structure including low-leakage, high crystalline dielectric materials and methods of forming same
11/14/2002US20020167002 Single electron memory device comprising quantum dots between gate electrode and single electron storage element and method for manufacturing the same
11/14/2002US20020166982 Exposure method, plane alignment method, exposure apparatus, and device manufacturing method
11/14/2002US20020166980 Apparatus and method for introducing impurity
11/14/2002US20020166979 Method of and apparatus for use in orienting an object at a reference angle
11/14/2002US20020166978 Aligner
11/14/2002US20020166976 Beam as well as method and equipment for specimen fabrication
11/14/2002US20020166975 Gaseous ion source feed for oxygen ion implantation
11/14/2002US20020166965 Method of and apparatus for measuring lattice-constant, and computer program
11/14/2002US20020166964 Detection of defects in patterned substrates
11/14/2002US20020166909 Cutting solution supplying and controlling apparatus for dicing machine
11/14/2002US20020166886 Method of forming bumps
11/14/2002US20020166885 Image processing method, an image processing device and a bonding apparatus
11/14/2002US20020166854 Ceramic heater
11/14/2002US20020166845 Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure
11/14/2002US20020166838 Sloped trench etching process
11/14/2002US20020166826 Holding stand for fragile plates
11/14/2002US20020166773 Enhanced electrochemical deposition (ECD) filling of high aspect ratio openings
11/14/2002US20020166762 Sputtering apparatus that allows the use of a shutter and shutter arm assembly that do not require long down time to transfer a wafer or shutter disk into the pasting or cleaning position
11/14/2002US20020166695 Gate area relief strip for a molded I/C package
11/14/2002US20020166694 Monolithic ceramic substrate and method for making the same
11/14/2002US20020166688 Microelectronic connections with liquid conductive elements
1 ... 4876 4877 4878 4879 4880 4881 4882 4883 4884 4885 4886 4887 4888 4889 4890 4891 4892 4893 4894 4895 4896 ... 6590